JPS5693001A - Method of forming thinnfilm sensor - Google Patents

Method of forming thinnfilm sensor

Info

Publication number
JPS5693001A
JPS5693001A JP15894080A JP15894080A JPS5693001A JP S5693001 A JPS5693001 A JP S5693001A JP 15894080 A JP15894080 A JP 15894080A JP 15894080 A JP15894080 A JP 15894080A JP S5693001 A JPS5693001 A JP S5693001A
Authority
JP
Japan
Prior art keywords
thinnfilm
sensor
forming
thinnfilm sensor
forming thinnfilm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15894080A
Other languages
Japanese (ja)
Inventor
Jiei Koneberu Donarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gould Inc
Original Assignee
Gould Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gould Inc filed Critical Gould Inc
Publication of JPS5693001A publication Critical patent/JPS5693001A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Fluid Pressure (AREA)
JP15894080A 1979-11-13 1980-11-13 Method of forming thinnfilm sensor Pending JPS5693001A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9383479A 1979-11-13 1979-11-13

Publications (1)

Publication Number Publication Date
JPS5693001A true JPS5693001A (en) 1981-07-28

Family

ID=22241068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15894080A Pending JPS5693001A (en) 1979-11-13 1980-11-13 Method of forming thinnfilm sensor

Country Status (5)

Country Link
JP (1) JPS5693001A (en)
DE (1) DE3041952A1 (en)
FR (1) FR2469802A1 (en)
GB (1) GB2063562A (en)
IT (1) IT1142188B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH032603A (en) * 1989-05-31 1991-01-09 Honda Motor Co Ltd Heat resisting strain gage and strain measuring method
CN105424096A (en) * 2016-01-04 2016-03-23 东南大学 Readout circuit of resistive composite sensor array, and readout method thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283641A (en) * 1985-10-08 1987-04-17 Sharp Corp Sensor element
JPS6281004U (en) * 1985-11-08 1987-05-23
DE3910646A1 (en) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co CAPACITIVE PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF
DE4024128A1 (en) * 1990-07-30 1992-02-13 Hottinger Messtechnik Baldwin METHOD FOR PRODUCING AND APPLYING A STRETCH MEASURING STRIP
CN115876071B (en) * 2023-03-08 2023-05-12 中北大学 Hollowed-out four-resistance grid type thin film strain sensor and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH032603A (en) * 1989-05-31 1991-01-09 Honda Motor Co Ltd Heat resisting strain gage and strain measuring method
CN105424096A (en) * 2016-01-04 2016-03-23 东南大学 Readout circuit of resistive composite sensor array, and readout method thereof

Also Published As

Publication number Publication date
FR2469802A1 (en) 1981-05-22
GB2063562A (en) 1981-06-03
DE3041952A1 (en) 1981-09-03
IT1142188B (en) 1986-10-08
IT8050160A0 (en) 1980-11-13

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