JPS57173805A - Optical filter and its manufacture - Google Patents

Abstract

PURPOSE:To prevent deterioration of a picture quality, by forming an area between color filter elements placed like a mosaic on a transparent substrate, to a hollowed shape, and preventing that air bubbles are left in the filter element part when making this filter adhere onto a solid image pickup plate, etc. CONSTITUTION:On a transparent substrate 51 such as glass, etc., an opaque part 52 is formed by use of a Cr vapor-deposited film, a color filter material 53 for covering the whole surface of the substrate 51 and the opaque part 52 is formed by gelatin, and on the layer 53, ultraviolet hardened resin 54 is applied. Subsequently, the part except the opaque part 52 is hardened by irradiating ultraviolet rays 55 from the substrate 51 side. After the development, a groove part 56 which has removed the resin 54 on the opaque part 52 is formed. Otherwise, on the glass substrate 1, a mosaic-like element of the first layer (for instance, red) 2 is formed, subsequently, the second layer (for instance, cyan) 3 is formed, a green layer is formed in the overlapping part of the layers 2, 3, and after that, a groove 31 is formed in the boundary of each color layer by plasma etching, etc., and after that, a protective layer 4 is formed. When making a filter obtained in this way adhere onto an image pickup plate, etc., no bubble goes onto the surface of the filter element, and it is collected into the groove part 31 or the groove part 56.