JPH11169803A - Ultrasonic washer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a washer to wash the rear side of a material to be washed at the same time without lowering a washing effect on the surface of the material to be washed. SOLUTION: In this ultrasonic washer, notched recessed parts are provided in both the end parts in the longitudinal direction of a washing liquid lead-out part 22 longitudinally formed below an ultrasonic washer main body 1 and also a washing liquid jetting port 12 for washing the rear side of a substrate 20 is provided on the upper surface of a holding base 3. In this way, the ultrasonic washer mainbody 1 can be installed at an ideal neighboring distance without being checked by a chuck member 2 and moreover, the rear side of the substrate 20 can be washed at the same time when the surface thereof is washed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning apparatus for ultrasonically cleaning a substrate such as a semiconductor wafer or a glass substrate to be cleaned.

[0002]

2. Description of the Related Art As a conventional ultrasonic cleaning apparatus, for example, an apparatus described in Japanese Patent Application Laid-Open No. 6-461 by the present applicant is known. This conventional ultrasonic cleaning apparatus will be described with reference to FIGS.

FIG. 10 shows a conventional ultrasonic cleaning apparatus main body 11.
FIG. 11 is a diagram including a partial cross-section of the ultrasonic cleaning device 130 and the conventional ultrasonic cleaning device 130 as viewed from the front, and FIG. 11 is a diagram of the conventional ultrasonic cleaning device main body 111 as viewed from the bottom.

As shown in FIG. 10, an ultrasonic cleaning apparatus main body 111 has a configuration excluding an object to be cleaned 117 made of a substrate such as a semiconductor wafer or a glass substrate and a conveying means (not shown) for conveying the object. It has a substantially concave cross section and a box shape in the longitudinal direction, and is formed of stainless steel or the like.
The ultrasonic cleaning device main body 111 includes an ultrasonic vibrator 115 disposed on a vibration plate 111 a that is a ceiling surface of the ultrasonic cleaning device main body 111, and an ultrasonic vibrator 115.
And an ultrasonic oscillator 116 for driving the same.

An ultrasonic cleaning apparatus 130 is composed of the ultrasonic cleaning apparatus main body 111 and a conveying means (not shown) for conveying the object to be cleaned 117 at a constant speed in the direction of arrow Y.

The ultrasonic oscillator 116 is, for example, 950
The ultrasonic transducer 115 is driven by an ultrasonic signal of KHz.
That is, the apparatus is a high-megasonic-compatible apparatus that performs cleaning using a high-frequency ultrasonic vibrator.

The ultrasonic cleaning apparatus main body 111 has a vibration plate 111a of an ultrasonic vibrator 115 disposed in the concave portion serving as a ceiling surface, and is provided so as to face the vibration plate 111a. Angle θ (0 <
(θ <10 °) The lower surface including the inclined reflecting plate 111b is the bottom surface.

The vibration plate 111a, which is the ceiling surface, and the reflection plate 111b, which is the bottom surface, of the ultrasonic cleaning device main body 111 are fastened and fixed via bolts 119 and nuts 122 via packing 119. As shown in FIG. 11, the reflection plate 111 b has three cleaning liquid supply ports 112 on one side surface and two overflow discharge ports 114 on the other side surface of the cleaning liquid supply port 112. In addition, it has a cleaning liquid lead-out portion 126 formed in the center of the bottom surface of the reflecting plate 111b in a longitudinal shape, and a slit 125 formed in the center of the cleaning liquid lead-out portion 126.

A rectifying plate 118 having a substantially L-shaped cross section is attached to one side of the packing 119, and a plurality of slits 120 are formed in a lower portion of the rectifying plate 118 to perform rectifying action.

Next, the operation of the ultrasonic cleaning apparatus having the above configuration will be described.

