JPH1055713A - Ultraviolet irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device so as to eliminate the need for positional adjustment of a discharge lamp after installing it. SOLUTION: This device comprises a short arc type discharge lamp 10, an elliptical converging mirror 21 having an opening in its center part, and an elliptical converging mirror holding member 20 for holding the elliptical converging mirror 21. A flange part 15 is provided in a base 13 at one end of the discharge lamp 10. An interfit hole 22 to which the base 13 is interfit is provided in a bottom part of the elliptical converging mirror holding member 20. The base 13 to be interfit to the interfit hole 22 is removably engaged with the elliptical converging mirror holding member 20 by providing a spring 30. The flange part 15 of the base 13 is energized toward the elliptical converging mirror holding member 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet irradiation apparatus used for curing an ultraviolet curable resin and exposing a semiconductor, a liquid crystal substrate and the like.

[0002]

2. Description of the Related Art An ultraviolet irradiation device which emits light containing ultraviolet light to a semiconductor device, a liquid crystal substrate exposure, a solar simulator, or the like is used for precision bonding of electronic components and optical components using an ultraviolet-curable resin as an adhesive. I have. As an optical system of such an ultraviolet irradiation apparatus, a short arc type discharge lamp and an elliptical converging mirror are often combined so as to efficiently use radiation light including ultraviolet rays.

FIG. 8 shows an example of an optical system of an ultraviolet irradiation device used for precision bonding of electronic parts and optical parts. Ultraviolet light from a short arc type discharge lamp 1 condensed by an elliptical converging mirror 2 is shown in FIG. Is reflected by the folding mirror 3, enters the light incident end 6 of the optical fiber 4, and is emitted from the light emitting end 7.

[0004]

The discharge lamp 1 has a male screw at one end, and the male screw is screwed into a female screw portion provided on a lamp holding member (not shown) to a predetermined position. Fixed by However, the discharge lamp 1 is mounted without sufficient screwing of the discharge lamp 1 through the male screw, or the female screw portion of the lamp holding member is worn or deformed during repeated replacement of the discharge lamp 1. As a result, the discharge lamp 1 cannot be screwed into a predetermined position.
May not be installed in a predetermined position.

In the case of the optical system shown in FIG.
In order to improve the accuracy of light focusing on the ellipse, the arc position of the short arc discharge lamp 1 must be accurately positioned at the focal point of the ellipse of the elliptical focusing mirror 2. , The positional relationship between the discharge lamp 1 and the elliptical converging mirror 2 must be adjusted. Usually, the elliptical converging mirror 2 is fixed to a housing (not shown) of the ultraviolet irradiation device, so that the above positional relationship is adjusted using, for example, a position adjusting mechanism shown in Japanese Utility Model Laid-Open No. 144518/1994. This is performed by adjusting the position of the discharge lamp 1.

The specific procedure is as follows. (1) An illuminance monitor is installed at a position where the light emitted from the light emitting end 7 of the fiber 4 is irradiated. (2) Remove the housing cover in the position adjusting mechanism to expose the position adjusting mechanism. (3) Turn on the discharge lamp 1 and open the shutter 5. (4) The position adjusting mechanism is manually driven to adjust the position of the discharge lamp 1 so that the illuminance of the emitted light displayed by the illuminance monitor is maximized.

As described above, when the position of the discharge lamp 1 is adjusted, the discharge lamp 1 is turned on and the light emitting end 7 of the fiber 4 is turned on.
Therefore, it is necessary to take measures against exposure to ultraviolet rays, such as a light-shielding cover, to the operator during the adjustment work. Further, since the adjustment is performed manually while observing the value displayed on the illuminance monitor, some skill is required for adjustment.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ultraviolet irradiation apparatus which does not require position adjustment of a discharge lamp after the discharge lamp is mounted.

[0009]

An ultraviolet irradiation apparatus according to the present invention comprises a short arc discharge lamp, an elliptical condenser having an opening in the center, and an elliptical condenser holding the elliptical condenser. In the ultraviolet irradiation device provided with a member, a flange-type base is provided at one end of the discharge lamp, and a fitting hole in which the base is fitted is formed at the bottom of the elliptical converging mirror holding member. The elliptical converging mirror holding member is provided with a biasing member that removably engages with the base fitted in the fitting hole and urges the flange portion of the base toward the elliptic converging mirror holding member. It is a thing.

