JPH11157610A - Stocker - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stocker for improving reliability by simplifying a structure to reduce costs for maintenance and repair and shortening a time for carrying-in/out operation. SOLUTION: A shelf 30 is installed in a housing 20 and a carrier box 10 carried from the outside is placed thereon. A robot 60 carries the carrier box 10 from the outside to be placed on the shelf 30 or transfers the carrier box 10 by using a horizontal rail 43 and a vertical rail 55 to be carried from the shelf 30 to the outside. Before the carrier box 10 is carried in or out, it is temporarily held in readiness in at least one shared port 200 for carry-in/out to control the operation of the shared port 200.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a stocker.
More particularly, the present invention relates to a stocker having a port provided with a carry-in / carry-out operation unit for a carrier box.

[0002]

2. Description of the Related Art Generally, a stocker carries in a carrier box on which wafers that have completed a preceding process are loaded,
This is a facility for temporarily storing and then carrying it out to the outside as the subsequent process proceeds.

FIG. 3 is a partially cutaway perspective view schematically showing a conventional stocker facility structure, and FIG. 4 is a longitudinal sectional view taken along the line BB 'of FIG. As shown, the stocker 1 has a housing 20, shelves 30 installed in multiple layers in the housing 20 for storing the carrier boxes 10 carried into the stocker 1, and a stocker 1 stored in the stocker 1. Take the carrier box 10 out of the stocker 1,
A loading / unloading section 100 for loading an external carrier box 10 into the stocker 1, a carrier box 10 placed in the loading / unloading section 100 being transferred to a shelf 30, or a carrier box 10 loaded on the shelf 30. And a robot 50 for transferring the robot to the loading / unloading unit 100.

In order to transfer the robot 50 in the horizontal and vertical directions, horizontal rails 41 and 43 and a vertical rail 55 are installed in the housing 20. The loading / unloading unit 100 is provided at the end of each stocker 1. Loading and unloading port 10 protruding from
0a, 100b, inside the housing 20, and the loading / unloading port 10
It comprises a carry-in and carry-out transfer section formed over 0a and 100b.

That is, the carrier box 10 that has completed the preceding step is placed in the carry-in port 100a, carried into the stocker 1 via the carry-in / transfer section, and placed on the shelf 30 inside the stocker 1. The carrier box 10 is placed in the unloading port 100b through the unloading and transferring unit and is ready to be unloaded.

Since the carry-in port 100a and the carry-out port 100b, and the carry-in / transport portion and the carry-out / transport portion have the same structure, the carry-in port 100a and the carry-in / transport portion will be described below as an example.

Referring to FIG. 3 and FIG.
In the front of 0a, the entrance 11 into which the carrier box 10 is loaded
0 is formed, and a signal button 120 is provided to notify the control unit (not shown) of the stocker 1 whether or not the carrier box 10 is loaded.
Is installed above the entrance 110.

The plate 130 separates an area for temporarily storing the carrier box 10 carried into the entrance 110 from an area in which the carry-in transfer section 170 for transferring the carrier box 10 is installed. Plate 130 has a loading entrance 110
A first sensing unit 140 for temporarily placing the carrier box 10 carried into the predetermined position at a predetermined position and detecting the presence or absence of the carrying box; and a carrier box from the first sensing unit 140 to the shelf 30 in the housing 20.
A second sensor 140 'for waiting for the transfer of the 10 and sensing the presence or absence of the transfer is formed, and a slit 135 connecting the first sensor 140 and the second sensor 140' is formed.

Also, a first sensing unit 140 and a second sensing unit 140 '
Are formed with position fixing ridges 131 and 133 for fixing the area where the carrier box 10 is placed, respectively, and the position fixing ridges 131 and 133 are provided at the corresponding positions of the edge of the carrier table 10 support base. It is formed in the shape of a "" key. In addition, a light receiving element 143 and a light emitting element 141 are installed on the first sensing unit 140 and the second sensing unit 140 'so as to face each other on a boundary formed by connecting the position fixing ridges 131 and 133. .

On the other hand, as shown in FIG. 4, the carry-in transfer section 170 is formed in a lower space of the plate 130, and a vertical transfer section 160 for vertically moving the carrier box 10 and a horizontal transfer section for horizontally moving the vertical transfer section 160. And a section 150.

