JPH10233286A - Organic electroluminescense display device - Google Patents

Organic electroluminescense display device

Info

Publication number
JPH10233286A
JPH10233286A JP9031982A JP3198297A JPH10233286A JP H10233286 A JPH10233286 A JP H10233286A JP 9031982 A JP9031982 A JP 9031982A JP 3198297 A JP3198297 A JP 3198297A JP H10233286 A JPH10233286 A JP H10233286A
Authority
JP
Japan
Prior art keywords
layer
stripe
insulating resin
cathode
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9031982A
Other languages
Japanese (ja)
Other versions
JP3485749B2 (en
Inventor
Takuji Ono
卓爾 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP03198297A priority Critical patent/JP3485749B2/en
Publication of JPH10233286A publication Critical patent/JPH10233286A/en
Application granted granted Critical
Publication of JP3485749B2 publication Critical patent/JP3485749B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent an organic EL layer from having thermal or chemical damage by parting a cathode layer which is formed at an overall surface including a stripe-shaped insulating resin layer which stereoscopically-cross an anode stripe group on the organic electroluminescense (organic EL) layer on a transparent substrate involving the anode stripe group, on the insulating resin layer along a stripe longitudinal direction. SOLUTION: An organic EL layer 3 is formed almost an overall surface on a transparent insulating substrate 1 which involves a plurality of anode stripes 2 consisting of an ITO or the like at its upper surface. An ultraviolet light curing type ink or the like is used for a plurality of stripe-shaped insulating resin layer 4 which is formed so as to form grade separation with the anode stripes 2 on it, and cures just after screen printing, thus it is possible to prevent the organic EL layer form being given thermal and chemical damage. A cathode layer formed almost at an overall surface on it is parted by means of laser beam machining method or the like on the insulating resin layer 4 along in its stripe longitudinal direction to form a plurality of cathode stripes 5, and the organic EL layer is not deteriorated by the mediation of the insulating resin layer 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、有機化合物のエレ
クトロルミネッセンス現象を利用して文字や画像を表示
する有機エレクトロルミネッセンス表示装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic electroluminescence display device for displaying characters and images by utilizing the electroluminescence phenomenon of an organic compound.

【０００２】[0002]

【従来の技術】有機化合物のエレクトロルミネッセンス
現象を利用した有機エレクトロルミネッセンス表示装置
は、日経ＢＰ社発行「日経エレクトロニクス：１９９６
年１月２９日号」第９９頁〜第１０３頁に開示されてい
る。2. Description of the Related Art An organic electroluminescent display device utilizing an electroluminescence phenomenon of an organic compound is disclosed in Nikkei BP, Nikkei Electronics: 1996.
January 29, 2009, pp. 99-103.

【０００３】有機エレクトロルミネッセンス表示装置の
一例として、有機エレクトロルミネッセンス層を介して
互いに立体交差する陽極ストライプ群と陰極ストライプ
群とを備え、前記陽極ストライプ群から選ばれる特定の
陽極ストライプと前記陰極ストライプ群から選ばれる特
定の陰極ストライプとの立体交差部分に介在する有機エ
レクトロルミネッセンス層を発光させるものがある。As an example of an organic electroluminescence display device, an anode stripe group and a cathode stripe group which three-dimensionally cross each other via an organic electroluminescence layer are provided, and a specific anode stripe and the cathode stripe group selected from the anode stripe group are provided. There is a device that emits light from an organic electroluminescent layer interposed at a three-dimensional intersection with a specific cathode stripe selected from the group consisting of:

【０００４】前記陽極ストライプ群は、透明導電材から
なる薄膜パターンとして透明基板上に形成され、前記有
機エレクトロルミネッセンス層は、前記陽極ストライプ
群上を含む前記透明基板上の略全面にわたって形成さ
れ、前記陰極ストライプ群は、導電材からなる薄膜パタ
ーンとして前記有機エレクトロルミネッセンス層上に形
成される。The anode stripe group is formed on a transparent substrate as a thin film pattern made of a transparent conductive material, and the organic electroluminescence layer is formed over substantially the entire surface of the transparent substrate including the anode stripe group. The cathode stripe group is formed on the organic electroluminescence layer as a thin film pattern made of a conductive material.