As shown in FIG. 10, when the cleaning liquid 124 is supplied from the cleaning liquid supply port 112 into the ultrasonic cleaning apparatus main body 111 in the direction of arrow X, the cleaning liquid 124 is supplied to the rectifying plate 118.
Rectified by the slit 120 of the ultrasonic cleaning device main body 11
1 flows in a laminar flow, and has a uniform shape along the cleaning liquid jet 113, and the cleaning object 1
Squirted on 17. At this time, the ultrasonic vibrator 115
The reflecting plate 1, which is driven by an ultrasonic signal and applies ultrasonic waves through the vibration plate 111a, is a bottom surface of the ultrasonic cleaning apparatus main body 111.
Radiate toward 11b. Since the reflecting plate 111b is inclined by a predetermined angle θ, the ultrasonic waves 123a and 123b reflected by the reflecting plate 111b repeatedly converge on the cleaning liquid jet 113 while being repeatedly reflected, and are guided to the ultrasonic deriving unit 126. A powerful ultrasonic cleaning liquid is irradiated onto the object to be cleaned 117 from a slit 125 (shown in FIG. 11).

[0012]

As shown in FIG. 10, in a conventional ultrasonic cleaning apparatus 130, an object to be cleaned 117 is moved downward by a conveying means (not shown) such as a roller below the cleaning liquid jet port 113 by a roller. Washing is performed by passing at a constant speed in the Y direction, that is, in one direction.

The ultrasonic cleaning apparatus 130 is a single-wafer type cleaning apparatus that transports and cleans objects to be cleaned 117 made of a substrate such as a semiconductor wafer or a glass substrate one by one by a transport means (not shown). .

This type of single-wafer type cleaning apparatus (single-wafer type is
The cleaning of the cleaning object one by one) includes cleaning the cleaning object by passing the cleaning object at a constant speed using a roller or the like, such as the ultrasonic cleaning apparatus 130, or a different type. For example, there is a configuration in which the back surface of an object to be cleaned is fixed on a suction plate by vacuum suction, and this is rotated at a high speed for cleaning.

The cleaning of the object to be cleaned 117 by the conventional ultrasonic cleaning apparatus 130 as shown in FIG.
Since a plurality of ultrasonic cleaning apparatuses 130 are used side by side to clean the upper surface of the substrate, a large amount of cleaning liquid is required.

When the object to be cleaned 117 is vacuum-adsorbed onto the suction plate for cleaning, the back surface of the object to be cleaned 117, that is, the surface being adsorbed cannot be cleaned.

Further, the apparatus for cleaning the both sides of the object to be cleaned by transporting the object to be cleaned by the transporting means is configured to pass through a vertically divided cleaning apparatus for cleaning, so that the apparatus is not used. Increase in size.

On the other hand, with the recent increase in the degree of integration of semiconductors, a higher degree of cleanliness is required for cleaning semiconductor wafers and the like. In addition, due to the higher degree of integration of semiconductors, the semiconductor manufacturing process is becoming more sophisticated and diversified, and other processes are required. In order to prevent contamination of the object, it is required that both surfaces of the object to be cleaned be cleaned to maintain a high degree of cleaning. Further, there is a demand for an apparatus that requires a small amount of a used liquid such as a cleaning liquid and is downsized.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and is directed to an ultrasonic cleaning apparatus for ultrasonically cleaning an object to be cleaned such as a semiconductor wafer, in particular, a high-speed rotating single-wafer ultrasonic cleaning apparatus. It is an object of the present invention to provide an ultrasonic cleaning apparatus which is small in size and capable of cleaning the back surface without deteriorating the cleaning effect on the front surface of the object to be cleaned.

[0020]

SUMMARY OF THE INVENTION An ultrasonic cleaning apparatus according to the present invention comprises a holding table for fixing and holding an object to be cleaned, and an object to be cleaned which is provided on the holding table and conveyed one by one by conveying means. A substrate supporting means for supporting at a position separated by a predetermined distance from the upper surface of the holding table, a holding means for engaging and holding an end of an object to be cleaned placed on the substrate supporting means, and rotating the holding table. A driving unit, and an ultrasonic cleaning device main body disposed above the holding table and performing ultrasonic cleaning on the object to be cleaned, wherein the ultrasonic cleaning device main body has a pattern forming surface of the object to be cleaned. An ultrasonic transducer whose length in the longitudinal direction is larger than at least, a reflector provided at a predetermined angle with respect to the surface of the ultrasonic transducer, and a longitudinal plate at the center of the reflector. A cleaning liquid outlet formed so as to project downward and A longitudinally formed slit at the center of the cleaning liquid lead-out part, and the longitudinal ends of the cleaning liquid lead-out part have a depth that does not contact the holding means when approaching the object to be cleaned by a predetermined distance. And a notch concave portion whose length from the end of the object to be cleaned is outside the pattern forming surface of the object to be cleaned.