The vertical transfer section 160 comprises a vertical transfer motor 161 and a support 165 connected to the vertical transfer motor 161 by a shaft 163. On the support 165, the carrier box 10 is mounted as described above.

The horizontal transfer unit 150 includes a horizontal transfer motor.
151 and a drive roller 15 coupled to a horizontal transfer motor 151
And a driven roller 155 which is separated from the driving roller 153 at a predetermined interval and rotates in the same direction as the driving roller 153 via a conveyor belt 157. Conveyor belt
The vertical transfer motor 161 of the vertical transfer unit 160 is fixedly mounted on 157.

On the other hand, a carry-out port 110 'is formed on the front surface of the carry-out port 100b of the carry-out section, and the carry-out box 110 is placed in a state where the carry-out box can be carried out. An indicator lamp 120 'is provided. The other configuration is the same as the above-described structure of the loading section.

Hereinafter, a conventional process of loading and unloading a carrier box will be described with reference to FIGS. FIG.
FIG. 8 to FIG. 8 are state diagrams for explaining a conventional carrier box loading / unloading process. First, a process in which the carrier box 10 is carried into the housing 20 of the stocker 1 through the carry-in port will be described.

The operator puts the carrier box 10 in which the preceding process has been completed through the loading port 110a of the loading port 100a.
It is placed on a support 165 as shown in FIG. Support
165 is a quadrangular shape and its four edges are aligned so as to respectively correspond to the position fixing ridges 131. When the carrier box 10 is placed on the support base 165 at this position, the gap between the light emitting element 141 and the light receiving element 143 is formed. By blocking the light path, the position of the carrier box 10 at the first sensing unit 140 is transmitted to the control unit of the stocker 1.

On the other hand, after the loading of the carrier box 10 is completed, the operator pushes the signal button 120 installed above the loading port 110 of the loading port 110a to execute loading of the carrier box 10.

Next, the control unit transmits an ascending signal to the vertical transfer unit 160, and as shown in FIG.
The vertical transfer motor 161 is driven. Then, the shaft 163 connected thereto is raised, so that the carrier box 10 is moved.
The support 165 on which is mounted rises to a position higher than the position fixing ridge 131.

Thereafter, the control unit transmits a drive signal to the horizontal transfer unit 150 to drive the horizontal transfer motor 151 of the horizontal transfer unit 150 as shown in FIG. Then, the driving roller 153 connected thereto rotates clockwise, and the vertical transfer unit 160 fixed to the conveyor belt 157 is moved to the second sensing unit 14.
Move to 0 'side. At this time, the first and second sensing units 140, 1
A slit 135 is formed between 40 'and is used as a path for the shaft 163 to transfer.

When the support 165 is positioned at the second sensing unit 140 ', the control unit further transmits a downward signal to the vertical transfer unit 160, and controls the vertical transfer motor 161 of the vertical transfer unit 160 as shown in FIG. Drive. Then, the axis 16 connected to this
By lowering 3, the support 165 on which the carrier box 10 is placed has its four edges aligned with the position fixing ridges 133.

At this time, the carrier box 10 is sensed by the light receiving element and the light emitting element installed in the second sensing unit 140 ', and the sensing signal is transmitted to the control unit.

Next, as described above, the control unit having received the signal from the first sensing unit 140 transmits a drive signal to the robot 50 to move the robot 50 to the loading / unloading unit 100. The robot 50 moved to the loading / unloading unit 100 is moved to the second sensing unit 14.
The carrier box 10 is loaded from 0 ′ and placed on the shelf 30 at a predetermined position.

Next, the process in which the carrier box is carried out of the stocker through the carry-out port 100b will be described as follows.

When the control unit transmits a signal to the robot 50 in response to a program input to the control unit or a request from an operator, the robot 50 receiving the signal from the control unit operates the shelf 50 at a predetermined position.
The carrier box 10 loaded on 30 is loaded and placed on the support base 165 located at the second sensor 140 '. At this time, since the position of the support base 165 is fixed by the position fixing ridge 133, the light emitting element 14 is
Light from 1 is blocked. Accordingly, the position of the carrier box 10 is sensed and transmitted to the control unit.

