JPH1130294A - Protective device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a slide motion between both elements themselves, thereby checking the incurring of dusting by having a bearing member of the same element on one side engaged with an opening of the same element on the other. SOLUTION: A link member 1 is made up of connecting its plural pieces together with one another. In this link member 1, its body is shaped into a rectangular frame form, and each of round holes 4a and 4b is formed in the center of two arm parts 2a and 2c at both the sides as an opening. In addition, each of support parts 2b and 2c is formed in the extended direction and in the reverse direction of these arm parts 2a and 2c, and then another round hole is made up in the center. A bush 5 is welded in this round hole. This bush 5 is form by a flange part at the end of a cylindrical part 5a and an internal thread 5c in this cylindrical part 5a. When the link members 1 are connected, each ball bearing 7 as a bearing member is set up in the round holes 4a and 4b of the arm parts 2a and 2c. A fixed screw 8 is inserted from the outside so as to have a shank 8b fitted in an inner race of this ball bearing 7, and then an external thread part 8a is screwed in the internal thread part 5c of the bush 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001]

[0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a protection device for protecting a wiring or a flexible pipe, and more particularly, to a protection device for a linear motion mechanism used in an environment where dust is not expected, such as in an exposure apparatus. Related to the device.

[0003]

[0002]

[0004]

2. Description of the Related Art In recent years, the line width of a circuit pattern when exposing a semiconductor element or a liquid crystal display element in a lithography process has been steadily miniaturized. For this reason, in the lithography process, there is a high possibility that a defective product will be generated even if the dust is minute even if it adheres to a reticle, a wafer, or a glass plate. Therefore, in the exposure apparatus, various dust measures are taken with great care.

[0005]

As a countermeasure against such dust generation, an exposure apparatus is installed in a clean room for preventing intrusion of dust from the outside world, the exposure apparatus body is further covered with a chamber, and special clothes, hats, gloves, masks and the like are used. In practice, it is mandatory to wear it to prevent dust from workers.

[0006]

In such an exposure apparatus,
For example, a linear motion mechanism for moving the wafer to a predetermined position is provided. FIG. 7 is a perspective view showing such a linear motion mechanism.

[0007]

In FIG. 7, two rails 15 are arranged on a fixed portion 17. A mover 16 such as a wafer holder is arranged on the linear rail 15 so as to be movable along the rail 15. The mover 16 is driven by a motor (not shown).

[0008]

Here, the movable element 16 includes a silicon tube for providing a positive pressure for operating an air cylinder or the like for driving an arm for moving the wafer, and a polyurethane for providing a negative pressure for holding the wafer by suction. Flexible piping and wiring such as a tube or a power cord for supplying electric power for driving the motor are connected.

[0009]

One end of the wiring or the flexible pipe is connected to a fixed portion, and the other end moves together with the mover 16. Therefore, if the mover 16 moves, it is left as it is. There is a danger that the movable member 16 or other parts may be caught or twisted, preventing the passage of air or breaking the wire. Therefore, the linear movement mechanism is usually provided with a protection device 14 that protects the wiring and flexible piping and that can move with the movement of the mover 16.

[0010]

FIG. 7 shows the shape of the protection device 14 in a simplified manner. The protection device 14 has one end attached to the mover 16 and the other end attached to the fixed portion 17. The wiring and the flexible piping 18 pass through the inside of the protection device 14 and extend from the fixed portion 17 to the mover 16.

[0011]

Further, the prior art protection device 14 will be described in detail. The protection device 14 must be able to move one end attached to the mover 16 together with the mover 16 while protecting the wiring and the flexible piping 18 from its original function. Therefore, the protective device 14 needs to be able to bend in a predetermined shape while having a certain strength sufficient for protection.

[0012]

In order to satisfy this requirement, the protection device 14
It has a configuration in which a plurality of the same link members 9 are rotatably connected. FIG. 5 is a perspective view showing one of the link members 9. FIG. 6 is a cross-sectional view showing a part of the protection device 14 in which three such link members 9 are connected.

