JPS5368079A - Short channel mos transistor and method of producing same - Google Patents

Short channel mos transistor and method of producing same

Info

Publication number
JPS5368079A
JPS5368079A JP14291776A JP14291776A JPS5368079A JP S5368079 A JPS5368079 A JP S5368079A JP 14291776 A JP14291776 A JP 14291776A JP 14291776 A JP14291776 A JP 14291776A JP S5368079 A JPS5368079 A JP S5368079A
Authority
JP
Japan
Prior art keywords
mos transistor
channel mos
short channel
producing same
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14291776A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP14291776A priority Critical patent/JPS5368079A/en
Publication of JPS5368079A publication Critical patent/JPS5368079A/en
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP14291776A 1976-11-30 1976-11-30 Short channel mos transistor and method of producing same Pending JPS5368079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14291776A JPS5368079A (en) 1976-11-30 1976-11-30 Short channel mos transistor and method of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14291776A JPS5368079A (en) 1976-11-30 1976-11-30 Short channel mos transistor and method of producing same

Publications (1)

Publication Number Publication Date
JPS5368079A true JPS5368079A (en) 1978-06-17

Family

ID=15326618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14291776A Pending JPS5368079A (en) 1976-11-30 1976-11-30 Short channel mos transistor and method of producing same

Country Status (1)

Country Link
JP (1) JPS5368079A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119686A (en) * 1977-03-29 1978-10-19 Agency Of Ind Science & Technol Production of semiconductor device
JPS5435682A (en) * 1977-08-26 1979-03-15 Agency Of Ind Science & Technol Manufacture of field effect transistor
JPS559477A (en) * 1978-07-06 1980-01-23 Nec Corp Method of making semiconductor device
JPS5630765A (en) * 1979-08-20 1981-03-27 Ibm Method of manufacturing insulated gate type transistor
JPS5961185A (en) * 1982-09-30 1984-04-07 Fujitsu Ltd Manufacture of metal insulator semiconductor field-effect semiconductor device
JPH02291173A (en) * 1989-04-28 1990-11-30 Nec Corp Manufacture of mos transistor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119686A (en) * 1977-03-29 1978-10-19 Agency Of Ind Science & Technol Production of semiconductor device
JPS6032992B2 (en) * 1977-03-29 1985-07-31 工業技術院長 Manufacturing method of semiconductor device
JPS5435682A (en) * 1977-08-26 1979-03-15 Agency Of Ind Science & Technol Manufacture of field effect transistor
JPS559477A (en) * 1978-07-06 1980-01-23 Nec Corp Method of making semiconductor device
JPS5630765A (en) * 1979-08-20 1981-03-27 Ibm Method of manufacturing insulated gate type transistor
JPS5961185A (en) * 1982-09-30 1984-04-07 Fujitsu Ltd Manufacture of metal insulator semiconductor field-effect semiconductor device
JPH02291173A (en) * 1989-04-28 1990-11-30 Nec Corp Manufacture of mos transistor

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