JPH11327888A - Semiconductor exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To evade unnecessary reinstallation and the deletion and misalteration of necessary programs and files by automatically recording alteration contents of software as a history when the software is restored or when a function is added to the soft ware. SOLUTION: A history file group 301 is a history of what alteration and function addition are performed and stored in an auxiliary storage device 112. On media 302, software etc., used for the restoration and function addition is retained and when the history file on the media 302 is copied to the auxiliary storage device 112, it is checked whether or not there is the same history file in the history file group 301 to judge whether the process is carried on. On media 303, software etc., used for revision is retained and the history file group which already corresponds thereto is compared with the history file group 301 in the auxiliary storage device 112 to display trouble restoration and function addition to disappear as a result of the revision. A display means 304 displays the history file group 301 in the auxiliary storage device 112.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an information processing apparatus for controlling a semiconductor exposure apparatus by software, a semiconductor exposure apparatus having the information processing apparatus, and a device manufacturing method using the apparatus.

[0002]

2. Description of the Related Art A huge number of programs for controlling an apparatus are installed in a semiconductor exposure apparatus. If there is a problem in the program, a repair tool (patch program) for repairing the problem is applied to the device to rewrite the program and to repair the environment of files, databases, and the like. Also, when a special function is added for each user, the tool is similarly applied to the apparatus and the program and the environment are rewritten. FIG. 2 is a schematic diagram for explaining an application form of a tool in such a conventional semiconductor exposure apparatus.

A program and data for controlling a semiconductor exposure apparatus are installed in an auxiliary storage device 201. If there is a problem with the current program and data,
The tool 202 for repairing a defect is stored in a floppy disk (FD) or a magneto-optical disk (MO) medium and executed via an external storage device to repair a defect in the auxiliary storage device 201. Similarly, when adding individual features,
The function addition tool 203 is executed to add programs and data to the auxiliary storage device 201.

[0004] In addition, a version upgrade in which all programs in the auxiliary storage device 201 are rewritten to a new program is performed by executing a version upgrade tool 204 in a similar manner. At that time, defects that have not been repaired by the new version of the program are individually repaired by a repair tool.

[0005]

However, such a conventional method has the following problems. That is, when some tools are applied to the device, the following problems can be solved on the auxiliary storage device 201:-what kind of defect is repaired;-what kind of function is added; Changed or added,
Was difficult to find easily.

In addition, when functions that are not added even in a new version of a program are individually added by a function addition tool, it is difficult to determine whether the restoration and addition of the functions disappear after the version upgrade. there were.

[0007] Therefore, there are problems such as re-applying the applied tool or changing a program or a file which should not be changed when upgrading the version.

In order to avoid such a problem, it is necessary to keep a record of the tool application history and the like for each device at all times. However, program management becomes complicated, and the above problem is caused by forgetting to record. Could have occurred.

SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the prior art described above, improve the efficiency of program management in a semiconductor exposure apparatus, and eliminate unnecessary re-installation and necessary programs.
An object of the present invention is to provide a device manufacturing method, a semiconductor exposure apparatus, and an information processing apparatus capable of avoiding file deletion and change mistakes.

[0010]

In order to achieve the above object, an information processing apparatus according to the present invention controls a semiconductor exposure apparatus by software, and can individually repair software malfunctions or add functions through an external storage medium. The information processing apparatus is characterized in that, when software is repaired or a function is added, means for automatically recording the change as a history is provided.

Further, the semiconductor exposure apparatus of the present invention is an exposure apparatus capable of restoring or adding software for controlling the semiconductor exposure apparatus through an external storage medium, and automatically records changes of the software as a history. It is characterized by having means for performing.

Here, the history of changes recorded in the apparatus is used to determine whether or not to execute an installation program for repairing or adding functions when, for example, repairing software or adding functions through an external storage medium. Therefore, the information is compared with information on the external storage medium indicating the content to be changed.

The information to be compared includes, for example, a description of a function to be installed and a management number of a file to be modified and / or added to realize the function.