[0013]

In FIG. 5, the link member 9 has a rectangular hole 1
It has a rectangular frame-shaped main body 13 having 3e. Rectangular hole 13
The rectangular plate-shaped arms 13a and 13c extend in a direction perpendicular to the plane e from both sides of the rectangular hole 13e. Circular holes 10a and 10c are formed at the centers of the arms 13a and 13c having the same shape. Arm part 13
Slope portions 12b, 12a and 12f, 12e are formed near the upper and lower edges of the tips of a and 13c.

[0014]

On the other hand, the arms 13a, 1
In the opposite direction to the direction in which 3c extends, circular plate-shaped support portions 13b and 13d extend in parallel from both sides of the rectangular hole 13e. The distance between the support portions 13b and 13d is
13c is smaller than the interval. In the center of the support portions 13b and 13d having the same shape, a cylindrical protrusion 11b is provided.
11d (not shown in FIG. 5) is formed. The outer diameter of the projections 11b and 11d matches the inner diameter of the circular holes 10a and 10c.

[0015]

A step 12d is formed near the joint of the support 13b with the main body 13, and the step 12d is continuous with the downwardly inclined portion 12c. Although not shown in FIG. 5, similar steps and inclined portions are formed near the joint of the support portion 13d with the main body 13.

[0016]

As shown in FIG. 6, the link members 9 are connected to each other to form a protection device 14. More specifically,
The link member 9 in the center of FIG.
Of the left link member 9 into the circular holes 10a and 10c
By fitting 1b and 11d, it is connected to the left link member 9.

[0017]

On the other hand, the center link member 9 is
b, 13d to the right link member 9
Are connected to the right link member 9 by fitting into the circular holes 10a and 10c. In this way, the protrusions 11b and 11d are
a, 10c, the protective device 14
Is formed.

[0018]

FIG. 8 shows that such a protection device 14 is
6 and the fixed part 1 together with the mover 16.
FIG. 7 is a diagram schematically showing a state of moving on top of FIG. As shown in the figure, the protection device 14 is self-supporting without using any other support member, is drawn in a U-shape, and is connected between the mover 16 and the fixed portion 17.

[0019]

The reason is that the slope 12b of the link member 9
This is due to the interaction between the step portion 12d and the inclined portion 12c. That is, referring to FIG. 5, in a state where the link members 9 are connected to each other, the link members 9
In one direction, it rotates around the protrusions 11b and 11d, but further rotation is limited by the slope 12a hitting the slope 12c.

[0020]

On the other hand, when the link member 9 attempts to rotate in the other direction, the rotation of the link member 9 is restricted by the tip of the arm portion 13a (near the slope 12b) hitting the step portion 12d. Due to this action, the protection device 14 shown in FIG. 8A has its own weight and the wiring and the flexibility that have passed inside since the step 12d is in contact with the tip of the arm 13a in the portion A. Despite the weight of the pipe (FIG. 7), the pipe extends linearly.

[0021]

On the other hand, the protection device 1 shown in FIG.
4 has a slope 12a on the slope 12c in the portion B.
, The rotation angle between the link members 9 is always a constant angle, so that the link members 9 are curved with a predetermined radius R. The portion B of the protection device 14 is displaced with the movement of the mover 16 (see FIG. 8B).

[0022]

[0020]

[0023]

However, as described above, dust is particularly disliked in an exposure apparatus or the like. However, the protective device 14 has a problem that a large number of link members 9 are connected to each other, and as shown in FIG. 8, when the protector 14 moves together with the mover 16, the link members 9 rub against each other, thereby generating dust.

[0024]

More specifically, the protrusion 11 of the link member 9
b, 11d, the sliding portion between the circular holes 10a, 10c, and the support portions 13b, which are adjacent to the arm portions 13a, 13c, respectively.
The sliding surface with 13d can be a dust generation source.

[0025]

On the other hand, in the prior art, as shown in FIG. 7, the entire protective device 14 is covered with a cover 19, and if necessary, the inside of the cover 19 is provided through exhaust ports provided at both ends of the cover 19. The dust generated from the link member 9 is discharged to the outside by sucking the air.

[0026]

However, since the cover 19 is bulky, the degree of freedom in designing the exposure apparatus is reduced. In addition, providing the cover 19 and the dust discharging device increases the manufacturing cost of the exposure device.

