JPS5774601A - Apparatus for fixing finely displacing table - Google Patents
Apparatus for fixing finely displacing tableInfo
- Publication number
- JPS5774601A JPS5774601A JP15160280A JP15160280A JPS5774601A JP S5774601 A JPS5774601 A JP S5774601A JP 15160280 A JP15160280 A JP 15160280A JP 15160280 A JP15160280 A JP 15160280A JP S5774601 A JPS5774601 A JP S5774601A
- Authority
- JP
- Japan
- Prior art keywords
- section
- finely
- displacing
- displacing table
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE:To enable fine movement at a high accuracy by building up a finely displacing table with a plurality of arms connected to each other by a connection section elastically bendable, a press moving section, a fixed section and a displacing table. CONSTITUTION:A finely displacing table 1 consists of a press moving section 2, arms 4, 6 and 8 connected with connecting sections 3, 5, 7 and 9 which are elastically bendable, a balancing section 10, a fixed section 16 and a displacing table 12. Two finely displacing tables 102 and 103 are so arranged on a base 101 as to cross in the direction of displacement through a spacer 104 and engaged with a carrier base 105. The carrier base 105 is finely shifted or fixed by moving the press moving section 2 with a micrometer or stepping motors 110 and 111. This can eliminate the lowering of accuracy due to a gap and others in the structural elements and enables fine movement in an extremely precise manner.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15160280A JPS5774601A (en) | 1980-10-29 | 1980-10-29 | Apparatus for fixing finely displacing table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15160280A JPS5774601A (en) | 1980-10-29 | 1980-10-29 | Apparatus for fixing finely displacing table |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5774601A true JPS5774601A (en) | 1982-05-10 |
JPS6318682B2 JPS6318682B2 (en) | 1988-04-19 |
Family
ID=15522110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15160280A Granted JPS5774601A (en) | 1980-10-29 | 1980-10-29 | Apparatus for fixing finely displacing table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5774601A (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59132387A (en) * | 1982-12-15 | 1984-07-30 | アルカテル エヌ.ブイ | Regulator displacing body in non-backlash manner |
JPS61136420A (en) * | 1984-08-30 | 1986-06-24 | ザ・ビ−オ−シ−・グル−プ・ピ−エルシ− | Separator for mixed gas |
JPS61164759A (en) * | 1985-01-14 | 1986-07-25 | Nippon Telegr & Teleph Corp <Ntt> | Minutely moving mechanism |
US4888878A (en) * | 1986-09-09 | 1989-12-26 | Hitachi Construction Machinery Co., Ltd. | Fine positioning device |
WO1991001848A1 (en) * | 1989-08-04 | 1991-02-21 | Hatheway Alson E | Precision motion transducer |
US5105552A (en) * | 1987-09-09 | 1992-04-21 | Institut Superieur D'etat De Surface (I S E S) | Procedure and sliding support for a profilometer |
US5123174A (en) * | 1989-04-28 | 1992-06-23 | Nissha Printing Co., Ltd. | Positioning table |
US5142791A (en) * | 1982-02-26 | 1992-09-01 | Hitachi, Ltd. | Apparatus for positioning sample |
US5180975A (en) * | 1989-11-16 | 1993-01-19 | Advantest Corporation | Positioning device and IC conveyor utilizing the same |
JPH074954A (en) * | 1993-01-29 | 1995-01-10 | Westvaco Corp | Method and equipment for measuring shape of paper surface |
US5684707A (en) * | 1994-10-03 | 1997-11-04 | Westvaco Corporation | Apparatus and method for analyzing paper surface topography |
CN102930904A (en) * | 2012-10-10 | 2013-02-13 | 北京航空航天大学 | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
CN103465239A (en) * | 2013-09-06 | 2013-12-25 | 苏州凯欧机械科技有限公司 | Planar biaxial precise-positioning large workbench |
-
1980
- 1980-10-29 JP JP15160280A patent/JPS5774601A/en active Granted
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5142791A (en) * | 1982-02-26 | 1992-09-01 | Hitachi, Ltd. | Apparatus for positioning sample |
JPS59132387A (en) * | 1982-12-15 | 1984-07-30 | アルカテル エヌ.ブイ | Regulator displacing body in non-backlash manner |
JPS61136420A (en) * | 1984-08-30 | 1986-06-24 | ザ・ビ−オ−シ−・グル−プ・ピ−エルシ− | Separator for mixed gas |
JPH0256126B2 (en) * | 1984-08-30 | 1990-11-29 | Boc Group Plc | |
JPS61164759A (en) * | 1985-01-14 | 1986-07-25 | Nippon Telegr & Teleph Corp <Ntt> | Minutely moving mechanism |
US4888878A (en) * | 1986-09-09 | 1989-12-26 | Hitachi Construction Machinery Co., Ltd. | Fine positioning device |
US4991309A (en) * | 1986-09-09 | 1991-02-12 | Hitachi Construction Machinery Co., Ltd. | Fine positioning device and displacement controller therefor |
US5105552A (en) * | 1987-09-09 | 1992-04-21 | Institut Superieur D'etat De Surface (I S E S) | Procedure and sliding support for a profilometer |
US5123174A (en) * | 1989-04-28 | 1992-06-23 | Nissha Printing Co., Ltd. | Positioning table |
WO1991001848A1 (en) * | 1989-08-04 | 1991-02-21 | Hatheway Alson E | Precision motion transducer |
US5180975A (en) * | 1989-11-16 | 1993-01-19 | Advantest Corporation | Positioning device and IC conveyor utilizing the same |
JPH074954A (en) * | 1993-01-29 | 1995-01-10 | Westvaco Corp | Method and equipment for measuring shape of paper surface |
US5614662A (en) * | 1993-01-29 | 1997-03-25 | Westvaco Corporation | Apparatus and method for measuring a paper surface roughness |
JP2895731B2 (en) * | 1993-01-29 | 1999-05-24 | ウェストヴァコ コーポレイション | METHOD AND APPARATUS FOR MEASURING SHAPE OF PAPER SURFACE |
US5684707A (en) * | 1994-10-03 | 1997-11-04 | Westvaco Corporation | Apparatus and method for analyzing paper surface topography |
CN102930904A (en) * | 2012-10-10 | 2013-02-13 | 北京航空航天大学 | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
CN102930904B (en) * | 2012-10-10 | 2015-03-11 | 北京航空航天大学 | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
CN103465239A (en) * | 2013-09-06 | 2013-12-25 | 苏州凯欧机械科技有限公司 | Planar biaxial precise-positioning large workbench |
Also Published As
Publication number | Publication date |
---|---|
JPS6318682B2 (en) | 1988-04-19 |
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