【０００５】ところが、有機エレクトロルミネッセンス
層を構成する材料は熱や薬品により特性が劣化しやすい
ため、有機エレクトロルミネッセンス層を形成した後
に、陰極ストライプ群となる陰極薄膜層をエッチング法
等によりパターニングすることは非常に難しい。However, the properties of the material constituting the organic electroluminescent layer are easily deteriorated by heat or chemicals. Therefore, after forming the organic electroluminescent layer, it is necessary to pattern the cathode thin film layer serving as a cathode stripe group by etching or the like. Is very difficult.

【０００６】一方、有機エレクトロルミネッセンス層を
形成した後に陰極薄膜層のパターニングを要しない構造
として、有機エレクトロルミネッセンス素子群を薄膜ト
ランジスタスイッチング素子により駆動する有機エレク
トロルミネッセンス表示装置が特開平４−１２５６８３
号に開示されている。On the other hand, as a structure which does not require patterning of a cathode thin film layer after forming an organic electroluminescence layer, an organic electroluminescence display device in which an organic electroluminescence element group is driven by a thin film transistor switching element is disclosed in Japanese Patent Laid-Open No. 4-125683.
Issue.

【０００７】薄膜トランジスタスイッチング素子により
表示装置を駆動する技術は、液晶表示装置において多用
されているが、液晶が電界により配向する厚みに比べて
有機エレクトロルミネッセンス層の厚みは極めて薄いた
め、有機エレクトロルミネッセンス層の形成下地となる
薄膜トランジスタスイッチング素子層の上面の凹凸を抑
制しなければ、有機エレクトロルミネッセンス層内での
電界が不均一となるという問題がある。The technique of driving a display device by using a thin film transistor switching element is widely used in a liquid crystal display device. However, since the thickness of the organic electroluminescence layer is extremely thin as compared with the thickness at which the liquid crystal is oriented by an electric field, the organic electroluminescence layer is driven. Unless the unevenness of the upper surface of the thin film transistor switching element layer serving as the base for forming the organic EL layer is suppressed, there is a problem that the electric field in the organic electroluminescence layer becomes non-uniform.

【０００８】また、有機エレクトロルミネッセンス層を
高輝度で発光させるためには液晶を配向させるのに比べ
て大電流を要するので、液晶表示装置用の薄膜トランジ
スタスイッチング素子をそのまま流用できない。Further, in order for the organic electroluminescence layer to emit light with high luminance, a large current is required as compared with the alignment of the liquid crystal. Therefore, a thin film transistor switching element for a liquid crystal display device cannot be used as it is.

【０００９】[0009]

【発明が解決しようとする課題】本発明は、有機エレク
トロルミネッセンス層を介して互いに立体交差する陽極
ストライプ群と陰極ストライプ群とを備え、前記陽極ス
トライプ群から選ばれる特定の陽極ストライプと前記陰
極ストライプ群から選ばれる特定の陰極ストライプとの
立体交差部分に介在する有機エレクトロルミネッセンス
層を発光させる有機エレクトロルミネッセンス表示装置
において、有機エレクトロルミネッセンス層に熱的、化
学的な損傷を与えることなく陰極ストライプ群を形成す
ることが可能な有機エレクトロルミネッセンス表示装置
の構成を明らかにするものである。SUMMARY OF THE INVENTION The present invention comprises an anode stripe group and a cathode stripe group which three-dimensionally cross each other via an organic electroluminescence layer. In an organic electroluminescence display device that emits an organic electroluminescence layer interposed at a three-dimensional intersection with a specific cathode stripe selected from a group, a cathode stripe group is formed without thermally or chemically damaging the organic electroluminescence layer. The purpose of the present invention is to clarify the structure of an organic electroluminescent display device that can be formed.

