Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP10697275ApriorityCriticalpatent/JPS5231666A/en
Publication of JPS5231666ApublicationCriticalpatent/JPS5231666A/en
PURPOSE: To obtain a good quality crystal, by means of growing the vapor phase by accomodating the solid solution of source material and the material to dope with, and source materials in other chamber.
COPYRIGHT: (C)1977,JPO&Japio
JP10697275A1975-09-051975-09-05Source container for capor phase growing
PendingJPS5231666A
(en)