JPS54127690A - Semiconductor pressure converter and its manufacture - Google Patents
Semiconductor pressure converter and its manufactureInfo
- Publication number
- JPS54127690A JPS54127690A JP3623578A JP3623578A JPS54127690A JP S54127690 A JPS54127690 A JP S54127690A JP 3623578 A JP3623578 A JP 3623578A JP 3623578 A JP3623578 A JP 3623578A JP S54127690 A JPS54127690 A JP S54127690A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- pressure converter
- semiconductor pressure
- manufacture
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
PURPOSE: To realize a semiconductor pressure converter as well as its manufacturing process in which the output dispersion is reduced with increased output itself by forming the part for the pressure receiving plate and the part for the fixing stage independently and then bonding then together.
CONSTITUTION: Resistance element 13 and conducting layer 14 are formed on one surface of silicon wafer 101, and then silicon wafer 102 is prepared on fixing stage 12a with pierced hole 18 drilled. Thus, stage 12a is formed to be bonded with adhesive 17. Then the etching is applied to the surface opposite to the adhesion surface of wafer 101 to secure the thickness required for pressure receiving plate 11a. As a result, layer 14 is exposed over the surface, and then electrode layer 15 is formed on the exposed surface of layer 14.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3623578A JPS54127690A (en) | 1978-03-28 | 1978-03-28 | Semiconductor pressure converter and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3623578A JPS54127690A (en) | 1978-03-28 | 1978-03-28 | Semiconductor pressure converter and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54127690A true JPS54127690A (en) | 1979-10-03 |
Family
ID=12464102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3623578A Pending JPS54127690A (en) | 1978-03-28 | 1978-03-28 | Semiconductor pressure converter and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54127690A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5828876A (en) * | 1981-08-12 | 1983-02-19 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
US4975390A (en) * | 1986-12-18 | 1990-12-04 | Nippondenso Co. Ltd. | Method of fabricating a semiconductor pressure sensor |
-
1978
- 1978-03-28 JP JP3623578A patent/JPS54127690A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5828876A (en) * | 1981-08-12 | 1983-02-19 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
US4975390A (en) * | 1986-12-18 | 1990-12-04 | Nippondenso Co. Ltd. | Method of fabricating a semiconductor pressure sensor |
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