JPS54157085A - Method of and device for measuring potential with no contact at electronic part - Google Patents

Method of and device for measuring potential with no contact at electronic part

Info

Publication number
JPS54157085A
JPS54157085A JP6456079A JP6456079A JPS54157085A JP S54157085 A JPS54157085 A JP S54157085A JP 6456079 A JP6456079 A JP 6456079A JP 6456079 A JP6456079 A JP 6456079A JP S54157085 A JPS54157085 A JP S54157085A
Authority
JP
Japan
Prior art keywords
contact
electronic part
measuring potential
potential
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6456079A
Other languages
Japanese (ja)
Inventor
Fuoierubaumu Hansupeetaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS54157085A publication Critical patent/JPS54157085A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
JP6456079A 1978-05-30 1979-05-24 Method of and device for measuring potential with no contact at electronic part Pending JPS54157085A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782823642 DE2823642A1 (en) 1978-05-30 1978-05-30 METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT

Publications (1)

Publication Number Publication Date
JPS54157085A true JPS54157085A (en) 1979-12-11

Family

ID=6040559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6456079A Pending JPS54157085A (en) 1978-05-30 1979-05-24 Method of and device for measuring potential with no contact at electronic part

Country Status (4)

Country Link
JP (1) JPS54157085A (en)
DE (1) DE2823642A1 (en)
GB (1) GB2021789B (en)
NL (1) NL7904226A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3036660A1 (en) * 1980-09-29 1982-05-19 Siemens AG, 1000 Berlin und 8000 München ARRANGEMENT FOR STROBOSCOPIC POTENTIAL MEASUREMENTS WITH AN ELECTRON BEAM MEASURING DEVICE
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
DE3138929A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE
DE3138990A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Coaxial opposing field spectrometer of high acceptance for secondary electrons and an electron beam test set
DE3138926A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Electron-optical arrangement for high-resolution electron-beam metrology
DE3138927A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus
DE3138901A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München IMPROVED COUNTERFIELD SPECTROMETER FOR ELECTRON BEAM MEASUREMENT TECHNOLOGY
DE3206309A1 (en) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION
JPS5932145A (en) * 1982-08-16 1984-02-21 Hitachi Ltd Potential detector
DE3232671A1 (en) * 1982-09-02 1984-03-08 Siemens AG, 1000 Berlin und 8000 München ARRANGEMENT AND METHOD FOR MEASURING VOLTAGE ON A CURVED MEASURING OBJECT
DE3235100A1 (en) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München METHOD FOR MEASURING ELECTRICAL POTENTIALS AT BURNED SOLID MATERIAL
DE3235484A1 (en) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München METHOD FOR SUPPRESSING A MALFUNCTION IN THE MEASUREMENT OF SIGNAL FLOWS WITH A BODY PROBE AND DEVICE FOR PERFORMING SUCH A METHOD
GB8515250D0 (en) * 1985-06-17 1985-07-17 Texas Instruments Ltd Testing of integrated circuits
US4943769A (en) 1989-03-21 1990-07-24 International Business Machines Corporation Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
JP2973554B2 (en) * 1991-03-19 1999-11-08 富士通株式会社 Voltage measurement method using electron beam device
DE112017007822B4 (en) 2017-09-29 2023-06-01 Hitachi High-Technologies Corporation SCANNING ELECTRON MICROSCOPE

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus
GB1277303A (en) * 1969-09-16 1972-06-14 Gen Electric Method and apparatus for testing circuits with an electron beam

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF PHYSICS E: SCIENTIFIC INSTRUMENTS=1974 *

Also Published As

Publication number Publication date
DE2823642A1 (en) 1980-01-03
GB2021789A (en) 1979-12-05
NL7904226A (en) 1979-12-04
GB2021789B (en) 1982-07-07

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