JPS5339060A - Lot number marking method to wafers - Google Patents

Lot number marking method to wafers

Info

Publication number
JPS5339060A
JPS5339060A JP11314776A JP11314776A JPS5339060A JP S5339060 A JPS5339060 A JP S5339060A JP 11314776 A JP11314776 A JP 11314776A JP 11314776 A JP11314776 A JP 11314776A JP S5339060 A JPS5339060 A JP S5339060A
Authority
JP
Japan
Prior art keywords
lot number
wafer
wafers
marking method
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11314776A
Other languages
Japanese (ja)
Inventor
Ichiro Takei
Kousuke Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11314776A priority Critical patent/JPS5339060A/en
Publication of JPS5339060A publication Critical patent/JPS5339060A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54493—Peripheral marks on wafers, e.g. orientation flats, notches, lot number

Abstract

PURPOSE: To make wafer creaking less as compared to mechanical numbering by marking a lot number on the material to be shielded of ultraviolet rays, bonding this to a glass mask, superposing the mask on a wafer coated with photoresist. exposing and developing the mask, thereafter etching the wafer leaving the lot number on the wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP11314776A 1976-09-22 1976-09-22 Lot number marking method to wafers Pending JPS5339060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11314776A JPS5339060A (en) 1976-09-22 1976-09-22 Lot number marking method to wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11314776A JPS5339060A (en) 1976-09-22 1976-09-22 Lot number marking method to wafers

Publications (1)

Publication Number Publication Date
JPS5339060A true JPS5339060A (en) 1978-04-10

Family

ID=14604749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11314776A Pending JPS5339060A (en) 1976-09-22 1976-09-22 Lot number marking method to wafers

Country Status (1)

Country Link
JP (1) JPS5339060A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115325A (en) * 1979-02-28 1980-09-05 Chiyou Lsi Gijutsu Kenkyu Kumiai Numbering method of semiconductor wafer
JPS5746106U (en) * 1980-09-01 1982-03-13
JPS57167619A (en) * 1980-09-08 1982-10-15 Fujitsu Ltd Number indication of semiconductor substrate
JPS61263117A (en) * 1985-05-16 1986-11-21 Rohm Co Ltd Mask plate for manufacturing semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912790A (en) * 1972-05-12 1974-02-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912790A (en) * 1972-05-12 1974-02-04

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115325A (en) * 1979-02-28 1980-09-05 Chiyou Lsi Gijutsu Kenkyu Kumiai Numbering method of semiconductor wafer
JPS6138848B2 (en) * 1979-02-28 1986-09-01 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS5746106U (en) * 1980-09-01 1982-03-13
JPS6011285Y2 (en) * 1980-09-01 1985-04-15 トヨタ自動車株式会社 Stroke end detection device for piston in cylinder
JPS57167619A (en) * 1980-09-08 1982-10-15 Fujitsu Ltd Number indication of semiconductor substrate
JPS6326535B2 (en) * 1980-09-08 1988-05-30 Fujitsu Ltd
JPS61263117A (en) * 1985-05-16 1986-11-21 Rohm Co Ltd Mask plate for manufacturing semiconductor device

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