Further, the substrate supporting means according to the present invention comprises:
It comprises at least three holding pins on the holding table.

The holding means according to the present invention comprises a chuck member capable of engaging and holding at least three ends of the object to be cleaned and opening and closing.

Further, the holding table according to the present invention is provided with a cleaning liquid jet port for jetting a cleaning liquid onto the back surface of the object to be cleaned placed on the substrate supporting means for cleaning.

Further, in the holding table according to the present invention, a convex portion having a predetermined height is provided on a peripheral portion.

Further, the ultrasonic cleaning apparatus main body according to the present invention is configured so as to be able to retreat from a transport path of a transport means for transporting an object to be cleaned.

Further, the ultrasonic vibrator according to the present invention comprises:
It is driven at an ultrasonic drive frequency of 500 KHz or more.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an ultrasonic cleaning apparatus according to the present invention will be described below with reference to the drawings.

FIG. 1 is a side view including a partial cross section showing the whole of an ultrasonic cleaning apparatus 15 as a third embodiment according to the present invention, and FIG. 2 is a front view of the ultrasonic cleaning apparatus 15 according to the present invention. 3 is a partially enlarged view of the ultrasonic cleaning device 15 shown in FIGS. 1 and 2, FIG. 4 is a plan view of the ultrasonic cleaning device 15 shown in FIG. 2, and FIG. 5 is FIG. FIG. 6 is a diagram showing a semiconductor wafer as an object to be cleaned, and FIGS. 7 and 8 show first and second embodiments of the ultrasonic cleaning device according to the present invention. FIG. 9 is a side view including a partial cross section, and FIG. 9 is a diagram illustrating the relationship between the intensity of ultrasonic waves and the distance.

First and second embodiments of the ultrasonic cleaning apparatus according to the present invention will be described with reference to FIGS.

As shown in FIGS. 7 and 8, the first and second embodiments of the ultrasonic cleaning apparatus according to the present invention use the basic structure of the ultrasonic cleaning apparatus 111 shown in FIG. The ultrasonic cleaning apparatus 130 is configured such that the object to be cleaned 117 is conveyed in one direction by the conveying means, the object to be cleaned such as a semiconductor wafer is fixed and rotated at high speed, and the back surface of the object to be cleaned is also washable. Is characterized by the fact that

The high-speed rotation type single-wafer ultrasonic cleaning apparatus can rotate the cleaning liquid on the object to be washed by centrifugal force and dry it by rotating at a high speed during and after the washing. There is an advantage that no dust remains.

As shown in FIGS. 7 and 8, this ultrasonic cleaning apparatus comprises an ultrasonic cleaning apparatus main body 1 and a holding table 3 for fixing and holding a substrate 20 such as a semiconductor wafer or the like to be cleaned.
And a plurality of needle-like holding pins 3b as substrate supporting means provided on the holding table 3 and a hook-shaped chuck member 2 as holding means.

The holding means 3, holding pins 3b and chuck member 2 constitute a fixing means.

The details of the structure of the ultrasonic cleaning device main body 1 will be described later, but it is substantially the same as that of the conventional ultrasonic cleaning device main body 111.

In the ultrasonic cleaning apparatus of the first embodiment shown in FIG. 7, the vibration surface including the ultrasonic vibrator of the ultrasonic cleaning apparatus main body 1 is smaller than that of the semiconductor wafer.
The ultrasonic cleaning apparatus according to the second embodiment shown in FIG. 8 is different from the ultrasonic cleaning apparatus body 1 in that the vibration surface including the ultrasonic vibrator of the ultrasonic cleaning apparatus main body 1 is larger than the semiconductor wafer.