【００１０】[0010]

【課題を解決するための手段】本発明による有機エレク
トロルミネッセンス表示装置においては、前記陽極スト
ライプ群を、透明導電材からなる薄膜パターンとして透
明基板上に形成し、前記有機エレクトロルミネッセンス
層を、前記陽極ストライプ群上を含む前記透明基板上の
略全面にわたって形成し、前記有機エレクトロルミネッ
センス層上に、前記陽極ストライプ群に対して立体交差
するストライプ状の絶縁樹脂層を形成し、該絶縁樹脂層
上を含む前記有機エレクトロルミネッセンス層上の略全
面にわたって形成された陰極層を、前記絶縁樹脂層上に
おいて該絶縁樹脂層のストライプ長方向に沿って分断す
ることにより、前記陰極ストライプ群を形成する。In the organic electroluminescence display device according to the present invention, the anode stripe group is formed on a transparent substrate as a thin film pattern made of a transparent conductive material, and the organic electroluminescence layer is formed on the anode substrate. A stripe-shaped insulating resin layer is formed over substantially the entire surface of the transparent substrate including the stripe group, and on the organic electroluminescence layer, a stripe-shaped insulating resin layer that three-dimensionally intersects the anode stripe group is formed. The cathode stripe group is formed by dividing the cathode layer formed over substantially the entire surface of the organic electroluminescent layer including the cathode layer along the stripe length direction of the insulating resin layer on the insulating resin layer.

【００１１】[0011]

【発明の実施の形態】本発明の一実施形態に従った有機
エレクトロルミネッセンス素子を製造するに当たって
は、まず、図１に示すように、ガラス、プラスチック等
の透明な絶縁性材料からなる基板１が準備される。DESCRIPTION OF THE PREFERRED EMBODIMENTS In manufacturing an organic electroluminescent device according to one embodiment of the present invention, first, as shown in FIG. 1, a substrate 1 made of a transparent insulating material such as glass, plastic, or the like is used. Be prepared.

【００１２】次に、図２に示すように、前記基板上にＩ
ＴＯ（インジウム錫酸化物）等の透明な導電性材料から
なる複数の陽極ストライプ２が形成される。複数の陽極
ストライプをまとめて、陽極ストライプ群と称する。該
陽極ストライプ群を構成する層の厚さは数百ｎｍであ
る。Next, as shown in FIG.
A plurality of anode stripes 2 made of a transparent conductive material such as TO (indium tin oxide) are formed. A plurality of anode stripes are collectively referred to as an anode stripe group. The thickness of the layer constituting the anode stripe group is several hundred nm.

【００１３】次に、図３に示すように、前記陽極ストラ
イプ群上を含む前記透明基板上の略全面にわたって、正
孔輸送層、発光層及び電子輸送層からなる有機エレクト
ロルミネッセンス層３が蒸着法等により形成される。該
有機エレクトロルミネッセンス層の厚さは数百ｎｍであ
る。Next, as shown in FIG. 3, an organic electroluminescent layer 3 composed of a hole transport layer, a light emitting layer and an electron transport layer is formed by vapor deposition over substantially the entire surface of the transparent substrate including the anode stripe group. And the like. The thickness of the organic electroluminescent layer is several hundred nm.

【００１４】次に、図４に示すように、前記有機エレク
トロルミネッセンス層上に、前記陽極ストライプ群に対
して立体交差する複数のストライプ状の絶縁樹脂層４が
シルクスクリーン印刷法等により形成される。該絶縁樹
脂層の厚さは数十μｍであり、その材料としては紫外線
硬化型インク等が用いられる。紫外線硬化型インクは、
シルクスクリーン印刷した直後の硬化前の時点でも有機
エレクトロルミネッセンス層との反応が少なく、印刷後
ただちに紫外線を照射して硬化させれば、有機エレクト
ロルミネッセンス層に熱的、化学的損傷を与えない。Next, as shown in FIG. 4, on the organic electroluminescence layer, a plurality of stripe-shaped insulating resin layers 4 which three-dimensionally intersect the anode stripe group are formed by a silk screen printing method or the like. . The thickness of the insulating resin layer is several tens of μm, and ultraviolet curable ink or the like is used as the material. UV curable ink is
There is little reaction with the organic electroluminescent layer even at the time immediately after silk screen printing and before curing, and if the organic electroluminescent layer is cured by irradiating ultraviolet rays immediately after printing, the organic electroluminescent layer will not be thermally or chemically damaged.

