JPS5764928A - Carrying apparatus for photo mask or reticle - Google Patents

Carrying apparatus for photo mask or reticle

Info

Publication number
JPS5764928A
JPS5764928A JP55140332A JP14033280A JPS5764928A JP S5764928 A JPS5764928 A JP S5764928A JP 55140332 A JP55140332 A JP 55140332A JP 14033280 A JP14033280 A JP 14033280A JP S5764928 A JPS5764928 A JP S5764928A
Authority
JP
Japan
Prior art keywords
cassette
mask
cassettes
glass substrate
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55140332A
Other languages
Japanese (ja)
Other versions
JPH03782B2 (en
Inventor
Nobutoshi Abe
Yukio Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55140332A priority Critical patent/JPS5764928A/en
Publication of JPS5764928A publication Critical patent/JPS5764928A/en
Publication of JPH03782B2 publication Critical patent/JPH03782B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To ensure dust proofness and facilitate a replacing operation, by a method wherein a plurality of cassettes each hermetically housing a mask or a reticle are loaded in a cartridge, being aligned with each other, and a carrying means is moved to a desired position in order to perform an inserting and removing operation. CONSTITUTION:A glass substrate as a mask or the like is mounted on the step portion of a cassette bottom lid 3 and housed with an upper lid 2 closed. Cartridges 14, 15 are secured onto a base 18 in parallel to each other, and cassette projections 4, 5 are fitted into grooves in the respective cartridges 14, 15 facing to each other, thereby allowing a plurality of cassettes to be loaded being aligned with each other, The operation for removing the glass substrate is conducted such that a fork-shaped arm 16 is moved to a position in front of a door member 1 of a given cassette by means of members 30, 41, and after the cassette is ooened by actuating opening- closing mechanisms 26, 27 mounted on the member 30, fork portions 16a, 16b of the arm 16 are inserted. Thereby, it is possible to maintain the glass substrate under a dust-proof condition as well as readily replace a mask or the like having become defective through replacement of cassettes.
JP55140332A 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle Granted JPS5764928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55140332A JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140332A JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63056285A Division JPS63265445A (en) 1988-03-11 1988-03-11 Substrate storing and carrying device

Publications (2)

Publication Number Publication Date
JPS5764928A true JPS5764928A (en) 1982-04-20
JPH03782B2 JPH03782B2 (en) 1991-01-08

Family

ID=15266355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140332A Granted JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Country Status (1)

Country Link
JP (1) JPS5764928A (en)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (en) * 1983-03-25 1984-10-04 Telmec Co Ltd Extractor for wafer in measuring device for semiconductor
JPS6169129A (en) * 1984-09-13 1986-04-09 Canon Inc Automatic reticle plate replacement
JPS6196458A (en) * 1984-10-18 1986-05-15 Canon Inc Contact medium self-feeding type ultrasonic flaw detecting scanner
JPS62273727A (en) * 1986-04-15 1987-11-27 ハンプシヤ−　インスツルメンツ，インコ−ポレ−テツド Apparatus and processing method for x-ray lithography
US4758127A (en) * 1983-06-24 1988-07-19 Canon Kabushiki Kaisha Original feeding apparatus and a cassette for containing the original
JPS63208414A (en) * 1987-02-20 1988-08-29 Canon Inc Substrate carrying device
JPS63208430A (en) * 1987-02-20 1988-08-29 Canon Inc Substrate carriage device
JPS63208452A (en) * 1987-02-20 1988-08-29 Canon Inc Substrate transporting device
JPS63265445A (en) * 1988-03-11 1988-11-01 Nikon Corp Substrate storing and carrying device
NL8801268A (en) * 1987-05-17 1988-12-16 Leitz Ernst Gmbh TREATMENT AUTOMATIC FOR PLATE-SHAPED OBJECTS.
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
US4999671A (en) * 1986-07-11 1991-03-12 Canon Kabushiki Kaisha Reticle conveying device
JPH04242953A (en) * 1991-03-23 1992-08-31 Tokyo Electron Ltd Wafer transfer system
US5330309A (en) * 1992-11-25 1994-07-19 Eastman Kodak Company Reader having cassette locating and unlatching mechanism
JPH06211308A (en) * 1993-01-18 1994-08-02 Canon Inc Article supply device
US6113346A (en) * 1996-07-31 2000-09-05 Agfa Corporation Method for loading and unloading a supply of plates in an automated plate handler
US6352254B1 (en) * 1994-05-20 2002-03-05 Fujitsu Limited Paper sheet manipulating apparatus and paper sheet transaction apparatus
KR100665293B1 (en) * 2006-01-04 2007-01-17 코리아테크노(주) Boxcover opener for use of photomask shipping box
CN104142612A (en) * 2013-05-08 2014-11-12 上海微电子装备有限公司 Mask pushback mechanism