Accordingly, the control unit transmits an ascending signal to the vertical transfer unit 160, and the vertical transfer motor 161 of the vertical transfer unit 160
Is driven to raise the shaft 163 coupled thereto, whereby the support 165 on which the carrier box 10 is mounted is raised to a position higher than the position fixing ridge 133.

Thereafter, the control unit transmits a drive signal to the horizontal transfer unit 150 to drive the horizontal transfer motor 151 of the horizontal transfer unit 150, and rotates the drive roller 153 connected thereto counterclockwise to rotate the conveyor belt. The vertical transfer unit 160 fixed to 157 is moved to the first sensing unit 140 side.

When the support 165 is positioned at the first sensing unit 140, the control unit further transmits a descending signal to the vertical transfer unit 160 to drive the vertical transfer motor 161 of the vertical transfer unit 160, and the shaft connected thereto. When the carrier 163 is lowered, the support 165 on which the carrier box 10 is placed is aligned at four edges with the position fixing ridges 131.

At this time, the carrier box 10 is sensed by the light receiving element and the light emitting element installed in the first sensing unit 140, and the sensing signal is transmitted to the control unit, and the signal is received from the first sensing unit 140. The control unit operates the drawer display lamp 120 'to inform the operator that the carrier box 10 is ready to be carried out.

[0028]

However, the conventional loading / unloading
Since the horizontal transfer section and the vertical transfer section of the unloading section are mechanical devices, there is a problem that a large amount of cost is required to maintain and repair them.

Further, when carrying the carrier box into or out of the stocker, there is a problem that it takes too much work time. That is, when a worker or a robot occupies the loading section or the unloading section and proceeds with the work, the carrier box is completely inserted into the stocker in order to prevent collision between the loaded carrier box and the unloaded carrier box. The next carrier box could not be loaded or unloaded until either loaded or unloaded from the stocker.

When the carrier box is unloaded,
If the carrier box is pulled out of the unloading port before the pull-out indicator lamp, which indicates that the carrier box has been completely unloaded, the control unit determines that the carrier box has fallen off during the transfer, or that the instrument has malfunctioned. There is a problem that a mechanical error is generated and the reliability of the stocker is reduced by generating an error signal by making a determination.

Accordingly, the present invention has been made to solve such a problem, and an object of the present invention is to reduce maintenance and repair costs by simplifying the structure of a stocker.

It is another object of the present invention to shorten the loading and unloading work time and improve the reliability of the stocker.

[0033]

According to a feature of the present invention to achieve the above object, a shelf is installed inside a housing and a carrier box carried in from the outside is placed, and the robot mounts the carrier box. The carrier box is transported using horizontal rails and vertical rails to be carried in from the outside and placed on a shelf, or to be carried out of the shelf to the outside, and at least one carrier box is carried in before carrying in or taking out the carrier box. And temporarily controls the loading / unloading common port to operate the shared port through the operation unit.

A loading / unloading port is formed in front of the common port for loading / unloading the carrier box. A base for mounting the carrier box is installed inside the common port, and the carrier is mounted on the base. A sensing unit for sensing the presence or absence of a box is provided.

Preferably, a position setting portion for guiding the carrier box to be placed at a fixed position on the base is formed on the base, and the position setting portion is formed from the base corresponding to the bottom edge of the carrier box. It consists of a protruding position fixing ridge.

The sensing section comprises a light emitting element fixed at a fixed position on the base and a light receiving element spaced apart from the light emitting element by the length of the carrier box and opposed to each other.

The operation section includes a carry-in instruction section for instructing carry-in of the carrier box, a port use display section for displaying that the carrier box is currently being carried out, and a carry-in / out port. A carry-in display unit displays that the located carrier box is scheduled to be carried in, and a carry-out display unit displays that the carrier box located in the common carry-in / out port is planned to be carried out.

Preferably, the carry-in instruction unit is a push button, and the port use display unit, the carry-in display unit, and the carry-out display unit are lamps.

According to another feature of the present invention, a shelf is installed inside the housing and a carrier box carried in from the outside is placed thereon, and the robot loads the carrier box from the outside and places it on the shelf or places it on the shelf. Transporting the carrier box using horizontal rails and vertical rails to carry it out to the outside, temporarily suspending at least one or more carry-in ports or carry-out ports before carrying in or carrying out the carrier box; Controls the operation of the import port through

The operation unit in this embodiment includes a carry-in instruction unit for instructing carry-in of the carrier box, and a carry-in display unit for displaying that the robot is currently carrying the carrier box.

