JPH10319221A - Optical element and production thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a completely dried diffraction grating end optical element by a high speed processing by irradiating a polymeric material having a reflection film and processible with laser ablation with a beam of laser from a direction of the reflection film and making a diffraction grating form of the reflection film. SOLUTION: A beam of laser oscillated from a laser device 1 is transmitted by being reflected by a total reflection mirror 2, etc., and is adjusted in the intensity and uniformed to be emitted onto a mask 4. An optical system is comprised of such a mechanism as an intensity distribution of the mask is fixed by a projection lens 5 and a processed piece 6 with a reflection film is fixed on a stage 7 adjustable in the direction of an optical axis, and a pattern is continuously formed by moving the stage 7, if necessary. And, a reflection film is added onto an ablative film. This film with the reflection film is irradiated with laser beam. A part of the irradiated laser beam transmits the reflection film and the polymeric material is irradiated the laser beam. Thus, this polymeric material is ablated and also the reflection film is removed, and a diffraction grating is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing various optical elements including spectroscopy by laser ablation, a diffraction grating for monochromaticization, an encoder scale for positioning control, and the like, and an optical element manufactured by the above manufacturing method. Things.

[0002]

2. Description of the Related Art A diffraction grating, which is one of optical elements, has been used as a wavelength dispersing element such as a spectroscope because of its wavelength selectivity. Further, since the amount of reflection and transmission can be spatially controlled, it is used as various optical elements. In recent years, encoder scales have become particularly important and have been increasingly used in recent years for high-precision positioning of motor control stages.

[0003] These diffraction gratings and scales have been mainly produced by machining, photofabrication, interference exposure, and ion / electron beam drawing. In the mechanical processing, a groove shape of a diffraction grating is formed on the surface of a substrate serving as a base, and the groove shape is formed continuously over the entire surface of the substrate. Photofabrication is a method in which a resist film applied to a substrate surface is patterned by mask exposure, and a groove shape of the substrate is formed by etching. The interference exposure method is a method in which a resist film is patterned by a two-beam interference exposure method, and a groove shape is formed by etching or the like. The ion / electron beam direct writing method is a method of spatially controlling an energy beam and irradiating a substrate to form a groove shape.

[0004] Laser ablation processing is a technique which has been studied as a direct processing method that does not require a resist work, and has attracted attention as a fine processing method for materials mainly composed of polymers or as a thin film forming method using scattered substances. . As a diffraction grating manufacturing method using ablation, there is a method disclosed in JP-A-7-027910 or JP-A-8-1847078. In the former method, a groove is formed by irradiating a laser beam directly to a substrate and ablating the substrate. The latter is a method of forming a grating by colliding fragments by laser ablation with a substrate through a mask. The diffraction grating is usually formed on a glass substrate or the like, and a groove shape is formed by a metal film, a resist film, a resin film, or the like on the flat glass.

[0005]

However, in the above-mentioned machining, it has been difficult to form a minute diffraction grating groove shape with high accuracy and high reproducibility. The photofabrication method requires many steps such as resist coating, drying, development and etching, and it is difficult to control the groove shape, and the cross-sectional shape is limited.

The interference exposure method requires specialized knowledge such as removal of the influence of the vibration of the processing apparatus and alignment, and the material to be processed is limited to polymeric photoresist, 2P resin and the like, and the selection range is narrow. Also in this case, there is a problem that it is difficult to control the processing shape and the shape is easily changed.

In addition, the photofabrication and interference exposure methods involve a wet process such as resist coating, and have a problem that an impurity is mixed in and a cleaning process is required. If the substrate material is not flat, it cannot be coped with.

The manufacturing method using an electron / ion beam has a problem that the processing cost is high because a large vacuum system is required and the electron / ion beam source is expensive. Was difficult.

In the manufacturing method by laser ablation,
Substrate materials are processed directly. Laser ablation requires a large amount of energy to remove metal materials,
It is difficult to control the shape. Glass and ceramic materials also require large laser energy and are not highly productive, making reduction projection processing difficult. In addition, this is a processing method for a single material, and there is a problem that control of the reflectance and control of the groove shape are governed by the characteristics of the single material. Further, in ablation, it is difficult to control the processing depth per laser beam irradiation, and it is difficult to form a grid having the same shape.

[0010] In addition, these manufacturing methods usually form an optical element such as a diffraction grating or a scale on a planar structure material such as a glass substrate having a high flatness, and it is difficult to form a groove on a surface having a spherical surface. Was. In addition, when a diffraction grating is added to another material, it is difficult to add the diffraction grating to a rotating surface or an elongating and deforming material.

