JPS57204128A - Precise shifter - Google Patents
Precise shifterInfo
- Publication number
- JPS57204128A JPS57204128A JP8818681A JP8818681A JPS57204128A JP S57204128 A JPS57204128 A JP S57204128A JP 8818681 A JP8818681 A JP 8818681A JP 8818681 A JP8818681 A JP 8818681A JP S57204128 A JPS57204128 A JP S57204128A
- Authority
- JP
- Japan
- Prior art keywords
- origin
- moving
- light source
- moving table
- rest frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To position a two-dimensional moving table accurately at an origin by mounting the light source or one of light receivers of a detector detecting the quantity of the moving table moved to the moving table and the other to a rest frame. CONSTITUTION:The moving table consisting of an X table 1 with a driving motor 8 and a Y table 4 is positioned at the origin by means of the detector, in which a wafer 4' is attached onto the moving table while the light source 10 with a lens system 11 is mounted, a position sensor 12 is arranged to the rest frame at a position corresponding to the light source 10 and these are combined. On the other hand, the quantity of the table moved is detected by means of a laser interference measuring machine 7. Accordingly, the table can easily be positioned with the accuracy of + or -1mum without depending upon the mechanical accuracy of the moving base because the position of the origin can be defined from direct relationship between the Y table and the rest frame.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8818681A JPS57204128A (en) | 1981-06-10 | 1981-06-10 | Precise shifter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8818681A JPS57204128A (en) | 1981-06-10 | 1981-06-10 | Precise shifter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57204128A true JPS57204128A (en) | 1982-12-14 |
Family
ID=13935863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8818681A Pending JPS57204128A (en) | 1981-06-10 | 1981-06-10 | Precise shifter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57204128A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62158341A (en) * | 1985-12-30 | 1987-07-14 | Hoya Corp | Mobile stage |
US5914774A (en) * | 1994-12-15 | 1999-06-22 | Nikon Corporation | Projection exposure apparatus with function to measure imaging characteristics of projection optical system |
CN102540765A (en) * | 2012-02-13 | 2012-07-04 | 志圣科技(广州)有限公司 | Device and method for positioning printed circuit board (PCB) of high-accuracy parallel light exposure machine |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5356975A (en) * | 1976-11-01 | 1978-05-23 | Hitachi Ltd | Exposure apparatus |
JPS5837546U (en) * | 1981-09-04 | 1983-03-11 | 三菱電機株式会社 | environmental test equipment |
-
1981
- 1981-06-10 JP JP8818681A patent/JPS57204128A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5356975A (en) * | 1976-11-01 | 1978-05-23 | Hitachi Ltd | Exposure apparatus |
JPS5837546U (en) * | 1981-09-04 | 1983-03-11 | 三菱電機株式会社 | environmental test equipment |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62158341A (en) * | 1985-12-30 | 1987-07-14 | Hoya Corp | Mobile stage |
US5914774A (en) * | 1994-12-15 | 1999-06-22 | Nikon Corporation | Projection exposure apparatus with function to measure imaging characteristics of projection optical system |
CN102540765A (en) * | 2012-02-13 | 2012-07-04 | 志圣科技(广州)有限公司 | Device and method for positioning printed circuit board (PCB) of high-accuracy parallel light exposure machine |
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