JPS5784927A - Gas flow rate control apparatus - Google Patents

Gas flow rate control apparatus

Info

Publication number
JPS5784927A
JPS5784927A JP16041280A JP16041280A JPS5784927A JP S5784927 A JPS5784927 A JP S5784927A JP 16041280 A JP16041280 A JP 16041280A JP 16041280 A JP16041280 A JP 16041280A JP S5784927 A JPS5784927 A JP S5784927A
Authority
JP
Japan
Prior art keywords
chamber
gas
pressure
check valve
responsive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16041280A
Other languages
Japanese (ja)
Other versions
JPS5853246B2 (en
Inventor
Tadashi Kojima
Tetsuo Uchihama
Kazuyoshi Tanaka
Eiichi Morozumi
Kentaro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16041280A priority Critical patent/JPS5853246B2/en
Publication of JPS5784927A publication Critical patent/JPS5784927A/en
Publication of JPS5853246B2 publication Critical patent/JPS5853246B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Feeding And Controlling Fuel (AREA)

Abstract

PURPOSE: To improve the flexibility of control and to secure the operation of the apparatus by a method wherein a part of a gas to be controlled is taken out to be supplied under pressure to a pressure chamber by means of an electromagnetic pressure supply device and valves are controlled by a responsive member which varies its position by detecting the pressure in the pressure chamber.
CONSTITUTION: When a piston 6 moves upward, the pressures in a cylinder chamber 7 and a supply chamber 10 decrease so that a check valve 8 is opened and the gas in a pipe 12 is sucked into the cylinder chamber 7 and the sucking chamber 19 through a pipe 13. On the other hand, when the piston 6 moves downward, the check valve 8 is kept closed and a check valve 9 is opened so that the gas in the cylinder chamber 7 flows into the pressure chamber 20 through a communication hole 19. As a consequence, the responsive member 23 is pushed downward and a valve body 24 connected to the responsive member 23 leaves away from a valve sheet 27 so that the gas within an inlet passage 26 flows into an outlet passage 27.
COPYRIGHT: (C)1982,JPO&Japio
JP16041280A 1980-11-14 1980-11-14 Gas flow control device Expired JPS5853246B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16041280A JPS5853246B2 (en) 1980-11-14 1980-11-14 Gas flow control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16041280A JPS5853246B2 (en) 1980-11-14 1980-11-14 Gas flow control device

Publications (2)

Publication Number Publication Date
JPS5784927A true JPS5784927A (en) 1982-05-27
JPS5853246B2 JPS5853246B2 (en) 1983-11-28

Family

ID=15714370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16041280A Expired JPS5853246B2 (en) 1980-11-14 1980-11-14 Gas flow control device

Country Status (1)

Country Link
JP (1) JPS5853246B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6557820B2 (en) * 2001-05-22 2003-05-06 Lockheed Martin Corporation Two-stage valve suitable as high-flow high-pressure microvalve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6557820B2 (en) * 2001-05-22 2003-05-06 Lockheed Martin Corporation Two-stage valve suitable as high-flow high-pressure microvalve

Also Published As

Publication number Publication date
JPS5853246B2 (en) 1983-11-28

Similar Documents

Publication Publication Date Title
JPS5762986A (en) Variable displacement type vane pump
CA2499939A1 (en) Metering pump with gas removal device
US20020179151A1 (en) Pressure control device for a pipeline
DE60031302D1 (en) VALVE FOR THE CONTROLLED DELIVERY OF A FLUID UNDER PRESSURE
IE781357L (en) Handling a flow in a two-phase flow pipeline system
WO2002099321A3 (en) Control valve
DE3865313D1 (en) HYDRAULIC CONTROL DEVICE.
JPS5784927A (en) Gas flow rate control apparatus
JPS56166511A (en) Fuel supply control device
JPS5674715A (en) Liquid compounding equipment
JPS57191485A (en) Pressure switch controlling type pump
JPS57146131A (en) Sampling device
JPS5784924A (en) Gas flow rate control apparatus
JPS56141403A (en) Fluid controller
JPS55132479A (en) Pressure control device
JPS5784925A (en) Flow rate control apparatus
JPS5572699A (en) Pump device
FR2389305A7 (en) Gas-fired water heater valve - has by=pass passage with spring loaded overflow valve from inlet to outlet
JPS5716299A (en) Water feeding apparatus
JPS57137774A (en) Fluid control valve
JPS5757976A (en) Solenoid valve
JPS57187718A (en) Pressure regulating valve device for fluid
GB1535459A (en) Fluid transfer apparatus
JPS5740182A (en) Pilot actuating solenoid valve
JPS5737162A (en) Water feed control method