As shown in FIGS. 7 and 8, this ultrasonic cleaning apparatus is provided with a cleaning liquid supply port 18 of the ultrasonic cleaning apparatus main body 1.
The cleaning liquid composed of pure water or the like supplied from the ultrasonic vibrator 4
As a result, ultrasonic vibration is applied to irradiate the surface of the substrate 20. The back surface of the substrate 20 is supported by, for example, four of the holding pins 3b. At least three portions of the peripheral edge portion 20b of the substrate 20 are engaged and held by the chuck member 2, and the holding table 3 is moved by an arrow X. The entire surface of the substrate 20 can be cleaned by being rotationally driven by a driving means such as a motor (not shown) in the direction.

On the other hand, in this ultrasonic cleaning apparatus, since the substrate 20 is arranged at a predetermined distance from the upper surface of the holding table 3 by the holding pins 3b, a space is created on the back side of the substrate 20, and the space for cleaning the back surface of the substrate 20 is formed. By providing the cleaning liquid jet port 12, it is possible to simultaneously clean the back surface together with the front surface.

In the ultrasonic cleaning apparatuses according to the first and second embodiments, at least three portions of the peripheral edge 20b of the substrate 20 are fixed by the chuck member 2, so that the chuck as the holding means is used. The member 2 protrudes above the surface of the substrate 20 in a convex shape. The protrusion by the chuck member 2 is approximately 8 mm to 1 mm from the surface of the substrate 20.
The height is about 0 mm.

However, in order to reliably transmit ultrasonic vibrations to the surface of the substrate 20 and obtain sufficient cleaning power, the holding force for holding the cleaning liquid on the surface of the substrate 20 by the action of surface tension is required. It is desirable that the ultrasonic cleaning apparatus main body 1 be brought close enough distance over the entire surface of the substrate 20 so as to be obtained. Therefore, in the conventional ultrasonic cleaning apparatus 130 as shown in FIG.
11 is installed approximately 3 mm to 5 mm above the surface of the object 117 to be cleaned. The same applies to a configuration in which an object to be cleaned is vacuum-adsorbed on an adsorption plate to be cleaned.

Therefore, as shown in FIG. 7, if the longitudinal width of the ultrasonic cleaning apparatus main body 1 as the first embodiment is reduced by avoiding the chuck member 2, the width of the main body 1 is about 3 mm from the surface of the substrate 20 as before. Although it is possible to install the ultrasonic cleaning device main body 5 mm above, when the longitudinal width of the ultrasonic cleaning device main body 1 is reduced, the longitudinal width of the ultrasonic vibrator 4 is also relatively reduced at the same time. The entire surface cannot be cleaned, and the effective cleaning area decreases. In addition, a portion that cannot be cleaned is formed on the outer peripheral portion of the substrate 20 and cannot be completely cleaned, and it is also difficult to distinguish a cleaned portion from a non-cleaned portion.

Therefore, as shown in FIG. 8, when the width of the ultrasonic vibrator 4 in the longitudinal direction is made larger than the outer diameter of the substrate 20, the convex portion of the chuck member 2 is avoided and Needs to be installed at least 10 mm above the surface of the device.

However, as shown in FIG. 9, the intensity of the ultrasonic wave radiated from the ultrasonic vibrator 4 of the ultrasonic cleaning apparatus main body 1 is such that the distance from the surface of the substrate 20 to be cleaned is 10 mm.
If it exceeds mm, it will begin to decrease sharply, and the cleaning effect will decrease.

FIG. 9 shows a case where a sensor is arranged at the position of the measuring point D at a flow rate of 12 liter / min, an oscillator output of 600 W (watt), and the distance between the lower surface of the ultrasonic cleaning device and the sensor is 5 mm, 10 mm as shown in the figure. .. Are the sound pressures of the ultrasonic waves when they are separated from each other, in this case, the values measured by converting to the voltage (V).

As is apparent from FIG. 9, when the ultrasonic cleaning apparatus and the object to be cleaned are separated from each other by a predetermined distance or more, the output of the ultrasonic wave is sharply reduced. Therefore, an ultrasonic cleaning apparatus having an ultrasonic cleaning power within a range shown by oblique lines is desired.

From this viewpoint, the present inventor has improved the ultrasonic cleaning apparatus shown in FIGS. 7 and 8 and invented an ultrasonic cleaning apparatus having a sufficient ultrasonic cleaning power.

