JPH11188671A - Two-arm type conveying robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a two-arm type conveying robot device which can minimize the height of the base end part of a hand member, and attain size reduction and high productivity. SOLUTION: A first parallel crank mechanism 26 and, the second parallel crank mechanism 46 are disposed vertically. In the parallel crank mechanisms, one joint in the first parallel 4-joint links 19, 39, are disposed so as to be coaxial with a first fulcrum O1 , and the first links 15, 35 and one of the base end parts of intermediate links 16, 17, and 36, 37 are fitted at the first to fourth rotating shafts. A second parallel 4-joint links 23 are disposed, being offset at the outside of the first parallel 4-joint links 19, 39. A clearance is formed in a radial direction between the rear part of the hand member and the rotating shaft when the respective hand members 25, 45 are pulled to the rotational shaft, O1 side, and the intermediate links are inclined to the opposite side of the respective hand members beyond the first fulcrum O1 , thus it is possible to make the hand members conduct linear movement and rotation freely.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used in a semiconductor manufacturing apparatus, a liquid crystal substrate manufacturing apparatus, and the like. It relates to a robot device.

[0002]

2. Description of the Related Art In general, in a semiconductor manufacturing apparatus, a liquid crystal substrate manufacturing apparatus, or the like, a hand member for mounting a workpiece, for example, a wafer, is moved linearly in a horizontal direction by an arm, and the hand member is moved to the tip. A transfer robot device for turning the mounted arm in the horizontal direction is used, and processing chambers engaged in various manufacturing processes are arranged at a plurality of radial positions around the turning axis of the transfer robot device. The workpiece is carried in and carried out between the appropriate processing chambers by the apparatus.

By the way, in order to improve the efficiency of the transport process,
A so-called two-arm type transfer robot having a hand member attached to the tip of each arm is used.

Conventionally, as a two-arm type transfer robot device, for example, devices shown in FIGS. 15 to 18 have been proposed. More specifically, in FIGS. 15 to 18, reference numeral 80 denotes a fixed frame, 81 denotes a horizontal swivel that is swiveled about the axis O1 by an appropriate driving device with respect to the fixed frame 80, and 82 denotes a horizontal swivel. The first arm 82 is rotatably supported about a first fulcrum P1 parallel to the axis O1 of 81, and the first arm 82 is appropriately rotated and driven by an appropriate driving device attached to the swivel 81. Is done. 83 is a second arm supported rotatably about a second fulcrum Q1 parallel to the first fulcrum P1 with respect to the first arm 82;
Reference numeral 4 denotes a hand member rotatably supported around a third fulcrum R1 parallel to the second fulcrum Q1 with respect to the second arm 83, and 85 is fixed to the swivel base 81 with the first fulcrum P1 as an axis. The first rotation transmitting member 86 is a second rotation transmitting member fixed to the second arm 83 with the second fulcrum Q1 as an axis, and the first rotation transmitting member 87 is a first arm with the second fulcrum Q1 as an axis. The third rotation transmitting member 88 fixed to 82
The fourth fixed to the hand member 84 with the fulcrum R1 as the axis
Are provided between the first rotation transmitting member 85 and the second rotation transmitting member 86 and between the third rotation transmitting member 87 and the fourth rotation transmitting member 88, respectively. First and second rotary connectors. The distance S between the first and second fulcrums is the same as the distance S between the third and fourth fulcrums, and the first rotation transmitting member 85, the second rotation transmitting member 86, and the fourth rotation Transmission member 88 and third
Are formed to have a radius ratio of 2: 1 with respect to the rotation transmitting member 87, respectively. Of course, the first to fourth rotation transmitting members 85 to 8
8, a chain sprocket or a pulley is appropriately used, and accordingly, a chain or a toothed belt or the like is appropriately used as the first and second rotary connecting members 89 and 90.

A first arm mechanism 91 is constituted by the above-mentioned 82 to 90, and a second arm mechanism 92 which is symmetrical to the first arm mechanism with respect to the line XX is connected to the axis O1. It is supported rotatably about a second parallel fulcrum P2. That is, the axis O1 and the first and second fulcrums P
The intervals between 1 and P2 are the same. The above-described 80 to 92 constitute a two-arm transfer robot apparatus. In this transfer robot device, the operations of the first and second arm mechanisms 91 and 92 are line-symmetrical but substantially the same, so the operation of the first arm mechanism 91 will be described. Now, it is assumed that the swivel 81 is maintained in a fixed state with respect to the fixed frame 80. In FIG. 17, the first arm 8 is driven by the driving device in a state where the first, second and third fulcrums P1, Q1, R1 are located on a straight line.
2 is rotated counterclockwise by an angle θ about the first fulcrum P1.

At this time, the first rotation transmitting member 85 is in a fixed state, and at this time, the second fulcrum Q1 moves to the position of Q11 by an angle θ.
If it is moved only in the counterclockwise direction, the first connecting member 89 disposed between the first and second rotation transmitting members 85 and 86 is wound around the first rotation transmitting member 85 in the Y1 direction. As a result, those in the Y2 direction are unwound from the first rotation transmitting member 85. That is, in FIG. 17, the first connecting member 89 moves in the directions of a1 and a2. Thus, the second rotation transmitting member 86 is rotated clockwise about the second fulcrum Q1. By the way, the first rotation transmitting member 8
5 and the second rotation transmitting member 86 have a radius ratio of 2: 1, so that the first arm 82 is connected to the first fulcrum P1 as described above.
Is rotated counterclockwise by an angle θ about
Of the rotation transmitting member 86 at an angle 2 around the second fulcrum Q11.
It is rotated clockwise by θ. In this case, since the second rotation transmitting member 86 is fixed to the second arm 83,
The second rotation transmitting member 86 and the second arm 83 are rotated clockwise by an angle 2θ about the second fulcrum Q1. That is, the first, second and third fulcrums P1, Q1,
When the first arm 82 is rotated counterclockwise about the first fulcrum P1 by an angle θ in a state where R1 is located on a straight line, the third fulcrum is virtually rotated to the position of R11. However, in this case, as described above, the second rotation transmitting member 86
Is rotated clockwise about the second fulcrum Q11 by an angle 2θ. Therefore, the third fulcrum R11 is rotated clockwise about the second fulcrum Q11 by an angle 2θ, and is rotated to the position of R12. Therefore, as described above, the first arm 8
2 is rotated counterclockwise by an angle θ about the first fulcrum P1 as described above, the position of the third fulcrum R12 is
The first and second arms 82 and 83 are located in a straight line connecting the first and third fulcrums P1 and R1 before rotation.