In order to control a signal by reflection,
It is necessary to add a material that absorbs light to the back surface of the glass substrate. In this case, reflection occurs on the front surface and the back surface, and thus there is a problem that the material is affected by the substrate material. In addition, since the selectivity of the substrate material is low, it is necessary to use an expensive substrate material, and there is also a problem that there are many restrictions on an additional material for the element and an adhesive material for bonding the element.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems and disadvantages of the prior art. A method of manufacturing a diffraction grating or an optical element which has been completely dried at a high speed, and a groove formed by the above manufacturing method are provided. It is an object to provide an optical element having a shape.

[0013]

According to a first aspect of the present invention, there is provided a method for manufacturing an optical element, comprising: a laser ablation processing apparatus having an optical system capable of projecting and irradiating a grid-shaped mask; The method is characterized in that a laser ablation-processable polymer material having a reflective film in a portion is irradiated with laser from the reflective film direction to form a diffraction grating shape of the reflective film.

According to a second aspect of the present invention, there is provided a method for manufacturing an optical element, comprising: a laser processing apparatus comprising a laser device and a means for irradiating a laser beam to an arbitrary position or a means for moving a substrate to an arbitrary position in parallel; The method is characterized in that a laser ablation material having at least a part of a reflective film is irradiated with laser from the direction of the reflective film to continuously move the light or the substrate to form a diffraction grating shape.

According to a third aspect of the present invention, there is provided a method for manufacturing an optical element according to the first or second aspect, wherein the laser for outputting a wavelength in the ultraviolet region is a reflective film material having a high transmittance at the same wavelength. Is used.

According to a fourth aspect of the present invention, there is provided the optical element manufacturing method according to any one of the first to third aspects, wherein the energy of light transmitted by the reflective thin film is adjustable in a region where the energy is equal to or larger than a laser ablation threshold. Processing is performed while adjusting the output of laser light by a laser device.

According to a fifth aspect of the present invention, there is provided a method of manufacturing an optical element according to the first or third aspect, further comprising a magnification adjusting unit and a substrate parallel moving unit.

According to a sixth aspect of the present invention, there is provided a method for manufacturing an optical element according to the first or second aspect, further comprising means for moving the same material as the three-dimensionally shaped workpiece in the optical axis direction. It is characterized by.

According to a seventh aspect of the present invention, there is provided an optical element manufacturing method according to the first or second aspect, wherein a polymer thin film layer capable of being subjected to laser ablation processing is formed between the glass substrate and the reflective film. Is used.

[0020] The polymer film according to claim 8 of the present invention is characterized in that it has a diffraction grating shape prepared by the means according to claim 1 or 2.

According to a ninth aspect of the present invention, a structure to which the polymer film is added is constituted by adding the polymer film according to the eighth aspect with an adhesive, or at least a part thereof is provided with an adhesive layer or an adhesive layer. A polymer film according to claim 8 provided with a polymer film is provided.

According to a tenth aspect of the present invention, there is provided a polymer having at least a part of a spherical surface, a groove formed by the means according to the first or second aspect, or a polymer having the above-mentioned groove. It is characterized in that it is configured by adding a film.

[0023] A polymer structure according to an eleventh aspect of the present invention is characterized in that at least a part thereof has a three-dimensional shape and is produced by the means described in the sixth aspect.

A polymer film according to a twelfth aspect of the present invention is the polymer film according to the eighth aspect, wherein the polymer film is made of a material having a high absorption coefficient or a material in which a light absorbing material is dispersed. According to a thirteenth aspect of the present invention, in the structure according to the tenth aspect, the polymer film has a diffraction grating shape according to the eighth aspect and is made of a material having a high absorption coefficient or a light absorbing material. It is characterized by being made of a dispersed material.

A polymer film according to a fourteenth aspect of the present invention is the polymer film according to the eighth aspect, characterized in that at least a part of the polymer film has a reflecting film groove shape on a transparent polymer. . The structure according to claim 15 of the present invention is the structure according to claim 10, wherein the polymer film has a reflective film groove shape on a polymer that is at least partially transparent. I do.

With the configuration according to the present invention as described above,
The irradiated laser beam passes through the reflective film on the material to be processed and reaches the polymer material, and the ablation effect of this laser beam causes the polymer material to cleave at the molecular level, causing the laser-irradiated portion to scatter outside. I do. At this time, since the substance scattered to the outside is also scattered at the same time as the reflection film on the upper part, the processing of the entire irradiation part is performed.

