JPH10264023A - Plate body holding method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To machine a plate body with accuracy and detach the plate body from a table in a short time by bonding the plate body to the upper face of a gypsum liquid, and then holding the plate body after uniforming the height of the machined face of a table before the gypsum liquid is completely solidified. SOLUTION: A plate body 10 is placed on the upper face of a gypsum block 14, and the plate body 10 is bonded with the gypsum block 14 as 'an adhesive. Before the gypsum block 14 is completely solidified, the height of the machined face 11 of the plate body 10 to the surface of a table 12 is uniformed using a block gage or the like. At this time, the height of the machined face 11 of the plate body 10 is adjusted by the deformation of the gypsum block 14. After adjustment, the plate body 10 is left until the gypsum block 14 is completely solidified. The plate body 10 is thereby bonded onto the gypsum block 14. In this state, the machined face 11 is ground by a grinding device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for holding a plate, and more particularly to a method for grinding a plate such as a silicon wafer or a plate which requires a high flatness. The present invention relates to a method for holding a plate-like body to be held on a table.

[0002]

2. Description of the Related Art To hold a plate on a table,
First, the plate-like body is placed on a table, and held on the table by bonding with an adhesive.

[0003]

However, the conventional method for holding a plate-shaped member is not suitable for holding the plate-shaped member on a table due to the difference in the amount of expansion of the adhesive due to uneven curing time of the adhesive.
For example, it deforms like a wave. For this reason, residual stress is generated in the plate-like body, and the plate-like body is deformed to return to its original shape when peeled off. Therefore, there is a disadvantage that the plate-like body cannot be processed with high accuracy.

In the conventional holding method, since the entire back surface of the plate is bonded with an adhesive, the solvent for dissolving the adhesive hardly penetrates to a deep portion (the center of the plate), so that the table to the plate can be removed. The disadvantage is that it takes time to remove the body. The present invention has been made in view of such circumstances, and provides a plate-like body holding method capable of processing a plate-like body with high accuracy and removing the plate-like body from a table in a short time. The purpose is to:

[0005]

According to the present invention, in order to achieve the above object, a method for holding a plate-like body on a table, the method comprising applying a gypsum liquid on the table at a predetermined interval. Then, after the plate is adhered to the upper surface of the gypsum liquid, before the gypsum liquid is completely solidified, the height of the processing surface of the plate with respect to the surface of the table is kept uniform. And

In order to achieve the above object, the present invention provides a method for holding a plate-shaped body on a table, wherein the gypsum liquid is applied on the table at a predetermined interval, and After the gypsum liquid is applied in a ring shape on the table, and the plate is placed on the top of the gypsum liquid, before the gypsum liquid is completely solidified, the height of the processing surface of the plate with respect to the surface of the table is lowered. After the gypsum liquid is completely solidified after uniformity, by suctioning air in the space surrounded by the table and the solidified gypsum and the plate-like body,
It is characterized in that the plate-shaped body is held in close contact with the top surface of the gypsum liquid.

According to the present invention, since the gypsum liquid having a small amount of expansion (volume change) upon solidification is used as the adhesive for the plate, deformation of the plate on the table can be suppressed. Further, in the present invention, since the gypsum liquid is applied on the table at predetermined intervals, the solidification time of the gypsum liquid becomes uniform, and the expansion amount during the solidification becomes uniform. Further, since the amount of gypsum used is small, there is an advantage that the total heat generation is small and the thermal deformation of the plate-like body and the table is small. Thereby, the deformation of the plate-like body on the table can be minimized. Therefore, according to the present invention, the plate-like body can be processed with high accuracy. In addition, when the plate is removed from the solidified gypsum, since the plate is only partially adhered to the gypsum, the solvent permeates in a short time to the deep portion of the bonded portion. Therefore, the plate can be removed in a short time.