Hereinafter, an ultrasonic cleaning apparatus 15 according to a third embodiment of the present invention will be described with reference to FIGS. Parts having the same configuration and function as those of the ultrasonic cleaning apparatus shown in FIGS. 7 and 8 are denoted by the same reference numerals.

As shown in FIG. 1 and FIG.
The ultrasonic cleaning apparatus 15 having the a and the lower base 15b includes an ultrasonic cleaning apparatus main body 1, a holding table 3 for fixing and holding a substrate 20 as an object to be cleaned such as a semiconductor wafer, and a substrate support provided on the holding table 3. A plurality of needle-like holding pins 3 as means
b, and a hook-shaped chuck member 2 as a holding means.

The holding means 3, the holding pins 3b, and the chuck member 2 constitute a fixing means.

As shown in FIG. 2 and FIG. 4, the holding table 3 has a disk shape, and the peripheral portion has a convex portion 3 for preventing the washing liquid from scattering.
a. The projection 3 a is formed at least higher than the surface of the substrate 20. A cleaning liquid discharge duct 25 for discharging the cleaning liquid during or after cleaning is provided at two locations in the inner peripheral side of the convex portion 3a in this case. The cleaning liquid discharge duct 25 may not be provided at two places, and may be provided at at least one place as appropriate.

The holding pins 3b as the substrate supporting means on the holding table 3 are formed of needle-like members, and support the back surface of the substrate 20 at one point so as not to contaminate the back surface. In the embodiment shown in FIG. 4, the holding pins 3b are arranged at four positions at equal intervals. Further, the chuck member 2 as the holding means is provided with the substrate 2
It is arranged at four places at equal intervals along the circumference of zero. As shown in FIG. 3, the chuck member 2 can be opened and closed by an opening / closing mechanism (not shown), and when the substrate 20 is received from above in the open state and the substrate 20 is placed on the holding pins 3b. 6. Close the peripheral edge 20b of the substrate 20 shown in FIG.
Is fixed by engagement. The holding pin 3b and the chuck member 2 may be provided in at least three places.

As shown in FIG. 1 and FIG.
One end of the shaft 3 is connected to the center of the back side of the holding base 3 and the other end is connected to a driving means (not shown). The driving means allows the shaft 13 to rotate forward and backward (see FIGS. 1 and 2). (Rotated in the direction of arrow X). This rotation is about 18
00 to 2000 r.p. p. m (revolution per minute). Further, a cleaning liquid supply path 24 for supplying a cleaning liquid for cleaning the back surface of the substrate 20 is formed at the rotation center of the shaft 13, and penetrates the center of the holding table 3 to be at the rotation center of the upper surface of the holding table 3. Cleaning liquid jet for back side 12
Are arranged.

On the other hand, a substantially hemispherical cover 15a provided on the upper part of the ultrasonic cleaning device 15 is provided with a substantially cylindrical lower base 15b.
The ultrasonic cleaning device main body 1 is attached and fixed to the inner surface of the ultrasonic cleaning device 1 in a hanging manner via a pair of support members 16. The cover 15a prevents the cleaning liquid from scattering when cleaning the object to be cleaned, and prevents entry of impurities from the outside.

As shown in FIG. 2, the ultrasonic cleaning apparatus main body 1 of the ultrasonic cleaning apparatus 15 includes an upper case 1a made of stainless steel having a thin rectangular shape, and a vibration plate 1b having a substantially concave cross section and a longitudinal shape. The ultrasonic vibrator 4 disposed in the concave portion of the vibration plate 1b is provided opposite to the vibration plate 1b and inclined at an angle θ (0 <θ <10 °) with respect to the surface of the ultrasonic vibrator 5. The length of the ultrasonic transducer 4 in the longitudinal direction shown in FIG. 1 is larger than the pattern forming surface 20a of the substrate 20 in the radial direction. Cleaning is possible over the entire surface. Further, the width of the ultrasonic transducer 4 in the longitudinal direction is equal to the pattern forming surface 20 of the substrate 20.
As long as the ultrasonic vibration can be transmitted to the entire range of a, the substrate may have a radial length greater than the diameter of the substrate 20, and if the substrate 20 has a rectangular shape,
The width may be the same as the width in the longitudinal direction (if the short direction and the longitudinal direction have the same length, either may be used). FIG.
As shown in (1), the semiconductor wafer serving as the substrate 20 has an orientation flat surface in a part thereof, and the radial length may be the radial length on the outer peripheral surface other than the orientation flat surface.