[0027]

In view of the above problems, an object of the present invention is to provide a protection device which can achieve a simple configuration and reduce manufacturing costs while effectively suppressing dust generation.

[0028]

[0025]

[0029]

In order to achieve the above-mentioned object, a protection device (140) according to the first aspect of the present invention comprises a plurality of identical elements (1) rotatably connected to each other so that wiring and flexibility can be improved. A protection device (14) for protecting at least one of the pipes (18);
0), comprising an opening (2a, 2c) formed of a first surface having an opening (4a, 4b) and a bearing member (7) having a rolling member, and the connection is made by one of the same members. Element (1)
Is formed by engaging the bearing member (7) of the same other element (1) with the opening (4a, 4b) of the other.

[0030]

According to the protection device (140) of the first aspect, the connection between the elements (1) is performed by connecting the openings (4a, 4b) of one of the same elements (1) to the openings of the other of the same elements (1). Since this is achieved by engaging the bearing member (7), sliding of the elements (1) during operation of the protection device (140) can be reduced, thereby suppressing generation of dust.

[0031]

According to a second aspect of the present invention, in the protection device (140), the bearing member (7) is held on the second surface (2b), and the first surface (2a) and the second surface (2a) are connected during connection. The first surface (2a) and the second surface (2b) so that the surface (2b) does not come into contact with the first surface (2a).
At least one of them has an escape portion.

[0032]

According to a third aspect of the present invention, the protection device (140) includes a limiting member (6b, 6) for limiting an amount of rotation between the same elements (1).
c, 6f). Limiting members (6b, 6c, 6
Since f) limits the amount of rotation between the same elements (1),
There is no disconnection of the wiring and no unnecessary bending of the piping.

[0033]

According to a fourth aspect of the present invention, there is provided a protective device comprising the protective member (1).
One end of 40) is fixed to a movable stage device. Therefore, by moving the stage device, it is possible to supply necessary utilities (for example, electric power, vacuum, compressed gas, etc.) to the stage device while the protection device (140) is interlocked. This stage device can be used for a wafer stage of an exposure apparatus for exposing a pattern of a mask onto a wafer.

[0034]

[0030]

[0035]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a side view of a protection device 140 of the present invention, and FIG.
FIG. 2 is a perspective view of a link member 1 as one element at 0. FIG. 3 is a side view of the link member 1, and FIG.
It is a horizontal sectional view showing a part of protection device 140 which connected two such link members 1.

[0036]

As shown in FIG. 1, the protection device 140 is provided with a metal member 141 on the link member 1 at one end thereof, and is attached to the movable element 16 (FIG. 7) as a moving stage via the metal member 141. On the other hand, a fitting 142 is provided on the link member 1 at the other end, and the fitting 14
2 to be attached to the fixing portion 17 (FIG. 7).

[0037]

The movable element 16 can be applied to a substrate stage on which a photosensitive substrate such as a wafer or a glass plate is placed and moved. This substrate stage uses a wire or a pipe protected by the protection device 140 to supply electric power for driving the substrate stage, compressed air for driving an air cylinder used for positioning the substrate, or the like, or vacuum the substrate. A vacuum for suction is supplied. Note that the substrate stage is provided in an exposure apparatus that exposes a mask pattern to a photosensitive substrate mounted on the substrate stage.

[0038]

In FIG. 2, the link member 1 has a main body 2 made of polycarbonate ABS resin. The main body 2 has a rectangular frame shape and a rectangular hole 2e. Arms 2a and 2c as rectangular plate-shaped openings extend in a direction perpendicular to the surface of the rectangular hole 2e and in parallel from both sides of the rectangular hole 2e. At the center of the arms 2a, 2c having the same shape, circular holes 4a, 4c are formed as openings. Slope portions 6b, 6f are formed near the upper edges of the distal ends of the arm portions 2a, 2c. On the other hand, projections 6a and 6e are formed on the lower edges of the arms 2a and 2c.