[0041]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments according to the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a partially cutaway perspective view schematically showing a facility structure of a stocker according to the present invention, and FIG. 2 is a longitudinal sectional view taken along the line AA ′ of FIG. As shown, the interior of the housing 20 is divided into three spaces, a space for moving the robot unit 60 is formed on the front surface, and a space for storing the loaded carrier box 10 on the rear surface. Are formed, and a space for carrying in / out the carrier box 10 is formed at the end.

A pair of horizontal rails 41 and 43 are installed on the bottom and ceiling of the front surface inside the housing 20, respectively.
Horizontal guides 51 and 53 are connected to 41 and 43, respectively. The horizontal guides 51 and 53 are connected by two pairs of vertical rails 55. Preferably, the two pairs of vertical rails 55 are installed such that the cross section is square.

The robot unit 60 includes a robot support 61 that moves up and down along a vertical rail 55, a rotating plate 63 that is installed on the upper surface of the robot support 61 and rotates 360 °,
An arm 65 installed on the upper surface of the rotating plate 63 and bent at an arbitrary angle with respect to the carrier box 10, and a holder installed at one end of the arm 65 and inserted into the carrier box 10
67.

On the other hand, on the rear surface inside the housing 20, shelves 30 for loading the carrier boxes 10 are provided in multiple layers.

According to one embodiment of the present invention, the housing 20
A common loading / unloading port 200 is formed at one end of the inside front side.

A loading / unloading port 210 for loading / unloading the carrier box 10 is formed in front of the loading / unloading common port 200, and loading / unloading of the carrier box 10 is located above the loading / unloading port 210. An operation unit 220 is provided for instructing the progress of the operation and loading and unloading to the control unit of the stocker.

The operation unit 220 is provided with a carry-in instruction button 221 for the worker to instruct the control unit to carry-in work, and a port for notifying the worker that the robot unit 60 is going to carry the carrier box 10 out. Indicator lamp 225
And a carry-in display lamp 223 and a carry-out display lamp 227 for indicating whether the carrier box 10 located in the common carry-in / carry-out port 200 is for carry-in or carry-out.

Here, the carry-in instruction button 221 uses a push button, and performs the role of the port use display lamp 225 and the carry-in display lamp and the carry-out display lamps 223, 227 by using an LCD panel for displaying information. it can.

On the other hand, a base 230 on which the carrier box 10 to be carried out or carried in is placed, a position setting part 250 for setting the position of the carrier box 10, and a port 200 inside the carrying-in / out port 200. Carrier box 10
A sensing unit 240 for detecting whether or not there is is installed.

The base 230 is installed at a height from the bottom surface of the housing 20 so that an operator can easily perform work. The position setting section 250 is fixed at a position corresponding to the four edges of the bottom surface of the carrier box 10. Consists of ridges 231. The position fixing ridges 231 are preferably in the shape of a """to securely fix the four edges of the bottom surface of the carrier box 10. Also,
The sensing unit 240 includes a light-emitting element 241 and a light-receiving element 243 that are installed to face each other outside a boundary formed by connecting the protrusions 231, and light emitted from the light-emitting element 241 is received by the light-receiving element 24.
If it does not reach 3, it senses that the carrier box 10 is located in the port 200.

On the other hand, according to another embodiment of the present invention, the ports are divided into a carry-in port and a carry-out port. In this case, the carry-out port does not require the operation unit, and the carry-in port is for the worker to instruct the control unit to carry-in the carry-in instruction button, and to inform that the robot is currently carrying the carrier box. An operation unit consisting of a loading indicator lamp is required. Therefore, as compared with the previous embodiment, the volume is increased by increasing the number of ports, but the structure is simplified.

Next, the process of loading and unloading the carrier box in the stocker according to the present invention will be described with reference to FIGS. Here, a description will be given of an embodiment of a structure having a common port for carrying in / out.

First, the process in which the carrier box 10 is carried into the stocker 1 will be described. The operator puts the carrier box 10 having completed the preceding process through the loading / unloading port 210 of the loading / unloading common port 200, and the base box 230.
Adjustment is made so that the position fixing protrusions 231 projecting upward and the four edges of the carrier box 10 correspond to each other.

