JPS57149927A - Measuring method for temperature distribution - Google Patents

Measuring method for temperature distribution

Info

Publication number
JPS57149927A
JPS57149927A JP56035909A JP3590981A JPS57149927A JP S57149927 A JPS57149927 A JP S57149927A JP 56035909 A JP56035909 A JP 56035909A JP 3590981 A JP3590981 A JP 3590981A JP S57149927 A JPS57149927 A JP S57149927A
Authority
JP
Japan
Prior art keywords
sample
state
temp
irradiating
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56035909A
Other languages
Japanese (ja)
Inventor
Yoshiro Uchikawa
Koji Masutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP56035909A priority Critical patent/JPS57149927A/en
Publication of JPS57149927A publication Critical patent/JPS57149927A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804—Shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
    • G01J5/53—Reference sources, e.g. standard lamps; Black bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/58—Radiation pyrometry, e.g. infrared or optical thermometry using absorption; using extinction effect
    • G01J2005/583—Interferences, i.e. fringe variation with temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To make the accurate measurement of temp. distributions possible by making the reflectivity/emissivity map of the respective points on a sample surface and correcting the actual measured values of temp. CONSTITUTION:The emissivity map of the surface of a sample 1 is made with a CPU11 in accordance with the differences in the signals obtained by detecting 3 the IR rays from the surface of said sample 1 in the state of irradiating the reference IR ray from a reference black body furnace 8 and in the state of not irradiating the same, respectively. The IR rays from the surface of the sample put in the measurement state are detected in the state of not irradiating the reference IR rays and the obtained detection signals are corrected in accordance with the emissivity map. In accordance with the corrected signals, the image of the temp. distributions of the sample surface is displayed 14.
JP56035909A 1981-03-12 1981-03-12 Measuring method for temperature distribution Pending JPS57149927A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56035909A JPS57149927A (en) 1981-03-12 1981-03-12 Measuring method for temperature distribution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56035909A JPS57149927A (en) 1981-03-12 1981-03-12 Measuring method for temperature distribution

Publications (1)

Publication Number Publication Date
JPS57149927A true JPS57149927A (en) 1982-09-16

Family

ID=12455150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56035909A Pending JPS57149927A (en) 1981-03-12 1981-03-12 Measuring method for temperature distribution

Country Status (1)

Country Link
JP (1) JPS57149927A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961761A (en) * 1982-09-30 1984-04-09 ヴアンゼツテイ・システムズ・インコ−ポレ−シヨン Optical fiber scanning system for laser/thermal inspection
US4840496A (en) * 1988-02-23 1989-06-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Noncontact temperature pattern measuring device
JPH0212046A (en) * 1988-06-30 1990-01-17 Saginomiya Seisakusho Inc Method for inspecting temperature distribution
JPH02298830A (en) * 1989-05-15 1990-12-11 Nippon Avionics Co Ltd Measuring apparatus of surface temperature distribution
JPH04244500A (en) * 1991-01-31 1992-09-01 Nec Corp Observation sensor
JPH0552785A (en) * 1991-08-22 1993-03-02 Shuji Nakada Method for inspecting joint of electronic parts
US5255286A (en) * 1991-05-17 1993-10-19 Texas Instruments Incorporated Multi-point pyrometry with real-time surface emissivity compensation
JPH06147998A (en) * 1992-11-09 1994-05-27 Nippon Avionics Co Ltd Infrared picture system
JP2013524250A (en) * 2010-04-13 2013-06-17 シーメンス アクチエンゲゼルシヤフト Apparatus and method for projecting information onto an object in thermographic inspection
JP2015230251A (en) * 2014-06-05 2015-12-21 株式会社ジェイテクト Optical nondestructive inspection method and optical nondestructive inspection apparatus
WO2021049188A1 (en) * 2019-09-13 2021-03-18 村田機械株式会社 Temperature monitoring method, temperature monitoring device, and control panel

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5169682A (en) * 1974-12-13 1976-06-16 Nippon Electron Optics Lab Hosharitsu oyobi moshikuha ondono sokuteihoho oyobi sochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5169682A (en) * 1974-12-13 1976-06-16 Nippon Electron Optics Lab Hosharitsu oyobi moshikuha ondono sokuteihoho oyobi sochi

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961761A (en) * 1982-09-30 1984-04-09 ヴアンゼツテイ・システムズ・インコ−ポレ−シヨン Optical fiber scanning system for laser/thermal inspection
US4840496A (en) * 1988-02-23 1989-06-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Noncontact temperature pattern measuring device
JPH0212046A (en) * 1988-06-30 1990-01-17 Saginomiya Seisakusho Inc Method for inspecting temperature distribution
JPH02298830A (en) * 1989-05-15 1990-12-11 Nippon Avionics Co Ltd Measuring apparatus of surface temperature distribution
JPH04244500A (en) * 1991-01-31 1992-09-01 Nec Corp Observation sensor
US5255286A (en) * 1991-05-17 1993-10-19 Texas Instruments Incorporated Multi-point pyrometry with real-time surface emissivity compensation
JPH0552785A (en) * 1991-08-22 1993-03-02 Shuji Nakada Method for inspecting joint of electronic parts
JPH06147998A (en) * 1992-11-09 1994-05-27 Nippon Avionics Co Ltd Infrared picture system
JP2013524250A (en) * 2010-04-13 2013-06-17 シーメンス アクチエンゲゼルシヤフト Apparatus and method for projecting information onto an object in thermographic inspection
JP2015230251A (en) * 2014-06-05 2015-12-21 株式会社ジェイテクト Optical nondestructive inspection method and optical nondestructive inspection apparatus
WO2021049188A1 (en) * 2019-09-13 2021-03-18 村田機械株式会社 Temperature monitoring method, temperature monitoring device, and control panel

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