JPS5398096A - Production of thin film metal resistor - Google Patents

Production of thin film metal resistor

Info

Publication number
JPS5398096A
JPS5398096A JP1340277A JP1340277A JPS5398096A JP S5398096 A JPS5398096 A JP S5398096A JP 1340277 A JP1340277 A JP 1340277A JP 1340277 A JP1340277 A JP 1340277A JP S5398096 A JPS5398096 A JP S5398096A
Authority
JP
Japan
Prior art keywords
thin film
production
metal resistor
film metal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1340277A
Other languages
Japanese (ja)
Inventor
Kiyohiko Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1340277A priority Critical patent/JPS5398096A/en
Publication of JPS5398096A publication Critical patent/JPS5398096A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography

Abstract

PURPOSE:To obtain a thin film metal resistor of reduced size, high resistance high reliability by forming rough surface of a metal film resistor on a rough surface of an insulating substrate, forming a protective film further thereon and then partially turnign the protective film into ashes and etching the resistance film.
JP1340277A 1977-02-08 1977-02-08 Production of thin film metal resistor Pending JPS5398096A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1340277A JPS5398096A (en) 1977-02-08 1977-02-08 Production of thin film metal resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1340277A JPS5398096A (en) 1977-02-08 1977-02-08 Production of thin film metal resistor

Publications (1)

Publication Number Publication Date
JPS5398096A true JPS5398096A (en) 1978-08-26

Family

ID=11832120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1340277A Pending JPS5398096A (en) 1977-02-08 1977-02-08 Production of thin film metal resistor

Country Status (1)

Country Link
JP (1) JPS5398096A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167602A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Method of etching cermet film
JPS6354800A (en) * 1986-08-25 1988-03-09 日本シイエムケイ株式会社 Manufacture of multilayer printed interconnection board
JPS6457695A (en) * 1987-08-27 1989-03-03 Nec Corp Hybrid integrated circuit
JPH0242402U (en) * 1988-09-19 1990-03-23
US7952154B2 (en) 2005-05-03 2011-05-31 Rosemount Aerospace Inc. High temperature resistant solid state pressure sensor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167602A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Method of etching cermet film
JPS6329808B2 (en) * 1981-04-07 1988-06-15 Mitsubishi Electric Corp
JPS6354800A (en) * 1986-08-25 1988-03-09 日本シイエムケイ株式会社 Manufacture of multilayer printed interconnection board
JPH0366831B2 (en) * 1986-08-25 1991-10-18 Nippon Cmk Kk
JPS6457695A (en) * 1987-08-27 1989-03-03 Nec Corp Hybrid integrated circuit
JPH0242402U (en) * 1988-09-19 1990-03-23
US7952154B2 (en) 2005-05-03 2011-05-31 Rosemount Aerospace Inc. High temperature resistant solid state pressure sensor
US8013405B2 (en) 2005-05-03 2011-09-06 Rosemount Aerospsace Inc. Transducer with fluidly isolated connection
US8460961B2 (en) 2005-05-03 2013-06-11 Rosemount Aerospace Inc. Method for forming a transducer

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