【００１５】次に、図５に示すように、前記絶縁樹脂層
上を含む前記有機エレクトロルミネッセンス層上の略全
面にわたってアルミニウム合金やマグネシウム合金から
なる陰極層５０を形成する。該陰極層の厚さは数百ｎｍ
である。Next, as shown in FIG. 5, a cathode layer 50 made of an aluminum alloy or a magnesium alloy is formed over substantially the entire surface of the organic electroluminescence layer including the insulating resin layer. The thickness of the cathode layer is several hundred nm.
It is.

【００１６】次に、図６に示すように、前記陰極層を前
記絶縁樹脂層上において該絶縁樹脂層のストライプ長方
向に沿って分断することにより、複数の陰極ストライプ
５を形成する。複数の陰極ストライプをまとめて、陰極
ストライプ群と称する。Next, as shown in FIG. 6, the plurality of cathode stripes 5 are formed by dividing the cathode layer on the insulating resin layer along the stripe length direction of the insulating resin layer. A plurality of cathode stripes are collectively referred to as a cathode stripe group.

【００１７】前記陰極層の分断には、ＹＡＧレーザーや
エキシマレーザー等によるレーザー加工法が用いられ
る。レーザー加工を行うとレーザー照射部が急激に温度
上昇するが、実際には、レーザー照射部と有機エレクト
ロルミネセンス層との間には厚い絶縁樹脂層が介在する
ので、単位時間当たりの照射パルス数をある程度少なく
すれば、有機エレクトロルミネッセンス層が変質するほ
どの温度上昇（約８０℃）に至ることはない。また、該
レーザー加工においては、レーザー照射により解離分解
した陰極層物質の再付着を防ぐためにアシストガスが併
用され、このガスも前記温度上昇の抑制に寄与する。A laser processing method using a YAG laser, an excimer laser, or the like is used for dividing the cathode layer. When laser processing is performed, the temperature of the laser irradiation part rises sharply, but in actuality, since a thick insulating resin layer is interposed between the laser irradiation part and the organic electroluminescence layer, the number of irradiation pulses per unit time , The temperature rise (about 80 ° C.) to such an extent that the organic electroluminescent layer is degraded does not occur. Further, in the laser processing, an assist gas is used in combination to prevent re-attachment of the cathode layer material dissociated and decomposed by the laser irradiation, and this gas also contributes to the suppression of the temperature rise.

【００１８】なお、図６に示した例では、絶縁樹脂層の
ストライプ幅方向の略中央部において陰極層を分断した
が、絶縁樹脂層のストライプ長方向に沿った端辺部や、
段差側面部において分断してもよい。In the example shown in FIG. 6, the cathode layer is divided substantially at the center of the insulating resin layer in the stripe width direction.
It may be divided at the step side surface.

【００１９】斯くして、有機エレクトロルミネッセンス
層を介して互いに立体交差する陽極ストライプ群と陰極
ストライプ群とを備え、前記陽極ストライプ群から選ば
れる特定の陽極ストライプと前記陰極ストライプ群から
選ばれる特定の陰極ストライプとの立体交差部分に介在
する有機エレクトロルミネッセンス層を発光させる有機
エレクトロルミネッセンス表示装置が完成する。In this manner, the anode stripe group and the cathode stripe group which three-dimensionally intersect with each other via the organic electroluminescence layer are provided, and a specific anode stripe selected from the anode stripe group and a specific anode stripe selected from the cathode stripe group are provided. An organic electroluminescent display device that emits light from the organic electroluminescent layer interposed at the three-dimensional intersection with the cathode stripe is completed.

