JPS5675576A - Plasma surface treating apparatus - Google Patents
Plasma surface treating apparatusInfo
- Publication number
- JPS5675576A JPS5675576A JP15205979A JP15205979A JPS5675576A JP S5675576 A JPS5675576 A JP S5675576A JP 15205979 A JP15205979 A JP 15205979A JP 15205979 A JP15205979 A JP 15205979A JP S5675576 A JPS5675576 A JP S5675576A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- plasma
- ions
- treated
- treating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To perform treatment efficiently by providing a shielding vessel between the inside wall of a tightly closed vessel and the material to be treated in the case of performing the surface treatment of said material by the use of plasma or ions in the tightly closed vessel.
CONSTITUTION: A shielding vessel 16 is provided between the inside wall of a tightly closed vessel 5 and the material 17 to be treated in a plasma surface treating apparatus which performs the surface treatment of the material 17 by using plasma or ions in the vessel 5. The vessel 16 is a cylindrical vessel having a plurality of holes, and the material 17 is contained therein. This prevents the polymerized matter formed by the oils etc. having stuck or adsorbed on or in the material 17 from adhering on the vessel 5; in addition, the diffusion of plasma or ions is suppressed and therefore the material 17 is treated with good efficiency.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15205979A JPS5675576A (en) | 1979-11-26 | 1979-11-26 | Plasma surface treating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15205979A JPS5675576A (en) | 1979-11-26 | 1979-11-26 | Plasma surface treating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5675576A true JPS5675576A (en) | 1981-06-22 |
Family
ID=15532148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15205979A Pending JPS5675576A (en) | 1979-11-26 | 1979-11-26 | Plasma surface treating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5675576A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59129872U (en) * | 1983-02-19 | 1984-08-31 | 日本真空技術株式会社 | plasma etching equipment |
JPS63280422A (en) * | 1987-05-12 | 1988-11-17 | Hitachi Ltd | Microwave plasma processor |
-
1979
- 1979-11-26 JP JP15205979A patent/JPS5675576A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59129872U (en) * | 1983-02-19 | 1984-08-31 | 日本真空技術株式会社 | plasma etching equipment |
JPS63280422A (en) * | 1987-05-12 | 1988-11-17 | Hitachi Ltd | Microwave plasma processor |
JPH0525386B2 (en) * | 1987-05-12 | 1993-04-12 | Hitachi Seisakusho Kk |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52126281A (en) | Method of purging operating plates used in treatments of biological poisoner and explosive materials* and safet cabinet for carrying out the method | |
JPS5271386A (en) | Method of removing membrane contaminants | |
JPS5675576A (en) | Plasma surface treating apparatus | |
JPS527149A (en) | Sludge stirring and carrying device | |
JPS541964A (en) | Complex cyanide treating apparatus | |
JPS5690999A (en) | Treating apparatus of metal surface | |
JPS52135879A (en) | Treatment of chemical washing waste liquid | |
JPS5339651A (en) | Treatment of waste water containing organic matters | |
JPS5321399A (en) | Detergent for removing radioactive contamination and its washed water liquid treating method | |
JPS53117255A (en) | Method of treating waste water containing pectic substances | |
JPS5364951A (en) | Apparatus for treating waste liquid | |
JPS51131160A (en) | Method of treating waste water | |
JPS5236572A (en) | Treating method of waste fluid from mandarine orange factory for the p urpose of obtaining resources | |
JPS51133179A (en) | A process for treatment of sludge | |
JPS51128472A (en) | Process for assimilating and decomposing polyvinyl alcohol by the use of microorganisms | |
JPS5275183A (en) | Method and apparatus for washing of treating objects | |
JPS51144060A (en) | Method of treating waste water | |
JPS53132171A (en) | Process for wastewater treatment | |
JPS5381900A (en) | Radioactive waste treating device | |
JPS544245A (en) | Washing equipment | |
JPS53131980A (en) | Method of cleaning membrane surface of membrane separator | |
JPS5362476A (en) | Processing method of semiconductor surface | |
JPS53133967A (en) | Water treating apparatus | |
JPS51144079A (en) | Apparatus of processing kitchen garbage | |
JPS5383351A (en) | Method of treating organic waste water |