Further, by moving the workpiece in parallel, continuous shape processing is performed.

Further, in the case of scanning with a laser beam, an arbitrary shape is processed without a mask for direct drawing, and at the same time, a large-area, long optical element is processed by moving the workpiece in parallel. You.

Further, since a polymer material has strong absorption in the ultraviolet region and can be ablated by an ultraviolet laser in many materials, efficient processing can be performed by using an ultraviolet laser. Further, by using the means for adjusting the laser intensity, shapes having different groove widths can be formed on the same element.

In the case of reduction projection processing by mask projection, any one of a mask position, a projection lens, and a processing position is used.
By simultaneously moving the two, the processing magnification is selected, thereby forming groove shapes having different magnifications.

By focusing the workpiece on the laser irradiation focal point, the material is processed into a three-dimensional shape, and a reflection shape is generated on a spherical or stepped structure.

Further, by preparing a laser ablation layer in the middle and removing it by laser irradiation, a glass substrate with a reflective thin film such as a metal reflective film is processed.
If the ablation energy threshold of the glass is much larger than that of the polymer, processing that does not damage the glass surface is performed by adjusting the processing energy.

Next, the polymer film having an optical function manufactured by these manufacturing methods can be easily deformed in shape, inexpensive, and the function can be easily selected.

By selecting a film to which an adhesive layer is added as the polymer material, additional processing is performed on other materials immediately after processing.

The addition of an optical function to a material having a spherical surface and the addition of the above-mentioned film with an adhesive material provide an optical function to a spherical surface.

Further, it is possible to process a structure having a three-dimensional shape, and a structure in which the reflection film is three-dimensionally controlled is created.

Further, by increasing the absorptivity of the polymer material, the reflection film and the absorption band can be formed close to each other, and a stepwise change in the reflectivity and a thin film optical element having multi-gradation characteristics can be realized. .

Conversely, a transmission type optical element is realized by using a transparent polymer.

[0039]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a manufacturing method according to the present invention, a step of irradiating a substrate spatially selectively by reducing or projecting a laser beam, a means for moving the substrate three-dimensionally, and an ablation-producing high-level device having a reflective film. And molecular materials. Further, in order to enhance the processing characteristics of the polymer, it is desirable to use an ultraviolet laser and a reflective material having a high transmittance at the wavelength of the laser light.

When adjusting the processing groove pitch by the reduction projection magnification, any one of the mask, lens, and processing substrate position is used.
It consists of two translation means. The material to be processed is composed of a polymer material to which a reflective thin film is added. In particular, when a reflective film is formed on a glass substrate, a thin film of an ablative polymer material is formed between the substrate and the reflective film.

The optical element according to the present invention may be any one of a deformable polymer film having a groove shape of a reflection film, a structure having a spherical surface, a polymer structure having a three-dimensional shape, and a structure to which the above film is added. It is desirable that the polymer material be composed of any of a transparent material, a light absorbing material, and a light absorbing material-added material.When the element is bonded to the structure, a material to which an adhesive material is added in advance is preferable. desirable.

Hereinafter, embodiments of the present invention will be described. (First Embodiment) FIG. 1 shows a first embodiment of the present invention. In FIG. 1, a laser beam oscillated from a laser device 1 is intensity-adjusted and uniformed by a molding optical system 3 and transmitted to a mask 4 while being transmitted by a total reflection mirror 2 and the like. The intensity distribution of the mask is projected by a projection lens 5 onto a workpiece 6 having a reflective film. The workpiece 6 with a reflective film is fixed on a stage 7 which can be adjusted in the direction of the optical axis, and comprises a mechanism for moving the stage 7 if necessary and continuously creating a pattern.

FIG. 2 is a schematic view showing a method for manufacturing an optical element according to the present invention. A reflection film M2 is added to the ablation-capable film M1 in an amount of about 500 to 1000 angstroms. The reflective film 2 can be formed by depositing a metal film such as Cr or Al by vapor deposition or sputtering, or by spin coating a polymer film containing a dye or the like. The laser light M3 is irradiated on the film M1 with the reflection film. A part of the irradiated laser light M3 passes through the reflection film M2 and is irradiated on the polymer material M1. The reflection film M2 is removed together with the ablation of the polymer, and the diffraction grating M4 is formed.

