JPH1131708A - Bonder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the increase of costs to a minimum, and to shorten the processing time. SOLUTION: At the time of converting data equivalent to a single image being the object of wire bonding into video signals of plural lines, and successively outputting them, a camera 1 divides those video signals into two systems of video signal CV01 of odd-numbered lines and video signals CV02 of even- numbered lines and output them in parallel with the same timing. An image- processing part 2 simultaneously amplifies and digital-converts the video signals CV01 and CV02 of the odd and even-numbered lines in parallel, simultaneously writes them in an image memory 23 in parallel, compared the video signals worth one image read from the image memory 23 with reference video signals from a reference memory 24, and outputs bonding positioning information PDI. Then, a bonding position is decided according to this bonding positioning information PDI, and bonding is executed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bonder, and more particularly, to a bonder configured to compare a video signal of a bonding object from a camera with a reference video signal indicating a reference position of the bonding object to perform bonding positioning. .

[0002]

2. Description of the Related Art Bonders have come to be widely used mainly as production facilities for providing fine wiring such as transistors and semiconductor integrated circuits (hereinafter referred to as ICs). This bonder usually converts a single image of a portion to be bonded by a camera into video signals of a plurality of lines, and this video signal corresponds to the portion to be bonded,
In addition, a comparison is made with a reference video signal including information indicating the reference position, and bonding positioning is performed in accordance with the comparison result, thereby performing fine wiring and the like with high accuracy.

FIG. 3 is a block diagram of a typical example of such a bonder in the related art, and FIG. 4 is a detailed block diagram of an image processing section thereof. This bonder amplifies a video signal CVO from the camera 1z, which sequentially outputs an image of a single bonding target portion of the bonding target 100 such as an IC as a plurality of lines of video signals CVO, and a video signal CVO from the camera 1z. An amplifier 21 for outputting, an A / D converter 22 for converting an output signal of the amplifier 21 into a digital signal and outputting the digital signal;
An image memory 23z for sequentially writing, storing and outputting the output signals of the A / D converter 22, a bonding object 100
A reference memory 24 for storing and outputting a reference video signal corresponding to a portion to be bonded and including information on the reference position, and a video signal read from the image memory 23z and read from the reference memory 24 An image processing unit 2z including a comparison processing unit 25 for comparing the obtained video signal and outputting the bonding positioning information PDI, a capillary 7 for performing a wire bonding process on the bonding object 100, and a wire bonding of the capillary 7 A bonding head 6 for controlling the processing and fixing the camera 1z, an XY stage 5 on which the bonding head 6 is mounted, and bonding positioning information PDI
XY stage 5 is moved in the X and Y directions in accordance with the formula (1) to control the positioning of wire bonding by the capillary 7 and the drive unit 4.

FIGS. 5 (a) and 5 (b) show an example of the contents of a wire bonding process performed by the bonder when the bonding object 100 is an IC, and one image of the bonding object portion obtained by the camera 1z. FIG. As shown in FIG. 5A, a plurality of pads 102 formed on a peripheral portion of a semiconductor chip 101 and a plurality of leads 103 of a lead frame are connected to each other by bonding wires 200. At this time, the shift of the corresponding pad 102 and lead 103 from the reference position is detected, and the position of the XY stage 5 is controlled so that bonding is performed at a correct position.

[0005] One image of a portion to be bonded obtained by the camera 1z is output, for example, as a video signal CVO of 256 lines. At this time, as shown in FIGS. 6A and 6B, first, for example, the odd-numbered lines (L1, L3,
L5 etc.) are sequentially output, and then the even-numbered lines (L5
2, L4, L6, etc.) are output (interlaced scanning method).

It is very natural that the productivity of the production equipment including the bonder is required to be improved. In order to improve the productivity by the bonder, it is necessary to reduce the processing time in each part. .

In this bonder, for example, the camera 1z
In order to shorten the time from writing the video signal of one image of the portion to be bonded obtained by the above to the image memory 23z and storing it, the readout cycle of the signal (data) of each pixel in the camera 1z must be changed. What is necessary is just to shorten it (to make the read frequency higher).