Further, as described above, the second arm 83
, The third fulcrum virtually located at R11 becomes the second fulcrum Q11
Is rotated clockwise about the angle 2θ, that is, to the position of R12 in the clockwise direction, the arrangement is made between the third rotation transmission member 87 and the fourth rotation transmission member 88 fixed to the first arm 82. Of the second connecting members 90 provided, those in the Y2 direction are wound around the third rotation transmitting member 87, and those in the Y1 direction are unwound from the third rotation transmitting member 87. That is, in FIG. 17, the second connecting member 90 is b
Move in the direction of 1 and b2. Accordingly, the fourth rotation transmitting member 88 is rotated counterclockwise about the third fulcrum R12. By the way, as described above, the second arm 8
3 rotates clockwise about the second fulcrum Q11 by an angle 2θ, the radius ratio between the fourth rotation transmitting member 88 and the third rotation transmitting member 87 is 2: 1. The rotation transmitting member 88 is rotated counterclockwise by an angle θ about the third fulcrum R12, and as a result, the fourth rotation transmitting member 8 is rotated.
The eight specific point C0 is located at the point C1 on the straight line connecting the first and third fulcrums P1 and R12.

As described above, the first arm 82 is rotated counterclockwise about the first fulcrum P1.
Hand member 84 fixed to fourth rotation transmitting member 88
Are the first and third fulcrum points P before the first arm 82 rotates.
The first arm mechanism 91 is driven in the X direction while maintaining the initial posture on a straight line connecting 1 and R1.

Similarly, the second arm mechanism 92 is driven in the X direction on a straight line connecting the first and third fulcrums P2 and R2 while maintaining the initial posture. The respective hand members 84A, 84B of the first and second arm mechanisms 91, 92
Is mounted so as to be located between the fulcrums P1 and P2, and the distal ends of the hand members 84A and 84B are mounted at an interval in the vertical direction.
During the linear movement of the arm mechanisms 91 and 92, the respective hand members 84 and 84 move along the XX line passing through the axis O1 without interfering with each other. Furthermore, the horizontal swivel 81
Is pivoted about the axis O1, whereby the first and second arm mechanisms 91 and 92 are simultaneously pivoted about the axis O1.

As described above, appropriate processing chambers 71 to 76 are disposed at a plurality of radially radial positions around the turning axis O1 of the two-arm transfer robot device, for example, at six positions. The processing of transporting the workpiece is performed appropriately.

[0011]

However, in the above-described conventional two-arm type transfer robot apparatus, as shown in FIGS. 15 to 18, the rotation drive shafts of the first and second arm mechanisms 91 and 92 are not provided. Since the shaft centers P1 and P2 are arranged so as to straddle the shaft center O1 of the turning shaft of the horizontal turning table 81, the turning radius of the horizontal turning table 81 becomes large. For this reason, rotating bearings 93, 93 for rotatably attaching the horizontal swivel table 81 to the fixed frame body 80, and a magnetic fluid seal 9 for maintaining the rotating portion airtight in the vertical direction.
4 has a large diameter, and the device has a large diameter, and the use of the large-diameter rotary bearings 93, 93 and the large-diameter magnetic fluid seal 94 has made the device expensive.

Further, the first and second arm mechanisms 9
A rotary drive for linearly moving the hand members 84A and 84B is mounted on a horizontal swivel 81 and swiveled together with the horizontal swivel 81. The rotary drive has a fixed frame. Since the power supply cable is routed from the body 80 side, the turning angle,
That is, the number of turns is limited. For this reason, there is provided an electric monitoring device for limiting the clockwise and counterclockwise turning angles of the horizontal turning table 81 with respect to the turning center O1 to an allowable value, for example, 540 degrees, respectively, with respect to the initial installation state. Although it is necessary and expensive, the usability of the device is poor.

Further, at the time of turning, the horizontal turning table 81
Since the first and second arm mechanisms 91 and 92 mounted on the robot are simultaneously turned, there are the following problems in use.

That is, in FIG. 18, for example, a supply processing chamber 72 in which a wafer as a workpiece is stored
The first and second arm mechanisms 91 and 92 are sequentially operated to place a wafer on the two hand members 84A and 84B, respectively, and thereafter the wafer is transferred to the processing chamber 73 and the processing chamber 71. Shall be. In this case, first, the horizontal swivel table 81 on which the first and second arm mechanisms 91 and 92 are mounted is appropriately rotated, and then, for example, the first arm mechanism 91 is operated to transfer the wafer into the processing chamber 73. You. Thereafter, the horizontal swivel 81 is swung in a direction corresponding to the processing chamber 71, and then the second arm mechanism 92 is operated to transfer the wafer into the processing chamber 71.

