JPS56134739U - - Google Patents
Info
- Publication number
- JPS56134739U JPS56134739U JP3236980U JP3236980U JPS56134739U JP S56134739 U JPS56134739 U JP S56134739U JP 3236980 U JP3236980 U JP 3236980U JP 3236980 U JP3236980 U JP 3236980U JP S56134739 U JPS56134739 U JP S56134739U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3236980U JPS56134739U (en) | 1980-03-11 | 1980-03-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3236980U JPS56134739U (en) | 1980-03-11 | 1980-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56134739U true JPS56134739U (en) | 1981-10-13 |
Family
ID=29628161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3236980U Pending JPS56134739U (en) | 1980-03-11 | 1980-03-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56134739U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015119026A (en) * | 2013-12-18 | 2015-06-25 | 株式会社ディスコ | Wafer housing cassette |
US9099562B2 (en) | 2005-09-29 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
-
1980
- 1980-03-11 JP JP3236980U patent/JPS56134739U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9099562B2 (en) | 2005-09-29 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2015119026A (en) * | 2013-12-18 | 2015-06-25 | 株式会社ディスコ | Wafer housing cassette |