JPS5776852A - Card for probe - Google Patents
Card for probeInfo
- Publication number
- JPS5776852A JPS5776852A JP15259080A JP15259080A JPS5776852A JP S5776852 A JPS5776852 A JP S5776852A JP 15259080 A JP15259080 A JP 15259080A JP 15259080 A JP15259080 A JP 15259080A JP S5776852 A JPS5776852 A JP S5776852A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- temperature
- probe
- measuring
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To measure the temperature of the surface of a semiconductor wafer without damaging an integrated circuit element on the wafer by also contacting a temperature detecting terminal for measuring the temperature of the surface of the wafer with the semiconductor wafer when the probe and the semiconductor wafer contact. CONSTITUTION:The temperature of the surface of the wafer 4 placed on a wafer chuck 5 is detected as the change of an electrical element through contact between the probe 2 mounted to the probe card 1 and the temperature detecting terminal 3 measuring the temperature of the surface of the wafer 4 in the wafer 4, and the temperature is measured by means of an external measuring instrument. Accordingly, a temperature condition can be added to the inspection of the characteristics of the integrated circuit element or the heating or cooling of the wafer can be controlled automaticall by feeding back temperature data to the heating or cooling.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15259080A JPS5776852A (en) | 1980-10-30 | 1980-10-30 | Card for probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15259080A JPS5776852A (en) | 1980-10-30 | 1980-10-30 | Card for probe |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5776852A true JPS5776852A (en) | 1982-05-14 |
JPS6118338B2 JPS6118338B2 (en) | 1986-05-12 |
Family
ID=15543765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15259080A Granted JPS5776852A (en) | 1980-10-30 | 1980-10-30 | Card for probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5776852A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154636A (en) * | 1985-12-27 | 1987-07-09 | Hitachi Electronics Eng Co Ltd | Cvd thin film forming apparatus |
JP2007227444A (en) * | 2006-02-21 | 2007-09-06 | Ricoh Co Ltd | Ic test method, probe guard, test prober, and ic tester |
-
1980
- 1980-10-30 JP JP15259080A patent/JPS5776852A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154636A (en) * | 1985-12-27 | 1987-07-09 | Hitachi Electronics Eng Co Ltd | Cvd thin film forming apparatus |
JPH0347739B2 (en) * | 1985-12-27 | 1991-07-22 | Hitachi Electr Eng | |
JP2007227444A (en) * | 2006-02-21 | 2007-09-06 | Ricoh Co Ltd | Ic test method, probe guard, test prober, and ic tester |
Also Published As
Publication number | Publication date |
---|---|
JPS6118338B2 (en) | 1986-05-12 |
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