JPH10283624A - Perpendicular magnetic recording medium and memory device - Google Patents

Perpendicular magnetic recording medium and memory device

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Publication number
JPH10283624A
JPH10283624A JP10383197A JP10383197A JPH10283624A JP H10283624 A JPH10283624 A JP H10283624A JP 10383197 A JP10383197 A JP 10383197A JP 10383197 A JP10383197 A JP 10383197A JP H10283624 A JPH10283624 A JP H10283624A
Authority
JP
Japan
Prior art keywords
layer
recording medium
magnetic recording
magnetic layer
soft magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10383197A
Other languages
Japanese (ja)
Inventor
Toshikazu Nishihara
敏和 西原
Toshio Ando
敏男 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP10383197A priority Critical patent/JPH10283624A/en
Publication of JPH10283624A publication Critical patent/JPH10283624A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain an excellent magnetic recording medium which does not give rise to the deterioration in signal even in an external magnetic field by forming the film thickness of a soft magnetic layer which is an intermediate layer of the perpendicular magnetic recording medium having a three-layered structure to a specific value or above. SOLUTION: A hard magnetic layer 2, the soft magnetic layer 3 formed of CoZrNi and a perpendicular layer 4 are successively laminated on a substrate 1 and a protective layer 5 is formed on this perpendicular layer 4. The hard magnetic layer 2 has function to fix the magnetization of the soft magnetic layer 3 weak to external magnetic fields and eventually to stabilize the magnetization of the perpendicular layer 4 and is formed of, for example, CoSm, etc. The soft magnetic layer 3 is so formed as to have a film thickness of >=600 nm. The perpendicular magnetic recording medium formed in such a manner is built into a HDD, etc., by which the magnetic recording medium having a high density and excellent reliability is obtd. If the film thickness is below 600 nm, the signal stability to the external magnetic fields is insufficient, degaussing occurs and the embodiment of the high reliability when the medium is built into external memory device is not possible.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は三層構造の垂直磁気
記録媒体及びそれを使用した記憶装置に関する。
The present invention relates to a perpendicular magnetic recording medium having a three-layer structure and a storage device using the same.

【0002】[0002]

【従来の技術】近年、コンピュータの外部記憶装置とし
て、HDD(Hard Disk Drive)が広く
用いられている。このHDDに組み込まれている記録用
ディスクは、主に面内磁気記録媒体である。この一方
で、面内磁気記録媒体を使用した面内磁気記録方式より
も、垂直磁気記録媒体を使用した垂直磁気記録方式の方
が、より高密度化を達成し得るという考え方や、それを
裏付けるデータが以前より数多く発表されている。この
垂直磁気記録媒体は、従来、基板上に面内軟磁性層(以
下、軟磁性層という)と垂直磁気記録層(以下、垂直層
という)がこの順に積層された二層構造であった。
2. Description of the Related Art In recent years, an HDD (Hard Disk Drive) has been widely used as an external storage device of a computer. The recording disk incorporated in this HDD is mainly an in-plane magnetic recording medium. On the other hand, the perpendicular magnetic recording system using a perpendicular magnetic recording medium can achieve higher densities than the longitudinal magnetic recording system using a longitudinal magnetic recording medium, and it supports this idea. More data has been published than before. Conventionally, this perpendicular magnetic recording medium has a two-layer structure in which an in-plane soft magnetic layer (hereinafter, referred to as a soft magnetic layer) and a perpendicular magnetic recording layer (hereinafter, referred to as a perpendicular layer) are laminated in this order on a substrate.

【0003】しかし、このような二層構造の垂直磁気記
録方式は、(1)面内磁気記録方式の高密度化が顕著に
進められたこと、(2)ヘッド媒体空隙による出力減少
の影響が大きいこと、並びに、(3)外部磁界の影響を
顕著に受けやすいことなどの理由で、なかなか実現され
なかった(William Cain et al.,
IEEE TRANSACTIONS ON MAGN
ETICS,VOL.32,NO.1,JUNUARY
1996)。
However, such a two-layered perpendicular magnetic recording system has the following effects: (1) the high density of the in-plane magnetic recording system has been remarkably advanced; It has not been easily realized because of its large size and (3) its susceptibility to external magnetic fields (William Cain et al.,
IEEE TRANSACTIONS ON MAGN
ETICS, VOL. 32, NO. 1, JUNUARY
1996).