[0014] The determination as to whether or not execution may be made may be such that if the same function as the function to be installed has already been installed, it is determined that the installation program is not to be executed. If another function is deleted by overwriting a file to be corrected and / or added, it may be determined not to execute the installation program.

In the case of a version upgrade in which a plurality or all of the software is updated simultaneously through an external storage medium, the information on the storage medium indicating the function supported by the new version is compared with the history on the apparatus. Judgment of the function that disappears after version upgrade
It may be displayed. After all the software on the device is updated by this version upgrade, the history may be initialized so that the individual functions are not added in the current version. Further, the apparatus of the present invention may have a means for displaying a history as needed in order for the operator to manage the changed contents.

A device manufacturing method according to the present invention is a method for manufacturing a semiconductor device using the above-described exposure apparatus according to the present invention. When repairing a defect occurring in software or adding a function, the contents of the change are removed. It is characterized by having a step of automatically recording as a history.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of an exposure apparatus that best illustrates the features of the present invention. In FIG. 1, reference numeral 101 denotes a main body CPU for controlling the entire apparatus, which is constituted by a central processing unit such as a microcomputer or a minicomputer. Reference numeral 102 denotes a wafer stage driving device, 103 denotes an alignment detection system such as an off-axis microscope, 104 denotes a reticle stage driving device, 105 denotes an illumination system such as a light source device, 106 denotes a shutter driving device, 107 denotes a focus detection system, and 108 denotes Z driving. These devices are controlled by the main body CPU 101. Reference numeral 109 denotes a transfer system such as a reticle transfer device and a wafer transfer device. 110 is a console CPU 111, auxiliary storage device 112, display 113, keyboard 1
14. A console unit having an external storage device 115 for giving various commands and parameters relating to the operation of the exposure apparatus to the main body CPU 101. That is, the console unit 110 is for exchanging information with the operator.

The auxiliary storage device 112 is, for example, an HDD (hard disk drive), in which a database is constructed, and various parameters and their management data are recorded. The external storage device 115 may be an FDD (floppy disk drive) or a MOD (magneto-optical disk drive).

In the present invention, the program and the data are read from the external storage device 115 and stored in the medium and stored in the auxiliary storage device 112.

The processing for updating and adding software such as a control program of the semiconductor exposure apparatus in the present embodiment is executed in the console unit 110 shown in FIG.

FIG. 3 is a diagram for briefly explaining the configuration and operation of the information processing apparatus according to the present embodiment.

In FIG. 2, reference numeral 301 denotes a history of what kind of restoration and function addition has been performed, and a means for storing the history 301 is provided in the auxiliary storage device 112.
Numeral 302 denotes a unit (media) for storing software and the like used for restoration and addition of functions. In addition to the installation program 401 shown in FIG. 4 and the history file 402 showing the function contents of each tool, the installation program 401 Means for copying the history file 402 to the auxiliary storage device 112 at the time of execution of the check, and checking whether the same history file as the history file 402 in the medium exists in the history file group 301 in the auxiliary device 112 at the time of execution Is stored. Reference numeral 303 denotes a unit (media) for storing software and the like used for the version upgrade, and includes an installation program 701 shown in FIG. 7 and a history file group 702 of defect repair and function addition already supported by this version. Means are provided for comparing the history file group 702 with the history file group 301 in the auxiliary device 112 and displaying a repair of a defect and a function addition which disappear by the version upgrade. Reference numeral 304 denotes a unit that displays the history file group 301 in the auxiliary device 112. The exposure apparatus of this embodiment solves the conventional problem by providing the above-described means.

FIG. 4 shows a configuration 30 of a repair and function adding tool.
2 is shown. An installation program 401 shown in FIG. 5 has a function for realizing the functions of the repair and additional tools in the exposure apparatus. A history file 402 has a tool name, function contents and a function for realizing the functions as shown in FIG. It has information fields such as a modified file in which a management number of a file to be modified and added is recorded, an added file, and the like.

