JPS5786710A - Measuring device for three-dimensional configuration - Google Patents

Measuring device for three-dimensional configuration

Info

Publication number
JPS5786710A
JPS5786710A JP16304980A JP16304980A JPS5786710A JP S5786710 A JPS5786710 A JP S5786710A JP 16304980 A JP16304980 A JP 16304980A JP 16304980 A JP16304980 A JP 16304980A JP S5786710 A JPS5786710 A JP S5786710A
Authority
JP
Japan
Prior art keywords
scale
axes
movement
axis
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16304980A
Other languages
Japanese (ja)
Other versions
JPS632323B2 (en
Inventor
Hideto Iwaoka
Koji Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP16304980A priority Critical patent/JPS5786710A/en
Publication of JPS5786710A publication Critical patent/JPS5786710A/en
Publication of JPS632323B2 publication Critical patent/JPS632323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To obtain the configuration of a body without contact, by converting interference fringes obtained from a light source which can be interfered into electric pulses via scale computing and processing the result, and obtaining the distance of movement of the scale in the directions of X, Y, and Z axes. CONSTITUTION:Moving systems 1-3, which are freely slid in the direction of the X, Y, and Z axes, have the scales along the directions of movement. The scale 4 is used for the X axis. Reflecting surfaces and transparent surfaces are regularly arranged on the scale. An optical scale reading deivce 5 reads the movement in the direction of the X axis. The same structures are provided in the Y and Z axes. The body to be measured 7 is placed between a position control device 6 which is provided at the tip of the moving system in the direction of the X axis and a table 8. In the optical scale reader 5, the light from the light source 21 which can be interfered goes through a lens L, a stopper 24, the scale 23, a half mirror 22, and reaches a screen 25, where the interference fringes of the light in the + or - primary mode is generated. Said interference fringes are converted into photoelectric signal and inputted to a control device 26, wherein computation is performed. Then, the outputs indicating the number of the pulses corresponding to the moved distance and the moving direction are sent out of the scale 23. Thus the configuration is obtained in contactless manner.
JP16304980A 1980-11-19 1980-11-19 Measuring device for three-dimensional configuration Granted JPS5786710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16304980A JPS5786710A (en) 1980-11-19 1980-11-19 Measuring device for three-dimensional configuration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16304980A JPS5786710A (en) 1980-11-19 1980-11-19 Measuring device for three-dimensional configuration

Publications (2)

Publication Number Publication Date
JPS5786710A true JPS5786710A (en) 1982-05-29
JPS632323B2 JPS632323B2 (en) 1988-01-18

Family

ID=15766197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16304980A Granted JPS5786710A (en) 1980-11-19 1980-11-19 Measuring device for three-dimensional configuration

Country Status (1)

Country Link
JP (1) JPS5786710A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067822A (en) * 1983-09-24 1985-04-18 Univ Nagoya Optical automatic positioner
JPS6056209U (en) * 1983-09-26 1985-04-19 三菱重工業株式会社 Non-contact displacement detection device
JPS60218007A (en) * 1984-04-13 1985-10-31 Hitachi Ltd Noncontact profiling method of body shape
JPS61246611A (en) * 1985-04-25 1986-11-01 Haruhisa Takatani Measuring method of distance and shape
JPS6263807A (en) * 1985-09-13 1987-03-20 Canon Inc Three-dimensional accuracy measuring method for robot
WO1993004339A1 (en) * 1991-08-27 1993-03-04 Fanuc Ltd Method of diagnosing real time sensor
JP2008185581A (en) * 2006-12-08 2008-08-14 Asml Netherlands Bv Scatterometer, lithography device, and focus analysis method
TWI414750B (en) * 2009-04-03 2013-11-11 Omron Tateisi Electronics Co Dimensional shape measuring device, three-dimensional shape measurement method and three-dimensional shape measurement program

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52107855A (en) * 1976-03-05 1977-09-09 Koito Mfg Co Ltd Noncontact type position detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52107855A (en) * 1976-03-05 1977-09-09 Koito Mfg Co Ltd Noncontact type position detector

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067822A (en) * 1983-09-24 1985-04-18 Univ Nagoya Optical automatic positioner
JPS6056209U (en) * 1983-09-26 1985-04-19 三菱重工業株式会社 Non-contact displacement detection device
JPH0342328Y2 (en) * 1983-09-26 1991-09-05
JPS60218007A (en) * 1984-04-13 1985-10-31 Hitachi Ltd Noncontact profiling method of body shape
JPH0519641B2 (en) * 1984-04-13 1993-03-17 Hitachi Ltd
JPS61246611A (en) * 1985-04-25 1986-11-01 Haruhisa Takatani Measuring method of distance and shape
JPH0469725B2 (en) * 1985-09-13 1992-11-09 Canon Kk
JPS6263807A (en) * 1985-09-13 1987-03-20 Canon Inc Three-dimensional accuracy measuring method for robot
WO1993004339A1 (en) * 1991-08-27 1993-03-04 Fanuc Ltd Method of diagnosing real time sensor
US5511007A (en) * 1991-08-27 1996-04-23 Fanuc Ltd. Diagnostic method for a real time sensor mounted on a robot
JP2008185581A (en) * 2006-12-08 2008-08-14 Asml Netherlands Bv Scatterometer, lithography device, and focus analysis method
JP4660533B2 (en) * 2006-12-08 2011-03-30 エーエスエムエル ネザーランズ ビー．ブイ． Scatterometer and focus analysis method
TWI414750B (en) * 2009-04-03 2013-11-11 Omron Tateisi Electronics Co Dimensional shape measuring device, three-dimensional shape measurement method and three-dimensional shape measurement program

Also Published As

Publication number Publication date
JPS632323B2 (en) 1988-01-18

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