JPS55158549A - Production of sensor - Google Patents

Production of sensor

Info

Publication number
JPS55158549A
JPS55158549A JP6646379A JP6646379A JPS55158549A JP S55158549 A JPS55158549 A JP S55158549A JP 6646379 A JP6646379 A JP 6646379A JP 6646379 A JP6646379 A JP 6646379A JP S55158549 A JPS55158549 A JP S55158549A
Authority
JP
Japan
Prior art keywords
oxygen
extremely fine
particle film
atmosphere
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6646379A
Other languages
Japanese (ja)
Other versions
JPS6030894B2 (en
Inventor
Masahiro Nishikawa
Yoshihiro Yamazaki
Kuni Ogawa
Atsushi Abe
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP54066463A priority Critical patent/JPS6030894B2/en
Publication of JPS55158549A publication Critical patent/JPS55158549A/en
Publication of JPS6030894B2 publication Critical patent/JPS6030894B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To improve the sensitivity and the conductivity by heating the extremely fine oxide particle film in the atmosphere of oxygen and containing oxygen after it is formed on the insulating support substrate.
CONSTITUTION: A pair of electrodes 2 and 3 are formed on the insulating substrate 1 made of glass, ceramics or the like and an extremely fine particle film 4 of metal oxide semiconductor such as zinc and nickel is formed thereon. The extremely fine oxide particle film 4 is heated in the atmosphere of oxygen or containing oxygen at a temperature higher than 350°C but lower than the sintering point.
COPYRIGHT: (C)1980,JPO&Japio
JP54066463A 1979-05-29 1979-05-29 Manufacturing method of gas/humidity sensor Expired JPS6030894B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54066463A JPS6030894B2 (en) 1979-05-29 1979-05-29 Manufacturing method of gas/humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54066463A JPS6030894B2 (en) 1979-05-29 1979-05-29 Manufacturing method of gas/humidity sensor

Publications (2)

Publication Number Publication Date
JPS55158549A true JPS55158549A (en) 1980-12-10
JPS6030894B2 JPS6030894B2 (en) 1985-07-19

Family

ID=13316488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54066463A Expired JPS6030894B2 (en) 1979-05-29 1979-05-29 Manufacturing method of gas/humidity sensor

Country Status (1)

Country Link
JP (1) JPS6030894B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763443A (en) * 1980-10-03 1982-04-16 Matsushita Electric Ind Co Ltd Manufacture of sensor for superfine powder
JPS58105049A (en) * 1981-12-17 1983-06-22 Matsushita Electric Ind Co Ltd Detector of no2 gas and detecting method therefor
JPS5990040A (en) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd Detector for gaseous carbon monoxide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763443A (en) * 1980-10-03 1982-04-16 Matsushita Electric Ind Co Ltd Manufacture of sensor for superfine powder
JPS58105049A (en) * 1981-12-17 1983-06-22 Matsushita Electric Ind Co Ltd Detector of no2 gas and detecting method therefor
JPS5990040A (en) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd Detector for gaseous carbon monoxide

Also Published As

Publication number Publication date
JPS6030894B2 (en) 1985-07-19

Similar Documents

Publication Publication Date Title
JPS55158549A (en) Production of sensor
JPS5249094A (en) Gas detecting device
JPS5578235A (en) Sensor and its manufacture
JPS5270751A (en) Manufacture of electrode of gas discharge panel
JPS5595857A (en) Moisture detection element
JPS5258579A (en) Temperature detector
JPS5618751A (en) Gas detector
JPS57178146A (en) Detector for gaseous component
JPS5425493A (en) Manufacture of transparent conductive film
JPS55158547A (en) Sensor
JPS53126270A (en) Production of semiconductor devices
JPS5346426A (en) Production of electroconductive material with excellent heat conductivity for low temperature uses
JPS5578224A (en) Temperature sensor
JPS5248384A (en) Surface temperature measuring portion
JPS55159149A (en) Production of electrode
JPS5383793A (en) Combustible gas detective element
JPS54136899A (en) Gas sensor
JPS57101751A (en) Manufacture of indium oxide series gas sensor
JPS5319600A (en) Porcelain component with high dielectric constant
JPS54123099A (en) Moisture sensitive element
JPS5266493A (en) Detector of outside atmosphere
JPS541897A (en) Humidity detector element
JPS5245262A (en) Semiconductor device
JPS5367498A (en) Gas detector
JPS5582680A (en) Manufacture of thermal head