As shown in FIGS. 2 and 4, the upper case 1a, the diaphragm 1b and the reflector 1b are fastened and fixed in a hermetically sealed state by a plurality of bolts 10 and nuts 11 via a packing 9. And the ultrasonic vibrator 4
It is connected to a connector 5 provided on the upper case 1 a via a cable 6, and this connector 5 is connected to an ultrasonic oscillator 8 via a cable 7. This ultrasonic oscillator 8
Drives the ultrasonic transducer 4 with an ultrasonic signal. Further, the ultrasonic oscillator 8 can use an ultrasonic signal of 500 KHz or more. In this embodiment, the ultrasonic oscillator 8 is a high-megasonic-compatible device that drives the ultrasonic vibrator 4 at a driving frequency of an ultrasonic signal of 950 KHz. ing.

As shown in FIGS. 1 and 4, one of the longitudinal end surfaces of the ultrasonic cleaning apparatus main body 1 has a cleaning liquid supply port 1 provided thereon.
A cleaning liquid 23 such as pure water is supplied from the cleaning liquid supply port 18. As shown in FIG. 2, the reflector 1 c has a cleaning liquid outlet 22 formed in the center so as to be elongated and protruding downward, and a slit 14 formed in the center of the cleaning liquid outlet 22. doing.

As shown in FIGS. 1 and 3, recesses 22a are formed at both ends in the longitudinal direction of the cleaning liquid outlet 22.
Are formed. The concave portion (notched concave portion) 22a of the cleaning liquid lead-out portion 22 is a notch corresponding to the depth corresponding to the convex portion of the chuck member 2 and the width in the radial direction and the circumferential direction.

If the chuck member 2 is a protrusion of approximately 8 mm to 10 mm above the surface of the substrate 20, the notch concave portion 22a may be formed to have a depth d of approximately 5 mm.
Therefore, even when the longitudinal width of the ultrasonic vibrator 4 and the cleaning liquid outlet 22 is larger than the diameter of the substrate 20, the ultrasonic cleaning apparatus main body 1 is located within a distance of approximately 3 mm to 5 mm above the surface of the substrate 20. Can be arranged.

The length x in the radial direction of the substrate 20 of the concave portion 22a of the cleaning liquid outlet portion 22 is the same as the substrate 20 shown in FIG.
Must be formed outside the pattern forming surface 20a. That is, since the pattern forming surface 20a is formed at least inside the peripheral edge portion 20b of the substrate 20,
The range of this peripheral edge 20b or this peripheral edge 20b
Is formed by cutting out a part of the cleaning liquid lead-out portion 22 in a range from to the vicinity of the outermost peripheral portion of the pattern forming surface 20a.

The cleaning liquid outlet 2 in the circumferential direction of the substrate 20
Since the width of the cleaning liquid outlet 22 is larger than that of the chuck member 2, the width of the recess 22 a is not in contact with the chuck member 2 if the width of the cleaning liquid outlet 22 is cut off. This is because the size of the chuck member 2 for engaging and holding the substrate 20 needs to be made as small as possible from the viewpoint of cleaning.

With the above configuration, the ultrasonic cleaning apparatus main body 1
Can be arranged at an ideal close distance where a high cleaning effect can be expected with respect to the surface of the substrate 20 to be cleaned. Since the peripheral edge portion 20b of the object can be cleaned at the same time, not only the cleaning effect on the surface of the object to be cleaned can be maintained, but also the high degree of cleaning of the entire apparatus can be maintained.

Next, the operation of the ultrasonic cleaning device 15 according to the present invention will be described.

As shown in FIG. 5, when supplying the substrate 20 as an object to be cleaned, the cover 15a of the ultrasonic cleaning device 15 is used.
The opening is automatically opened by about 90 degrees about the support shaft 28 by an opening / closing mechanism (not shown), and the ultrasonic cleaning device body 1 attached to the cover 15a in a hanging manner by the support member 16 is also retracted integrally.