In this case, when viewed from the processing chamber 71, the time required for the horizontal swivel table 81 to rotate from the processing chamber 72 to a position corresponding to the processing chamber 73, and the time required for loading the wafer into the processing chamber 73 by the first arm mechanism 91. And the horizontal swivel 81 is in the processing chamber 7.
Halfway time when turning from 3 to the position corresponding to the processing chamber 71,
That is, the total time of the traveling swing time until the horizontal swivel 81 swings from the processing chamber 73 to a position corresponding to the processing chamber 72 is a waiting time for the processing chamber 71.

Of course, the waiting time increases as the distance between the two processing chambers increases, and the two-arm transfer robot apparatus is repeatedly operated as needed for a large number of processing chambers, for example, 71 to 76. Since the workpiece is conveyed, the total waiting time in one day's work is a considerable value. Therefore, the above-mentioned waiting time is small,
It has been desired to realize a two-arm transfer robot apparatus having good productivity.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a two-arm type transfer robot apparatus which is compact, easy to use, inexpensive, and has good productivity.

[0018]

In order to achieve the above object, the first aspect of the present invention provides a first parallel connection in which an inner first link and an outer second link are connected by a pair of first intermediate links. A first parallel crank mechanism comprising a four-bar link, a second parallel four-bar link connecting the second link and the hand link by a pair of second intermediate links, and a first parallel crank mechanism. A second parallel crank mechanism having substantially the same structure is applied to a two-arm type transfer robot apparatus arranged vertically. It is characterized by a fixed frame, and first to fourth rotating shafts rotatably and coaxially supported by the fixed frame around a first fulcrum, which is the axis of the horizontal turning shaft. A first to a fourth rotary drive attached to the fixed frame body and respectively connected to the first to the fourth rotary shafts, and the first and second parallel cranks In the mechanism, one joint of each first parallel four-bar link is disposed coaxially with the first fulcrum, and each first link and one side of the base end of the first intermediate link are connected to the first fulcrum. The first and second intermediate links are attached to the first to fourth rotating shafts, and the first and second intermediate links are formed to have the same link length.
Parallel four-bar links are arranged offset to the outside with respect to the first parallel four-bar links, and are vertically attached to the free ends of the respective hand links having a gap in the horizontal direction with respect to the rotation axis. The first and second hand members that are separated from each other protrude, and a rotation transmission mechanism is disposed between the first and second intermediate links. When the hand member is pulled toward the rotation shaft, the hand member is moved rearward. The first and second intermediate links are tilted in the horizontal direction opposite to the hand member beyond the first fulcrum, with a gap in the radial direction between the first and second hands. The member is appropriately linearly moved in the horizontal direction passing through the first fulcrum, and the first and second hand members are freely turned around the first fulcrum.

Further, according to the second aspect of the present invention, in the first aspect, the first and second hand members vertically separated from each other are defined by a cover disposed in a horizontal direction excluding a rotating shaft portion. It is characterized in that it can be displaced in a given space.

Further, the third invention is directed to the first or second invention.
The invention is characterized in that the first to fourth coaxially supported rotating shafts are rotatably supported via an airtight magnetic fluid seal.

<Operation> As described above, in the first aspect of the present invention, the first parallel four-node link in which the inner first link and the outer second link are connected by a pair of first intermediate links; A first parallel crank mechanism including a second parallel four-bar link in which the second link and the hand link are connected by a pair of second intermediate links, and substantially the same structure as the first parallel crank mechanism The second parallel crank mechanism is placed on a two-armed transfer robot device arranged vertically, and a fixed frame and a fixed frame around a first fulcrum, which is the axis of a horizontal turning shaft. First to fourth rotation shafts rotatably and coaxially supported by the frame, and first to fourth rotation shafts attached to the fixed frame and connected to the first to fourth rotation shafts, respectively. The first and second rotary driving machines
In the parallel crank mechanism, one joint in each first parallel four-bar link is arranged coaxially with the first fulcrum,
Each of the first links and one side of the base end of the first intermediate link are attached to the first to fourth rotating shafts, and the first and second intermediate links are formed to have the same link length. The free end of each hand link, wherein each second parallel bar link is offset outwardly with respect to the first parallel bar link and has a gap in the horizontal direction with respect to the axis of rotation. First and second hand members which are vertically separated from each other protrude from the portion, and a rotation transmission mechanism is disposed between the first and second intermediate links, so that when the hand member is drawn toward the rotation shaft, The first and second intermediate links are inclined beyond the first fulcrum in the horizontal direction on the opposite side to the hand member, with a gap in the radial direction between the rear of the hand member and the rotation axis. And the second hand member is appropriately linearly moved in the horizontal direction passing through the first fulcrum. With the, since the first and second handling member is freely pivoted about a first pivot mechanism for rotating the hand member is simplified, and,
Since the first to fourth rotating shafts are coaxially rotatably supported with the vertical line as the axis, the diameter of the rotating bearing for rotatably supporting the first to fourth rotating shafts should be as small as possible. And the flat space as a device becomes compact,
In addition, the use of small-diameter rotary bearings makes the apparatus inexpensive.

Further, when the hand member is pulled toward the rotation shaft, there is a gap in the radial direction between the rear of the hand member and the rotation shaft, so that the first and second intermediate links exceed the first fulcrum. Therefore, the first intermediate link is rotated at a large angle between the retracting direction and the protruding direction of the hand member, and the rotation of the first intermediate link is rotated by the rotation transmitting mechanism. At the same time, since the second intermediate link is rotated by the same angle, the hand member is largely displaced between the retracted state of the hand member and the projected state of the hand member for transporting the workpiece to an appropriate processing chamber. The horizontal linear movement stroke of the hand member can be increased, and the hand member can be displaced in a protruding state as far away from the center of rotation as possible, but the hand member is horizontally turned,
That is, in the retracted state of the hand member, the hand member is drawn toward the rotating shaft as much as possible, so that the turning radius required for the device can be made as small as possible, that is, the device can be made compact.