FIG. 6 is a processing flow of the installation program 401. In step S601, the media 302
The history file 402 above is compared with the history file group 301 existing on the auxiliary storage device 112, and step S602 is performed.
If the tool exists, it is determined that the tool has already been applied, and in step S606 the operator has been "already applied".
Is displayed and the processing is stopped. On the other hand, if the history file 402 does not exist on the auxiliary storage device 112, it is determined in step S602 that this tool has not been applied, and a repair or function addition process is performed in step S603. To copy the history file 402 on the medium 302 to the auxiliary storage device 112. Further, in step S605, the contents of the history file 402 are displayed to inform what kind of restoration and function addition has been performed.

FIG. 7 shows a software configuration stored in the medium 303. In FIG. 8, an installation program 701 has a function of realizing software upgrade in an exposure apparatus, and a history file group 702 is a group of history files of tools applied in this version as shown in FIG.

FIG. 9 is a diagram showing the structure of the history file group 301. In the figure, reference numeral 901 denotes the auxiliary storage device 11
2 is a storage area for storing the history file of the tool applied on the server 2, and may be, for example, a specific directory in which the history file is written.

FIG. 10 shows a version upgrade tool 204.
5 is a processing flow of the installation program 701 of FIG.
In step S1001, the version-up media 30
3 is compared with the history file group 301 on the auxiliary storage device 112. If all the history files 301 on the auxiliary storage device 112 are present in the medium 303, the current function disappears due to version upgrade. It is determined that they are not to be performed, and the installation process of step S1006 is executed.

If it is determined in step S1002 that there is a history file that does not exist in the medium on the auxiliary storage device, the function is lost due to the version upgrade. Therefore, in step S1003, a history file that only exists on the auxiliary storage device is stored. Then, in step S1004, the contents of the history file are displayed, and in step S1005, the process waits for an instruction to stop / continue processing by the operator.

If the processing has been canceled, the installation processing is terminated. If the processing is to be continued, the installation processing is performed in step S1006, the contents of the history file of the function lost in step S1007 are displayed, and the user is notified that the corresponding tool needs to be applied again.

In step S1008, by deleting all the history files on the auxiliary storage device and returning to the default state, it becomes information that the individual tool has not been applied after the version upgrade. After the processing is completed, the operator reinstalls the function displayed in step S1007 as appropriate.

FIG. 11 is a processing flow of the display means 304 of the history file group 301 on the auxiliary storage device 112.
In step S1101, it is checked whether or not a history file exists on the auxiliary storage device. If not, "No tool application" is displayed (step S1104), and the process ends. If a history file exists, step S110
2. In step S1103, all the history files are displayed, and the process ends.

Next, a method of manufacturing a device using the above-described exposure apparatus will be described. FIG. 12 shows a micro device (a semiconductor chip such as an IC or an LSI, a liquid crystal panel, a CC)
D, thin-film magnetic head, micromachine, etc.). In step S1 (circuit design), a circuit of a semiconductor device is designed. In step S2 (mask production), a mask on which the designed pattern is formed is produced. on the other hand,
In step S3 (wafer manufacture), a wafer is manufactured using a material such as silicon or glass. Step S4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step S5 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer produced in step S4, and includes processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). including. In step S6 (inspection), inspections such as an operation check test and a durability test of the semiconductor device manufactured in step S5 are performed. Through these steps, a semiconductor device is completed and shipped (step S7).

FIG. 13 shows a detailed flow of the wafer process. In step S11 (oxidation), the surface of the wafer is oxidized. In step S12 (CVD), an insulating film is formed on the wafer surface. In step S13 (electrode formation), electrodes are formed on the wafer by vapor deposition. Step S1
In step 4 (ion implantation), ions are implanted into the wafer. In step S15 (resist processing), a photosensitive agent is applied to the wafer. In step S16 (exposure), the circuit pattern of the mask is printed onto the wafer by exposure using an exposure apparatus having a means for confirming the suitability of the above-described exposure. Step S1
In step 7 (development), the exposed wafer is developed. Step S
In step 18 (etching), portions other than the developed resist image are removed. In step S19 (resist stripping), unnecessary resist after etching is removed. By repeating these steps S11 to S19, multiple circuit patterns are formed on the wafer.

