JPS5670450A - Humidity sensor - Google Patents
Humidity sensorInfo
- Publication number
- JPS5670450A JPS5670450A JP14841679A JP14841679A JPS5670450A JP S5670450 A JPS5670450 A JP S5670450A JP 14841679 A JP14841679 A JP 14841679A JP 14841679 A JP14841679 A JP 14841679A JP S5670450 A JPS5670450 A JP S5670450A
- Authority
- JP
- Japan
- Prior art keywords
- humidity detecting
- film
- layer
- thermal characteristics
- temperature compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Air Conditioning Control Device (AREA)
Abstract
PURPOSE: To eliminate the delay in time of the follow-up of temperature compensation by using a humidity detecting element and an element for temperature compensation having the same thermal characteristics with those of the former element as a pair.
CONSTITUTION: In the intermediate part of a U-shaped tantalum wire 32 is formed a tantalum oxide film 33 and on a part, at least, of this film 33 is formed a manganese dioxide layer 35 in such a manner that is contacts with and covers the film 33. On this layer 34, a steam-transmitting and electroconductive facing electrode 35, such as silver paint and carbon, and a solder layer 34 are formed and further one piece of the U-shaped device is coated with waterproof resin 37 such as silicone, whereby the humidity sensor using the humidity detecting element of a changing electrostatic capacity type is manufactured. In this case, a part between a drawn-out lead 39 and a common lead 38 has a temperature-humidity detecting function and the thermal characteristics of both leads are quite the same.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14841679A JPS5670450A (en) | 1979-11-15 | 1979-11-15 | Humidity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14841679A JPS5670450A (en) | 1979-11-15 | 1979-11-15 | Humidity sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5670450A true JPS5670450A (en) | 1981-06-12 |
Family
ID=15452295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14841679A Pending JPS5670450A (en) | 1979-11-15 | 1979-11-15 | Humidity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5670450A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6141836A (en) * | 1984-07-31 | 1986-02-28 | Sanyo Electric Co Ltd | Ultra-sonic humidifier |
JPS6488145A (en) * | 1987-09-30 | 1989-04-03 | Canon Kk | Humidity measuring instrument |
JP2003028824A (en) * | 2001-07-16 | 2003-01-29 | Denso Corp | Capacitive humidity sensor |
WO2016181535A1 (en) * | 2015-05-13 | 2016-11-17 | 三菱電機株式会社 | Humidification device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5235690A (en) * | 1975-09-16 | 1977-03-18 | Toshiba Corp | Temperature compensating circuit and circuit for same |
-
1979
- 1979-11-15 JP JP14841679A patent/JPS5670450A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5235690A (en) * | 1975-09-16 | 1977-03-18 | Toshiba Corp | Temperature compensating circuit and circuit for same |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6141836A (en) * | 1984-07-31 | 1986-02-28 | Sanyo Electric Co Ltd | Ultra-sonic humidifier |
JPS6488145A (en) * | 1987-09-30 | 1989-04-03 | Canon Kk | Humidity measuring instrument |
JP2003028824A (en) * | 2001-07-16 | 2003-01-29 | Denso Corp | Capacitive humidity sensor |
JP4501320B2 (en) * | 2001-07-16 | 2010-07-14 | 株式会社デンソー | Capacitive humidity sensor |
WO2016181535A1 (en) * | 2015-05-13 | 2016-11-17 | 三菱電機株式会社 | Humidification device |
JPWO2016181535A1 (en) * | 2015-05-13 | 2017-07-27 | 三菱電機株式会社 | Humidifier |
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