[0008]

There is a strong demand for a bonder to improve productivity, and in order to improve the productivity, it is necessary to reduce the processing time of each part of the bonder. For example, in this conventional bonder, the camera 1z
In order to shorten the time from writing the video signal of one image of the portion to be bonded obtained by the above to the image memory 23z and storing it, the readout cycle of the signal (data) of each pixel in the camera 1z must be changed. Although it may be shortened (higher read frequency), the video signal CVO from the camera 1z is amplified by the amplifier 21, converted into a digital signal by the A / D converter 22, and written into the image memory 23z. Therefore, it is necessary not only to increase the speed of the camera 1z but also to increase the operating frequencies of the amplifier 21, the A / D converter 22, and the image memory 23z. Not only is there a limit to the shortening, but they are expensive and there is a problem that the cost of the entire bonder increases.

SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, an object of the present invention is to reduce the processing time even if the A / D converter, the image memory, and the like are set to the same operating frequency as the conventional one, and It is an object of the present invention to provide a bonder capable of suppressing an increase in cost of the bonder.

[0010]

The present invention has the following means in order to achieve the above object. That is, when the bonder of the present invention converts one image to be bonded into video signals of a plurality of lines and sequentially outputs the video signals, the video signal of the odd-numbered line and the video signal of the even-numbered line are used. A camera that outputs the video signal of the odd-numbered line and the video signal of the even-numbered line in parallel at the same timing, and a video signal of the odd-numbered line and a video of the even-numbered line from the camera. Each signal is converted into a digital signal, written and stored at a predetermined address of the image memory at the same timing and in parallel with each other, and the video signal for one sheet of the bonding object stored in the image memory is read out. An image processing unit for comparing one video signal to be bonded with a reference video signal corresponding thereto and outputting bonding positioning information; Configured so as to perform the bonding determines the bonding position of the bonding target in accordance with the bonding positioning information.

[0011] The camera, and odd / even A / D converters for converting each of the odd-numbered line video signal and the even-numbered line video signal from the camera into a digital type. The video signal of the odd-numbered line and the video signal of the even-numbered line, which are digitally converted by the A / D converter, are written and stored at predetermined addresses in parallel with each other at the same timing and are written and stored. The image memory for reading out the video signal for one sheet of the bonding target in a predetermined procedure, and storing a reference video signal including reference bonding position information for the bonding target and storing the video for one sheet of the bonding target. A reference memory that outputs the reference video signal corresponding to the signal, and the bonding target from the image memory. An image processing unit including a comparison processing unit that compares a video signal for one sheet with a reference video signal from the reference memory and outputs the bonding positioning information; and a bonding processing unit that performs a bonding process on the bonding target. And an XY stage on which the bonding processing unit and the camera are mounted, and a position control drive unit that moves the XY stage in accordance with the bonding positioning information and controls bonding positioning by the bonding processing unit.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In one embodiment of the present invention, a camera that converts an image for one bonding target into video signals of a plurality of lines and sequentially outputs the video signals of a plurality of lines is provided. A camera that divides the video signal of the odd-numbered line and the video signal of the even-numbered line into two systems of the video signal of the odd-numbered line and the video signal of the even-numbered line in parallel at the same timing, An image processing unit that receives the video signal from the camera and outputs bonding positioning information is provided for the odd-numbered and even-numbered lines that convert the odd-numbered line video signal and the even-numbered line video signal into digital signals. A / D converters, and odd-numbered line video signals and even-numbered line video signals digitally converted by these A / D converters, respectively. An image memory for writing and storing in parallel the addresses corresponding to each other at the same timing and reading out the written and stored video signal of one bonding target in a predetermined procedure, and a bonding target from the image memory. And a comparison processing unit for comparing the one video signal with a reference video signal corresponding to the video signal and outputting bonding positioning information. The position is determined and bonding is performed.

