JPS5320863A - Defect correcting method of photo masks and reticles - Google Patents
Defect correcting method of photo masks and reticlesInfo
- Publication number
- JPS5320863A JPS5320863A JP9483876A JP9483876A JPS5320863A JP S5320863 A JPS5320863 A JP S5320863A JP 9483876 A JP9483876 A JP 9483876A JP 9483876 A JP9483876 A JP 9483876A JP S5320863 A JPS5320863 A JP S5320863A
- Authority
- JP
- Japan
- Prior art keywords
- reticles
- correcting method
- defect correcting
- photo masks
- dropout parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To additively forming images at dropout parts in a self-alignment manner and perofrm correction by coating a photographic emulsion to the regions including the dropout parts and performing exposing and developing treatment from the back.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9483876A JPS5320863A (en) | 1976-08-11 | 1976-08-11 | Defect correcting method of photo masks and reticles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9483876A JPS5320863A (en) | 1976-08-11 | 1976-08-11 | Defect correcting method of photo masks and reticles |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320863A true JPS5320863A (en) | 1978-02-25 |
Family
ID=14121174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9483876A Pending JPS5320863A (en) | 1976-08-11 | 1976-08-11 | Defect correcting method of photo masks and reticles |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320863A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57165832A (en) * | 1981-03-16 | 1982-10-13 | Monosoraa Inc | Thin film |
JPS6046556A (en) * | 1983-08-24 | 1985-03-13 | Hoya Corp | Manufacture of photomask |
JPS60245135A (en) * | 1984-05-18 | 1985-12-04 | Matsushita Electric Ind Co Ltd | Correcting method for photomask |
-
1976
- 1976-08-11 JP JP9483876A patent/JPS5320863A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57165832A (en) * | 1981-03-16 | 1982-10-13 | Monosoraa Inc | Thin film |
JPS6046556A (en) * | 1983-08-24 | 1985-03-13 | Hoya Corp | Manufacture of photomask |
JPS60245135A (en) * | 1984-05-18 | 1985-12-04 | Matsushita Electric Ind Co Ltd | Correcting method for photomask |
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