JPH10241940A - Electric signal controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electric signal controller in which electric signals flowing through transmission conductors control each other, by obtaining magnetic coupling having a high coupling coefficient even at a high frequency of several tens of MHz or higher. SOLUTION: After an electric signal transmitting conductor film which is electrically connected to an input terminal 3 and an output terminal 4 and has a thickness of 5μm is formed on a ceramic substrate by sputtering copper, the transmitting conductor is patterned by etching. Then, after a film composed of an electrically insulating resin, such as polyimide, etc., is formed to a thickness of 5μm by spin coating and a through hole is formed at a prescribed location by etching, a copper film having a thickness of 5μm is again formed by sputtering and the pattern of another electric signal transmitting conductor electrically connected to an input terminal 1 and an output terminal 2 is formed by etching.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric signal control device used for electronic equipment and the like.

[0002]

2. Description of the Related Art Conventionally, an electric signal control device of this type, which controls electric signals mutually by magnetically coupling conductors, has a structure in which a plurality of coated conductive wires are wound around a magnetic core. Parts and parts having a structure in which a plurality of transmission conductors orbiting in the same direction are superimposed and printed via an insulating layer by a thick film lamination printing method have been put to practical use.

FIG. 5 is a view for explaining a conventional problem, and FIGS. 6 and 7 are external views of a conventional product. In the product shown in FIG. 6, a plurality of coated electric wires as transmission conductors are wound around a magnetic core of a magnetic body, and the electric signal of each transmission conductor is controlled by a mutual induction electromotive force generated by a magnetic flux generated in the magnetic core. As described above, the magnetic core, which is a magnetic material, has a reduced permeability at high frequencies, and in particular, the ferromagnetic properties of the magnetic material are lost in transmission lines for electric signals of several tens of MHz or more, and the electric flux due to the magnetic flux generated in the magnetic core is lost. Magnetic coupling is attenuated.

[0004] Further, in a component manufactured by the thick film lamination printing method shown in FIG. 7, electric and magnetic coupling is obtained by a magnetic flux shared by each transmission line, but the thickness of the insulating layer secures electrical insulation between the lines. For this reason, it is generally 50 μm or more, and as shown schematically in FIG. 5, the unshared leakage magnetic fluxes 16 and 17 passing through the insulating layer between the lines reduce the coupling rate, and the mutual inductance and the geometric mean of each inductance are reduced. Was about 0.8 at the maximum.

[0005]

However, as a problem in the above-mentioned conventional electronic parts, the magnetic core, which is a magnetic material, has a reduced magnetic permeability at high frequencies, and in particular, has a strong magnetic material in a transmission line for electric signals of several tens of MHz or more. The magnetism is lost, and the electric and magnetic coupling due to the magnetic flux generated in the magnetic core is attenuated.

In a component manufactured by the thick film lamination printing method, electric and magnetic coupling is obtained by a magnetic flux shared by each transmission line. However, the thickness of the insulating layer is generally 50 μm or more, and the insulating layer is commonly used to pass through the insulating layer between the lines. No leakage flux reduces the coupling ratio, and the coupling coefficient, which is the ratio between the mutual inductance and the geometric mean of each inductance, is around 0.8 at the maximum. Therefore, improvement of the coupling coefficient has been a problem for efficient control of electric signals.

SUMMARY OF THE INVENTION An object of the present invention is to provide an electric signal control device which obtains a magnetic coupling having a high coupling coefficient even at a high frequency of several tens of MHz or more and controls electric signals flowing through respective transmission conductors. To provide.

[0008]

According to the present invention, there is provided an electric signal control device for controlling mutual signals of two or more electric lines for transmitting electric signals, wherein four or more electrode terminals are provided outside the device. And two or more transmission conductors electrically connected to the electrode terminals and formed inside the device, and each of the transmission conductors is electrically connected to at least one or more transmission conductors different from the transmission conductor. In an electric signal control device that controls electric signals flowing between the transmission conductors by magnetically coupling with each other, at least a part of the two or more transmission conductors that are electrically and magnetically coupled has a superposed structure. In addition, a non-magnetic electric insulator is provided between the transmission conductors of the superimposed portion, and the electric insulator is an insulating resin having a thickness of less than 50 μm.

