JPS53145475A - Position detector - Google Patents

Position detector

Info

Publication number
JPS53145475A
JPS53145475A JP6005277A JP6005277A JPS53145475A JP S53145475 A JPS53145475 A JP S53145475A JP 6005277 A JP6005277 A JP 6005277A JP 6005277 A JP6005277 A JP 6005277A JP S53145475 A JPS53145475 A JP S53145475A
Authority
JP
Japan
Prior art keywords
position detector
detecting
base
precison
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6005277A
Other languages
Japanese (ja)
Inventor
Tadanori Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6005277A priority Critical patent/JPS53145475A/en
Publication of JPS53145475A publication Critical patent/JPS53145475A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To control beam exposure and perform precison patterning by detecting base positions and also detecting the displacement of the posture of the base.
COPYRIGHT: (C)1978,JPO&Japio
JP6005277A 1977-05-24 1977-05-24 Position detector Pending JPS53145475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6005277A JPS53145475A (en) 1977-05-24 1977-05-24 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6005277A JPS53145475A (en) 1977-05-24 1977-05-24 Position detector

Publications (1)

Publication Number Publication Date
JPS53145475A true JPS53145475A (en) 1978-12-18

Family

ID=13130919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6005277A Pending JPS53145475A (en) 1977-05-24 1977-05-24 Position detector

Country Status (1)

Country Link
JP (1) JPS53145475A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645025A (en) * 1979-09-21 1981-04-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam lithography apparatus
JP2001290281A (en) * 2000-03-08 2001-10-19 Leica Microsystems Lithography Gmbh Method and device for constituting curved line drawing on photosensitive resist
US7025498B2 (en) * 2003-05-30 2006-04-11 Asml Holding N.V. System and method of measuring thermal expansion

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645025A (en) * 1979-09-21 1981-04-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam lithography apparatus
JP2001290281A (en) * 2000-03-08 2001-10-19 Leica Microsystems Lithography Gmbh Method and device for constituting curved line drawing on photosensitive resist
US7025498B2 (en) * 2003-05-30 2006-04-11 Asml Holding N.V. System and method of measuring thermal expansion

Similar Documents

Publication Publication Date Title
JPS53132213A (en) Tracking control unit
JPS53145475A (en) Position detector
JPS527095A (en) Laser work device
JPS53141879A (en) Moving direction controller of moving body
JPS52134931A (en) Air-to-fuel ratio feedback system
JPS5437790A (en) Speed detector
JPS53120528A (en) Positive type radiation sensitive material
JPS5375768A (en) Size check pattern
JPS5326514A (en) Position adjusting unit
JPS5357737A (en) Magnetic control circuit
JPS528877A (en) Object detector unit
JPS5434091A (en) Constructing device for long material with offset
JPS522118A (en) Focus contrl unit
JPS5376283A (en) Stopping control of moving body
JPS5398863A (en) Position detector
JPS53141031A (en) Camera having focusing-state detecting element
JPS51145352A (en) Tilt detector
JPS53121767A (en) Funiculosin derivatives
JPS5287583A (en) Position control apparatus
JPS53141618A (en) Visibility controller for camera
JPS53101279A (en) Electron beam exposure device
JPS53147552A (en) Spot light state detector
JPS537046A (en) Mechanism for adjusting height of elevator
JPS5411680A (en) Exposure unit of electron beam
JPS5427693A (en) Failsafe mechanism for anti-skyd control device