[0039]

Further, from the main body 13, the arm portions 2a, 2c
The circular plate-shaped support portions 2b and 2d extend from opposite sides of the rectangular hole 2e in a direction opposite to the extending direction of the rectangular holes 2e. The interval between the support portions 2b and 2d is smaller than the interval between the arm portions 2a and 2c. Circular holes 3d and 3e are formed in the center of the support portions 2b and 2d having the same shape.

[0040]

In the circular holes 3d and 3e, a metal bush 5 is provided.
Is welded. As shown in FIG. 4, the bush 5
A flange 5b is formed at an end of the cylindrical portion 5a, and a female screw 5c is formed inside the cylindrical portion 5a. The cylindrical portion 5a of the bush 5 is welded in the circular holes 3d and 3e,
The flange 5b is exposed on the outer surfaces of the arms 2a, 2c.

[0041]

Returning to FIG. 2, the support portion 2b and the arm portion 2a
A step 6c is formed in the vicinity of the junction with the above. FIG.
, A similar step is formed between the support 2d and the arm 2c. The inner peripheral edge 2f of the rectangular hole 2e, the inner edges 2g, 2h, 2i, and 2j of the arms 2a and 2c and the support portions 2b and 2d are chamfered so that wirings passing through the rectangular hole 2e are rubbed. Or, the generation of dust due to rubbing between edges is prevented.

[0042]

As shown in FIG. 4, the link members 1 are connected to each other to form a protection device 140. In the connected state, the wiring and the flexible piping 18 (FIG. 7) extend through the rectangular holes 2e of each link member 1. The connection of the link member 1 is performed by a fixing screw 8. The fixing screw 8 includes a male screw 8a, a shaft 8b having a larger diameter than the male screw 8a, and a head 8c.

[0043]

More specifically, the connection between the link members 1 will be described. In FIG. 4, ball bearings 7 as bearing members are arranged in circular holes 4a, 4b formed in the arm portions 2a, 2b of the right link member 1. The fixing screw 8 is inserted from the outside so that the shaft portion 8 b is fitted to the inner ring of the ball bearing 7, and the male screw portion 8 a is screwed into the female screw portion 5 c of the bush 5.

[0044]

When the link members 1 are connected to each other, the gap between the arm 2a and the support 2b and between the arm 2c and the support 2d is based on the thickness of the flange 5b of the bush 5. A clearance Δ is formed as an escape portion. In addition,
In the present embodiment, the gap Δ is 1 mm, and the play is 0.2 mm.

[0045]

One arm 2a and the other arm 2b
Are processed (molded) so that this escape portion is formed. The processing (forming) for forming the relief portion may be performed only on the arm portion 2a, may be performed only on the arm portion 2b, or may be performed on both the arm portions 2a,
2b.

[0046]

A disc-shaped sealing member 7a is arranged between the head 8c of the fixing screw 8 and the ball bearing 7 to prevent dust generated inside the ball bearing 7 from scattering outside. ing.

[0047]

As shown in FIG. 1, the protection device 140 of the present embodiment has a slope 6b (6f) of one link member 1.
Hits the step 6c of the other link member 1,
It becomes a curved state with a radius R, and becomes a linear state when the projection 6a (6e) of one link member 1 hits the step 6c of the other link member 1.

[0048]

The protection device 140 according to the present embodiment
When moving with the mover 16 (FIG. 7),
1, one end of the protection device 140 attached moves, and the link member 1 sequentially rotates around the fitting portion as an axis, and follows the mover.

[0049]

As shown in FIG. 3, the bush 5 and the circular hole 4a
L1, the distance from the step 6c to the center of the bush 5 is L2, the distance from the center of the circular hole 4a to the tip of the projection 6a is L3, and the distance from the center of the circular hole 4a to the slope 6b is L4. When the inclination angle of the inclined surface 6b with respect to the perpendicular is θ, the radius R of the curved portion of the protection device is obtained by the following equation.

R = L1 / (2 · cos ((180−θ) / 2)) where L2 = L3 = L4.

[0051]

Further, as shown in FIG. 8, when the protection device 140 is attached, the stroke
The required number N of link members 1 is calculated by the following equation.

