JPS4918568A - - Google Patents
Info
- Publication number
- JPS4918568A JPS4918568A JP5873672A JP5873672A JPS4918568A JP S4918568 A JPS4918568 A JP S4918568A JP 5873672 A JP5873672 A JP 5873672A JP 5873672 A JP5873672 A JP 5873672A JP S4918568 A JPS4918568 A JP S4918568A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5873672A JPS542065B2 (en) | 1972-06-13 | 1972-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5873672A JPS542065B2 (en) | 1972-06-13 | 1972-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4918568A true JPS4918568A (en) | 1974-02-19 |
| JPS542065B2 JPS542065B2 (en) | 1979-02-01 |
Family
ID=13092782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5873672A Expired JPS542065B2 (en) | 1972-06-13 | 1972-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS542065B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51135463A (en) * | 1975-05-20 | 1976-11-24 | Matsushita Electric Ind Co Ltd | Impurity diffusion system |
-
1972
- 1972-06-13 JP JP5873672A patent/JPS542065B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51135463A (en) * | 1975-05-20 | 1976-11-24 | Matsushita Electric Ind Co Ltd | Impurity diffusion system |
| JPS547676B2 (en) * | 1975-05-20 | 1979-04-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS542065B2 (en) | 1979-02-01 |