JPS5289540A - Etching gaseous mixture - Google Patents
Etching gaseous mixtureInfo
- Publication number
- JPS5289540A JPS5289540A JP629476A JP629476A JPS5289540A JP S5289540 A JPS5289540 A JP S5289540A JP 629476 A JP629476 A JP 629476A JP 629476 A JP629476 A JP 629476A JP S5289540 A JPS5289540 A JP S5289540A
- Authority
- JP
- Japan
- Prior art keywords
- gaseous mixture
- etching gaseous
- etching
- mixture
- gaseous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP629476A JPS5289540A (en) | 1976-01-21 | 1976-01-21 | Etching gaseous mixture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP629476A JPS5289540A (en) | 1976-01-21 | 1976-01-21 | Etching gaseous mixture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5289540A true JPS5289540A (en) | 1977-07-27 |
JPS5636704B2 JPS5636704B2 (en) | 1981-08-26 |
Family
ID=11634347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP629476A Granted JPS5289540A (en) | 1976-01-21 | 1976-01-21 | Etching gaseous mixture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5289540A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2486716A1 (en) * | 1980-07-11 | 1982-01-15 | Philips Nv | METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE |
FR2486715A1 (en) * | 1980-07-11 | 1982-01-15 | Philips Nv | METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE |
EP0123813A2 (en) * | 1983-03-08 | 1984-11-07 | Kabushiki Kaisha Toshiba | Dry etching method for organic material layers |
-
1976
- 1976-01-21 JP JP629476A patent/JPS5289540A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2486716A1 (en) * | 1980-07-11 | 1982-01-15 | Philips Nv | METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE |
FR2486715A1 (en) * | 1980-07-11 | 1982-01-15 | Philips Nv | METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE |
JPS5752136A (en) * | 1980-07-11 | 1982-03-27 | Philips Nv | Method of producing semiconductor device |
JPH0237091B2 (en) * | 1980-07-11 | 1990-08-22 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
EP0123813A2 (en) * | 1983-03-08 | 1984-11-07 | Kabushiki Kaisha Toshiba | Dry etching method for organic material layers |
Also Published As
Publication number | Publication date |
---|---|
JPS5636704B2 (en) | 1981-08-26 |
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