JPH10309515A - Method for removing coating by laser and laser processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to remove coating films without using chemicals by executing abnormality processing when a stage for removing the coating films compares the temp. obtd. by a stage for measuring temp. with a reference temp. and when this temp. is higher than the reference temp.. SOLUTION: A color sensor 43 and a temp. sensor 44 are mounted near the front end of a gas suction port 42. The color sensor 43 is constituted to include, for example, a CCD and detects the position of a work 1 to be irradiated with a laser beam and the color near this position. The temp. sensor 44 is, for example, a radiation thermometer and detects the temp. of the position on the surface of the work 1 to be irradiated with the laser beam and near the same. The output signal of the temp. sensor 44 is inputted to a temp. abnormality detector 45. This temp. abnormality detector 45 previously stores the reference temp. to be a criterion and compares the temp. detected by the temp. sensor 44 and the reference temp. and executes the abnormality processing when the detected temp. is higher than the reference temp. For example, the stoppage of the irradiation with the laser beam, etc., are executed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating removing method using laser light and a laser processing apparatus suitable for the coating removing method.

[0002]

2. Description of the Related Art A highly toxic chemical called methylene chloride is mainly used for removing paint on an outer body of an aircraft or the like. Conventionally, this agent is sprayed on the painted surface,
After weakening the paint, the paint film was manually removed by scraping off the surface of the fuselage skin.

[0003]

The above-mentioned conventional method for removing a coating film is not only dangerous, but also has low working efficiency. There is also a problem in the collection and disposal of the removed material.

An object of the present invention is to provide a paint film removing method capable of removing a paint film without using a chemical, and a laser processing apparatus suitable for removing the paint film.

[0005]

According to one aspect of the present invention, an energy density capable of irradiating a surface of a processing object with a laser beam and changing an energy density of the laser beam on the surface of the processing object is provided. Using a variable optical system, irradiating a laser beam to the surface of the processing object having a coating film formed on the surface, and removing at least an upper layer portion of the coating film by ablation, removing the coating film The step of observing the temperature of the laser beam irradiating part on the surface of the object to be processed or the vicinity thereof, and comparing the temperature obtained in the step of observing the temperature with a reference temperature. And carrying out the abnormal treatment when it is higher.

If the energy density of the irradiation laser beam is too low, ablation does not occur. If the energy density is too high, the base material of the coating film is damaged.
That is, when the coating film is removed by ablation, there is a suitable range of the energy density. By using the variable energy density optical system, the energy density can be set in a suitable range. It is possible to confirm whether or not the surface temperature of the processing target during the ablation is equal to or lower than the reference temperature.

According to another aspect of the present invention, a lens for converging or diverging a laser beam to irradiate the surface of a processing object, supporting the lens, and adjusting a height from the processing object surface to the lens. There is provided a laser processing apparatus having an adjustable lens support mechanism and a temperature sensor for detecting a temperature of a laser beam irradiating portion on the surface of the processing target or a temperature in the vicinity thereof.

By changing the height from the surface of the processing object to the lens, the energy density of the laser beam on the surface of the processing object can be changed. With the temperature sensor,
The surface temperature of the processing target during ablation can be detected.

[0009]

FIG. 1 is a schematic perspective view of a laser processing apparatus according to an embodiment of the present invention. The laser irradiation head 10 is in contact with the surface of the processing target 1. The laser irradiation head 10 is a box-shaped container 1 having an opening on the processing object 1 side.
1 and optical components housed therein. A transparent window 12 is attached to a side surface of the box-shaped container 11, and the inside can be visually observed through the transparent window 12. Note that the box-shaped container 11 itself may be formed of a transparent material.

The laser irradiation head 10 is attached to the tip of a manipulator arm 50. The manipulator arm 50 is controlled by the manipulator body 51 and moves and supports the laser irradiation head 10 to a desired position on the surface of the processing target 1.

The laser beam output from the laser light generator 60 is guided into the laser irradiation head 10 through a beam shaping optical component 61 and a beam transmission arm 62.

The laser light generator 60 is, for example, a transversely pumped atmospheric pressure type CO ₂ laser device (TEA-CO ₂ laser device). The TEA-CO ₂ laser device has a wavelength of 9-1.
A 1 μm laser beam is output as a pulse.

The beam shaping optical component 61 shapes the cross section of the laser beam output from the laser light generator 60 into a desired shape. For example, it is constituted by an aperture having a rectangular through-hole, and shapes the cross-sectional shape of the laser beam into a rectangular shape.

The beam transmitting arm 62 is, for example, a bendable arm having a plurality of joints. The beam transmitting arm 62 follows the movement of the laser irradiation head 10 and transmits the laser beam passing through the beam shaping optical component 61 to the laser irradiation head 10. Lead.