(Second Embodiment) FIG. 3 shows a second embodiment of the present invention. Laser light 1 oscillated from laser device 1
2 is transmitted through a total reflection mirror 13, an orifice 14, etc., is condensed by a condensing lens 15, and is irradiated on a sample. The laser beam is scanned on the workpiece 18 by the galvanometer mirror 16 and the moving stage 17. The material to be processed 18 has the configuration shown in FIG. 2 and is processed according to the same principle. The processing width of the laser light can be adjusted by changing the laser intensity, and the same operation is possible even if a dimmer is provided in the apparatus.

(Third Embodiment) FIG. 4 shows a third embodiment of the present invention. The laser light oscillated from the laser device 1 is intensity-adjusted and uniformed by the shaping optical system 3 and transmitted to the mask 4 while being transmitted by the total reflection mirror 2 and the like. The mask is set on the moving stage 25 and is movable in the optical axis direction.
In some cases, a mechanism for rotating the mask and a mechanism for replacing the mask are provided. The image of the mask is applied to the surface of the workpiece 8 fixed on the moving stage 7 through the projection lens 5. The mask moving stage 25 and the moving stage 7 are controlled by the computer 10 through the stage controller 9. The movement of the stage and the number of laser irradiations and laser irradiation intensity are simultaneously controlled by a computer. Thereby, shape processing with different magnifications can be performed from one mask, and various shape processing can be performed by simultaneously performing mask replacement and laser intensity adjustment.

(Fourth Embodiment) FIG. 5 shows a fourth embodiment of a method for forming a diffraction grating on a glass substrate. A polymer film N2 is added on the glass substrate N1. The polymer film N2 is 0.1 μm
If it is less than about, the reflection film N3 and the polymer film N2 can be simultaneously peeled off by a single irradiation of the laser beam with relatively low energy.
Further, by irradiating the laser intensity below the laser ablation threshold of the glass, a highly accurate reflection film shape can be created without affecting the glass surface N1. As the material, not only a polymer resist used for exposure, but also a photo-curing / thermo-setting resin or various polymers can be used.

(Fifth Embodiment) FIG. 6 shows a method of manufacturing an optical element and an optical element according to a fifth embodiment of the present invention.
C on a polymer optical material P1 having a spherical surface such as an optical lens
A reflective film P2 of r, Al or the like is added. Laser light P3 is selectively irradiated from above the reflective film of this material. Thereby, a groove shape of the reflective film P2 is generated, and when light is irradiated on this element, a part is reflected and a part is transmitted. At this time, the reflected light is diffused and the transmitted light is collected. The optical element P4 thus processed has an optical function.

(Sixth Embodiment) FIG. 7 shows an optical element having a spherical surface formed by spherical processing according to a sixth embodiment of the present invention. An ablative polymer thin film R2 is added on the columnar rotating structure R1, and a reflective film R3 is further added. This is partially irradiated with a laser beam R4 to form a reflective film pattern by the ablation function. By sequentially irradiating the laser beam R4 while rotating the rotating body R1, a reflection film pattern is formed on the surface of the rotating body R1.
A surface scale R5 is created. Since this scale is formed on the surface, it can be used for position control and speed control of the surface. This can also be achieved by creating a scale and adding it to the rotating body.

(Seventh Embodiment) FIG. 8 shows an example of manufacturing a reflection pattern on a three-dimensional structure and an manufactured optical element according to a seventh embodiment of the present invention. The ablation-processable polymer material is three-dimensionally processed to obtain a three-dimensional structure S1. For the three-dimensional processing, mechanical processing, stereolithography, ablation processing, and the like can be used. A reflection film S2 is added to this material by sputtering, vapor deposition, or the like, and a laser beam S3 is irradiated in a spatially selective manner. For example, only the plane portion in FIG. 8 is processed by the laser ablation operation. As a result, the flat portion becomes the optical element S4 through which light is transmitted and the inclined surface is reflected. When this element is irradiated with the signal light S5, the light is partially reflected and functions as a light reflection element as shown in the figure.

(Eighth Embodiment) FIG. 9 shows an optical element including an absorbing material according to an eighth embodiment of the present invention. The polymer film T1 having the controlled absorptance has a structure in which the reflectivity varies depending on the thickness by, for example, overlapping in multiple stages or controlling the amount of dispersion. A reflective film T2 is added on the polymer film T1,
The laser beam T3 is irradiated there. The processing depth is changed by controlling the intensity of the laser beam T3 and changing the irradiation amount, thereby obtaining a structure T4 shown in FIG. When such a structure T4 is irradiated with light, the signal intensity changes depending on the position as shown in FIG. This serves as an optical element that generates a stepwise signal.

