JPH11238919A - Bimorph piezoelectric element - Google Patents
Bimorph piezoelectric elementInfo
- Publication number
- JPH11238919A JPH11238919A JP10037456A JP3745698A JPH11238919A JP H11238919 A JPH11238919 A JP H11238919A JP 10037456 A JP10037456 A JP 10037456A JP 3745698 A JP3745698 A JP 3745698A JP H11238919 A JPH11238919 A JP H11238919A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- region
- thickness
- piezoelectric element
- bimorph
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はバイモルフ圧電素
子、即ち、２枚の方形圧電板を貼合せて構成され、且つ
全体に亘り均一な厚さを有するバイモルフ圧電素子に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bimorph piezoelectric element, that is, a bimorph piezoelectric element formed by laminating two rectangular piezoelectric plates and having a uniform thickness throughout.
【０００２】[0002]
【従来の技術】従来、バイモルフ圧電素子としては、特
開平１−１９０２７１号公報に開示されたものが知られ
ている。このバイモルフ圧電素子は、電圧の印加によ
り、一方の圧電板が伸び、また他方の圧電板が縮むこと
によって、略Ｕ字状に湾曲するように構成されている。2. Description of the Related Art Hitherto, as a bimorph piezoelectric element, one disclosed in Japanese Patent Application Laid-Open No. 1-190271 is known. The bimorph piezoelectric element is configured to bend into a substantially U-shape when one of the piezoelectric plates is expanded and the other is contracted by applying a voltage.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
バイモルフ圧電素子はその湾曲方向が一方向であるた
め、二方向に作動するアクチュエータとしては使用する
ことができない。However, the conventional bimorph piezoelectric element cannot be used as an actuator that operates in two directions because its bending direction is one direction.
【０００４】[0004]
【課題を解決するための手段】本発明は、二方向に作動
するアクチュエータとして使用することが可能な、前記
バイモルフ圧電素子を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a bimorph piezoelectric element that can be used as an actuator that operates in two directions.
【０００５】前記目的を達成するため本発明によれば、
２枚の方形圧電板を貼合せて構成され、且つ全体に亘り
均一な厚さを有するバイモルフ圧電素子において、対向
二辺を含む両端縁部に在って両圧電板の厚さが等しい２
つの第１領域と、両第１領域間に在って両圧電板の厚さ
が変化している第２領域とを備え、その第２領域では、
一方の前記圧電板の厚さが、両第１領域側から前記第２
領域の中央部に向ってそれぞれ漸増し、それに応じて他
方の前記圧電板の厚さが、両第１領域側から前記中央部
に向ってそれぞれ漸減しているバイモルフ圧電素子が提
供される。[0005] To achieve the above object, according to the present invention,
In a bimorph piezoelectric element formed by laminating two rectangular piezoelectric plates and having a uniform thickness over the whole, both piezoelectric plates have the same thickness at both end portions including two opposing sides.
A first region and a second region between the two first regions where the thicknesses of both piezoelectric plates are changed. In the second region,
The thickness of one of the piezoelectric plates is equal to the thickness of the second
There is provided a bimorph piezoelectric element in which the thickness of the other piezoelectric plate gradually decreases toward the center of the region, and the thickness of the other piezoelectric plate accordingly decreases gradually toward the center from both the first regions.
【０００６】前記構成において、電圧の印加により、バ
イモルフ圧電素子の両第１領域がそれぞれ例えば上方に
向って湾曲すると、それに伴い第２領域が下方に向って
湾曲する。このようにバイモルフ圧電素子は、逆圧電効
果を利用することによって二方向に作動する。In the above structure, when both first regions of the bimorph piezoelectric element are curved upward, for example, by application of a voltage, the second region is curved downward accordingly. Thus, bimorph piezoelectric elements operate in two directions by utilizing the inverse piezoelectric effect.
【０００７】またバイモルフ圧電素子の圧電効果（ピエ
ゾ効果）を利用することによって二方向の曲げ角度を検
知することも可能である。Further, it is possible to detect a bending angle in two directions by utilizing a piezoelectric effect (piezo effect) of a bimorph piezoelectric element.