With this configuration, even when the operating frequencies of the camera, the A / D converter, and the image memory are the same as those of the conventional example, one bonding target can be obtained.
The time required to write and store (take in) the video signal for the number of frames into the image memory is shorter than the conventional method of taking in the video signal of the odd-numbered line and then taking in the video signal of the even-numbered line. The processing time can be reduced to half, and the processing time of the entire bonder can be reduced. A /
Since the operating frequencies of the D converter, the image memory, and the like are the same as those of the conventional example, there is no increase in cost due to the increase in the operating frequency, and even if two systems for the odd number and even number are required, The cost increase can be minimized, and the overall cost increase can be suppressed.

Further, in consideration of cost, a camera, A /
If the operating frequency of the D converter, the image memory and the like is increased, the processing time can be further reduced.

[0015]

Next, embodiments of the present invention will be described with reference to the drawings. FIGS. 1A and 1B are a block diagram showing an embodiment of the present invention and a block diagram showing an internal configuration of an image processing unit of this embodiment. In this embodiment, when one image of the wire bonding target portion of the bonding target 100 is converted into video signals of a plurality of lines and sequentially output, the video signal CVO1 of the odd-numbered line and the even-numbered line are output. The video signal CVO2 of the odd-numbered line and the video signal CVO2 of the even-numbered line are output in parallel at the same timing, and the video signal CVO2 of the odd-numbered line is divided into two systems. Amplifiers 21a that amplify the video signal CVO1 and the video signal CVO2 of the even-numbered line respectively,
21b, odd-numbered and even-numbered A / D converters 22a and 22b for converting the odd-numbered line video signal and the even-numbered line video signal amplified by the amplifiers 21a and 21b into digital types, respectively. The video signals of the odd-numbered lines and the video signals of the even-numbered lines, which are digitally converted by the A / D converters 22a and 22b, are written at the same timing and in parallel at the corresponding addresses and stored. The image memory 23 for reading out the stored and stored video signal for one wire bonding object by a predetermined procedure (for example, a procedure corresponding to the interlaced scanning method), and includes reference bonding position information for the wire bonding object 100. Stores the reference video signal and corresponds to the video signal of one wire bonding target. That the reference reading reference memory 24 the video signal, and the reference video signal and a comparison bonding position information P from the wire bonding image signal and the reference memory 24 of one sheet object from the image memory 23
An image processing unit 2 including a comparison processing unit 25 that outputs DI,
A capillary 7 for performing a wire bonding process on the bonding object 100, a bonding head 6 for controlling the wire bonding process of the capillary 7 and fixing the camera 1, an XY stage 5 on which the bonding head 6 is mounted, and a bonding It has a control unit 3 and a drive unit 4 that move the XY stage 5 in the XY directions in accordance with the positioning information PDI and perform positioning control of wire bonding by the capillary 7.

In this embodiment, FIG.
As shown in (b), the video signal of one image to be wire-bonded is supplied from the camera 1 by the video signal CVO1 of the odd-numbered line (L1, L3, L5,...) And the even-numbered line (L1). L2, L4, L6,...)
VO2 are simultaneously output in parallel (two systems), and these video signals CVO1 and CVO2 are amplified in parallel and simultaneously by the amplifiers 21a and 21b and the A / D converters 22a and 22b, and are digitally converted to the image memory 23. Written and stored (captured) in parallel and simultaneously.

Therefore, even if the operating frequencies of the amplifiers 21a and 21b, the A / D converters 22a and 22b, and the image memory 23 are the same as those of the conventional example, the video signal for one wire bonding object is not The time until the data is stored in the memory 23 can be reduced to half that of the conventional example.

The operating frequencies of the amplifiers 21a and 21b, the A / D converters 22a and 22b, the image memory 23, and the like are the same as those of the conventional amplifier 21, A / D converter 22, and image memory 23.
Since it is the same as z, there is no increase in cost due to the increase in frequency. Even if circuit elements for two systems for odd-numbered and even-numbered systems are required, the cost increase for that is minimized. It is possible to suppress an increase in the cost of the entire bonder.