Further, according to the present invention, there is provided an electric signal control device, wherein the insulating resin is a resin having photosensitivity.

Further, according to the present invention, there is provided an electric signal control device, wherein the electric insulator is an oxygen compound or a nitrogen compound having a thickness of less than 50 μm.

[0011]

The electric insulator between the conductors obtained by the above-mentioned means is applied by a spin coating method or the like to a thickness of 5%.
By using a nonmagnetic electrically insulating resin having a thickness of less than 0 μm, the coupling coefficient can be reduced to 0.8 even at a high frequency of several tens MHz or more.
As described above, by further reducing the thickness, a high magnetic coupling of 0.9 or more can be obtained, and a high-performance and highly reliable electric signal control device that efficiently controls electric signals flowing through each transmission conductor can be realized.

[0012] In addition, the electric insulator between the conductors obtained by the above-mentioned means is an oxide or nitride of the conductor, so that the surface layer of the conductor is oxidized or nitrided to provide good electrical insulation between the conductors. It is possible to easily form a nonmagnetic electric insulator having a thickness of less than 50 μm between conductors, and to further reduce the coupling coefficient to 0.8 or more even at a high frequency of several tens MHz or more. At 0.9
The above-described high magnetic coupling is obtained, and a high-performance and highly reliable electric signal control device that efficiently controls electric signals flowing through each transmission conductor can be realized.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an external perspective view showing an embodiment of the electric signal control device of the present invention. FIG.
2 is an electrical equivalent circuit diagram of the electrical signal control device of FIG.
FIG. 3 is a partial detailed view of a connecting portion connecting the transmission conductors of the electric signal control device of the present invention. FIG. 4 is a diagram for explaining the operation principle of the electric signal control device of the present invention.

In FIG. 1, an electric signal transmission conductor 8 (see FIG. 3) electrically connected to the input terminal 3 and the output terminal 4 is formed on a ceramic substrate by sputtering a 5 μm-thick copper film. A transmission conductor pattern was formed by etching. Next, a resin such as polyimide, which is an electrically insulating resin, is formed into a film with a thickness of 5 μm by a spin coating method, a through hole is formed in a predetermined place by etching, and copper having a thickness of 5 μm is formed again by a sputtering film forming method. The pattern of the electric signal transmission conductor 7 (see FIG. 3) electrically connected to the input terminal 1 and the output terminal 2 was formed by film formation and etching. Finally, a protective coating resin was formed on the surface to prevent corrosion of copper and the like, and an electric signal control device 5 was obtained.

As another embodiment, in FIG. 1, an electric signal transmission conductor 8 electrically connected to the input terminal 3 and the output terminal 4 is formed on a ceramic substrate by sputtering a 5 μm thick copper film. To form a transmission conductor pattern by etching. Next, the electrical insulating resin Si
An oxygen compound such as O ₂ or a nitrogen compound such as Si ₃ N _{4 is} formed into a film having a thickness of 1 μm by a sputtering film forming method, a through hole is formed at a predetermined place by etching, and copper having a thickness of 5 μm is formed again. The pattern of the electric signal transmission conductor 7 electrically connected to the input terminal 1 and the output terminal 2 was formed by sputtering and then etching. A transmission conductor pattern was formed. Finally, a protective coating resin was formed on the surface to prevent corrosion of copper and the like, and an electric signal control device 5 was obtained.

FIG. 2 shows an electric equivalent circuit of the electric signal control device 5. The electric signal transmission conductor 7 and the electric signal transmission conductor 8 are magnetically coupled by a coupling portion 6 having a mutual inductance M.

FIG. 3 is a diagram schematically showing the coupling portion 6 formed by the mutual inductance M. The electric signal transmission conductor 7 is a copper pattern having a thickness of 5 μm.
Is a 5 μm thick copper pattern, and the electrical insulator 9 is a 5 μm thick insulating resin or a 1 μm thick oxygen compound such as SiO ₂ or a nitrogen compound such as Si ₃ N ₄ .