【０００８】[0008]
【発明の実施の形態】図１〜３において、バイモルフ圧
電素子１は、２枚の方形をなす第１，第２圧電板２，３
を貼合せて構成され、且つ全体に亘り均一な厚さを有
し、また対向二辺を含む両端縁部に在って両圧電板２，
３の厚さが等しい２つの第１領域Ａ1 と、両第１領域Ａ
1 間に在って両圧電板２，３の厚さが変化している第２
領域Ａ2とを備えている。その第２領域Ａ2 では、上側
の第１圧電板２の厚さが、両第１領域Ａ1 側から第２領
域Ａ2 の中央部ｃに向ってそれぞれ漸増し、それに応じ
て下側の第２圧電板３の厚さが、両第１領域Ａ1 側から
中央部ｃに向ってそれぞれ漸減している（即ち、ｔ2 ＞
ｔ1 ＞ｔ3 ）。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIGS. 1 to 3, a bimorph piezoelectric element 1 has two rectangular first and second piezoelectric plates 2 and 3 respectively.
Are bonded to each other and have a uniform thickness over the entirety.
3, two first regions A 1 having the same thickness, and both first regions A 1
The thickness of both piezoelectric plates 2 and 3 varies between 1 and 2
And a region A 2. In the second region A 2 , the thickness of the upper first piezoelectric plate 2 gradually increases from both the first regions A 1 toward the central portion c of the second region A 2 , and accordingly, the lower first piezoelectric plate 2 increases. the thickness of the second piezoelectric plate 3, gradually decreases from each of both the first region a 1 side toward the center c (i.e., t 2>
t 1 > t 3 ).
【０００９】第１および第２圧電板２，３の各平面上お
よび両板２，３間にそれぞれ箔状銅電極４が設けられ、
平面側の両銅電極４のリード線５，６が電源装置の、例
えば陰極（−）に、また両板２，３間の銅電極４のリー
ド線７が電源装置の陽極（＋）にそれぞれ接続される。
この場合、電圧の印加に伴い、上側の第１圧電板２は伸
びを生じ、また下側の第２圧電板３は縮みを生じるよう
になっている。A foil copper electrode 4 is provided on each of the first and second piezoelectric plates 2 and 3 and between the two plates 2 and 3, respectively.
The leads 5 and 6 of the copper electrodes 4 on the plane side are connected to, for example, a cathode (-) of the power supply device, and the leads 7 of the copper electrode 4 between the plates 2 and 3 are connected to the anode (+) of the power supply, respectively. Connected.
In this case, the upper first piezoelectric plate 2 expands and the lower second piezoelectric plate 3 contracts with the application of the voltage.
【００１０】第１および第２圧電板２，３は、ＰＺＴ
［Ｐｂ（Ｚｒ，Ｔｉ）Ｏ3 ］、ＰＬＺＴ［（Ｐｂ，Ｌ
ａ）（Ｚｒ，Ｔｉ）Ｏ3 ］、ＰＭＮ［Ｐｂ（Ｍｇ，Ｎ
ｂ）Ｏ3 ］、ＰＶＤＦ（ポリフッ化ビニリデン）等から
選択される一種より構成される。The first and second piezoelectric plates 2 and 3 are made of PZT.
[Pb (Zr, Ti) O 3 ], PLZT [(Pb, L
a) (Zr, Ti) O 3 ], PMN [Pb (Mg, N
b) O 3 ], PVDF (polyvinylidene fluoride) and the like.
【００１１】前記構成において、図４に示すように、電
圧の印加により、上側の第１圧電板２が伸び、また下側
の第２圧電板３が縮むと、両圧電板２，３の前記厚さ関
係に起因して両第１領域Ａ1 が最も小さな曲率半径Ｒmi
n を持つように上方に向って湾曲し、また第２領域Ａ2
の中央部ｃが最も大きな曲率半径Ｒmax を持つように上
方に向って湾曲する。そして第２領域Ａ2 における各第
１領域Ａ1 および中央部ｃ間は、各第１領域Ａ1 から中
央部ｃに向って曲率半径が漸増するように上方に向って
湾曲し、結果として、図５に示すように、第２領域Ａ2
が下方に向い曲率半径Ｒを以て湾曲したことになる。In the above configuration, as shown in FIG. 4, when the upper first piezoelectric plate 2 expands and the lower second piezoelectric plate 3 contracts due to the application of a voltage, the two piezoelectric plates 2 Due to the thickness relationship, both first regions A 1 have the smallest radius of curvature Rmi
n and has a second region A 2
Is curved upward so as to have the largest radius of curvature Rmax. And between the first region A 1 and the central portion c is in the second region A 2, it curved upward as the radius of curvature from the first region A 1 toward the central portion c gradually increases, as a result, As shown in FIG. 5, the second region A 2
Is curved downward with a radius of curvature R.