【0004】ところが、最近になって、面内磁気記録媒
体に書き込まれた信号が熱による影響を受けやすいこと
が判り、近い将来、高密度化に歯止めがかかることが懸
念されている。そして、これに代わるものとして、垂直
磁気記録方式の実用化が再び期待されるようになった。
垂直磁気記録方式を実用化するにあたって、上記(2)
の問題は、近年のヘッド低浮上化により支障のない領域
まで改善されている。また、上記(3)の問題は、本発
明者らが既に提案した、三層構造の垂直磁気記録媒体に
より、かなりの程度まで改善された(特開平7−129
946号公報)。この三層構造の垂直磁気記録媒体は上
述した二層構造の媒体の面内軟磁性層と基板との間に面
内硬磁性層(以下、硬磁性層という)を設けたものであ
る。この硬磁性層は、外部磁界に弱い軟磁性層の磁化を
固定し、ひいては、垂直層の磁化を安定化させる機能を
有する。
However, recently, it has been found that a signal written on an in-plane magnetic recording medium is easily affected by heat, and there is a concern that high density will be stopped in the near future. As a substitute for this, practical use of the perpendicular magnetic recording system has been expected again.
In putting the perpendicular magnetic recording system into practical use, the above (2)
The problem described above has been improved to an area where there is no hindrance due to the recent low flying height of the head. The problem (3) has been improved to a considerable extent by the three-layered perpendicular magnetic recording medium already proposed by the present inventors (JP-A-7-129).
946). This perpendicular magnetic recording medium having a three-layer structure is obtained by providing an in-plane hard magnetic layer (hereinafter, referred to as a hard magnetic layer) between the in-plane soft magnetic layer and the substrate of the above-described two-layer structure medium. The hard magnetic layer has a function of fixing the magnetization of the soft magnetic layer that is weak to an external magnetic field, and thereby stabilizing the magnetization of the perpendicular layer.

【0005】[0005]

【発明が解決しようとする課題】上述した三層構造の垂
直磁気記録媒体は、一般的な地磁気程度の外部磁界
(0.3[Oe]程度)に対しての記録信号は非常に安
定である。しかし、最近になって、数10[Oe]程度
の外部磁界中では、信号の減磁が発生することが判って
きた。したがって、数10[Oe]の磁界中でも、記録
信号の安定性に優れた垂直磁気記録媒体、並びに、その
ような磁気記録媒体が組み込まれた高信頼性を有する外
部記憶装置の開発が望まれている。
In the above-described perpendicular magnetic recording medium having a three-layer structure, a recording signal with respect to an external magnetic field (approximately 0.3 [Oe]) equivalent to general geomagnetism is very stable. . However, it has recently been found that signal demagnetization occurs in an external magnetic field of about several tens [Oe]. Therefore, it is desired to develop a perpendicular magnetic recording medium having excellent recording signal stability even in a magnetic field of several tens [Oe] and a highly reliable external storage device incorporating such a magnetic recording medium. I have.

【0006】[0006]

【課題を解決するための手段】本発明者らは、三層構造
を有する垂直磁気記録媒体の中間層である軟磁性層の膜
厚と、外部磁界に対する信号の安定性との関係に着目
し、上記目的を達成し得る面内軟磁性層の膜厚の下限値
を見出して本発明を完成するに至った。すなわち、本発
明によれば、基板上に、硬磁性層、軟磁性層及び垂直層
が順次積層されてなる垂直磁気記録媒体の、軟磁性層の
膜厚が600nm以上であるものが提供される。また、
本発明によれば、基板上に硬磁性層、軟磁性層及び垂直
層が順次積層されてなる垂直磁気記録媒体が組み込まれ
た記憶装置の、軟磁性層の膜厚が600nm以上である
ものが提供される。そして、上記各構成において、軟磁
性層を形成する材料としては、CoCrTaが好まし
い。
The present inventors have focused on the relationship between the thickness of the soft magnetic layer, which is the intermediate layer of a perpendicular magnetic recording medium having a three-layer structure, and the stability of signals with respect to an external magnetic field. The present invention was completed by finding the lower limit of the thickness of the in-plane soft magnetic layer capable of achieving the above object. That is, according to the present invention, there is provided a perpendicular magnetic recording medium in which a hard magnetic layer, a soft magnetic layer, and a perpendicular layer are sequentially laminated on a substrate, wherein the soft magnetic layer has a thickness of 600 nm or more. . Also,
According to the present invention, there is provided a storage device incorporating a perpendicular magnetic recording medium in which a hard magnetic layer, a soft magnetic layer, and a perpendicular layer are sequentially laminated on a substrate, wherein the soft magnetic layer has a thickness of 600 nm or more. Provided. In each of the above structures, the material for forming the soft magnetic layer is preferably CoCrTa.