The laser irradiation head 10 has a gas introduction pipe 13
And a gas exhaust pipe 15. The gas introduction pipe 13 is connected to a gas supply device 14, and is supplied from the gas supply device 14 through the gas introduction pipe 13.
Gas is introduced into 0. The gas exhaust pipe 15 is connected to a gas exhaust device 16, and the gas exhaust device 16 exhausts the gas in the laser irradiation head 10 through the gas exhaust pipe 15.

FIG. 2 is a schematic sectional view of the laser irradiation head 10 of FIG. A box-shaped container 11 having an open surface on the processing object 1 side is held so that the periphery of the opening is almost in contact with the surface of the processing object 1. A laser transmission arm 62 is connected to a through hole 17 formed on a surface of the box-shaped container 11 facing the opening. The laser beam 63 transmitted through the laser transmission arm 62 is introduced into the box-shaped container 11 through the through hole 17.

The laser beam introduced into the box-shaped container 11 passes through the half mirror 20 and the homogenizer 31, is reflected by the deflectors 21 and 22, and enters the condenser lens 23. The laser beam focused by the focusing lens 23 is applied to the surface of the processing target 1.

The half mirror 20 reflects a part of the laser beam and makes it incident on the energy sensor 30. The energy sensor 30 measures the energy of the laser beam.

The homogenizer 31 makes the intensity distribution in the cross section of the laser beam substantially uniform. Deflectors 21 and 22
Indicates the irradiation position of the laser beam,
Are moved in the Y-axis direction and the X-axis direction which are orthogonal to each other in the surface of. The deflectors 21 and 22 are constituted by, for example, galvanomirrors. When the deflectors 21 and 22 are galvanomirrors, it is preferable that the condenser lens 23 be an arc sine lens in order to keep the moving speed of the laser irradiation position constant. When the deflection angle of the laser beam by the deflectors 21 and 22 changes in proportion to time, it is preferable that the condenser lens 23 be an fθ lens for the same reason. Note that rotating polygon mirrors may be used as the deflectors 21 and 22. Even when the fθ lens is used, the moving speed at the laser irradiation position can be kept constant by operating the galvanomirror so that the angle change becomes non-linear with respect to time.

The condenser lens 23 has a condenser lens support mechanism 2
4 attached to the side surface of the box-shaped container 11. The condenser lens support mechanism 24 can adjust the height from the surface of the processing target 1 to the condenser lens 23. A height sensor 25 is attached to the condenser lens 23. The height sensor 25 is provided between the surface of the processing target 1 and the condenser lens 2.
Detects a height up to 3 and sends a detection signal to the height controller 26.

The height control unit 26 stores a height target value in advance. The height control device 26 includes a height sensor 25
And controls the condenser lens support mechanism 24 so that the height of the condenser lens 23 approaches the target value, and adjusts the height of the condenser lens 23 based on the detection signal received from.

A visible light laser device 32 is provided in the box-shaped container 11.
Is installed. The visible light laser device 32 is, for example, H
An eNe laser device or the like. The visible laser beam output from the visible light laser device 32 is reflected by the half mirror 20 and propagates along the same optical axis as the laser beam incident through the through hole 17. Therefore, the visible laser beam irradiates a region of the surface of the processing target 1 that is substantially the same as the TEA-CO ₂ laser beam. Therefore, the irradiation position of the laser beam can be visually observed through the transparent window 12 shown in FIG.

In the box-shaped container 11, nozzles 40 and 41 are arranged. The nozzles 40 and 41 communicate with the gas introduction pipe 13 attached to the side wall of the box-shaped container 11. The nozzle 40 ejects gas to the laser beam irradiation position on the surface of the processing target 1 and its vicinity. The nozzle 41 ejects gas toward the surface of the condenser lens 23 on the processing object 1 side. By this gas flow, it is possible to suppress the scattered matter from the surface of the processing target 1 from adhering to the surface of the condenser lens 23.

Gas suction port 4 arranged in box type container 11
2 communicates with a gas exhaust pipe 15 attached to the side wall of the box-shaped container 11. The tip of the gas suction port 42 faces the laser irradiation position on the surface of the processing target 1. The gas suction port 42 can exhaust the gas in the box-shaped container 11 and discharge the scattered matter scattered from the laser irradiation part.

A color sensor 4 is provided near the tip of the gas suction port 42.
3 and a temperature sensor 44 are attached. The color sensor 43 includes, for example, a CCD, and
Of the laser beam irradiation position and the color in the vicinity thereof are detected.
The temperature sensor 44 is, for example, a radiation thermometer, and detects a laser beam irradiation position on the surface of the processing target 1 and a temperature in the vicinity thereof.

