JPS5648144A - Measurement equipment for characteristic of semiconductor device - Google Patents

Measurement equipment for characteristic of semiconductor device

Info

Publication number
JPS5648144A
JPS5648144A JP12356579A JP12356579A JPS5648144A JP S5648144 A JPS5648144 A JP S5648144A JP 12356579 A JP12356579 A JP 12356579A JP 12356579 A JP12356579 A JP 12356579A JP S5648144 A JPS5648144 A JP S5648144A
Authority
JP
Japan
Prior art keywords
signal
semiconductor device
potential
scanning
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12356579A
Other languages
Japanese (ja)
Inventor
Hirokazu Yuasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12356579A priority Critical patent/JPS5648144A/en
Publication of JPS5648144A publication Critical patent/JPS5648144A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To efficiently analyze faults by automatically detecting the area of the faulty part in a semiconductor device by input and output signals wherein the distribution of potential is measured by scanning pulse electron beams which are generated repeatedly. CONSTITUTION:A pattern signal 2 is sent to a semiconductor device 3 from a computer 1 and the computer 1 detects a faulty part by an output signal 4 to send a control signal 6. The scanning range of pulse electron beams 8 is controlled by generating 5 a signal to a scanning coil 7 by the signal 6. Electron beams 13 are converted into 10 pulses by the control current 11 from the computer 1. The beams 8 are emitted by synchronizing with the predetermined phase of the semiconductor device 3 which are repeatedly operated by the pattern signal 2. Energy distributing secondary electrons 14 influenced by the surface potential of the device 3 are detected 15 and amplified 16 to send a luminous signal 18 to a CRT 17 and the surface distribution of potential will be measured by using a scanning signal 19 at the same time. Furthermore, the timing of beam 8 emission is controlled to measure the hourly variations in the distribution of potential. In this composition, IC fault analyses will be available.
JP12356579A 1979-09-26 1979-09-26 Measurement equipment for characteristic of semiconductor device Pending JPS5648144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12356579A JPS5648144A (en) 1979-09-26 1979-09-26 Measurement equipment for characteristic of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12356579A JPS5648144A (en) 1979-09-26 1979-09-26 Measurement equipment for characteristic of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5648144A true JPS5648144A (en) 1981-05-01

Family

ID=14863724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12356579A Pending JPS5648144A (en) 1979-09-26 1979-09-26 Measurement equipment for characteristic of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5648144A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999731A (en) * 1982-11-30 1984-06-08 Toshiba Corp Measuring device for potential distribution of electronic device
US6195773B1 (en) 1997-07-14 2001-02-27 Nec Corporation LSI defective automatic analysis system and analyzing method therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999731A (en) * 1982-11-30 1984-06-08 Toshiba Corp Measuring device for potential distribution of electronic device
JPH0522386B2 (en) * 1982-11-30 1993-03-29 Tokyo Shibaura Electric Co
US6195773B1 (en) 1997-07-14 2001-02-27 Nec Corporation LSI defective automatic analysis system and analyzing method therefor

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