JPS5643724A - Method and device for semiconductorrwafer pecvvtreatment - Google Patents
Method and device for semiconductorrwafer pecvvtreatmentInfo
- Publication number
- JPS5643724A JPS5643724A JP11781979A JP11781979A JPS5643724A JP S5643724 A JPS5643724 A JP S5643724A JP 11781979 A JP11781979 A JP 11781979A JP 11781979 A JP11781979 A JP 11781979A JP S5643724 A JPS5643724 A JP S5643724A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductorrwafer
- pecvvtreatment
- semiconductorrwafer pecvvtreatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11781979A JPS5643724A (en) | 1979-09-13 | 1979-09-13 | Method and device for semiconductorrwafer pecvvtreatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11781979A JPS5643724A (en) | 1979-09-13 | 1979-09-13 | Method and device for semiconductorrwafer pecvvtreatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5643724A true JPS5643724A (en) | 1981-04-22 |
JPS6337495B2 JPS6337495B2 (en) | 1988-07-26 |
Family
ID=14721032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11781979A Granted JPS5643724A (en) | 1979-09-13 | 1979-09-13 | Method and device for semiconductorrwafer pecvvtreatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5643724A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59159532A (en) * | 1982-01-06 | 1984-09-10 | ドライテツク・インコ−ポレ−テツド | Gas plasma processor |
JPS6159840A (en) * | 1984-08-31 | 1986-03-27 | Fujitsu Ltd | Vapor growth method |
JPS6192054U (en) * | 1984-11-22 | 1986-06-14 |
-
1979
- 1979-09-13 JP JP11781979A patent/JPS5643724A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59159532A (en) * | 1982-01-06 | 1984-09-10 | ドライテツク・インコ−ポレ−テツド | Gas plasma processor |
JPS6159840A (en) * | 1984-08-31 | 1986-03-27 | Fujitsu Ltd | Vapor growth method |
JPS6192054U (en) * | 1984-11-22 | 1986-06-14 |
Also Published As
Publication number | Publication date |
---|---|
JPS6337495B2 (en) | 1988-07-26 |
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