The output signal of the temperature sensor 44 is input to a temperature abnormality detecting device 45. The temperature abnormality detection device 45 includes:
A reference temperature serving as a criterion is stored in advance. The temperature abnormality detection device 45 compares the temperature detected by the temperature sensor 44 with a reference temperature. If the detected temperature is higher than the reference temperature, an abnormality process is performed. The abnormality processing is, for example, stopping laser beam irradiation.

Next, the operation of the laser processing apparatus shown in FIGS. 1 and 2 will be described by taking as an example a case where the coating film on the surface of the processing object is removed.

The laser beam incident on the laser irradiation head 10 shown in FIG. 2 is irradiated on the surface of the processing object 1, and the coating film is removed by ablation. Processing object 1
If the energy density (fluence) of the laser beam on the surface of the substrate is too low, the coating film is not ablated. On the other hand, if the energy density is too high, the base material of the coating film will be damaged. Therefore, it is preferable to set the energy density of the laser beam in a range where the underlying material is not damaged and the coating film is ablated. When the energy density of the laser beam output from the laser light generator 60 is sufficiently high, a diverging lens may be used instead of the condenser lens 23.

The energy density can be adjusted by adjusting the height from the surface of the processing object 1 to the condenser lens 23 by the condenser lens support mechanism 24 to change the area of the irradiation area. The preferable range of the energy density differs depending on the type of the base material and the coating film. Therefore, it is preferable that preliminary experiments are performed in advance at different energy densities to determine a suitable energy density range, that is, a suitable height of the condenser lens 23.

The preferred height of the condenser lens 23 is stored in the height controller 26. The height controller 26 compares the height detected by the height sensor 25 with a suitable height stored in advance, and controls the condenser lens support mechanism 24 so as to approach the suitable height. With this height control, ablation can always be performed with a suitable energy density.

The irradiation position of the laser beam is swept by the deflector 22 in the X-axis direction, and then the irradiation position is shifted by the deflector 21 in the Y-axis direction. The irradiation position is again swept in the X-axis direction by the deflector 22, and the laser beam is irradiated in the same range as the previous sweep in the X-axis direction. By repeating this sweep, the coating film in a certain area on the surface of the processing target 1 can be removed by ablation.

The position of the laser irradiation head 10 is moved by driving the manipulator arm 50 shown in FIG.
The sweep in the axis and Y axis directions is repeatedly executed. In this manner, the coating film in a wide area on the surface of the processing target 1 can be removed by ablation.

When the laser irradiation head 10 is moved, the height from the surface to the condenser lens 23 may fluctuate due to a change in the curvature of the surface of the processing object 1 or unevenness. In this case, the height of the condenser lens 23 can be kept constant by the height sensor 25 and the height control device 26.
Therefore, the energy density of the laser beam on the surface of the processing target 1 can be kept constant, and stable ablation can be performed.

Note that the sweep direction by the deflector 21 and the sweep direction by the deflector 22 need not necessarily be orthogonal. It suffices that the two sweep directions cross each other.

In the above-described sweeping method, a case has been described in which the two-dimensional sweep is performed using the deflectors 21 and 22, but the one-dimensional sweep may be performed using only one of the deflectors. Good. In this case, the laser irradiation head 10 is moved by the manipulator arm 50 shown in FIG. 1 in a direction crossing the sweep direction. In this manner, the laser beam can be applied to a wide area on the surface of the processing target 1.

By blowing gas from the nozzle 40 onto the surface of the processing object 1, a rise in surface temperature can be suppressed. In addition, the processing target 1
It is preferable to use a gas that does not oxidize, for example, an inert gas such as an Ar gas or a He gas, or an N ₂ gas.
In the case of processing a material having high oxidation resistance, air may be blown. The removed matter scattered from the surface of the processing object 1 is discharged from the gas suction port 42.

While the coating film is being removed by laser ablation, the abnormal temperature detector 45 monitors the normality of the surface temperature of the processing target 1. When the surface temperature of the processing target 1 exceeds a preset reference temperature, abnormal processing is executed. The abnormality processing is, for example, stopping laser beam irradiation, sounding an alarm, or the like. When the detected temperature exceeds the reference temperature, the pulse repetition frequency of the laser light may be reduced.

As described above, by using laser ablation, the coating film can be removed without using toxic chemicals. Further, since the surface temperature of the processing target 1 is monitored during the ablation, it is possible to prevent the processing target 1 from being damaged or deteriorated due to a rise in temperature.

According to the International Air Transport Association (IAT) standards, the temperature of the aircraft surface must be kept below 80 ° C. when removing the coating film on the surface of the aircraft body. For example, the reference temperature set in the temperature abnormality detection device is 75 ° C.
By doing so, it is possible to remove the coating film while checking whether the body surface temperature satisfies the IATA standard.