As described above, the carrier box 10 is
0, the light output from the light-emitting element 241 is blocked by the carrier box 10 and does not reach the light-receiving element 243.
It is sensed that 10 is placed, and a sensing signal is transmitted to the controller.

On the other hand, the worker uses the common carry-in / discharge port 200.
After the carrier box 10 is placed in the loading / unloading port 21
0 The control unit is made to recognize that the carry-in instruction button 221 of the operation unit 220 installed at the upper part is pressed and the carrier box 10 placed on the base 230 is carried in.

Next, from the sensing unit 240 to the carrier box 10
Is transmitted from the operator to the carrier box.
When the carry-in signal is transmitted to 10, the control unit turns on the carry-in display lamp 223 according to the sensing signal and the carry-in signal to operate the robot unit 60.

At this point, the carry-in display lamp 223 is turned on to indicate to other workers working on the same line that the carrier box 10 in the port 200 is for carry-in. It is possible to prevent the box 10 from being carried out by another worker.

The robot unit 60 that has received the signal from the control unit is moved along the horizontal rails 41 and 43 to a position where the carrier box 10 is loaded. Then, after the robot support base 61 is raised to the height where the carrier box 10 is located along the vertical rail 55, the arm 65 is adjusted and the holder 67 is inserted into the carrier box 10 located on the base 230 and received. After that, horizontal rails 41 and 43 and vertical rails
While moving along 55, it is placed on the shelf 30 at a predetermined position.

Next, the process of unloading the carrier box 10 stored in the stocker 1 will be described. Depending on the program input to the control unit or the request of the operator,
The control unit transmits a signal to the robot unit 60 to instruct an operation. At this time, the control unit transmits a signal to the operation unit 220 to turn on the port use display lamp 225 before instructing the robot unit 60 to perform an operation.

The reason why the port use indicator lamp 225 is turned on is that one port 200 for carrying in and carrying out is commonly used. That is, the control unit informs the worker via the port use display lamp 225 that the carrier box 10 is to be carried out, so that the worker delays the carrying-in work of the carrier box 10 for a predetermined time.

More specifically, since the operator does not know when the carrier box 10 is unloaded from the stocker 1 without the port use display lamp 225, the operator transfers the carrier box 10 from which the robot unit 60 is unloaded. In some cases, a worker places the carrier box 10 on the carry-in / carry-out port 200 while the worker is in the middle. Then, the carrier box 10 to be carried out and the carrier box 10 to be carried in collide with each other, and the wafer loaded on the carrier box 10 is damaged.

After the port use indicator lamp 225 is turned on, the control unit controls the carrier box mounted on the shelf 30.
A signal for transferring 10 is transmitted to the robot unit 60.

Next, the robot unit 60 having received the signal input from the control unit raises the robot support base 61 to a predetermined height, and then operates the arm 65 to place the holder 67 on the shelf 30. It is inserted into the carrier box 10. After loading the carrier box 10, the robot unit 60 moves along the horizontal rails 41 and 43 to the side where the port 200 is installed, lowers the robot support base 61 and adjusts it to the height of the base 230, The carrier box 10 transferred by operating the arm 60 is placed on the base 230.

At this time, the carrier box is placed on the base 230.
When the carrier box 10 is mounted, the light output from the light emitting element 214 is blocked by the carrier box 10 and does not reach the light receiving element 243, so that the sensing unit 240 has the carrier box 10 mounted on the base 230. And transmits the signal to the control unit.

The control unit that has input the signal from the sensing unit 240
The unloading indicator lamp 227 of the operation unit 220 is turned on to turn off the port use indicating lamp 225, and the operator is informed that the carrier box 10 placed on the base 230 is for unloading. 1 is prevented from being carried inside.

[0067]

As described above, in the present invention, the carry-in / carry-out conveyor is removed, and the robot is controlled so that the carrier box into or out of which the carry-in / carry-out is performed is directly positioned in the port. Is improved and the cost of maintaining and repairing the stocker is reduced.

Further, by using the carry-in / carry-out port so that the worker carrying the carrier box and the robot carrying the carrier box can share one port, the working time can be shortened.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view schematically showing a facility structure of a stocker according to the present invention.