Further, according to the present invention, after the gypsum liquid is applied in a ring shape on the table, a plate is placed on the upper surface of the gypsum liquid, and the table, the solidified gypsum and the plate are combined. The air in the enclosed space is sucked, and the plate-shaped body is held in close contact with the top surface of the gypsum. The present invention uses a gypsum liquid having a small amount of expansion upon solidification as a plate-like support member,
The plate can be processed with high accuracy. Further, according to the present invention, the plate-like body can be removed from the plaster simply by stopping the suction of the air and returning the pressure of the space to the atmospheric pressure.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method for holding a plate according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a perspective view showing a first embodiment of a holding method for holding a plate 10 as a plate, and FIG.
FIG. 3 is a side view showing a state where the plate-like body 10 is held on the table 12 via solidified gypsum blocks 14, 14,.

The gypsum blocks 14, 14,... Are formed in a columnar shape having a predetermined height, and are formed on the table 12 at predetermined intervals. In the present embodiment, a total of nine plaster blocks 14, 14...
The number is not limited to this, and the gypsum block 14 and the plate 1
What is necessary is just to set suitably according to the magnitude of 0. In the method for forming the gypsum blocks 14, 14,..., First, a perforated plate such as a punched metal plate having a plurality of holes regularly formed on the surface is placed on the table 12. Then, the gypsum liquid is poured into the holes of the perforated plate, and the perforated plate is removed from the table 12 before the gypsum liquid is completely solidified. As a result, the gypsum blocks 14, 14,.
Are formed on the table 12.

Next, the plate 10 is placed on the top surfaces of the gypsum blocks 14, 14,..., And the plate 10 is bonded using the gypsum blocks 14, 14,. Before the gypsum blocks 14, 14... Are completely solidified, the height of the processing surface 11 of the plate 10 with respect to the surface of the table 12 is made uniform using a block gauge or the like. At this time, the height of the processing surface 11 of the plate-shaped body 10 is adjusted by the deformation of the gypsum blocks 14, 14,. After adjustment, plaster block 1
By leaving 4, 14 ... completely solidified,
As shown in FIG.
4... And the grinding surface is ground by the grinding machine in this state.

The bonding in this case is considered to be due to the anchor effect, and is not strong. However, if there are many bonding portions, the bonding can be performed with a strength that can be ground. If the bonding strength is insufficient, an adhesive such as wax that can be bonded at a low temperature may be used in combination. As described above, in the first embodiment, the gypsum blocks 14, 1 with a small expansion amount during solidification are used.
4 are used as an adhesive for the plate-shaped body 10, so that the deformation of the plate-shaped body 10 on the table 12 can be suppressed.

Further, in the present embodiment, the work surface 11 is corrected to a flat surface by deforming the gypsum blocks 14, 14... Before solidification without deforming the plate-like body 10. Therefore, even if the plate-like body 10 is removed from the gypsum blocks 14, 14, ..., no residual stress is generated in the plate-like body 10, so that the plate-like body 10 is not deformed. Furthermore, in this embodiment, since the gypsum blocks 14, 14,... Are formed on the table 12 at predetermined intervals, the gypsum blocks 14, 14,.
The solidification time of... Becomes uniform, and the expansion amount during solidification becomes uniform. Thereby, deformation of the plate-shaped body 10 on the table 12 can be minimized.

Therefore, in the present embodiment, the plate-like body 10 can be processed with high accuracy from the above-described effects.
After grinding the plate-like body, the plate-like body 10 is transformed into a gypsum block 14,
When the plate-like body 10 is detached from the gypsum blocks 14, 14,..., The solvent permeates in a short time to the deep part of the bonding part. Therefore, the plate 10 can be removed in a short time.

FIG. 3 is a perspective view showing a second embodiment of the method for holding a plate-like body according to the present invention, and FIG.
FIG. 3 is a cross-sectional view showing a state where 0 is held on a table 16 via gypsum blocks 14, 14,. While the above-described embodiments (FIGS. 1 and 2) utilize the adhesive properties of gypsum, in this embodiment, they are used as support members, and the object to be ground is fixed by a vacuum chuck. . The method for forming the loop-shaped gypsum block 18 is such that a square inner mold plate and an outer mold plate having a square opening for accommodating the inner mold plate are placed on the table 16 and the inner mold plate is formed. It is formed by forming a gap (groove) between the plate and the outer mold plate, and pouring the gypsum liquid into this groove. Also, the plaster blocks 14, 14,...
Is formed together with the gypsum block 18 by forming holes corresponding to the number and positions of the inner mold plates and pouring a gypsum solution into the holes. In the present embodiment, a method of correcting the processing surface 11 of the plate-like body 10 to a flat surface is as follows.
Since it is the same as the first embodiment, the description is omitted.
In this embodiment, it is preferable to apply a release agent to the plate-like body to solidify the gypsum. This prevents the gypsum block and the plate-like body from adhering.