【0007】[0007]

【発明の実施の形態】図1は本発明の垂直磁気記録媒体
の層構成の一例を示す図である。図において、例えば、
基板1上に、硬磁性層2、軟磁性層3及び垂直層4が順
次積層され、垂直層4の上には保護膜5が形成されてい
る。硬磁性層2は、前述したように外部磁界に弱い軟磁
性層3の磁化を固定し、ひいては、垂直層4の磁化を安
定化させる機能を有するもので、例えば、CoSmなど
により形成される。
FIG. 1 is a diagram showing an example of a layer structure of a perpendicular magnetic recording medium according to the present invention. In the figure, for example,
A hard magnetic layer 2, a soft magnetic layer 3, and a vertical layer 4 are sequentially laminated on a substrate 1, and a protective film 5 is formed on the vertical layer 4. The hard magnetic layer 2 has a function of fixing the magnetization of the soft magnetic layer 3 that is weak against an external magnetic field and stabilizing the magnetization of the perpendicular layer 4 as described above, and is formed of, for example, CoSm.

【0008】上記の垂直磁気記録媒体において、軟磁性
層3の膜厚は600nm以上となるようにすることが必
要である。この軟磁性層3の膜厚が600nm未満であ
る場合には、得られた垂直磁気記録媒体の外部磁界に対
する信号安定性が十分ではなく、減磁が発生する。した
がって、外部記憶装置に組み込んだ際、高い信頼性を実
現することができない。この軟磁性層3を形成する材料
は特に限定されるものではなく、CoZrNb、パーマ
ロイなど各種のものを使用することができるが、特に、
CoZrNbは好ましいものである。また、垂直層4
は、例えばCoCrTaにより形成され、保護膜5は例
えばSiO2により形成される。また、本発明の外部記
憶装置は、上記の垂直磁気記録媒体を、例えば、HDD
などに組み込むことにより得られたもので、高密度で、
かつ、信頼性に優れたものである。
In the above-described perpendicular magnetic recording medium, the thickness of the soft magnetic layer 3 needs to be 600 nm or more. If the thickness of the soft magnetic layer 3 is less than 600 nm, the obtained perpendicular magnetic recording medium does not have sufficient signal stability against an external magnetic field, and demagnetization occurs. Therefore, when incorporated in an external storage device, high reliability cannot be realized. The material for forming the soft magnetic layer 3 is not particularly limited, and various materials such as CoZrNb and Permalloy can be used.
CoZrNb is preferred. Also, the vertical layer 4
Is formed of, for example, CoCrTa, and the protective film 5 is formed of, for example, SiO 2 . In addition, the external storage device of the present invention can store the above-described perpendicular magnetic recording medium in, for example, an HDD
It is obtained by incorporating it in a high density,
And it is excellent in reliability.

【0009】<実施例>図1に示した三層構造垂直磁気
記録媒体を製造した。すなわち、直径3.5インチのガ
ラスディスク基板1上に、CoSm17硬磁性層2、Co
Zr5Nb4軟磁性層3、及び、各種組成のCoCrTa
垂直層4を各々DCマグネトロンスパッタ方式により成
膜し、さらに、垂直層4上にSiO2保護膜5をRFス
パッタ方式により成膜して磁気ディスクを得た。このと
きの垂直層4の組成、磁化Ms、膜厚δ及び保磁力H
c、軟磁性層3の膜厚δ、並びに、硬磁性層2の膜厚δ
を各々表1に示した。表1に示したように、垂直層4と
硬磁性層2の特性は略一定とし、軟磁性層の膜厚を様々
に変化させた。
<Example> A three-layer perpendicular magnetic recording medium shown in FIG. 1 was manufactured. That is, a CoSm 17 hard magnetic layer 2 and a CoSm 17 hard magnetic layer 2 were formed on a glass disk substrate 1 having a diameter of 3.5 inches.
Zr 5 Nb 4 soft magnetic layer 3 and CoCrTa of various compositions
Each of the vertical layers 4 was formed by a DC magnetron sputtering method, and a SiO 2 protective film 5 was formed on the vertical layer 4 by an RF sputtering method to obtain a magnetic disk. At this time, the composition, magnetization Ms, film thickness δ, and coercive force H of the vertical layer 4 are obtained.
c, the thickness δ of the soft magnetic layer 3 and the thickness δ of the hard magnetic layer 2
Are shown in Table 1. As shown in Table 1, the characteristics of the perpendicular layer 4 and the hard magnetic layer 2 were kept substantially constant, and the thickness of the soft magnetic layer was varied.

