JPS55158549A - Production of sensor - Google Patents
Production of sensorInfo
- Publication number
- JPS55158549A JPS55158549A JP6646379A JP6646379A JPS55158549A JP S55158549 A JPS55158549 A JP S55158549A JP 6646379 A JP6646379 A JP 6646379A JP 6646379 A JP6646379 A JP 6646379A JP S55158549 A JPS55158549 A JP S55158549A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- extremely fine
- particle film
- atmosphere
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To improve the sensitivity and the conductivity by heating the extremely fine oxide particle film in the atmosphere of oxygen and containing oxygen after it is formed on the insulating support substrate.
CONSTITUTION: A pair of electrodes 2 and 3 are formed on the insulating substrate 1 made of glass, ceramics or the like and an extremely fine particle film 4 of metal oxide semiconductor such as zinc and nickel is formed thereon. The extremely fine oxide particle film 4 is heated in the atmosphere of oxygen or containing oxygen at a temperature higher than 350°C but lower than the sintering point.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54066463A JPS6030894B2 (en) | 1979-05-29 | 1979-05-29 | Manufacturing method of gas/humidity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54066463A JPS6030894B2 (en) | 1979-05-29 | 1979-05-29 | Manufacturing method of gas/humidity sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55158549A true JPS55158549A (en) | 1980-12-10 |
JPS6030894B2 JPS6030894B2 (en) | 1985-07-19 |
Family
ID=13316488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54066463A Expired JPS6030894B2 (en) | 1979-05-29 | 1979-05-29 | Manufacturing method of gas/humidity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6030894B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5763443A (en) * | 1980-10-03 | 1982-04-16 | Matsushita Electric Ind Co Ltd | Manufacture of sensor for superfine powder |
JPS58105049A (en) * | 1981-12-17 | 1983-06-22 | Matsushita Electric Ind Co Ltd | Detector of no2 gas and detecting method therefor |
JPS5990040A (en) * | 1982-11-15 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Detector for gaseous carbon monoxide |
-
1979
- 1979-05-29 JP JP54066463A patent/JPS6030894B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5763443A (en) * | 1980-10-03 | 1982-04-16 | Matsushita Electric Ind Co Ltd | Manufacture of sensor for superfine powder |
JPS58105049A (en) * | 1981-12-17 | 1983-06-22 | Matsushita Electric Ind Co Ltd | Detector of no2 gas and detecting method therefor |
JPS5990040A (en) * | 1982-11-15 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Detector for gaseous carbon monoxide |
Also Published As
Publication number | Publication date |
---|---|
JPS6030894B2 (en) | 1985-07-19 |
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