As shown in FIG. 4, the table 16 has an air passage 20 formed therein. Further, the through holes 22, 22, 22 communicating with the ventilation path 20 are provided.
3 is formed on the surface of the table 16 surrounded by the loop-shaped plaster block 18, as shown in FIG. Furthermore,
A suction port 24 communicating with the ventilation path 20 is formed on the side surface of the table 16, and a suction device (not shown) is connected to the suction port 24 via a pipe 26 as shown in FIG.

In order to hold the plate 10 on the table 16 constructed as described above, first, the gypsum block 14,
The plate-shaped body 10 is placed on the upper surfaces of the. Next, by driving the suction device, the air in the space 28 surrounded by the plate 10, the table 16, and the gypsum block 18 is passed through the pipe 2.
6. Suction through the ventilation path 20 and the through holes 22, 22, 22. As a result, the plate-like body 10 becomes the gypsum block 1
4, 14,..., 18 are held in close contact with the upper surface.

Therefore, in this embodiment, since the gypsum body having a small amount of expansion at the time of solidification is used as a support member for the plate-like body, the plate-like body can be accurately processed. Also,
In the present embodiment, since the plate-shaped body and the gypsum block are not bonded, the vacuum of the air is stopped and the pressure of the space 28 is returned to the atmospheric pressure, and the plate-shaped body 10 is moved to the gypsum block 1.
4, 14 ... 18.

In this embodiment, an example in which a plate is used as the plate is described. However, the present invention is not limited to this, and any plate, such as a glass plate, can be used.

[0020]

As described above, according to the method for holding a plate-like body according to the present invention, gypsum having a small amount of expansion during solidification is used as an adhesive or a support member for the plate-like body. The body can be processed with high accuracy. Further, since the plate-like body is only partially adhered to the gypsum or adhered by air suction, the plate-like body can be removed from the gypsum in a short time.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a method for holding a plate-like body according to a first embodiment of the present invention.

FIG. 2 is a side view of a plate-like body held by the holding method of FIG. 1;

FIG. 3 is an explanatory view of a plate-like body holding method according to a second embodiment of the present invention.

FIG. 4 is a sectional view taken along line 4-4 in FIG. 3;

[Explanation of symbols]

 10: plate-like body 12, 16: table 14, 18: gypsum block

Claims (3)

[Claims] 1. A method for holding a plate-like body for holding the plate-like body on a table, wherein a gypsum liquid is applied on the table at a predetermined interval,
After the plate-like body is bonded to the upper surface of the gypsum solution, before the gypsum solution is completely solidified, the height of the processing surface of the plate-like body with respect to the surface of the table is kept uniform. How to hold the plate. 2. The gypsum solution is prepared by placing a perforated plate on a table, applying the gypsum solution to the holes of the perforated plate, and before the gypsum solution is completely solidified. 2. The method for holding a plate-like body according to claim 1, wherein the liquid is applied onto the table at a predetermined interval by removing the plate-like body from the table. 3. A method for holding a plate-like body for holding the plate-like body on a table, wherein the gypsum liquid is applied on the table at a predetermined interval, and the gypsum liquid is applied on the table in a ring shape.
After placing the plate on the top surface of the gypsum liquid, before the gypsum liquid is completely solidified, the height of the processing surface of the plate with respect to the table surface is made uniform, and then the gypsum liquid is completely solidified. The plate-like body characterized in that the plate-like body is held in close contact with the top surface of the gypsum liquid by sucking air in a space surrounded by the table, the solidified gypsum, and the plate-like body. Holding method.