The substrate 20 is transported by the transport mechanism 30 and placed on the holding pins 3b on the holding table 3. Prior to this, the chuck members 2 (four in this embodiment) provided on the holding table 3 are opened by an opening / closing mechanism (not shown) to receive the substrate 20.

The transport mechanism 30 for feeding and unloading the substrate 20 onto and from the holding table 3 holds and transports the substrates 20 one by one with a hook-shaped claw 30a provided at the tip of an arm-shaped member. I do.

When the substrate 20 is mounted on the holding pins 3b (four in this embodiment) of the holding table 3, FIGS.
As shown in (2), the chuck member 2 is closed and the peripheral edge 20b of the substrate 20 is engaged and held and fixed.

When the substrate 20 is fixed, the cover 15a is automatically closed by an opening / closing mechanism (not shown) as shown in FIG.

When the operation of the ultrasonic cleaning apparatus 15 is started, a cleaning liquid 23 such as pure water is supplied from the cleaning liquid supply port 18 into the ultrasonic cleaning apparatus main body 1 and filled therein. From the substrate 20 onto the substrate 20. At this time, the ultrasonic vibrator 4 is driven by an ultrasonic signal (950 KHz in this case) from the ultrasonic oscillator 8, and the ultrasonic wave is transmitted to the reflecting plate 1c, which is the bottom surface of the ultrasonic cleaning apparatus main body 1, via the vibration plate 1b. It is radiated toward.

The reflection plate 1c has a predetermined angle θ (0 <θ <10
°), the ultrasonic waves 17a and 17b reflected by the reflection plate 1c repeatedly converge on the cleaning liquid jet port 21 while being repeatedly reflected, are guided to the ultrasonic wave deriving section 22, and are retained from the slit 14. A powerful ultrasonic cleaning liquid is irradiated onto the rotating substrate 20 fixed on the table 3 to clean the surface. During this cleaning, the convex portion 3a of the holding table 3 acts as a weir to prevent the cleaning liquid 23 from being scattered by centrifugal force,
The cleaning liquid 23 is effectively guided to the cleaning liquid discharge duct 25, and is discharged to the outside of the ultrasonic cleaning device 15 through the cleaning liquid discharge port 26 during and after the cleaning.

The cleaning liquid is also radiated to the rear surface of the substrate 20 from the cleaning liquid jet port 12 for the rear surface provided at the center of the upper surface of the holding table 3. At this time, the strong ultrasonic wave irradiated from the ultrasonic cleaning device main body 1 to the surface of the substrate 20 is applied to the substrate 2.
0, the back surface of the substrate 20 can be cleaned by ultrasonic cleaning, the back surface of the substrate 20 can be cleaned at the same time, and the dirt attached to the surface of the substrate 20 is scattered. Can be prevented from re-adhering to the back surface. The irradiation of the cleaning liquid on the back surface of the substrate 20 is different from the irradiation of the cleaning liquid on the front surface. If the cleaning liquid is uniformly irradiated to the back surface of the substrate 20 to some extent, a desired cleaning effect, that is, dirt or the like adhering to the surface of the substrate 20 is obtained. It is possible to obtain a cleaning effect such as prevention of re-adhesion. Therefore, the amount of the cleaning solution used may be smaller than that of the substrate surface.

When the cleaning of both surfaces of the substrate 20 is completed, the jetting of the cleaning liquid from the ultrasonic cleaning device main body 1 and the cleaning liquid jet port 12 for the back surface is stopped. After the jetting of the cleaning liquid is stopped, the holding table 3 is continuously rotated for a predetermined time, and the cleaning liquid remaining on both surfaces of the substrate 20 is scattered and dried.

When the cleaning of the substrate 20 is completed, as shown in FIG. 5, the cover 15a and the chuck member 2 of the ultrasonic cleaning device 15 are opened again, and the cleaned substrate 20 is gripped and carried out by the transport mechanism 30. You. Then, the same operation is repeated while receiving the substrate 20 as a new object to be cleaned.

[0072]

As described above, according to the ultrasonic cleaning apparatus of the present invention, especially in a high-speed rotating single-wafer ultrasonic cleaning apparatus, the back surface can be cleaned without deteriorating the cleaning effect on the surface of the object to be cleaned. Can also be performed at the same time.