Further, since the first and second hand members are vertically separated from each other, the first and second hand members do not interfere with each other, and the first and second hand members do not interfere with each other. The hand link to which the hand member is attached
It is supported by a link connection that can be made as thin as possible without using a rotation transmission member and a rotation connector as before,
As a result, the height H2 on the base side of the two hand members can be reduced, so that the window of the vacuum processing chamber for entering and exiting the hand members can be reduced as much as possible.

Of course, in order to move the hand member linearly in the horizontal direction with the first fulcrum, which is the axis of the horizontal turning shaft, as the fulcrum, the first and second intermediate links need to have the same link length. However, since the second parallel four-bar link is arranged offset to the outside with respect to the first parallel four-bar link, the fifth fulcrum of the hand link, which is the base side of the hand member, and the first The hand member can move linearly in the horizontal direction using the first fulcrum as a fulcrum while maintaining the distance L2 between the fulcrum and the fulcrum. As described above, since the fifth fulcrum and the first fulcrum of the hand link, which is the base side of the hand member, are arranged while maintaining the distance L2, the first and second parallel crank mechanisms are coaxial. Can be arranged up and down.

Of course, the first and second rotary drives and the third and fourth rotary drives prevent the first and second hand members from interfering with each other and optionally, respectively. Since the workpiece is freely linearly moved and turned, the workpiece can be transported to an appropriate processing chamber by the first and second hand members without waiting time, and productivity is improved.

Further, since the first and second hand members do not interfere with each other and the first to fourth rotary drivers are mounted on a fixed frame, the first and second rotary members are attached to each other.
Can be turned horizontally without being limited to an angle. For this reason, the first and second hand members are swung to a free position irrespective of the swivel angle as compared with the conventional device which requires checking the swivel angle, that is, the swivel angle. Since the workpiece can be transported, the device is more convenient to use than in the past. In short, according to the first aspect of the present invention, it is possible to realize a two-arm transfer robot apparatus which is compact, easy to use, inexpensive, and has good productivity.

According to the second aspect of the present invention, the first and second hand members vertically separated from each other can freely displace a space defined by a horizontally disposed cover excluding the rotary shaft. , Dust and the like of the parallel crank mechanism disposed on the upper side of the cover fall on the workpiece to be handled by the parallel crank mechanism disposed on the lower side, particularly the lower parallel crank mechanism. There is no danger of adhesion.

Further, according to the third aspect of the invention, it is possible to reduce the diameter of a particularly expensive magnetic fluid seal for airtightness, which rotatably supports the first to fourth rotating shafts coaxially, as much as possible. Therefore, the device becomes inexpensive.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments. 1 to 10, reference numeral 1 denotes a fixed frame, and reference numerals 2 to 5 denote a first coaxially rotatably supported by the fixed frame 1 around a first fulcrum O1 which is the axis of the horizontal turning shaft. The fourth to fourth rotating shafts are appropriately supported via rotating bearings. For example, the fixed frame 1 is a vacuum chamber V.V. C
In order to maintain a vacuum state, airtight magnetic fluid seals 6 to 9 are provided on the respective rotating shafts.

Reference numerals 11 to 14 denote first to fourth rotary driving devices. The first to fourth rotary driving devices 11 to 14 are provided with a rotation transmission member such as a speed reducer, a sprocket or a pulley, and the like, which are appropriately connected. The first to fourth rotating shafts 2 to 5 are connected via rotating connectors such as chains or toothed belts.
It is connected to.

Reference numeral 15 denotes an inner first link. The first link 15 and the outer second link 18 are connected by a pair of first intermediate links 16 and 17 to form a first parallel four-bar link 19.
Are formed. Second link 18 and hand link 2
2 are connected to each other by a pair of second intermediate links 20 and 21 to form a second parallel four-bar link 23. The respective pivot points of the first intermediate links 16, 17 and the second link 18 are provided. With respect to the straight line connecting the third fulcrums O3 and O3, the straight line connecting the fourth fulcrums O4 and O4, which are the pivot points of the second intermediate links 20, 21 and the second link 18, is located in the X1 direction. So that the second parallel four-bar link 23 is offset in the X1 direction. In addition, hand link 2
A first hand member 25 protrudes from a free end of the second hand member 25.

Reference numeral 24 denotes a rotation transmission mechanism disposed between the first and second intermediate links.
Is a first gear 24A fixed to the first intermediate link 16
And a second gear 24B fixed to the second intermediate link 20 so as to mesh with the first gear 24A. The first intermediate links 16, 17 and the second intermediate links 20, 21 are formed to have the same link length, for example, the length L1, and the first link 15 and the first intermediate links 16, 17 are connected to each other. Are rotatably supported, for example, about a first fulcrum O1 and a second fulcrum O2 which are separated in the Y direction. One joint of the first parallel four-bar link 19 is arranged coaxially with the first fulcrum O1 which is the axis of the horizontal turning shaft, and is located on one side of the base end of the first intermediate link 16, 17. For example, 16 and the first link 15 are attached to the first and second rotating shafts 2 and 3. The first and second parallel four-bar links 19 and 23 and the rotation transmitting mechanism 24
These form a first parallel crank mechanism 26.

A second parallel crank mechanism 46 having substantially the same structure as that of the first parallel crank mechanism 26 is vertically separated from the first parallel crank mechanism 26 with the first fulcrum O1 as a rotation axis. Are located. That is, the first link 35 and the outer second link 38 are connected by a pair of first intermediate links 36 and 37 to form a first parallel four-bar link 39, and the second link 38 and the hand link 42 Are connected by a pair of second intermediate links 40, 41 to form a second parallel four-link 43, which is offset from the first parallel four-link 39 in the X1 direction of the first fulcrum O1. Placed. Of course, for example, a rotation transmission mechanism 44 is disposed between the first and second intermediate links 36 and 40.