【0010】[0010]

【表1】 [Table 1]

【0011】次に、上記により得られた各垂直磁気記録
媒体の外部磁界に対する記録信号の安定性を評価した。
この評価試験は、ヘルムホルツコイルで0〜70[O
e]の磁界を発生させ、その中で、各ディスクを5分間
回転させ、その前後の43kfciの信号出力の変化
(印加前の出力を100%とし、印加後の値を各々%で
示した)を調べることにより実施した。得られた結果を
図2に示した。なお、図において、実施例1は▽、実施
例2は□、比較例1は△、そして、比較例2は○で各々
示してある。
Next, the stability of a recording signal with respect to an external magnetic field of each perpendicular magnetic recording medium obtained as described above was evaluated.
This evaluation test was performed using a Helmholtz coil at 0 to 70 [O
e), and each disk is rotated for 5 minutes in the magnetic field, and a change in 43 kfci signal output before and after the change (output before application is set to 100%, and values after application are indicated by%). Was carried out. The results obtained are shown in FIG. In the figures, Example 1 is indicated by Δ, Example 2 is indicated by □, Comparative Example 1 is indicated by Δ, and Comparative Example 2 is indicated by O.

【0012】図2からも明らかなように、CoZrNb
軟磁性層の膜厚が300、200nmのディスク(比較
例1、2)は、各々20、35[Oe]の磁界で最も大
きな減磁が引き起こされ、その前後においてもかなり大
きな減磁現象が確認された。それに対して、CoZrN
b軟磁性層の膜厚が600、1000nmのディスク
(実施例2、1)は、約70[Oe]までの外部磁界中
で全く減磁が観察されなかった。このようにCoZrN
b軟磁性層の膜厚が増大するにつれて、減磁が小さくな
り、膜厚が600nmに達すると減磁現象が消失する。
これは、CoZrNb膜厚が増大するに従って、磁壁内
での磁化変化が微小になり、漏れ磁束が外部に出てこな
くなるためと考えられる。
As is clear from FIG. 2, CoZrNb
In the disks having a soft magnetic layer thickness of 300 and 200 nm (Comparative Examples 1 and 2), the largest demagnetization was caused by a magnetic field of 20 and 35 [Oe], and a considerably large demagnetization phenomenon was observed before and after that. Was done. On the other hand, CoZrN
(b) No demagnetization was observed in a disk having a soft magnetic layer thickness of 600 or 1000 nm (Examples 2 and 1) in an external magnetic field up to about 70 [Oe]. Thus, CoZrN
b As the thickness of the soft magnetic layer increases, the demagnetization decreases, and when the thickness reaches 600 nm, the demagnetization phenomenon disappears.
This is presumably because as the CoZrNb film thickness increases, the change in magnetization in the domain wall becomes smaller, and the leakage magnetic flux does not come out to the outside.

【0013】なお、家庭やオフィスなどで通常存在して
いる磁界は、おおよそ数10[Oe](約70[O
e])程度までであるが、上述したような結果から、C
oZrNb膜厚を更に大きくしていくことにより、それ
より更に高い外部磁界に対しても安定な磁気ディスクを
得ることができるものと推測される。さらに、このよう
にして得られた垂直磁気ディスクを、例えば、HDDな
どに組み込むことにより、高密度でしかも信頼性に優れ
た外部記憶装置を得ることが可能となる。
The magnetic field usually present in homes and offices is approximately several tens [Oe] (about 70 [Oe]).
e]), but from the results described above, C
It is presumed that by further increasing the oZrNb film thickness, a magnetic disk that is stable against an external magnetic field higher than that can be obtained. Further, by incorporating the thus obtained perpendicular magnetic disk into, for example, an HDD or the like, it becomes possible to obtain an external storage device having high density and excellent reliability.