[0010]

FIG. 1 shows an optical system of an ultraviolet irradiation apparatus according to the present invention. Reference numeral 10 denotes a short arc type discharge lamp having a pair of electrodes including a cathode 11 and an anode 12 therein. The base 13 on the anode 12 side of the discharge lamp 10 is provided with a flange portion 15. The base 13 is machined with high precision so as to have a predetermined positional relationship with the pair of electrodes. On the other hand, a power supply cable C1 is connected to the base 14 on the cathode 11 side of the discharge lamp 10.

Reference numeral 20 denotes a condenser mirror bracket which holds an elliptical condenser mirror 21 inside. A fitting hole 22 is provided in the center of the bottom of the condenser mirror bracket 20, and the discharge lamp 10 is fixed by inserting the small diameter portion 16 of the base 13 of the discharge lamp 10 into the fitting hole 22. Here, the fitting hole 22
Is provided so that the discharge lamp 10 is fixed so that the arc position of the discharge lamp 10 is positioned on the optical axis L passing through the two focal points of the ellipse of the elliptical converging mirror 21. The position of the elliptical focusing mirror 21 is adjusted so that the emitted light is incident on the light incident end Fin of the optical fiber F when the lamp is turned on. St is a shutter.

Reference numeral 30 denotes a fixing leaf spring for fixing the stationary discharge lamp 10, and is attached to the lower surface of the condenser mirror bracket 20 by a spring mounting base 31.

FIG. 2 shows a state before fixing the discharge lamp, and FIG. 3 shows a state after fixing the discharge lamp. 2 (a) and 3 (a) are sectional views, and FIGS. 2 (b) and 3 (b) show the focusing mirror bracket 2 from the lower surface of the focusing mirror bracket 20.
FIG. As shown in FIGS. 2 and 3, the fixing leaf spring 30 has a convex shape that bulges downward in FIGS. 2 and 3, and has one end bent upward by 90 degrees. The fixing leaf spring 30 is provided with a mounting long hole 34 and a lamp fixing hole 35. The fixing leaf spring 30 is attached to the converging mirror bracket 20 by a screw 32 penetrating through the spring mounting base 31 and the elongating mounting hole 34 and connected to the converging mirror bracket 20. It is movable in the length direction by the length of the mounting slot 34.

In FIG. 2, the base 1 of the discharge lamp 10 is shown.
Since 3 passes through the lamp fixing hole 35 of the spring 30, the discharge lamp 10 is not fixed. On the other hand, as shown in FIG. 3, when the fixing leaf spring 30 is pushed in the direction of the arrow A, the portion of the lamp fixing hole 35 having a small diameter becomes the base 13.
And the discharge lamp 10 is pressed against the converging mirror bracket 20 by the force in the direction of the arrow B by the fixing leaf spring 30, and the bottom surface of the converging mirror bracket 20 and the flange portion 15 of the base 13 are formed. It is fixed at a position defined by the lower surface. This specified position is the position of the discharge lamp 1
The position of the arc 0 is the focal point of the ellipse (2
It is set to be equal to the position in the direction of the optical axis L of one of the focal points (the focal point which is not on the fiber side).

That is, when the fixing leaf spring 30 is in the state shown in FIG. 2, the small-diameter portion 16 of the base 13 of the discharge lamp 10 is fitted into the fitting hole 22 of the condenser mirror bracket 20, and the discharge lamp 10 So that the position of the arc is located on the optical axis L,
The discharge lamp 10 is set. Next, by pressing the fixing leaf spring 30 in the direction of arrow A in FIG. 3, the discharge lamp 10 is pressed in the direction of arrow B in FIG. The focus of the ellipse (2
Of the two focal points (the focal point which is not the fiber side). Here, by adjusting the degree of tightening of the screw 32, it is possible to adjust the force of the fixing leaf spring 30 pressing the discharge lamp 10.