The first link 35 and the first intermediate links 36 and 37 are connected, for example, to a first fulcrum O separated in the Y direction.
The first and second fulcrums O2 are rotatably supported respectively around the fulcrum O2. Further, the fact that one joint of the first parallel four-bar link 39 in the second parallel crank mechanism 46 is arranged coaxially with the first fulcrum O1, which is the axis of the horizontal turning shaft, is the first It is the same as the crank mechanism 26, and in this case, one of the base ends of the first intermediate links 36 and 37,
For example, 36 and the first link 35 are attached to the third and fourth rotating shafts 4,5. That is, similarly to the first parallel crank mechanism 26, the first and second parallel four-bar links 39 and 43 and the rotation transmitting mechanism 44 constitute a second parallel crank mechanism 46. A second hand member 45 protrudes from a free end of the hand link 42.

The above-mentioned 1 to 46 constitute a two-arm type transfer robot apparatus. Needless to say, a plurality of processing chambers are appropriately provided at a plurality of radial locations centered on the vertical first fulcrum O1 as in the conventional case.

In the above configuration, since the operations of the first and second parallel crank mechanisms 26 and 46 are the same, for example, the operation of the first parallel crank mechanism 26 will be described. As shown in FIG. 2, a straight line passing through the first and third fulcrums O1, O3 is inclined by an angle .theta.1 with respect to the straight line O1-X1. 2 and the first intermediate link 16 are rotated clockwise about the first fulcrum O1 by an angle θ, for example, θ = θ1 + θ2, about the first fulcrum O1.

In FIGS. 1 to 4, it is now assumed that the second rotary drive 12 is maintained in a stopped state, and the first link 15 fixed to the second rotary shaft 3 is maintained in a fixed state. It is assumed that When the first rotary shaft 2 and the first intermediate link 16 are rotated clockwise about the first fulcrum O1 by the angle .theta. The link 19 is connected to the first fulcrum O1 and the second fulcrum O2.
It moves in parallel in the Y1 direction with the fulcrum O2 as the fulcrum. In this case, the first intermediate link 16 is rotated clockwise about the third fulcrum O3 by the angle θ with respect to the second link 18. As a result, the second intermediate links 20 and 21 are rotated counterclockwise about the fourth fulcrum O4 by an angle θ with respect to the second link 18 via the rotation transmitting mechanism 24, and the second intermediate links 20 and 21 are rotated by the second parallel link. The four-bar link 23 moves in parallel in the Y1 direction with the fourth fulcrums O4 and O4 as fulcrums.

In the above description, focusing on the hand link 22 and the first hand member 25, when the first intermediate link 16 is rotated clockwise by an angle θ about the first fulcrum O1, the first The first hand member 25 is displaced in the Y1 direction by twice the amount of displacement of the intermediate link 16 in the Y1 direction.

That is, as shown in FIG. 8, a straight line passing through the first and third fulcrums O1, O3 is a straight line O1-X
As shown in FIG. 9, the first intermediate link 16 is moved from the state where the first intermediate link 16 is tilted by an angle θ1 with respect to the first fulcrum O1.
Clockwise at an angle θ centered at, for example, θ = θ1 + θ2
Only clockwise. In this case, FIG.
As shown in FIG. 9 and first and second intermediate links 16, 17, 20, formed with the same link length,
21 is L1, the third and fourth fulcrums O3,
If the interval in the X direction of O4 is L2 and the intervals in the X direction of the fulcrums are, for example, X11 to X16 as shown in the figure, X12 = X13 = L1 COSθ1 X14 = X16 = L1 COSθ2 = L1 COS (θ− θ1) Since X13 + L2 = X12 + X11 X14 + L2 = X16 + X15, it can be seen that X11 = L2 and X15 = L2.

That is, since X11 = X15 = L2,
When the first intermediate link 16 is rotated clockwise or counterclockwise about the first fulcrum O1, the hand link 22 and the first hand member 25 are moved to the fifth fulcrum O5.
, O5 on the same straight line while maintaining the initial state.
Moved in the direction. After all, the first parallel crank mechanism 26
When the hand link 22 moves in the Y direction, the hand link 22 moves between the first fulcrum O1 and the hand link 2
While maintaining the horizontal gap L0 between the second fulcrum 2 and the second fulcrum O5, it is moved in the Y direction on the same straight line passing through the fifth fulcrums O5 and O5 while maintaining the initial state.

Further, as shown in FIGS. 8 and 9, the distance between the first and third fulcrums O1 and O3 in the Y direction before and after the rotation of the first intermediate link 16 is, for example, Y
11 and Y12, Y11 = L1 SIN.theta.1 Y12 = L1 SIN.theta.2 = L1 SIN (.theta .-. Theta.1), and the third fulcrum O3 is moved in the Y1 direction by an interval (Y11 + Y12) by the rotation of the first intermediate link 16. Position displacement. Of course, if the first intermediate link 16 rotates as described above, the second intermediate link 20
1 rotates about the fourth fulcrum O4, and thus the first intermediate link 16 is pivoted about the first fulcrum O1 as described above.
For example, when rotated clockwise by the angle θ, the first
The hand member 28 has a large Y with an interval of 2 · (Y11 + Y12).
It is displaced in one direction.

Therefore, as shown in FIG. 1B, for example, the first parallel crank mechanism 26 is extended in the horizontal radial direction so that the first hand member 25 linearly moves in the Y1 direction. Then, the workpiece is carried in / out of the first hand member 25. Thereafter, the first parallel crank mechanism 26 is bent and the first hand member 25 is bent.
Is drawn in the direction of the first fulcrum O1, for example, FIG.
The state shown in (A) is the horizontal turning state of the first hand member 25.

