JPS54122971A - Scanning electronic microscope - Google Patents
Scanning electronic microscopeInfo
- Publication number
- JPS54122971A JPS54122971A JP3014278A JP3014278A JPS54122971A JP S54122971 A JPS54122971 A JP S54122971A JP 3014278 A JP3014278 A JP 3014278A JP 3014278 A JP3014278 A JP 3014278A JP S54122971 A JPS54122971 A JP S54122971A
- Authority
- JP
- Japan
- Prior art keywords
- displayed
- crt
- scanning
- image
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To establish the scanning electronic microscope which can set only the desired part of the scanning picture of CRT to the contrast and luminance suitable for picture pick up.
CONSTITUTION: With the switch 13 off, the deflection coils 5, 11 are started 6 and the scanning image of the test piece 4 is displayed on the CRT 10. The switch 13 is closed by finding the sight, luminance modulation 9 is made by detecting and setting 12 the scanning signal level, and the profile 10b representing the selective area is displayed on the CRT screen or the region 10a which can be distincted from others is displayed. The setting 12 is made manually, which can arbitrarily select and make variable the size and position. when selection is made so that the test piece image A is included, only the image signal corresponding to the area is gated 15 and the waveform B is displayed on the exposure meter 16. When the waveform B is observed and the amplifier 8 is adjusted so that it is contained between the upper and lower limit CD, only the selected area is displayed on CRT with optimum exposure.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3014278A JPS5827621B2 (en) | 1978-03-16 | 1978-03-16 | scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3014278A JPS5827621B2 (en) | 1978-03-16 | 1978-03-16 | scanning electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54122971A true JPS54122971A (en) | 1979-09-22 |
JPS5827621B2 JPS5827621B2 (en) | 1983-06-10 |
Family
ID=12295509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3014278A Expired JPS5827621B2 (en) | 1978-03-16 | 1978-03-16 | scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5827621B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5783658U (en) * | 1980-11-10 | 1982-05-24 | ||
EP1632980A2 (en) * | 2004-09-03 | 2006-03-08 | Carl Zeiss SMT Limited | Scanning particle beam instrument |
-
1978
- 1978-03-16 JP JP3014278A patent/JPS5827621B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5783658U (en) * | 1980-11-10 | 1982-05-24 | ||
EP1632980A2 (en) * | 2004-09-03 | 2006-03-08 | Carl Zeiss SMT Limited | Scanning particle beam instrument |
EP1632980B1 (en) * | 2004-09-03 | 2012-01-18 | Carl Zeiss NTS Limited | Scanning particle beam instrument |
Also Published As
Publication number | Publication date |
---|---|
JPS5827621B2 (en) | 1983-06-10 |
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