JPS5260279A - Substrate cooling apparatus in vacuum evaporation machine, etc. - Google Patents

Substrate cooling apparatus in vacuum evaporation machine, etc.

Info

Publication number
JPS5260279A
JPS5260279A JP13683175A JP13683175A JPS5260279A JP S5260279 A JPS5260279 A JP S5260279A JP 13683175 A JP13683175 A JP 13683175A JP 13683175 A JP13683175 A JP 13683175A JP S5260279 A JPS5260279 A JP S5260279A
Authority
JP
Japan
Prior art keywords
vacuum evaporation
cooling apparatus
substrate cooling
evaporation machine
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13683175A
Other languages
Japanese (ja)
Inventor
Eiki Okamoto
Yoshikane Ida
Satoru Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP13683175A priority Critical patent/JPS5260279A/en
Publication of JPS5260279A publication Critical patent/JPS5260279A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To rapidly and uniformly cool a substrate of a vacuum evaporation machine, etc. in order to make the machine, etc. shorter.
JP13683175A 1975-11-13 1975-11-13 Substrate cooling apparatus in vacuum evaporation machine, etc. Pending JPS5260279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13683175A JPS5260279A (en) 1975-11-13 1975-11-13 Substrate cooling apparatus in vacuum evaporation machine, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13683175A JPS5260279A (en) 1975-11-13 1975-11-13 Substrate cooling apparatus in vacuum evaporation machine, etc.

Publications (1)

Publication Number Publication Date
JPS5260279A true JPS5260279A (en) 1977-05-18

Family

ID=15184512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13683175A Pending JPS5260279A (en) 1975-11-13 1975-11-13 Substrate cooling apparatus in vacuum evaporation machine, etc.

Country Status (1)

Country Link
JP (1) JPS5260279A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2420588A1 (en) * 2010-08-16 2012-02-22 Applied Materials, Inc. Thermal management of film deposition processes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2420588A1 (en) * 2010-08-16 2012-02-22 Applied Materials, Inc. Thermal management of film deposition processes
US8709158B2 (en) 2010-08-16 2014-04-29 Applied Materials, Inc. Thermal management of film deposition processes

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