JPS526380A - Abrasion resistant thin film - Google Patents

Abrasion resistant thin film

Info

Publication number
JPS526380A
JPS526380A JP50083808A JP8380875A JPS526380A JP S526380 A JPS526380 A JP S526380A JP 50083808 A JP50083808 A JP 50083808A JP 8380875 A JP8380875 A JP 8380875A JP S526380 A JPS526380 A JP S526380A
Authority
JP
Japan
Prior art keywords
thin film
abrasion resistant
resistant thin
substrate
film made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50083808A
Other languages
Japanese (ja)
Other versions
JPS5823468B2 (en
Inventor
Keizaburo Kuramasu
Hiroshi Otani
Fujio Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50083808A priority Critical patent/JPS5823468B2/en
Publication of JPS526380A publication Critical patent/JPS526380A/en
Publication of JPS5823468B2 publication Critical patent/JPS5823468B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electronic Switches (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PURPOSE:An abrasion resistant thin film made of mixed materials, which firmly adheres on the surface of substrate, is obtained.
JP50083808A 1975-07-07 1975-07-07 Method for manufacturing wear-resistant thin film Expired JPS5823468B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50083808A JPS5823468B2 (en) 1975-07-07 1975-07-07 Method for manufacturing wear-resistant thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50083808A JPS5823468B2 (en) 1975-07-07 1975-07-07 Method for manufacturing wear-resistant thin film

Publications (2)

Publication Number Publication Date
JPS526380A true JPS526380A (en) 1977-01-18
JPS5823468B2 JPS5823468B2 (en) 1983-05-16

Family

ID=13812953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50083808A Expired JPS5823468B2 (en) 1975-07-07 1975-07-07 Method for manufacturing wear-resistant thin film

Country Status (1)

Country Link
JP (1) JPS5823468B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method
JPS57102374A (en) * 1980-12-18 1982-06-25 Ricoh Co Ltd Thermal head
JPS5968863A (en) * 1982-10-08 1984-04-18 Canon Inc Magnetic tape guide
JPH01123068A (en) * 1987-11-06 1989-05-16 Nippon Kentetsu Co Ltd Formation of thin film on substrate surface

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4738189U (en) * 1971-05-14 1972-12-27
JPS4959046A (en) * 1972-10-12 1974-06-07
JPS5014237A (en) * 1973-04-23 1975-02-14
JPS50113648A (en) * 1974-02-22 1975-09-05

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4738189U (en) * 1971-05-14 1972-12-27
JPS4959046A (en) * 1972-10-12 1974-06-07
JPS5014237A (en) * 1973-04-23 1975-02-14
JPS50113648A (en) * 1974-02-22 1975-09-05

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method
JPS57102374A (en) * 1980-12-18 1982-06-25 Ricoh Co Ltd Thermal head
JPH0143633B2 (en) * 1980-12-18 1989-09-21 Ricoh Kk
JPS5968863A (en) * 1982-10-08 1984-04-18 Canon Inc Magnetic tape guide
JPH01123068A (en) * 1987-11-06 1989-05-16 Nippon Kentetsu Co Ltd Formation of thin film on substrate surface

Also Published As

Publication number Publication date
JPS5823468B2 (en) 1983-05-16

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