【００２０】[0020]

【発明の効果】本発明によれば、有機エレクトロルミネ
ッセンス層を介して互いに立体交差する陽極ストライプ
群と陰極ストライプ群とを備え、前記陽極ストライプ群
から選ばれる特定の陽極ストライプと前記陰極ストライ
プ群から選ばれる特定の陰極ストライプとの立体交差部
分に介在する有機エレクトロルミネッセンス層を発光さ
せる有機エレクトロルミネッセンス表示装置において、
有機エレクトロルミネッセンス層に熱的、化学的な損傷
を与えることなく陰極ストライプ群を形成することが可
能となる。According to the present invention, there are provided an anode stripe group and a cathode stripe group which three-dimensionally intersect with each other via an organic electroluminescence layer, and a specific anode stripe selected from the anode stripe group and a cathode stripe group are provided. In an organic electroluminescence display device that emits an organic electroluminescence layer interposed at a three-dimensional intersection with a specific cathode stripe to be selected,
The cathode stripe group can be formed without thermally or chemically damaging the organic electroluminescence layer.

【図面の簡単な説明】[Brief description of the drawings]

【図１】基板の斜視図である。FIG. 1 is a perspective view of a substrate.

【図２】陽極ストライプ群形成工程を示す基板の斜視図
である。FIG. 2 is a perspective view of a substrate showing a step of forming an anode stripe group.

【図３】有機エレクトロルミネッセンス層形成工程を示
す基板の斜視図である。FIG. 3 is a perspective view of a substrate showing an organic electroluminescence layer forming step.

【図４】絶縁樹脂層形成工程を示す基板の斜視図であ
る。FIG. 4 is a perspective view of the substrate showing an insulating resin layer forming step.

【図５】陰極層形成工程を示す基板の斜視図である。FIG. 5 is a perspective view of a substrate showing a cathode layer forming step.

【図６】陰極層分断工程を示す基板の斜視図である。FIG. 6 is a perspective view of the substrate showing a cathode layer cutting step.

【符号の説明】[Explanation of symbols]

１ 基板 ２ 陽極ストライプ ３ 有機エレクトロルミネッセンス層 ４ 絶縁樹脂層 ５ 陰極ストライプ Reference Signs List 1 substrate 2 anode stripe 3 organic electroluminescence layer 4 insulating resin layer 5 cathode stripe