FIG. 2 is a longitudinal sectional view taken along line AA ′ of FIG.

FIG. 3 is a partially cutaway perspective view schematically showing a conventional stocker facility structure.

FIG. 4 is a longitudinal sectional view taken along line BB ′ of FIG. 3;

FIG. 5 is a state diagram for explaining a conventional carrier box loading / unloading process. (Part 1)

FIG. 6 is a state diagram for explaining a conventional carrier box loading and unloading process. (Part 2)

FIG. 7 is a state diagram for explaining a conventional carrier box loading and unloading process. (Part 3)

FIG. 8 is a state diagram for explaining a conventional carrier box loading / unloading process. (Part 4)

[Explanation of symbols]

 1 Stocker 10 Carrier box 20 Housing 30 Shelf 41, 43 Horizontal rail 51, 53 Horizontal guide 55 Vertical rail 60 Robot unit 61 Robot support 63 Rotating plate 65 Arm 67 Holder 200 Loading / unloading common port 210 Loading / unloading 220 Operation Part 221 Carry-in instruction button 223 Carry-in indicator light 225 Port use indicator lamp 227 Carry-out indicator lamp 230 Base 231 Position fixing ridge 240 Sensing part 241 Light emitting element 243 Light receiving element 250 Position setting part

Claims (12)

[Claims] 1. A housing, a shelf installed inside the housing and on which a carrier box carried in from outside is placed, and the carrier box is carried in from outside and placed on the shelf, or the shelf is placed on the shelf. A robot that transports the carrier box to carry it out of the vehicle, a horizontal rail that guides the robot horizontally, a vertical rail that guides the robot vertically, and before loading or unloading the carrier box. A stocker comprising: at least one or more shared port for unloading / unloading, and an operating unit for controlling the operation of the shared port for unloading / unloading. 2. The loading / unloading common port includes a loading / unloading port formed at a front surface of the common port for loading and unloading the carrier box, and is installed inside the common port, and the carrier box is provided with a predetermined position. The stocker according to claim 1, further comprising: a base mounted on the base; and a sensing unit installed on the base and configured to sense the presence or absence of the carrier box on the base. 3. The stocker according to claim 2, wherein the carry-in / out port is further provided with a position setting unit for guiding the carrier box to be placed at a predetermined position on the base. 4. The stocker according to claim 3, wherein said position setting section comprises a position fixing ridge protruding from said base corresponding to four edges of a bottom surface of said carrier box. 5. The light-emitting device according to claim 1, wherein the light-emitting device is fixed at a predetermined position on the base, and a light-receiving device is installed at a position separated from the light-emitting device by a length of the carrier box. 3. The stocker according to claim 2, comprising: 6. The operation unit, a carry-in instruction unit for instructing carry-in of the carrier box, a port use display unit for displaying that the carrier box is currently carried out, and the carry-in / out. A carry-in indicator for indicating that the carrier box placed in the common port is to be carried in, and a sign indicating that the carrier box is planned to be carried in the carry-in / out common port. 2. The stocker according to claim 1, further comprising: a carry-out display unit. 7. The stocker according to claim 6, wherein the carry-in instruction section is a push button. 8. The display device according to claim 6, wherein the port use display, the carry-in display, and the carry-out display are lamps.
The stocker described. 9. A housing, a shelf installed inside the housing and on which a carrier box carried in from outside is placed, and the carrier box is carried in from outside and placed on the shelf, or the carrier box is placed outside from the shelf. A robot for transferring the carrier box to carry out the robot, a horizontal rail for guiding the robot horizontally, a vertical rail for guiding the robot vertically, and temporarily waiting before loading the carrier box. At least one or more carry-in ports to be carried out, at least one or more carry-out ports to temporarily wait before carrying out the carrier box, and an operation unit for controlling operation of the carry-in port. Stocker. 10. The operation unit comprises: a loading instruction unit for instructing loading of the carrier box; and a loading display unit for displaying that the robot is currently loading the carrier box. The stocker according to claim 9, wherein 11. The stocker according to claim 9, wherein said carry-in instruction unit is a push button. 12. The stocker according to claim 9, wherein said carry-in display section is a lamp.