JPS5447473A - Method of implanting ion to semiconductor - Google Patents

Method of implanting ion to semiconductor

Info

Publication number
JPS5447473A
JPS5447473A JP11261177A JP11261177A JPS5447473A JP S5447473 A JPS5447473 A JP S5447473A JP 11261177 A JP11261177 A JP 11261177A JP 11261177 A JP11261177 A JP 11261177A JP S5447473 A JPS5447473 A JP S5447473A
Authority
JP
Japan
Prior art keywords
semiconductor
implanting ion
implanting
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11261177A
Other languages
Japanese (ja)
Other versions
JPS617726B2 (en
Inventor
Shiyuuichi Nakamura
Masami Kanegae
Teruo Katou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP11261177A priority Critical patent/JPS5447473A/en
Publication of JPS5447473A publication Critical patent/JPS5447473A/en
Publication of JPS617726B2 publication Critical patent/JPS617726B2/ja
Granted legal-status Critical Current

Links

JP11261177A 1977-09-21 1977-09-21 Method of implanting ion to semiconductor Granted JPS5447473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11261177A JPS5447473A (en) 1977-09-21 1977-09-21 Method of implanting ion to semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11261177A JPS5447473A (en) 1977-09-21 1977-09-21 Method of implanting ion to semiconductor

Publications (2)

Publication Number Publication Date
JPS5447473A true JPS5447473A (en) 1979-04-14
JPS617726B2 JPS617726B2 (en) 1986-03-08

Family

ID=14591058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11261177A Granted JPS5447473A (en) 1977-09-21 1977-09-21 Method of implanting ion to semiconductor

Country Status (1)

Country Link
JP (1) JPS5447473A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200416A (en) * 1983-04-28 1984-11-13 Toshiba Corp Manufacture of semiconductor device
JPS60235453A (en) * 1984-05-09 1985-11-22 Hitachi Ltd Manufacture of semiconductor device
JPS61248522A (en) * 1985-04-26 1986-11-05 Mitsubishi Electric Corp Impurity layer forming apparatus
JPH02126634A (en) * 1988-11-07 1990-05-15 Hitachi Ltd Manufacture of semiconductor device and manufacturing device therefor
US5021119A (en) * 1987-11-13 1991-06-04 Kopin Corporation Zone-melting recrystallization process
JPH03278430A (en) * 1990-03-28 1991-12-10 Kawasaki Steel Corp Manufacture of semiconductor device
JPH04212417A (en) * 1990-03-27 1992-08-04 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
US5453153A (en) * 1987-11-13 1995-09-26 Kopin Corporation Zone-melting recrystallization process

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200416A (en) * 1983-04-28 1984-11-13 Toshiba Corp Manufacture of semiconductor device
JPS60235453A (en) * 1984-05-09 1985-11-22 Hitachi Ltd Manufacture of semiconductor device
JPS61248522A (en) * 1985-04-26 1986-11-05 Mitsubishi Electric Corp Impurity layer forming apparatus
US5021119A (en) * 1987-11-13 1991-06-04 Kopin Corporation Zone-melting recrystallization process
US5453153A (en) * 1987-11-13 1995-09-26 Kopin Corporation Zone-melting recrystallization process
JPH02126634A (en) * 1988-11-07 1990-05-15 Hitachi Ltd Manufacture of semiconductor device and manufacturing device therefor
JPH04212417A (en) * 1990-03-27 1992-08-04 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPH03278430A (en) * 1990-03-28 1991-12-10 Kawasaki Steel Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS617726B2 (en) 1986-03-08

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