Now, when the first hand member 25 is arranged in a horizontal turning state, the first and second rotary driving machines 11 and 12 are driven to rotate in synchronization with each other, and the first and second rotary driving machines 11 and 12 are rotated. When the rotating shafts 2 and 3 are rotated in the same direction at the same angular velocity, the first parallel crank mechanism 26 attached to the first and second rotating shafts 2 and 3 rotates and moves in the same direction as a whole. Therefore, while maintaining the state shown in FIGS. 2 and 4, the first parallel crank mechanism 26
Is turned clockwise or counterclockwise about the first fulcrum O1 at

After the first hand member 28 has been turned at an appropriate angle in this manner, the first rotary drive 11 is moved so that the first hand member 25 projects in the horizontal direction passing through the axis O1.
Is driven to rotate, and the first hand member 25 is displaced to the carry-in / out position of the workpiece.

Of course, after that, the first hand member 25 is displaced to the position of the horizontal turning state drawn toward the axis O1 as described above.

In FIGS. 1 to 4, the second parallel crank mechanism 46, which is vertically spaced apart from the first parallel crank mechanism 26, has the same configuration as the first parallel crank mechanism 26. Activated. That is, the third rotary drive 13 is rotationally driven while the fourth rotary drive 14 is stopped, and the second hand member 45 is horizontally moved to the loading / unloading position of the workpiece. You. After this, the second
When the hand member 45 is placed in a horizontal turning state, the third and fourth rotary driving devices 13 and 14 are driven to rotate in the same direction in synchronization with each other, and the second parallel crank mechanism 46 Are moved in the same direction. Of course, since the first parallel crank mechanism 26 and the second parallel crank mechanism 46 are vertically separated from each other,
Even if these are freely operated individually, they do not interfere with each other.

For example, as shown in FIG. 1A, the first and second parallel crank mechanisms 26 and 46 are respectively bent, and from this state, for example, as shown in FIG. Is rotated 90 degrees counterclockwise about the first fulcrum O1. After this,
For example, as shown in FIG. 10B, the second hand member 45 is extended in the horizontal radial direction by the second parallel crank mechanism 46, and the workpiece is loaded into the second hand member 45.・ It is carried out.

Of course, the first and second parallel crank mechanisms 2
6 and 46 attached to the first and second hand members 2
5, 45 are vertically separated from each other, and the links 22 and 4 for hands are respectively provided.
2, even if the first and second hand members 25, 45 are freely swiveled and linearly moved, these hand members 25, 45 and the parallel crank mechanisms 26, 4 are used.
6 does not abut.

When the hand member is pulled toward the rotation shaft as described above, there is a gap in the radial direction between the back of the hand member and the rotation shaft, and the first and second intermediate links are connected to the first and second intermediate links.
Since the first intermediate link is tilted in the horizontal direction opposite to the hand member beyond the fulcrum, the first intermediate link is rotated at a large angle between the retracting direction and the projecting direction of the hand member, and the first intermediate link is rotated by the rotation transmitting mechanism. Since the second intermediate link is rotated by the same angle at the same time as the rotation of the link, the second intermediate link is largely displaced between the retracted state of the hand member and the projected state of the hand member that transports the workpiece to an appropriate processing chamber. Thus, the horizontal linear movement stroke of the hand member can be increased.
That is, in spite of the fact that the hand member can be displaced to a protruding state as far as possible from the center of rotation, the hand member rotates as much as possible in the horizontal turning state of the hand member, that is, in the retracted state of the hand member. Since it is drawn to the shaft side, the turning radius required for the device can be made as small as possible, that is, it can be made compact.

Furthermore, since the first and second hand members are vertically spaced apart from each other, the first and second hand members do not interfere with each other, and the first and second hand members do not interfere with each other. The hand link to which the hand member is attached
It is supported by a link connection that can be made as thin as possible without using a rotation transmission member and a rotation connector as before,
As a result, the height H2 on the base side of the two hand members can be reduced, so that the window of the vacuum processing chamber for entering and exiting the hand members can be reduced as much as possible.

Of course, in order to move the hand member linearly in the horizontal direction with the first fulcrum, which is the axis of the horizontal turning shaft, as the fulcrum, the first and second intermediate links need to have the same link length. However, since the second parallel four-bar link is arranged offset to the outside with respect to the first parallel four-bar link, the fifth fulcrum of the hand link, which is the base side of the hand member, and the first The hand member can move linearly in the horizontal direction using the first fulcrum as a fulcrum while maintaining the distance L2 between the fulcrum and the fulcrum. As described above, since the fifth fulcrum and the first fulcrum of the hand link, which is the base side of the hand member, are arranged while maintaining the distance L2, the first and second parallel crank mechanisms are coaxial. Can be arranged up and down.

Of course, the first and second rotary drive units and the third and fourth rotary drive units do not cause the first and second hand members to interfere with each other and arbitrarily, respectively. Since the workpiece is freely linearly moved and turned, the workpiece can be transported to an appropriate processing chamber by the first and second hand members without waiting time, and productivity is improved.

Further, the mechanism for rotating the hand member is simplified, and the first to fourth rotating shafts are coaxially supported by rotation about a vertical line, so that the first to fourth rotating shafts are supported. The diameter of the rotating bearing for rotatably supporting the rotating shaft and the magnetic fluid seal for airtightness can be made as small as possible, so that the device becomes compact, and the use of a small-diameter rotating bearing and a small-diameter magnetic fluid seal is used. The device becomes cheaper.