N ≧ | (S + πR) / L1 |

[0053]

In this embodiment, since the link members 1 are rotatably supported by using the ball bearings 7 as described above, the circular holes in the arm portions and the support portions are formed as in the prior art. Since the projection does not slide directly, dust generation can be effectively suppressed. Further, a seal body 7a is disposed outside the ball bearing 7, thereby effectively preventing even a small amount of dust generated inside the ball bearing 7 from scattering outside.

[0054]

In addition, the flange 5b of the bush 5 causes the adjacent arm and support to be arranged at a distance Δ apart from each other, so that even if distortion occurs during molding, the arm or support warps. , The side surfaces are prevented from sliding with each other, whereby dust generation can be more effectively suppressed. With the above configuration, for example, the cover of the protection device provided in the related art can be eliminated or simplified, whereby the degree of freedom in designing the linear moving mechanism is improved and the manufacturing cost is reduced.

[0055]

The link members 1 are supported by the ball bearings 7 so as to be rotatable relative to each other.
It is possible to reduce the rotational resistance between the link members 1 at the time of the operation 0, thereby improving the reliability in the fine movement control of the linear moving mechanism.

[0056]

In this embodiment, the exposure apparatus is taken as an example, and the wiring of the linear moving mechanism and the protection device for the flexible piping used for the exposure apparatus have been described. However, the present invention is not limited to this. The present invention can be applied to any protection device that protects a wiring and a flexible pipe for a moving mechanism used in an environment that dislikes dust. The material of the link member 1 includes:
If a low-wear material having good slip properties is employed, it is more effective in suppressing dust generation.

[0057]

[0050]

[0058]

According to the protection device of the first aspect, the components constituting the protection device are connected to each other by engaging the bearing member of the same element with the opening of one and the same element. Therefore, during operation of the protection device, sliding between the elements can be reduced, thereby suppressing generation of dust.

[0059]

In the protective device according to the second aspect, the relief portion is provided on at least one of the first surface and the second surface.
It is possible to prevent dust generation due to contact between the first surface and the second surface.

[0060]

In the protection device according to the third aspect, since the restricting member restricts the amount of rotation between the same elements, there is no possibility that the wiring is disconnected or the pipe is bent more than necessary.
Therefore, the supply of the utility is not interrupted.

[0061]

The protection device according to the fourth aspect can supply necessary utilities to the stage device.

[Brief description of the drawings]

FIG. 1 is a side view of a protection device 140 according to the present invention.

FIG. 2 is a perspective view of a link member 1 as one element in the protection device 140.

FIG. 3 is a side view of the link member 1. FIG.

FIG. 4 is a cross-sectional view showing a part of the protection device 140 in which two such link members 1 are connected.

FIG. 5 is a perspective view showing one of the link members 9 according to the related art.

FIG. 6 is a cross-sectional view showing a part of a conventional protection device 14 in which three link members 9 are connected.

FIG. 7 is a perspective view showing a conventional linear motion mechanism.

FIG. 8 is a diagram schematically illustrating a state in which the protection device of the related art moves on the fixed portion together with the movable element when the protection apparatus is attached to the movable element.

[Explanation of symbols]

1 link member 2 body 3d, 3e ··· Supporting hole 4a, 4c ··· Arm part hole 5 ··· Bush 6a, 6e ... Projection 6b, 6f Slope 6c Step 7 Ball bearing 8 ······ Fixing screw 140 ··· Protective device

Claims (4)

[Claims] 1. A plurality of the same elements are rotatably connected to each other,
A protection device for protecting at least one of a wiring and a flexible pipe, comprising: an opening having a first surface having an opening; and a bearing member having a rolling member, wherein the connection is the same as one of the two. The protection device is characterized in that the opening is made by engaging the bearing member of the same other element with the opening of the element. 2. The protection device according to claim 1, wherein the bearing member is held on a second surface so that the first surface does not contact the second surface during the connection. A protection device provided with a relief portion on at least one of the first surface and the second surface. 3. The protection device according to claim 1, further comprising a restricting member for restricting a rotation amount between the same elements. 4. The protection device according to claim 1, wherein one end of the protection member is fixed to a movable stage device.