[Brief description of the drawings]

FIG. 1 is a side view including a partial cross section showing an entire ultrasonic cleaning apparatus 15 as a third embodiment according to the present invention.

FIG. 2 is a sectional view of the ultrasonic cleaning device 15 according to the present invention as viewed from the front.

FIG. 3 is a partially enlarged view of the ultrasonic cleaning device 15 shown in FIGS. 1 and 2;

FIG. 4 is a plan view of the ultrasonic cleaning apparatus 15 in the state shown in FIG.

FIG. 5 is a view showing the operation of the ultrasonic cleaning device 15 shown in FIG.

FIG. 6 is a view showing a semiconductor wafer as an object to be cleaned.

FIG. 7 is a side view including a partial cross section as a first embodiment of the ultrasonic cleaning apparatus according to the present invention.

FIG. 8 is a side view including a partial cross section of a second embodiment of the ultrasonic cleaning apparatus according to the present invention.

FIG. 9 is a diagram showing the relationship between the intensity of ultrasonic waves and the distance.

FIG. 10 is a front view of an ultrasonic cleaning apparatus 130 including a conventional ultrasonic cleaning apparatus main body 111.

FIG. 11 is a view of a conventional ultrasonic cleaning apparatus main body 111 viewed from the bottom.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Ultrasonic cleaning device main body 1a Upper case 1b Vibration plate 1c Reflector plate 2 Chuck member 3 Holder 3b Holding pin 4 Ultrasonic vibrator 8 Ultrasonic oscillator 12 Cleaning liquid jet for back surface 15 Ultrasonic cleaning device 15a Cover 17a Ultrasonic 17b Ultrasonic wave 20 Substrate 20a Pattern forming surface of substrate 20b Peripheral edge of substrate 21 Cleaning liquid jet port 22 Cleaning liquid outlet 22a Concave of cleaning liquid outlet 23 Cleaning liquid

Claims (7)

[Claims] 1. A holding table for fixedly holding an object to be cleaned, and a plurality of objects to be cleaned which are provided on the holding table and which are conveyed one by one by a conveying means are supported at a position separated by a predetermined distance from the upper surface of the holding table. Substrate support means, holding means for engaging and holding an end of the object to be cleaned placed on the substrate support means, drive means for rotating and driving the holding table, and disposed above the holding table. An ultrasonic cleaning device main body that performs ultrasonic cleaning on the object to be cleaned, wherein the ultrasonic cleaning device main body has a length that is at least longer in a longitudinal direction than a pattern formation surface of the object to be cleaned. An ultrasonic oscillator, a reflector provided at a predetermined angle to the surface of the ultrasonic oscillator, and a cleaning liquid deriving portion formed in the center of the reflector in a longitudinal shape and protruding downward, Formed in the center of the cleaning liquid outlet portion in a longitudinal shape. A slit is provided, at both ends in the longitudinal direction of the cleaning liquid outlet portion, when approaching the object to be cleaned by a predetermined distance, the depth is not in contact with the holding means and the length from the end of the object to be cleaned. Is provided with a cutout concave portion which is outside the pattern forming surface of the object to be cleaned. 2. The ultrasonic cleaning apparatus according to claim 1, wherein said substrate supporting means comprises at least three or more holding pins on said holding table. 3. The ultrasonic cleaning apparatus according to claim 1, wherein said holding means is a chuck member capable of engaging and holding at least three ends of said object to be cleaned and capable of opening and closing. 4. A cleaning liquid jet port for jetting a cleaning liquid onto a back surface of an object to be cleaned placed on the substrate support means to perform cleaning. 2. The ultrasonic cleaning device according to 1. 5. The ultrasonic cleaning apparatus according to claim 1, wherein the holding table is provided with a convex portion having a predetermined height on a peripheral portion. 6. The ultrasonic cleaning apparatus according to claim 1, wherein said ultrasonic cleaning apparatus main body is configured to be able to retreat from a transport path of a transport means for transporting an object to be cleaned. 7. The ultrasonic cleaning apparatus according to claim 1, wherein said ultrasonic transducer is driven at an ultrasonic driving frequency of 500 KHz or more.