Further, since the first and second hand members do not interfere with each other and the first to fourth rotary drivers are mounted on a fixed frame, the first and second rotary members are attached to each other.
Can be turned horizontally without being limited to an angle. For this reason, the first and second hand members are swung to a free position irrespective of the swivel angle as compared with the conventional device which requires checking the swivel angle, that is, the swivel angle. Since the workpiece can be transported, the device is more convenient to use than in the past. In short, according to the first aspect of the present invention, it is possible to realize a two-arm transfer robot apparatus which is compact, easy to use, inexpensive, and has good productivity.

As shown in FIGS. 10 and 11, the rotation transmitting mechanism 24 disposed between the first and second intermediate links is provided with a third fulcrum O of the first intermediate links 16 and 17.
3 and coaxially fixed, for example, a pulley 24C,
, A pulley 24D fixed coaxially with the fourth fulcrum O4 of the intermediate links 20, 21 and a belt 24E stretched between the pulleys 24C, 24D.

FIGS. 13 and 14 show the second embodiment of the present invention, in which the first and second hand members 25 and 45 vertically separated from each other are arranged in the horizontal direction excluding the rotating shaft. Is moved in a space defined by the cover 47 disposed in a position freely. For this reason, dirt, dust, etc. of the parallel crank mechanism arranged above the cover 47 drop onto the workpiece handled by the parallel crank mechanism arranged below, especially the lower parallel crank mechanism. It is particularly suitable as a transfer robot device for a semiconductor manufacturing apparatus or the like that performs processing in a vacuum atmosphere without fear of adhesion.

[0057]

As is apparent from the above description, in the transfer robot device according to the first invention, the inner first link and the outer second link are connected by a pair of first intermediate links. A first parallel crank mechanism including a first parallel four-bar link, a second parallel four-bar link in which the second link and the hand link are connected by a pair of second intermediate links, and the first parallel crank mechanism; A second parallel crank mechanism having substantially the same structure as that of the parallel crank mechanism is provided on a two-arm type transfer robot apparatus which is arranged vertically, and has a fixed frame and a center axis of a horizontal turning shaft. First to fourth rotating shafts rotatably and coaxially supported by the fixed frame around a first fulcrum;
First to fourth rotary driving devices attached to the fixed frame body and respectively connected to the first to fourth rotary shafts, wherein the first and second parallel crank mechanisms are: One joint of each first parallel four-bar link is disposed coaxially with the first fulcrum, and each first link and one side of the proximal end of the first intermediate link are connected to the first to the fourth. 4, the first and second intermediate links are formed with the same link length, and each of the second parallel four-bar links is connected to the first
A first vertically spaced apart from the free end of each hand link which is offset outwardly with respect to the parallel four-bar link of the first hand and has a gap in the horizontal direction with respect to the rotation axis.
And a second hand member is protruded, and a rotation transmission mechanism is disposed between the first and second intermediate links. When the hand member is drawn toward the rotation shaft, the rear of the hand member and the rotation shaft Have a gap in the radial direction, the first and second intermediate links are tilted horizontally beyond the first fulcrum and opposite to the hand member, and the first and second hand members are Since the first and second hand members are freely rotated around the first fulcrum while being appropriately linearly moved in the horizontal direction passing through the fulcrum, the mechanism for rotating the hand members is simplified, and Since the first to fourth rotating shafts are rotatably supported coaxially with the vertical line as the axis, the diameter of the rotating bearing for rotatably supporting the first to fourth rotating shafts is made as small as possible. And the flat space as a device becomes compact. Moreover the apparatus for using a small diameter of the rotary bearing less expensive.

Further, when the hand member is pulled toward the rotation shaft, there is a gap in the radial direction between the rear of the hand member and the rotation shaft, so that the first and second intermediate links exceed the first fulcrum. Therefore, the first intermediate link is rotated at a large angle between the retracting direction and the protruding direction of the hand member, and the rotation of the first intermediate link is rotated by the rotation transmitting mechanism. At the same time, since the second intermediate link is rotated by the same angle, the hand member is largely displaced between the retracted state of the hand member and the projected state of the hand member for transporting the workpiece to an appropriate processing chamber. The horizontal linear movement stroke of the hand member can be increased, and the hand member can be displaced in a protruding state as far away from the center of rotation as possible, but the hand member is horizontally turned,
That is, in the retracted state of the hand member, the hand member is drawn toward the rotating shaft as much as possible, so that the turning radius required for the device can be made as small as possible, that is, the device can be made compact.

Further, since the first and second hand members are vertically spaced apart from each other, the first and second hand members do not interfere with each other, and the first and second hand members do not interfere with each other. The hand link to which the hand member is attached
It is supported by a link connection that can be made as thin as possible without using a rotation transmission member and a rotation connector as before,
As a result, the height H2 on the base side of the two hand members can be reduced, so that the window of the vacuum processing chamber for entering and exiting the hand members can be reduced as much as possible.

Of course, in order to move the hand member linearly in the horizontal direction using the first fulcrum, which is the axis of the horizontal turning shaft, as the fulcrum, the first and second intermediate links must have the same link length. However, since the second parallel four-bar link is arranged offset to the outside with respect to the first parallel four-bar link, the fifth fulcrum of the hand link, which is the base side of the hand member, and the first The hand member can move linearly in the horizontal direction using the first fulcrum as a fulcrum while maintaining the distance L2 between the fulcrum and the fulcrum. As described above, since the fifth fulcrum and the first fulcrum of the hand link, which is the base side of the hand member, are arranged while maintaining the distance L2, the first and second parallel crank mechanisms are coaxial. Can be arranged up and down.

Of course, the first and second rotary driving devices and the third and fourth rotary driving devices do not cause the first and second hand members to interfere with each other and arbitrarily, respectively. Since the workpiece is freely linearly moved and turned, the workpiece can be transported to an appropriate processing chamber by the first and second hand members without waiting time, and productivity is improved.