(Ninth Embodiment) FIG. 11 shows an example of an optical element using a transparent polymer according to a ninth embodiment of the present invention. The reflective film V2 on the polymer thin film V1 is patterned into the shape shown in FIG. Further, similarly, the optical element V3 having the shape processed as shown in (B) and (C) is processed.
Create Since these are transparent and can be made very thin, they can be overlapped to form a pattern with a complicated shape as shown in the figure. In this case, (A), (B),
(C) can have the same shape, and since it is transparent, transmission-type signal processing becomes possible.

[0052]

As described in detail above, according to the present invention,
By making the reflective film on the material to be processed into a thin film, part of the irradiated laser light reaches the polymer material. Due to the ablation by the laser light, the polymer material is cleaved at the molecular level, and the laser-irradiated portion scatters outside. At this time, since the substance scattered to the outside is also scattered at the same time as the reflection film on the upper part, the processing of the entire irradiation part is performed.

Here, by reducing the thickness of the reflective film, the reflective film can be processed with one laser photon, and the laser irradiation time can be reduced to several nanoseconds or less, so that extremely high-speed processing becomes possible. . Further, since the reflection is controlled by removing the reflection film, it is not necessary to precisely control the processing shape in the depth direction, and many materials can be used as the reflection film and the substrate material.

In the reduction projection processing, the shape of the mask is reduced and a desired position on the substrate is irradiated. In such a reduced projection, a large area shape can be collectively performed, so that productivity is extremely increased.

Further, by moving the workpiece in parallel, it is possible to continuously shape the workpiece, and it is possible to easily produce a long scale. You can also select the mask shape,
By changing the mask, not only the groove shape but also various reflection shapes can be created.

Further, in the case of scanning with a laser beam, it is possible to process directly into an arbitrary shape without a mask for direct drawing, and it is possible to use even a case where the laser output is low because the laser beam is condensed and used. Processing can be performed at high speed by repeatedly using a laser, a galvanometer mirror, or the like.
At the same time, a large-area, long optical element can be processed by moving the workpiece in parallel.

Usually, many polymer materials have strong absorption in the ultraviolet region, and many materials can be ablated by an ultraviolet laser. Therefore, efficient processing can be performed by using an ultraviolet laser. At this time, since the reflective material uses the reflection characteristics in the infrared to visible region, it is preferable to use a material having a high transmittance in the wavelength region when using an ultraviolet laser.

Further, in the thin film processing by such ablation assist, the film processing width changes depending on the laser energy intensity. Therefore, by using the means for adjusting the laser intensity, it is possible to easily form shapes having different groove widths on the same element.

In the case of reduction projection processing by mask projection, any one of the mask position, projection lens, and processing position is used.
It is possible to arbitrarily select a processing magnification by simultaneously moving the two, and thereby it is possible to easily form groove shapes having different magnifications.

Further, by focusing the workpiece on the laser irradiation focal point, it is possible to process a material having a three-dimensional shape, and it is also possible to generate a reflection shape on a spherical surface or a step-shaped structure. Become.

In the case of processing a metal thin film on a glass substrate, by preparing a laser ablation layer in the middle and removing it, a glass substrate with a reflective thin film such as a metal reflective film, which is generally difficult to process by laser ablation, can be processed with low energy. It is possible to process at high speed. Further, the cross-sectional shape of the removed film becomes a good shape that cannot be obtained by thermal processing such as laser trimming.

In many cases, the ablation energy threshold of glass is much larger than that of a polymer, and processing with this energy enables processing without damaging the glass surface. At this time, there is also a cleaning effect of simultaneously removing organic substances attached to the glass surface.

Next, the polymer film having an optical function manufactured by these manufacturing methods is characterized by being capable of deforming its shape, being inexpensive and having low brittleness, and having a high material selectivity and allowing selection of functions. is there.

By selecting a film to which an adhesive layer has been added as this polymer material, it is possible to add it to another material immediately after processing, and to add an optical function to the structuring agent. In particular, polymer adhesives have a wide selection range, and it is easy to select adhesive strength, thickness heat characteristics, and the like.

Further, the addition of an optical function to a material having a spherical surface or the addition of the film with an adhesive material facilitates the addition of an optical function to a difficult spherical surface. This makes it possible to create a mask or a light splitting element on a lens, create an encoder function on a spherical surface, or the like.

Further, processing into a three-dimensionally structured body is also possible, and a structure in which the reflecting film is three-dimensionally controlled can be created. Since such a structure can control the optical function spatially, it is possible to add the optical function to a part of the reflection branching element, the micromachine, and the sensor.

