JPS5638040A - Pattern forming method - Google Patents

Pattern forming method

Info

Publication number
JPS5638040A
JPS5638040A JP11287779A JP11287779A JPS5638040A JP S5638040 A JPS5638040 A JP S5638040A JP 11287779 A JP11287779 A JP 11287779A JP 11287779 A JP11287779 A JP 11287779A JP S5638040 A JPS5638040 A JP S5638040A
Authority
JP
Japan
Prior art keywords
layer
scattered
dye
lost
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11287779A
Other languages
Japanese (ja)
Inventor
Michiaki Hashimoto
Toshio Nakano
Tadao Kaneko
Akira Sasano
Haruo Matsumaru
Ken Tsutsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11287779A priority Critical patent/JPS5638040A/en
Publication of JPS5638040A publication Critical patent/JPS5638040A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices

Abstract

PURPOSE:To correctly form a minute pattern of high sensitivity on the 1st layer contg. a dye which is scattered and lost by heating and to obtain a color filter or mask by forming the 2nd layer made of photosensitive composition preventing the dye from being scattered and lost by heating. CONSTITUTION:A dye such as ''Eastman Red 901 '', ''Eastman Polyester Blue 4RL '', ''Eastman Yellow R-GFD '' or ''Eastman Bule GBN '' which is scattered and lost by heating is dissolved in a soln. of a binder such as polyglycidyl methacrylate, and this colored soln. is applied to plate 1 of glass, metal or the like or substrate 1 for a solid pickup element, a semiconductor element or the like to form the 1st layer 2. On layer 2 film 3 is formed by applying a photosensitive aqueous soln. of gelatin ammonium dichromate. Film 3 is irradiated with light through a color filter and developed, leaving parts set by the exposure. The dye in layer 2 other than parts 4 is then scattered and lost by heating to 200 deg.C for about 5min. Thus, the 1st color pattern is obtd. By repeating such processes, a three-color filter or red 4, blue 5 and green 6 is, e.g., obtd.
JP11287779A 1979-09-05 1979-09-05 Pattern forming method Pending JPS5638040A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11287779A JPS5638040A (en) 1979-09-05 1979-09-05 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11287779A JPS5638040A (en) 1979-09-05 1979-09-05 Pattern forming method

Publications (1)

Publication Number Publication Date
JPS5638040A true JPS5638040A (en) 1981-04-13

Family

ID=14597759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11287779A Pending JPS5638040A (en) 1979-09-05 1979-09-05 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS5638040A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232304A (en) * 1983-06-15 1984-12-27 Matsushita Electric Ind Co Ltd Production of color filter
JPS62234149A (en) * 1985-12-23 1987-10-14 ゼネラル・エレクトリック・カンパニイ Photoresist recording medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4885152A (en) * 1972-02-14 1973-11-12
JPS5021050A (en) * 1973-06-22 1975-03-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4885152A (en) * 1972-02-14 1973-11-12
JPS5021050A (en) * 1973-06-22 1975-03-06

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232304A (en) * 1983-06-15 1984-12-27 Matsushita Electric Ind Co Ltd Production of color filter
JPH045163B2 (en) * 1983-06-15 1992-01-30
JPS62234149A (en) * 1985-12-23 1987-10-14 ゼネラル・エレクトリック・カンパニイ Photoresist recording medium

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