Further, since the first and second hand members do not interfere with each other and the first to fourth rotary driving devices are mounted on a fixed frame, the first and second rotary members are attached to each other.
Can be turned horizontally without being limited to an angle. For this reason, the first and second hand members are swung to a free position irrespective of the swivel angle as compared with the conventional device which requires checking the swivel angle, that is, the swivel angle. Since the workpiece can be transported, the device is more convenient to use than in the past. In short, according to the first aspect of the present invention, it is possible to realize a two-arm transfer robot apparatus which is compact, easy to use, inexpensive, and has good productivity.

According to the second aspect of the present invention, the first and second hand members which are vertically separated from each other can freely displace a space defined by a horizontally disposed cover excluding the rotary shaft. , Dust and the like of the parallel crank mechanism disposed on the upper side of the cover fall on the workpiece to be handled by the parallel crank mechanism disposed on the lower side, particularly the lower parallel crank mechanism. There is no danger of adhesion.

Further, according to the third aspect of the present invention, it is possible to reduce the diameter of the particularly expensive airtight magnetic fluid seal which supports the first to fourth rotating shafts so as to be rotatable coaxially. Therefore, the device becomes inexpensive. For this reason, it is particularly suitable as a transfer robot device for a semiconductor manufacturing apparatus or the like that performs processing in a vacuum atmosphere.

[Brief description of the drawings]

FIG. 1A is a perspective view showing an embodiment of the present invention, and FIG. 1A is a view showing a turning state in which first and second parallel crank mechanisms 26 and 46 are bent, and FIG. FIG. 5 is a diagram showing a state where the first hand member 25 is linearly moved by the first parallel crank mechanism 26.

FIG. 2 is a plan view of FIG. 1;

FIG. 3 is a front view of FIG. 1;

FIG. 4 is a longitudinal sectional front view in FIG. 3;

FIG. 5 is a sectional view taken along line VV in FIG. 3;

6 is a sectional view taken along line VI-VI in FIG.

FIG. 7 is a sectional view taken along line VII-VII in FIG. 3;

FIG. 8 is a plan view for explaining an operation state of a main part of FIG. 3;

FIG. 9 is a plan view for explaining an operation state of a main part of FIG. 3;

FIG. 10 is a perspective view for explaining the operation state of FIG. 1;
FIG. 10A is a view showing a state where the second hand member 45 is turned by the second parallel crank mechanism 46.
FIG. 10B is a diagram showing a state where the second hand member 45 is linearly moved by the second parallel crank mechanism 46.

FIG. 11 is an enlarged plan view showing a modification of the main part of FIG. 3;

FIG. 12 is a sectional view taken along line XI-XI in FIG. 11;

FIG. 13 is a front view showing another embodiment of the present invention.

FIG. 14 is a plan view of FIG.

FIG. 15 is a sectional front view of a main part showing a conventional example.

16 is a longitudinal sectional side view of FIG.

FIG. 17 is a plan view for explaining the operation state of FIG. 15;

FIG. 18 is a plan view for explaining the use state of FIG. 15;

DESCRIPTION OF SYMBOLS 1 Fixed frame 2 to 5 First to fourth rotating shafts 6 to 9 Airtight magnetic fluid seal 11 to 14 First to fourth rotating drive 15, 35 First link 16, 17 first intermediate links 36, 37 first intermediate links 18, 38 second links 19, 39 first parallel four-bar links 20, 21 second intermediate links 40, 41 A pair of second intermediate links 22, 42 Hand links 23, 43 Second parallel four-bar links 24, 44 Rotation transmission mechanism 25 First hand member 26 First parallel crank mechanism 45 Second hand member 46 Second parallel crank mechanism 47 Cover O1 First fulcrum O2, second fulcrum O3 third fulcrum O4 fourth fulcrum O5 fifth fulcrum, which is the axis of the horizontal turning shaft.

Claims (3)

[Claims] 1. A first parallel four-node link in which an inner first link and an outer second link are connected by a pair of first intermediate links, and the second link and the hand link are formed by a pair of first and second hand links. A first parallel crank mechanism including a second parallel four-bar link connected by two intermediate links, and a second parallel crank mechanism having substantially the same structure as the first parallel crank mechanism.
Placed on a two-armed transfer robot device arranged vertically, a fixed frame and a rotatably coaxially supported by the fixed frame around a first fulcrum, which is the axis of the horizontal turning shaft. The first
To the fourth rotating shaft and the fixed frame,
A first to a fourth rotary driving device respectively connected to the first to the fourth rotary shafts, wherein the first and second parallel crank mechanisms are provided in each of the first parallel four-bar links. One joint is arranged coaxially with the first fulcrum, and each first link and one side of the base end of the first intermediate link are attached to the first to fourth rotation shafts, And a second intermediate link is formed with the same link length, and each second parallel four-bar link is offset outwardly with respect to the first parallel four-bar link,
First and second hand members vertically spaced apart from each other at the free end of each hand link having a gap in the horizontal direction with respect to the rotation axis are provided between the first and second intermediate links. A rotation transmission mechanism is disposed, and when the hand member is pulled toward the rotation shaft, a gap is provided in the radial direction between the rear of the hand member and the rotation shaft, and the first and second intermediate links are connected to the first and second intermediate links. The first and second hand members are appropriately linearly moved in the horizontal direction passing through the first fulcrum while being inclined in the horizontal direction opposite to the hand member beyond the fulcrum. A two-arm type transfer robot device, wherein a hand member is freely turned around a first fulcrum. 2. The first and second hand members, which are vertically separated from each other, are displaceably moved in a space defined by a horizontally disposed cover excluding a rotary shaft. The transfer robot device of the two-arm system described in the above. 3. The two-arm transport according to claim 1, wherein the first to fourth coaxially supported rotary shafts are rotatably supported via a hermetic magnetic fluid seal. Robot device.