The shapes of the base 13 of the discharge lamp 10 and the fitting hole 22 of the condenser mirror bracket 20 are not limited to the shapes shown in FIGS. 1, 2 and 3, and are shown, for example, in FIG. It may be configured as follows. In the structure shown in FIG. 4, the flange portion 15 is
2 defines the position of the arc of the discharge lamp 10 in the direction of the optical axis L, and the arc of the discharge lamp 10 is positioned on the optical axis L by being fitted into the fitting hole 22. So that the discharge lamp 10 is fixed.

Returning to FIG. 1, reference numeral 40 denotes a power supply member to which a power supply cable C2 is connected. That is, electric power is supplied to the discharge lamp 10 by the cables C1 and C2.

FIG. 5 is a view showing details of the power supply member 40. As shown in FIG. Reference numeral 41 denotes a lamp fixing holder to which a power supply cable C2 is connected and whose bottom has a spherical shape, which is installed on a holder holding member 47 which is an electrically insulating material. The slot 4 is provided in the lamp fixing holder 41.
2 is provided, and the slit 42 is provided with the discharge lamp 1
A fixing portion 43 into which the tip of the base 13 is inserted is provided. A tightening shaft 44 tightens the slit 42 when a lever 45 connected to the tightening shaft 44 is raised vertically as shown in FIG.

FIG. 6 is a view for explaining the tightening of the slit, and shows the cross-sectional structure of the lamp fixing holder 41 and the tightening shaft 44. The fastening shaft 44 has a male screw at the tip and has a stepped portion C. Also,
The clamping shaft 44 insertion part of the lamp fixing holder 41 is
The tightening shaft 44 includes a hole D having a diameter larger than the diameter of the male screw portion of the tightening shaft 44 and smaller in diameter than the step portion C, and a female screw screw portion E engaging with the male screw portion.

That is, when the tightening shaft 44 is rotated so that the male screw-shaped tip of the tightening shaft 44 engages with the screw hole E of the lamp fixing holder 41, the tightening shaft 44 moves in the direction of arrow F. However, since the progress in the direction of arrow F is regulated from the step C, as a result, the portion of the lamp fixing holder 41 on the screw hole E side receives the force in the direction of arrow G, and the slot 42 Is tightened, and the tip of the discharge lamp 10 inserted into the fixing portion 43 is tightened.

Returning to FIG. 5, the integrated lamp fixing holder 41, the tightening shaft 44, and the lever 45 are fixed to the holder holding member 47 by the screw fixing member 46.

The reason why the bottom of the lamp fixing holder 41 is spherical is as follows. FIG. 7 is a view for explaining the operation due to the difference in the shape of the lamp fixing holder. As shown in FIG. 7A, when the bottom of the lamp fixing holder 41 is flat and the tip of the base 13 of the discharge lamp 10 is inclined, when the slot 42 is tightened, the slit 42 is tightened. As shown in b), the lamp fixing holder 41 is also inclined according to the inclination of the tip of the base 13. At this time, a force is applied to the discharge lamp 10 in the direction of arrow I with H as a fulcrum. The discharge lamp 10 receives a force in the direction of arrow B in FIG. 7 by the fixing leaf spring 30 shown in FIG.
However, the force in the direction of arrow B partially offsets the force in the direction of arrow B, and the discharge lamp 1
Fixation of 0 becomes insufficient.

On the other hand, as shown in FIG. 7 (c), if the bottom of the lamp fixing holder 41 is spherical, even if the tip of the base 13 of the discharge lamp 10 is inclined, when the slit 42 is tightened, The lamp fixing holder 41 only tilts in accordance with the tilt of the tip of the base 13, and does not exert a force on the discharge lamp 10 in the direction of the arrow I as shown in FIG. Therefore, the insertion of the discharge lamp 10 does not become insufficient.