In this embodiment, if the operating frequency of the camera 1, the amplifiers 21a and 21b, the A / D converters 22a and 22b, the image memory 23, and the like is made higher than that of the conventional example in consideration of cost. Of course, the processing time can be further reduced.

[0020]

As described above, according to the present invention, a video signal of one image to be bonded is separated from a camera into a video signal of an odd-numbered line and a video signal of an even-numbered line by a camera. Since the system outputs the signals in parallel and simultaneously, and amplifies the video signals of the odd-numbered lines and the video signals of the even-numbered lines in parallel and simultaneously, and digitally converts them, and writes and stores them in the image memory in parallel and simultaneously.
Even if the operating frequency of the A / D converter, the image memory, and the like is the same as that of the conventional example, the time until the video signal of one image is taken into the image memory is reduced to half that of the conventional example. The processing time of the entire bonder can be reduced, and there is no cost increase due to an increase in operating frequency. Therefore, even if circuit elements for two systems, odd-numbered and even-numbered, are required. However, an increase in cost for that purpose can be minimized, and there is an effect that an increase in the cost of the entire bonder can be suppressed.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating an embodiment of the present invention and a block diagram illustrating an internal configuration of an image processing unit of the embodiment.

FIG. 2 is a diagram illustrating a state when a video signal of one image of a bonding target according to the embodiment illustrated in FIG. 1 is output from a camera.

FIG. 3 is a block diagram showing an example of a conventional bonder.

FIG. 4 is a block diagram showing an internal configuration of an image processing unit of the bonder shown in FIG.

FIG. 5 is a diagram showing a state of a wire bonding process by the bonder shown in FIG. 3 and a diagram showing one image of a wire bonding target.

FIG. 6 is a diagram showing a state when a video signal of one image of a wire bonding target is output from a camera according to the embodiment shown in FIG. 3;

[Explanation of symbols]

 1, 1z camera 2, 2z image processing unit 3 control unit 4 drive unit 5 XY stage 6 bonding head 7 capillary 11 lens 21, 21a, 21b amplifier 22, 22, a, 22b A / D converter 23, 23z image memory 24 reference memory 25 Comparison processing unit 100 Bonding object 101 Semiconductor chip 102 Pad 103 Lead 200 Bonding wire

Claims (2)

[Claims] 1. A system for converting one image to be bonded into video signals of a plurality of lines and sequentially outputting the converted signals into two systems of a video signal of an odd-numbered line and a video signal of an even-numbered line. A camera that outputs the odd-numbered line video signal and the even-numbered line video signal in parallel at the same timing, and an odd-numbered line video signal and an even-numbered line video signal from the camera. At the same timing and in parallel with each other, the data is converted into a digital type, written and stored in a predetermined address of the image memory, and the video signal for one sheet of the object to be bonded stored in the image memory is read out. An image processing unit that performs comparison processing of one image signal with a corresponding reference image signal and outputs bonding positioning information; A bonding position determined for the bonding target according to the positioning information; and bonding is performed. 2. An odd-numbered and even-numbered A / D converter for converting a video signal of an odd-numbered line and a video signal of an even-numbered line from the camera into a digital type, respectively, The video signal of the odd-numbered line and the video signal of the even-numbered line, which are digitally converted by the A / D converter, are written and stored at predetermined addresses in parallel with each other at the same timing and are written and stored. The image memory for reading out a video signal for one sheet of the bonding target in a predetermined procedure, and storing a reference video signal including reference bonding position information with respect to the bonding target and storing one of the bonding targets.
A reference memory for outputting the reference video signal corresponding to the video signal for one frame, and comparing the video signal for one frame to be bonded from the image memory with the reference video signal from the reference memory. The image processing unit including a comparison processing unit that outputs the bonding positioning information,
A bonding processing unit for performing bonding processing on the bonding target, an XY stage on which the bonding processing unit and the camera are mounted, and moving the XY stage in accordance with the bonding positioning information to perform positioning control of bonding by the bonding processing unit The bonder according to claim 1, further comprising a position control drive unit.