Further, by increasing the absorptivity of the polymer material, a reflection film and an absorption band can be formed in close proximity to change the reflectance stepwise, or a thin film optical element in which a multi-tone signal is formed. Can be created. In addition, by absorbing light with the polymer layer, the N / A of the reflective element can be increased.

Conversely, by using a transparent polymer, it becomes possible to use the same as a transmission type optical element similar to glass, and it is possible to form various signals by overlapping these elements. Become.

[Brief description of the drawings]

FIG. 1 is a schematic view of an optical element manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is a schematic view of a method for manufacturing an optical element according to the first embodiment of the present invention.

FIG. 3 is a schematic view of an optical element manufacturing apparatus according to a second embodiment of the present invention.

FIG. 4 is a schematic diagram of an optical element manufacturing apparatus according to a third embodiment of the present invention.

FIG. 5 is a schematic view of a diffraction grating manufacturing method according to a fourth embodiment of the present invention.

FIG. 6 is a schematic view of a method for manufacturing an optical element and an optical element according to a fifth embodiment of the present invention.

FIG. 7 is a schematic diagram of an optical element manufacturing method and an optical element according to a sixth embodiment of the present invention.

FIG. 8 is a schematic diagram of an optical element manufacturing method and an optical element according to a seventh embodiment of the present invention.

FIG. 9 is a schematic diagram of an optical element manufacturing method and an optical element according to an eighth embodiment of the present invention.

FIG. 10 is a diagram illustrating an example of a signal from an optical element according to an eighth embodiment of the present invention.

FIG. 11 is a schematic view of an optical element manufacturing method and an optical element according to a ninth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laser apparatus 2 Total reflection mirror 3 Molding optical system 4 Mask 5 Projection lens 6 Workpiece with a reflective film 7 Stage

Claims (15)

[Claims] 1. A laser ablation apparatus having an optical system capable of projecting and irradiating a lattice-shaped mask, irradiating a laser from a reflective film direction onto a laser ablation-processable polymer material having a reflective film on at least a part thereof and reflecting the laser light. An optical element manufacturing method, wherein a diffraction grating shape of a film is created. 2. A laser ablation process having a reflective film on at least a part thereof can be performed by a laser processing device comprising a laser device and a means for irradiating a laser beam to an arbitrary position or a means for moving a substrate in parallel to an arbitrary position. A method for producing an optical element, comprising: irradiating a laser beam from a reflective film to a material to continuously move light or a substrate to form a diffraction grating shape. 3. The method for manufacturing an optical element according to claim 1, wherein a laser outputting an ultraviolet wavelength and a reflective film material having a high transmittance at the same wavelength are used. 4. The processing according to claim 1, wherein the processing is performed while adjusting the output of the laser beam by a laser device capable of adjusting the energy of the transmitted light by the reflective thin film in a region equal to or larger than a laser ablation threshold. An optical element manufacturing method according to any one of the above. 5. The method of manufacturing an optical element according to claim 1, further comprising a magnification adjusting means and a substrate parallel moving means. 6. The method according to claim 1, further comprising means for moving the material having a three-dimensional shape in the optical axis direction.
The method for producing an optical element according to the above. 7. The method for manufacturing an optical element according to claim 1, wherein a material in which a polymer thin film layer capable of laser ablation processing is formed between a glass substrate and a reflection film is used. 8. A polymer film having a diffraction grating shape produced by the means according to claim 1. 9. The polymer film according to claim 8, which is formed by adding the polymer film according to claim 8 with an adhesive, or the polymer film according to claim 8, wherein at least a part thereof is provided with an adhesive layer or an adhesive layer. A structure characterized by comprising: 10. A structure wherein at least a part is spherical and has a groove formed by the means according to claim 1 or a polymer film having the groove is added. Structure. 11. A polymer structure, wherein at least a part thereof has a three-dimensional shape and is produced by the means according to claim 6. 12. The polymer film according to claim 8, comprising a material having a high absorption coefficient or a material in which a light absorbing material is dispersed. 13. The polymer film according to claim 8, wherein the polymer film has a diffraction grating shape and is made of a material having a high absorption coefficient or a material in which a light absorbing material is dispersed.
The described structure. 14. The polymer film according to claim 8, wherein a reflection film groove shape is formed on a polymer that is at least partially transparent. 15. The structure according to claim 10, wherein the polymer film has a reflection film groove shape on a polymer that is at least partially transparent.