[0018] While FIG. 4 is a diagram for explaining the operating principle of the electric signal controlling device described above structure, when the electric signal current i ₁₀ to an electric signal transmission conductor 10 flows (a), the electrical signal transmission conductors 10 A magnetic flux Φi ₁₀ surrounding both patterns of the electric signal transmission conductor 11 is generated, and in FIG.
_The self-induced electromotive force 12 is generated in the electric signal transmission conductor ₁₀ by the electric signal transmission conductor 10, and the mutual induction electromotive force 13 is generated in the electric signal transmission conductor 11, so that the electric signal flowing through the electric signal transmission conductor 11 can be controlled.

Although copper is used as the material of the transmission conductor in the embodiment of the present invention, the present invention is not limited to the above embodiment. Therefore, any semiconductor such as silicon mixed with any metal or impurity capable of transmitting an electric signal may be used.

Although a ceramic substrate is used as the substrate, a material other than the ceramic substrate may be used, and the shape is not limited to this embodiment.

If the number of transmission conductors is two or more and the number of external terminal electrodes is four or more, the number is not limited to the present embodiment.

Furthermore, even if a circuit board or the like on which electronic parts having a multilayer structure are mounted, such as a circuit board, a part of the structure utilizes the present invention, and if the board has four or more electrode terminals on the outside, the present invention It is not limited to the embodiment.

[0023]

According to the present invention, five conductors are superposed between superposed conductors.
With a configuration in which a non-magnetic electric insulating resin of less than 0 μm is formed, good electrical insulation can be provided between the conductors,
In addition, a configuration in which a nonmagnetic electric insulator having a thickness of less than 50 μm between conductors is possible. Particularly, even at a high frequency of several tens of MHz or more, the coupling coefficient is 0.8 or more, and is further increased to 0.9 or more by further thinning. Magnetic coupling is obtained, and a high-performance and highly reliable electric control device that efficiently controls electric signals flowing through each transmission conductor is obtained.

Further, according to the present invention, by oxidizing or nitriding the surface layer of the lower conductor to be superimposed, good electrical insulation between the conductors can be obtained, and the gap between the conductors having a thickness of less than 50 μm can be easily achieved. It is possible to use a non-magnetic electrical insulator, especially at high frequencies of several tens of MHz or more, and to obtain a high magnetic coupling of 0.9 or more by further reducing the coupling coefficient to 0.8 or more. A high-performance and highly reliable electric signal control device which efficiently controls electric signals flowing through the electric device can be obtained.

[Brief description of the drawings]

FIG. 1 is an external perspective view showing an embodiment of an electric signal control device of the present invention.

FIG. 2 is an electrical equivalent circuit diagram of the electrical signal control device of FIG.

FIG. 3 is a partial detailed view of a connecting portion connecting transmission conductors of the electric signal control device of the present invention.

FIG. 4 is a diagram illustrating the operation principle of the electric signal control device of the present invention.

FIG. 5 is a diagram illustrating a conventional problem.

FIG. 6 is an external view of a conventional product.

FIG. 7 is an external view of a conventional product.

[Explanation of symbols]

 1,3 input terminal 2,4 output terminal 5 electric signal control device 6 coupling part 7,8,10,11,14,15 electric signal transmission conductor 9 electric insulator 12 self-induced electromotive force 13 mutual induced electromotive force 16,17 Leakage flux 18 Shared flux

Claims (3)

[Claims] 1. An electric signal control device for controlling signals of two or more electric lines for transmitting electric signals, wherein the electric signal control device has four or more electrode terminals outside the device and is electrically connected to the electrode terminals. The transmission conductor having two or more transmission conductors connected and formed inside the device, and each of the transmission conductors is electrically and magnetically coupled to at least one or more transmission conductors different from the transmission conductor. In an electric signal control device that controls electric signals flowing between conductors, at least a part of the two or more transmission conductors that are electrically and magnetically coupled to each other,
An electric signal control device having a superimposed structure and a non-magnetic electric insulator between transmission conductors in the superimposed portion, wherein the electric insulator is an insulating resin having a thickness of less than 50 μm. 2. The electric signal control device according to claim 1, wherein said insulating resin is a resin having photosensitivity. 3. The electric signal control device according to claim 1, wherein the electric insulator is an oxygen compound or a nitrogen compound having a thickness of less than 50 μm.