JPS54122971A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS54122971A
JPS54122971A JP3014278A JP3014278A JPS54122971A JP S54122971 A JPS54122971 A JP S54122971A JP 3014278 A JP3014278 A JP 3014278A JP 3014278 A JP3014278 A JP 3014278A JP S54122971 A JPS54122971 A JP S54122971A
Authority
JP
Japan
Prior art keywords
displayed
crt
scanning
image
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3014278A
Other languages
Japanese (ja)
Other versions
JPS5827621B2 (en
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3014278A priority Critical patent/JPS5827621B2/en
Publication of JPS54122971A publication Critical patent/JPS54122971A/en
Publication of JPS5827621B2 publication Critical patent/JPS5827621B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To establish the scanning electronic microscope which can set only the desired part of the scanning picture of CRT to the contrast and luminance suitable for picture pick up.
CONSTITUTION: With the switch 13 off, the deflection coils 5, 11 are started 6 and the scanning image of the test piece 4 is displayed on the CRT 10. The switch 13 is closed by finding the sight, luminance modulation 9 is made by detecting and setting 12 the scanning signal level, and the profile 10b representing the selective area is displayed on the CRT screen or the region 10a which can be distincted from others is displayed. The setting 12 is made manually, which can arbitrarily select and make variable the size and position. when selection is made so that the test piece image A is included, only the image signal corresponding to the area is gated 15 and the waveform B is displayed on the exposure meter 16. When the waveform B is observed and the amplifier 8 is adjusted so that it is contained between the upper and lower limit CD, only the selected area is displayed on CRT with optimum exposure.
COPYRIGHT: (C)1979,JPO&Japio
JP3014278A 1978-03-16 1978-03-16 scanning electron microscope Expired JPS5827621B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3014278A JPS5827621B2 (en) 1978-03-16 1978-03-16 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3014278A JPS5827621B2 (en) 1978-03-16 1978-03-16 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS54122971A true JPS54122971A (en) 1979-09-22
JPS5827621B2 JPS5827621B2 (en) 1983-06-10

Family

ID=12295509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3014278A Expired JPS5827621B2 (en) 1978-03-16 1978-03-16 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5827621B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5783658U (en) * 1980-11-10 1982-05-24
EP1632980A2 (en) * 2004-09-03 2006-03-08 Carl Zeiss SMT Limited Scanning particle beam instrument

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5783658U (en) * 1980-11-10 1982-05-24
EP1632980A2 (en) * 2004-09-03 2006-03-08 Carl Zeiss SMT Limited Scanning particle beam instrument
EP1632980B1 (en) * 2004-09-03 2012-01-18 Carl Zeiss NTS Limited Scanning particle beam instrument

Also Published As

Publication number Publication date
JPS5827621B2 (en) 1983-06-10

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