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4403387B2 (en) 2004-04-26 2010-01-27 ソニー株式会社 Solid-state imaging device and driving method of solid-state imaging device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer
JPS5544927A (en) * 1978-09-27 1980-03-29 Toshiba Electric Equip Corp Smoke sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer
JPS5544927A (en) * 1978-09-27 1980-03-29 Toshiba Electric Equip Corp Smoke sensor

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (en) * 1983-03-25 1984-10-04 Telmec Co Ltd Extractor for wafer in measuring device for semiconductor
JPH0447976B2 (en) * 1983-03-25 1992-08-05 Tokyo Electron Ltd
US4758127A (en) * 1983-06-24 1988-07-19 Canon Kabushiki Kaisha Original feeding apparatus and a cassette for containing the original
JPS6169129A (en) * 1984-09-13 1986-04-09 Canon Inc Automatic reticle plate replacement
JPS6196458A (en) * 1984-10-18 1986-05-15 Canon Inc Contact medium self-feeding type ultrasonic flaw detecting scanner
JPS62273727A (en) * 1986-04-15 1987-11-27 ハンプシヤ−　インスツルメンツ，インコ−ポレ−テツド Apparatus and processing method for x-ray lithography
US4999671A (en) * 1986-07-11 1991-03-12 Canon Kabushiki Kaisha Reticle conveying device
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
JPS63208452A (en) * 1987-02-20 1988-08-29 Canon Inc Substrate transporting device
JPS63208430A (en) * 1987-02-20 1988-08-29 Canon Inc Substrate carriage device
JPS63208414A (en) * 1987-02-20 1988-08-29 Canon Inc Substrate carrying device
NL8801268A (en) * 1987-05-17 1988-12-16 Leitz Ernst Gmbh TREATMENT AUTOMATIC FOR PLATE-SHAPED OBJECTS.
JPS63265445A (en) * 1988-03-11 1988-11-01 Nikon Corp Substrate storing and carrying device
JPH04242953A (en) * 1991-03-23 1992-08-31 Tokyo Electron Ltd Wafer transfer system
US5330309A (en) * 1992-11-25 1994-07-19 Eastman Kodak Company Reader having cassette locating and unlatching mechanism
JPH06211308A (en) * 1993-01-18 1994-08-02 Canon Inc Article supply device
US6352254B1 (en) * 1994-05-20 2002-03-05 Fujitsu Limited Paper sheet manipulating apparatus and paper sheet transaction apparatus
US6113346A (en) * 1996-07-31 2000-09-05 Agfa Corporation Method for loading and unloading a supply of plates in an automated plate handler
KR100665293B1 (en) * 2006-01-04 2007-01-17 코리아테크노(주) Boxcover opener for use of photomask shipping box
CN104142612A (en) * 2013-05-08 2014-11-12 上海微电子装备有限公司 Mask pushback mechanism

Also Published As

Publication number Publication date
JPH03782B2 (en) 1991-01-08

Similar Documents

Publication Publication Date Title
JPS5764928A (en) Carrying apparatus for photo mask or reticle
KR870000048B1 (en) Tape cassette
JPS5895812A (en) Cassette of base plate
JPS56174146U (en)
DE59209948D1 (en) SMIF system for injecting substrates into lock clean rooms
EP0265809A3 (en) Cd-changer
EP0449227A3 (en) Sputtering apparatus
JPS5788561A (en) Automatic loading record player
DE69015301T2 (en) Packaging and handling system for foils.
GB2021072A (en) A storage device for tape cassettes and/or cartridges
JPS5763452A (en) Slide frame for chemical analysis
ES489993A0 (en) IMPROVEMENTS IN FILE BOXES (CASSETTES) OF MAGNETIC TAPE.
JPH1010705A (en) Reticle case
US4426214A (en) Laminated filters
DE3268298D1 (en) Apparatus for loading plane film cassettes in daylight
US2993992A (en) Mass spectrometers
DE3166885D1 (en) Man-hole frame constructed of assembled members
JPS6428933A (en) Wafer-surface inspection device
JPS5764929A (en) Carrying apparatus for glass substrate
GB2070977B (en) Optical recording materials containing a,a'-bis (dialkylaminobenzylidene) ketone dyes
DE3882993D1 (en) DEVICE FOR CENTERING X-RAY FILM CASSETTES.
JPS5391731A (en) Animated image storage system
JPH04172454A (en) Reticle or photomask fixed to dustproof case
SU1054818A1 (en) Attachment for opening and closing photographic film holders
JPS63265445A (en) Substrate storing and carrying device