Next, referring to FIG. 3, a description will be given of the result of an experiment for removing the coating film. In the experiment, a sample in which a coating film having a thickness of about 80 μm used for coating an aircraft body was formed on an aluminum plate surface was used. Laser light generator 60
Is a TEA-CO ₂ laser device that outputs pulsed laser light at a repetition frequency of 100 Hz. The energy density of the laser beam on the surface of the object 1 is about 5 J / c.
m ² , the shape of the irradiation area is a rectangle of about 14 mm × 1 mm. At this time, the area to be ablated is a rectangle of about 5 mm × 0.5 mm. The moving distance between shots is about 0.5 mm. Further, the sweep speed of the laser beam irradiation position in the X-axis direction was set to 25 mm / s.

FIG. 3 shows a laser beam irradiation history. First, as shown by the arrow S1, the beam is swept by about 5 cm in the X-axis direction by the deflector 22. Next, it is shifted by about 0.5 cm in the Y-axis direction by the deflector 21, and the same range is swept again by the deflector 22 in the X-axis direction as shown by the arrow S2. Further, it is shifted by about 0.5 cm in the Y-axis direction, and sweeps the same range in the X-axis direction as shown by an arrow S3. Arrow S1
By the sweep of S3, a rectangular area of about 5 cm × 1.5 cm can be irradiated with a laser beam. Arrow S1
The sweep of S3 is repeated three times.

As a result, the coating film on the surface of the aluminum plate was almost completely removed, and the surface of the aluminum plate as the base material was exposed.
No damage was observed on the surface of the aluminum plate.

In the above experiment, laser irradiation was performed three times on the same region of the surface of the processing object. By reducing the number of laser irradiations, it is possible to leave the lower layer of the coating film and remove only the upper layer. The coating film on the aircraft body surface is
It usually consists of a primer layer for adhesion and rust prevention, and a cosmetic topcoat layer applied thereon. By adjusting the number of laser irradiations, for example, only the top coat layer can be removed.

In the above embodiment, the case where the pulse oscillation type TEA-CO ₂ laser device is used as the laser light generator has been described, but other laser devices may be used. For example, an Nd: YAG laser device, an Nd: YLF laser device, an excimer laser device, a copper vapor laser device, a CO laser device, a semiconductor laser device, or the like may be used. Further, the present invention is not limited to the pulse oscillation type, and a continuous oscillation type laser device may be used. Further, harmonics of laser light output from these laser devices, for example, second to fifth harmonics, Raman-converted light, or the like may be used.

The present invention has been described in connection with the preferred embodiments.
The present invention is not limited to these. For example, it will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.

[0046]

As described above, according to the present invention,
By using laser ablation, the coating film formed on the surface of the processing object can be removed without using a chemical. Further, by adjusting the height from the surface of the processing object to the condenser lens, the energy density of the laser beam can be set in a suitable range.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a laser processing apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view schematically showing the laser irradiation head shown in FIG.

FIG. 3 is a diagram for explaining how a laser beam is swept.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Processing target 10 Laser irradiation head 11 Box-shaped container 12 Transparent window 13 Gas introduction pipe 14 Gas supply device 15 Gas exhaust pipe 16 Gas exhaust device 17 Through hole 20 Half mirror 21, 22 Deflector 23 Condensing lens 24 Condensing lens Support mechanism 25 Height sensor 26 Height control device 30 Energy sensor 31 Homogenizer 32 Visible light laser device 40, 41 Nozzle 42 Gas suction port 43 Color sensor 44 Temperature sensor 45 Temperature abnormality detection device 50 Manipulator arm 51 Manipulator body 60 Laser light generation Device 61 Beam shaping optical component 62 Laser transmission arm 63 Laser beam

Claims (3)

[Claims] Irradiating a laser beam on a surface of an object to be processed;
Using a variable energy density optical system capable of changing the energy density of laser light on the surface of the processing object, irradiating the surface of the processing object having a coating film formed on the surface with laser light, A step of removing at least an upper layer portion of the coating film by ablation, wherein the step of removing the coating film further comprises a step of observing a temperature of a laser beam irradiating portion on a surface of the processing object or a vicinity thereof, Comparing the temperature obtained in the step of observing the temperature with a reference temperature, and performing an abnormal process when the temperature is higher than the reference temperature. 2. A lens for converging or diverging a laser beam to irradiate the surface of a processing object, and a lens supporting mechanism for supporting the lens and adjusting a height from the processing object surface to the lens. A laser processing apparatus comprising: a temperature sensor that detects a temperature of a laser beam irradiation part on a surface of the processing target or a vicinity thereof. 3. A temperature abnormality detecting means for storing a reference temperature, comparing a temperature detected by the temperature sensor with the reference temperature, and executing an abnormality process when the temperature is higher than the reference temperature. Item 3. A laser processing apparatus according to item 2.