【００１２】このようにバイモルフ圧電素子１は、逆圧
電効果を利用することによって二方向に作動する。As described above, the bimorph piezoelectric element 1 operates in two directions by utilizing the inverse piezoelectric effect.
【００１３】[0013]
【発明の効果】本発明によれば、前記のように構成する
ことによって、逆圧電効果の利用下で二方向に作動する
アクチュエータとして使用することが可能なバイモルフ
圧電素子を提供することができる。またこのバイモルフ
圧電素子の圧電効果（ピエゾ効果）を利用することによ
って二方向の曲げ角度を検知することも可能である。According to the present invention, a bimorph piezoelectric element which can be used as an actuator which operates in two directions by utilizing the inverse piezoelectric effect can be provided by the above-mentioned structure. It is also possible to detect a bending angle in two directions by utilizing the piezoelectric effect (piezo effect) of the bimorph piezoelectric element.
【図面の簡単な説明】[Brief description of the drawings]
【図１】バイモルフ圧電素子の斜視図である。FIG. 1 is a perspective view of a bimorph piezoelectric element.
【図２】図１の２−２線断面図である。FIG. 2 is a sectional view taken along line 2-2 of FIG.
【図３】図１の３−３線断面図である。FIG. 3 is a sectional view taken along line 3-3 of FIG. 1;
【図４】作動状態にあるバイモルフ圧電素子の図１、４
矢視図である。FIG. 4 shows the bimorph piezoelectric element in operation, FIGS.
It is an arrow view.
【図５】図４の５矢視図である。FIG. 5 is a view taken in the direction of arrow 5 in FIG. 4;
１……………バイモルフ圧電素子 ２，３………第１，第２圧電板 Ａ1 ，Ａ2 …第１，第２領域 ｃ……………中央部1 ............... bimorph piezo ......... first, second piezoelectric plate A 1, A 2 ... first, second region c ............... central portion
Claims (1)
構成され、且つ全体に亘り均一な厚さを有するバイモル
フ圧電素子において、対向二辺を含む両端縁部に在って
両圧電板（２，３）の厚さが等しい２つの第１領域（Ａ
1 ）と、両第１領域（Ａ1 ）間に在って両圧電板（２，
３）の厚さが変化している第２領域（Ａ2 ）とを備え、
その第２領域（Ａ2 ）では、一方の前記圧電板（２）の
厚さが、両第１領域（Ａ1 ）側から前記第２領域
（Ａ2 ）の中央部（ｃ）に向ってそれぞれ漸増し、それ
に応じて他方の前記圧電板（３）の厚さが、両第１領域
（Ａ1）側から前記中央部（ｃ）に向ってそれぞれ漸減
していることを特徴とするバイモルフ圧電素子。1. A bimorph piezoelectric element which is formed by bonding two rectangular piezoelectric plates (2, 3) and has a uniform thickness over the whole, is located at both ends including two opposing sides. Two first regions (A) having the same thickness of both piezoelectric plates (2, 3)
1 ) and both piezoelectric plates (2, 2) between the first regions (A 1 ).
3) a second region (A 2 ) having a varying thickness,
In the second area (A 2 ), the thickness of one of the piezoelectric plates (2) is increased from the first area (A 1 ) side toward the center (c) of the second area (A 2 ). A bimorph, wherein the thickness of the other piezoelectric plate (3) gradually decreases from the first region (A 1 ) side toward the central portion (c). Piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03745698A JP3853957B2 (en) | 1998-02-19 | 1998-02-19 | Bimorph piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03745698A JP3853957B2 (en) | 1998-02-19 | 1998-02-19 | Bimorph piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11238919A true JPH11238919A (en) | 1999-08-31 |
| JP3853957B2 JP3853957B2 (en) | 2006-12-06 |
Family
ID=12498032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03745698A Expired - Fee Related JP3853957B2 (en) | 1998-02-19 | 1998-02-19 | Bimorph piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3853957B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001031715A1 (en) * | 1999-10-22 | 2001-05-03 | The Government Of The United States As Represented By The Administrator Of The National Aeronautics And Space Administration | Non-uniform thickness electroactive device |
-
1998
- 1998-02-19 JP JP03745698A patent/JP3853957B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001031715A1 (en) * | 1999-10-22 | 2001-05-03 | The Government Of The United States As Represented By The Administrator Of The National Aeronautics And Space Administration | Non-uniform thickness electroactive device |
| US7015624B1 (en) | 1999-10-22 | 2006-03-21 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Non-uniform thickness electroactive device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3853957B2 (en) | 2006-12-06 |
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