As described above, in the above-described ultraviolet irradiation apparatus, while the base 13 on the anode side of the discharge lamp 10 is provided with the flange portion 15 so as to be in a predetermined positional relationship with the pair of electrodes of the discharge lamp 10. Since the fitting hole 22 for fitting the base 13 is provided in the focusing mirror bracket 20 for holding the elliptical focusing mirror 21, the base 13 of the discharge lamp 10 is Are fixed at a predetermined position, that is, the position of the arc of the discharge lamp 10 on the optical axis L passing through the focal point of the ellipse of the elliptical condenser mirror 21, and a fixing leaf spring 30 provided at the lower part of the condenser mirror bracket 21.
As a result, the position of the arc of the discharge lamp 10 is
It can be simply fixed so as to be the focal position of one ellipse.

Therefore, it is not necessary to perform the positioning of the discharge lamp 10 while monitoring the illuminance monitor by turning on the lamp as in the related art, and the light shielding cover required at the time of the positioning is not required.

Further, when the end portion 13 of the discharge lamp 10 is inserted into the fitting portion 22 of the condenser mirror bracket 20, the end portion of the end portion 13 is inserted into the fixing portion 43 of the power supply member 40 connected to the cable C2. When the lever 45 is tilted, the fixing portion 43 of the slit structure tightens the front end of the end portion 13, so that the power supply means for the discharge lamp 10 can be easily connected to the discharge lamp 10.

In particular, as shown in FIG. 1, when the fixing plate spring 30 does not fix the discharge lamp 10 (the state shown by the broken line in FIG. 1), when the lever 45 is set to be vertical,
If the discharge lamp 10 is configured to hit the fixing leaf spring 30, it is possible to prevent a problem that the discharge lamp 10 is fixed to the power supply member 40 without fixing the discharge lamp 10.

[0028]

According to the ultraviolet irradiation apparatus of the present invention, one end of the discharge lamp is formed as a flange structure having a step, and is provided on the bottom of the elliptical condenser holding member below the opening of the elliptical condenser. Is provided with a fitting portion to which the end of the flange structure is fitted, and the end of the discharge lamp is passed through the opening of the elliptical focusing mirror to the fitting portion at the bottom of the elliptical focusing mirror holding member. When fitted, the arc position of the discharge lamp was made to substantially coincide with the focal position of the elliptical converging mirror, so that the lamp was turned on and the value displayed on the illuminance monitor was observed as in the related art. There is no need to perform the positioning of the discharge lamp, and it is not necessary to take measures against exposure of the worker during the positioning operation to ultraviolet rays such as a light-shielding cover.

[Brief description of the drawings]

FIG. 1 is a diagram showing an optical system of an ultraviolet irradiation device of the present invention.

FIG. 2 is a diagram showing a state before fixing the discharge lamp.

FIG. 3 is a diagram showing a state after fixing the discharge lamp.

FIG. 4 is a view showing another shape of the base and the fitting hole.

FIG. 5 is a diagram showing details of a power supply member.

FIG. 6 is a diagram for explaining the tightening of a slit;

FIG. 7 is a diagram for explaining an operation due to a difference in shape of a lamp fixing holder.

FIG. 8 is a diagram illustrating an example of an optical system of an ultraviolet irradiation device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Discharge lamp 11 Cathode 12 Anode 13 Base 15 Flange part 16 Small diameter part 17 Groove part 20 Condensing mirror bracket 21 Elliptical condensing mirror 22 Fitting hole 30 Fixing leaf spring 31 Spring mounting base 32 Spring mounting base fixing screw 34 Mounting length Hole 35 Lamp fixing hole 40 Power supply member 41 Lamp fixing holder 42 Slotting part 43 Fixed part 44 Tightening shaft 45 Lever 46 Screw fixing member 47 Holder holding member

Claims (1)

[Claims] 1. An ultraviolet irradiation apparatus comprising: a short arc type discharge lamp; an elliptical focusing mirror having an opening at a central portion; and an elliptical focusing mirror holding member for holding the elliptical focusing mirror. A flange-type base is provided at one end of the lamp, and a fitting hole into which the base is fitted is formed at the bottom of the elliptical condenser mirror holding member. An ultraviolet irradiation device, further comprising an urging member which is detachably engaged with the base fitted in the hole and urges a flange portion of the base toward the elliptical converging mirror holding member.