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 有機エレクトロルミネッセンス層を介し
て互いに立体交差する陽極ストライプ群と陰極ストライ
プ群とを備え、前記陽極ストライプ群から選ばれる特定
の陽極ストライプと前記陰極ストライプ群から選ばれる
特定の陰極ストライプとの立体交差部分に介在する有機
エレクトロルミネッセンス層を発光させる有機エレクト
ロルミネッセンス表示装置において、 前記陽極ストライプ群は、透明導電材からなる薄膜パタ
ーンとして透明基板上に形成され、 前記有機エレクトロルミネッセンス層は、前記陽極スト
ライプ群上を含む前記透明基板上の略全面にわたって形
成され、 前記有機エレクトロルミネッセンス層上には、前記陽極
ストライプ群に対して立体交差するストライプ状の絶縁
樹脂層が形成され、 前記陰極ストライプ群は、前記絶縁樹脂層上を含む前記
有機エレクトロルミネッセンス層上の略全面にわたって
形成された陰極層を、前記絶縁樹脂層上において該絶縁
樹脂層のストライプ長方向に沿って分断することにより
形成されたことを特徴とする有機エレクトロルミネッセ
ンス表示装置。1. An anode stripe group and a cathode stripe group which three-dimensionally intersect with each other via an organic electroluminescence layer, wherein a specific anode stripe selected from the anode stripe group and a specific cathode stripe selected from the cathode stripe group are provided. An organic electroluminescence display device that emits light from an organic electroluminescence layer interposed at a three-dimensional intersection with the organic electroluminescence display device, wherein the anode stripe group is formed on a transparent substrate as a thin film pattern made of a transparent conductive material. A stripe-shaped insulating resin layer is formed over substantially the entire surface of the transparent substrate including the anode stripe group, and on the organic electroluminescent layer, the stripe-shaped insulating resin layer intersects the anode stripe group three-dimensionally. Flock The cathode layer formed over substantially the entire surface of the organic electroluminescence layer including the insulating resin layer is formed by dividing the cathode layer along the stripe length direction of the insulating resin layer on the insulating resin layer. Characteristic organic electroluminescent display device. 【請求項２】 前記絶縁樹脂層は、スクリーン印刷法に
より形成された光硬化型樹脂からなることを特徴とする
請求項１記載の有機エレクトロルミネッセンス表示装
置。2. The organic electroluminescent display device according to claim 1, wherein the insulating resin layer is made of a photocurable resin formed by a screen printing method.
JP03198297A 1997-02-17 1997-02-17 Organic electroluminescent display Expired - Fee Related JP3485749B2 (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11185968A (en) * 1997-12-17 1999-07-09 Sanyo Electric Co Ltd Organic electroluminescent device and its manufacture
JP2000068071A (en) * 1998-08-25 2000-03-03 Casio Comput Co Ltd Light-emitting device and its manufacture
KR20030042074A (en) * 2001-11-20 2003-05-28 씨엘디 주식회사 Organic electroluminescence device and method of making the same
WO2005022662A1 (en) * 2003-08-27 2005-03-10 Osram Opto Semiconductors Gmbh Method for manufacturing an organic electronic device and organic electronic device
KR100489590B1 (en) * 2002-09-19 2005-05-16 엘지.필립스 엘시디 주식회사 Transmissive Type Organic Electroluminescent Device and method for fabricating the same
KR100606668B1 (en) * 1999-05-04 2006-07-31 엘지전자 주식회사 method for fabricating Organic Electroluminescent display Device
US7989812B2 (en) * 1999-10-12 2011-08-02 Semiconductor Energy Laboratory Co., Ltd. EL display device and a method of manufacturing the same
TWI553939B (en) * 2009-07-15 2016-10-11 周星工程股份有限公司 Electro-optic device and method for manufacturing the same

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JPH08315981A (en) * 1995-03-13 1996-11-29 Pioneer Electron Corp Organic electroluminescent display panel and its manufacture
JPH09298090A (en) * 1996-04-30 1997-11-18 Hokuriku Electric Ind Co Ltd El element, its manufacture, and its driving method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315981A (en) * 1995-03-13 1996-11-29 Pioneer Electron Corp Organic electroluminescent display panel and its manufacture
JPH09298090A (en) * 1996-04-30 1997-11-18 Hokuriku Electric Ind Co Ltd El element, its manufacture, and its driving method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11185968A (en) * 1997-12-17 1999-07-09 Sanyo Electric Co Ltd Organic electroluminescent device and its manufacture
JP2000068071A (en) * 1998-08-25 2000-03-03 Casio Comput Co Ltd Light-emitting device and its manufacture
KR100606668B1 (en) * 1999-05-04 2006-07-31 엘지전자 주식회사 method for fabricating Organic Electroluminescent display Device
US7989812B2 (en) * 1999-10-12 2011-08-02 Semiconductor Energy Laboratory Co., Ltd. EL display device and a method of manufacturing the same
US8884301B2 (en) 1999-10-12 2014-11-11 Semiconductor Energy Laboratory Co., Ltd. EL display device and a method of manufacturing the same
KR20030042074A (en) * 2001-11-20 2003-05-28 씨엘디 주식회사 Organic electroluminescence device and method of making the same
KR100489590B1 (en) * 2002-09-19 2005-05-16 엘지.필립스 엘시디 주식회사 Transmissive Type Organic Electroluminescent Device and method for fabricating the same
WO2005022662A1 (en) * 2003-08-27 2005-03-10 Osram Opto Semiconductors Gmbh Method for manufacturing an organic electronic device and organic electronic device
US7498737B2 (en) 2003-08-27 2009-03-03 Osram Opto Semiconductors Gmbh Method of manufacturing an organic electronic device and organic electronic device
TWI553939B (en) * 2009-07-15 2016-10-11 周星工程股份有限公司 Electro-optic device and method for manufacturing the same

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