【0014】[0014]

【発明の効果】以上詳細に説明したとおり、本発明によ
れば、三層構造の垂直磁気記録媒体の中間層である軟磁
性層の膜厚を600nm以上とすることにより、通常、
存在している数10[Oe](約70[Oe])程度の
外部磁界中においても信号の劣化が発生しない優れた磁
気記録媒体を得ることができる。したがって、本発明の
垂直磁気記録媒体は高信頼性の記録システムに供するこ
とができ、例えば、HDDなどの記憶装置に組み込むこ
とにより、今後、益々必要とされる、高密度で信頼性に
優れた可搬性の大容量記憶装置の実現を可能とするもの
である。
As described above in detail, according to the present invention, by setting the thickness of the soft magnetic layer, which is the intermediate layer of the three-layered perpendicular magnetic recording medium, to 600 nm or more,
An excellent magnetic recording medium in which signal deterioration does not occur even in the existing external magnetic field of about several tens [Oe] (about 70 [Oe]) can be obtained. Therefore, the perpendicular magnetic recording medium of the present invention can be used in a highly reliable recording system. This makes it possible to realize a portable large-capacity storage device.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の垂直磁気記録媒体の層構成の一例を示
す概念図である。
FIG. 1 is a conceptual diagram showing an example of a layer configuration of a perpendicular magnetic recording medium of the present invention.

【図2】本発明の実施例における軟磁性層の膜厚と外部
磁界に対する出力変化との関係を示すグラフである。
FIG. 2 is a graph showing a relationship between a thickness of a soft magnetic layer and a change in output with respect to an external magnetic field in an example of the present invention.

【符号の説明】 1 基板(ガラスディスク基板) 2 硬磁性層(CoSm層) 3 軟磁性層(CoZrNb層) 4 垂直層(CoCrTa層) 5 保護膜(SiO2層)[Description of Signs] 1 Substrate (glass disk substrate) 2 Hard magnetic layer (CoSm layer) 3 Soft magnetic layer (CoZrNb layer) 4 Vertical layer (CoCrTa layer) 5 Protective film (SiO 2 layer)

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 基板上に、面内硬磁性層、面内軟磁性層
及び垂直磁気記録層が順次積層されてなる垂直磁気記録
媒体において、前記面内軟磁性層の膜厚が、600nm
以上であることを特徴とする垂直磁気記録媒体。
In a perpendicular magnetic recording medium in which an in-plane hard magnetic layer, an in-plane soft magnetic layer, and a perpendicular magnetic recording layer are sequentially laminated on a substrate, the in-plane soft magnetic layer has a thickness of 600 nm.
A perpendicular magnetic recording medium characterized by the above.
【請求項2】 前記面内軟磁性層がCoZrNbにより
形成されている、請求項1記載の垂直磁気記録媒体。
2. The perpendicular magnetic recording medium according to claim 1, wherein the in-plane soft magnetic layer is formed of CoZrNb.
【請求項3】 基板上に面内硬磁性層、面内軟磁性層及
び垂直磁気記録層が順次積層されてなる垂直磁気記録媒
体が組み込まれた記憶装置において、前記垂直磁気記録
媒体の前記面内軟磁性層の膜厚が、600nm以上であ
ることを特徴とする記憶装置。
3. A storage device incorporating a perpendicular magnetic recording medium in which an in-plane hard magnetic layer, an in-plane soft magnetic layer and a perpendicular magnetic recording layer are sequentially laminated on a substrate, wherein the surface of the perpendicular magnetic recording medium is provided. A storage device, wherein the thickness of the inner soft magnetic layer is 600 nm or more.
【請求項4】 前記面内軟磁性層がCoZrNbにより
形成されている、請求項3記載の記憶装置。
4. The storage device according to claim 3, wherein said in-plane soft magnetic layer is formed of CoZrNb.
JP10383197A 1997-04-07 1997-04-07 Perpendicular magnetic recording medium and memory device Pending JPH10283624A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10383197A JPH10283624A (en) 1997-04-07 1997-04-07 Perpendicular magnetic recording medium and memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10383197A JPH10283624A (en) 1997-04-07 1997-04-07 Perpendicular magnetic recording medium and memory device

Publications (1)

Publication Number Publication Date
JPH10283624A true JPH10283624A (en) 1998-10-23

Family

ID=14364377

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH10283624A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548194B2 (en) 2001-03-12 2003-04-15 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and a magnetic reproducing apparatus
US6657813B2 (en) 2000-02-28 2003-12-02 Hitachi, Ltd. Perpendicular magnetic recording system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6657813B2 (en) 2000-02-28 2003-12-02 Hitachi, Ltd. Perpendicular magnetic recording system
US7088548B2 (en) 2000-02-28 2006-08-08 Hitachi Global Storage Technologies Japan, Ltd. Perpendicular magnetic recording system
US6548194B2 (en) 2001-03-12 2003-04-15 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and a magnetic reproducing apparatus

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