JPS566666A - Linear motor - Google Patents

Linear motor

Info

Publication number
JPS566666A
JPS566666A JP8142779A JP8142779A JPS566666A JP S566666 A JPS566666 A JP S566666A JP 8142779 A JP8142779 A JP 8142779A JP 8142779 A JP8142779 A JP 8142779A JP S566666 A JPS566666 A JP S566666A
Authority
JP
Japan
Prior art keywords
magnetic
pole
armature
line
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8142779A
Other languages
Japanese (ja)
Other versions
JPS5857066B2 (en
Inventor
Kazumi Matsui
Takashi Takasue
Masami Iwasaki
Masaki Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP54081427A priority Critical patent/JPS5857066B2/en
Publication of JPS566666A publication Critical patent/JPS566666A/en
Publication of JPS5857066B2 publication Critical patent/JPS5857066B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Abstract

PURPOSE:To obtain simultaneously a driving power, a floating power and a guiding power in the width direction to enable the stable driving of a linear motor by a method wherein plural magnetic poles are prepared in an armature and a magnetic field system extending in parallel in the axial direction confronting with each other, and each magnetic pole is so controlled as to constitutes a magnetic single-pole. CONSTITUTION:An armature core 15 is constituted of a core having an E-shaped sectional area, and forms three lines of magnetic poles 15a-15c extending in the axial direction. Slots 18 having equal space with each other are prepared in the center magnetic pole line 15b, and four armature coils 11-14 are equipped in the slot 18 piled up in two layers, each coil being made to bridge over two poles of center magnetic pole line 15b and to be shifted by half pitch. Currents are made to flow in the armature coils 11-14 being so controlled as each of the magnetic pole line 15a-15c forms a magnetic single-pole respectively. A field system 20 is also constituted of a core having an equal sectional area, and each line of magnetic pole 21a-21c is made to constitute respectively a magnetic single-pole by a magnetic field coil 23, and the field system is made to confront with an armature 10.
JP54081427A 1979-06-29 1979-06-29 linear motor Expired JPS5857066B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54081427A JPS5857066B2 (en) 1979-06-29 1979-06-29 linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54081427A JPS5857066B2 (en) 1979-06-29 1979-06-29 linear motor

Publications (2)

Publication Number Publication Date
JPS566666A true JPS566666A (en) 1981-01-23
JPS5857066B2 JPS5857066B2 (en) 1983-12-17

Family

ID=13746062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54081427A Expired JPS5857066B2 (en) 1979-06-29 1979-06-29 linear motor

Country Status (1)

Country Link
JP (1) JPS5857066B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006068233A1 (en) * 2004-12-24 2006-06-29 Nikon Corporation Magnetic guiding apparatus, stage apparatus, exposure apparatus and device manufacturing method
US7830046B2 (en) 2007-03-16 2010-11-09 Nikon Corporation Damper for a stage assembly
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6149367A (en) * 1984-08-17 1986-03-11 Matsushita Electric Works Ltd Variable color discahrge lamp
JPS6155851A (en) * 1984-08-25 1986-03-20 Matsushita Electric Works Ltd Variable color discharge lamp
JPS61126758A (en) * 1984-11-24 1986-06-14 Matsushita Electric Works Ltd Variable color discharge lamp
JPS6193968U (en) * 1984-11-24 1986-06-17
JPS6193970U (en) * 1984-11-24 1986-06-17
JPS6193969U (en) * 1984-11-24 1986-06-17

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885959B2 (en) 2003-04-09 2018-02-06 Nikon Corporation Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en) 2003-10-28 2017-09-12 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US10281632B2 (en) 2003-11-20 2019-05-07 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10241417B2 (en) 2004-02-06 2019-03-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10234770B2 (en) 2004-02-06 2019-03-19 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
WO2006068233A1 (en) * 2004-12-24 2006-06-29 Nikon Corporation Magnetic guiding apparatus, stage apparatus, exposure apparatus and device manufacturing method
US9310696B2 (en) 2005-05-12 2016-04-12 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9360763B2 (en) 2005-05-12 2016-06-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9429851B2 (en) 2005-05-12 2016-08-30 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US7830046B2 (en) 2007-03-16 2010-11-09 Nikon Corporation Damper for a stage assembly
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9857599B2 (en) 2007-10-24 2018-01-02 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
JPS5857066B2 (en) 1983-12-17

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