In the present embodiment, in each of the repetitive processes, when the above-described trouble of the control program occurs, or when a function is added or a version is upgraded, it is possible to quickly cope with the problem. It is possible to manufacture a semiconductor device in an efficient manner.

[0035]

As described above, according to the present invention,
For each device, you can easily find out what defects have been repaired, what functions have been added, and what programs and files have been changed or added. Management efficiency is improved.

In addition, unnecessary re-installation can be avoided, and mistakes in deleting programs and files necessary for version upgrade can be avoided.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a semiconductor manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a diagram illustrating an outline of a conventional information processing apparatus.

FIG. 3 is a diagram illustrating an outline of an information processing apparatus according to an embodiment of the present invention.

FIG. 4 is a diagram showing a configuration of a failure repair and function addition tool.

FIG. 5 is a diagram showing a configuration of a history file of FIG. 4;

FIG. 6 is a flowchart illustrating a process of installing a fault repair and function addition tool.

FIG. 7 is a diagram showing a configuration of a version upgrade tool.

FIG. 8 is a diagram illustrating a storage state of a history file in a version-up medium.

FIG. 9 is a diagram showing a storage state of a history file on an auxiliary storage device.

FIG. 10 is a flowchart illustrating installation processing of a version upgrade tool.

FIG. 11 is a flowchart illustrating a display process of a history file on an auxiliary storage device.

FIG. 12 is a flowchart showing a manufacturing process of a micro device.

FIG. 13 is a detailed flowchart of the wafer process of FIG. 12;

[Explanation of symbols]

101: main body CPU, 102: wafer stage drive, 103: alignment detection system, 104: reticle stage drive, 105: illumination system, 106: shutter drive, 107: focus detection system, 108: Z drive, 109: Transport system, 110: console unit, 1
11: console CPU, 112: auxiliary storage device, 11
3: display, 114: keyboard, 115: external storage device, 202: repair tool, 203: function addition tool, 204: version upgrade tool, 301: history file group, 302: restoration, function storage tool storage medium, 303: version Uptool storage media, 3
04: display means, 401: installation program, 4
02: history file, 701: installation program, 702: history file group, 901: history file storage area.

Claims (10)

[Claims] An information processing apparatus for controlling a semiconductor exposure apparatus by software, wherein the information processing apparatus can individually repair or add functions of the software through an external storage medium. An information processing apparatus having means for automatically recording the contents of a change as a history when performing the change. 2. When the software is repaired or a function is added through the external storage medium, whether or not to execute an installation program for performing the repair or the function addition is determined by a change history recorded in the information processing apparatus. 2. The information processing apparatus according to claim 1, further comprising means for comparing and determining information on the external storage medium indicating the content to be changed. 3. The information according to claim 1, wherein the information indicating the changed content includes a description of a function to be installed and a management number of a file to be modified and / or added to realize the function. An information processing apparatus according to claim 1. 4. The method according to claim 2, wherein the determination as to whether or not execution is possible determines that the installation program is not to be executed when the same function as the function to be installed has already been installed. Information processing device. 5. The determination as to whether or not execution is possible is made not to execute the installation program when another function already introduced at the time of installation is deleted by overwriting the file to be corrected and / or added. The information processing apparatus according to claim 3, wherein 6. When updating a plurality of or all of the software via an external storage medium at the same time, comparing the history with information on the storage medium indicating a function supported by a new version. By determining the function that disappears after the version upgrade,
2. The apparatus according to claim 1, further comprising means for displaying the information.
6. The information processing device according to any one of claims 1 to 5. 7. The information processing apparatus according to claim 6, wherein the history is initialized after all the software has been updated by the version upgrade. 8. The information processing apparatus according to claim 1, further comprising means for displaying the history. 9. A semiconductor exposure apparatus, wherein the apparatus is controlled by the information processing apparatus according to claim 1. Description: 10. A method of manufacturing a semiconductor device by controlling an exposure apparatus by software, wherein when repairing a defect occurring in the software or adding a function, the contents of the change are automatically recorded as a history. A method for manufacturing a device, comprising a step of recording.