JPH09308283A - Positioning controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize the mechanical damage at collision of an actuator such as a control shaft, etc., by equipping this controller with an avoidance action directive part which changes the target position of the rotational position of a motor or a machine shifting position when disturbance gets over a specified value for a period not shorten than a specified time. SOLUTION: This controller is equipped with an avoidance operation detective part 9 which changes the target position of the rotational position of a motor or the shifting position of a machine 1 when the disturbance being one of the quantity of state estimated by a disturbance observer 8 gets over a specified time for a period not shorten than a specified time. In case that the velocity of a motor 2 is low or the change of the position is small and a large current flows instantaneously, it does not perform danger avoidance action without judging that disturbance has occurred, and when the disturbance gets over the specified value for the period not shorten than the specified time, this performs danger avoidance action by changing the target position of the rotational position of the motor 2 or the shifting position of the machine 1. Hereby, the damage of the machine 1 at collision can be minimized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning control device, and more specifically, an F controller used in a laser beam writing unit.
Detecting a situation in which the control axis accidentally collides with a workpiece or the like during operation in a shape measuring device such as a θ mirror or a positioning control device used for a robot or NC machine tool, and avoids this promptly. The present invention relates to a positioning control device that can perform

[0002]

2. Description of the Related Art Generally, in a robot, an NC machine tool, etc., an actuator controls a control axis so that a target position is reached. As a positioning control device of this type, for example, Japanese Patent Laid-Open No. 6-284764 is used. There is one such as that described in the publication. This includes an actuator, a position detector that detects the rotational position of the actuator or the position of the machine, speed detection means that detects the rotational speed of the motor, and a position command generation unit that generates a rotational position command of the motor. And a position control unit that controls the rotation position of the motor, a speed control unit that controls the rotation speed of the motor, and a current control unit that controls the torque current of the motor. A disturbance observer that estimates a disturbance torque by inputting a current command and a motor rotation speed, and a direction in which the motor is stopped when the disturbance torque estimated by the disturbance observer exceeds a preset allowable disturbance torque value. Reverse braking control that outputs the braking torque current command to the current controller instead of the normal current command until the motor stops It has a, and.

According to this, the maximum braking torque permitted by the machine can be applied to the motor in the direction in which the motor stops immediately after the collision of the machine is detected. There is an advantage that the braking distance can be shortened. Further, as another positioning control device, for example, there is one described in Japanese Patent Laid-Open No. 3-110406.

In this system, one actuator is composed of a focus signal generator for generating a focus signal for optically detecting the distance between the actuator and the objective lens and a position detector for detecting the position of the objective lens. A focus provided with two position detecting means and performing both actuator position control by switching the two position detecting means of the focus signal and the position detection signal which are inputs to one gain controller circuit (position control section). The control of the servo system and the position control system is switched.

[0005]

However, such a conventional positioning control device requires a speed control device (speed control unit) for inputting the motor speed to the disturbance observer, and There is a problem that the reverse rotation braking control unit for generating the motor braking torque is required, which increases the cost of the device.

Further, as a method of detecting a motor collision,
When the disturbance estimated from the torque current and the rotation of the motor exceeds a predetermined value, it is judged as a collision, but when the motor is started or stopped, there is little change in the speed or position of the motor and the current is instantaneous. Since there is a large amount of flow, the disturbance estimated by the disturbance observer becomes a large value, and there is a problem in that it is erroneously determined to be a collision.

Further, if a predetermined value to be compared with the estimated disturbance is large, it is unlikely to be judged as a malfunction, but depending on the band of the disturbance observer, it takes an estimated time to reach the predetermined value. As a result, there is a problem in that the damage to the machine in the event of a collision increases. Further, in the positioning control device described in the latter, since the disturbance observer is not considered at all, there is a problem that the disturbance cannot be estimated and suppressed.

In view of this, the inventions according to claims 1 to 7 are capable of minimizing mechanical damage at the time of collision of an actuator such as a control shaft without providing a special device or sensor for avoiding danger. An object is to provide a cost-effective positioning control device. Further, the invention according to claims 8 to 12 is a positioning control device capable of minimizing a mechanical damage at the time of collision of an actuator by estimating a plurality of disturbances according to a plurality of detection modes of the actuator. It is intended to be provided.

[0009]

According to the first aspect of the present invention,
In order to solve the above problems, a motor, a position detector that detects a rotational position of the motor or a position of a machine attached to the motor, and a motor is driven by controlling an electric current supplied to the motor. A current control unit, a current detection unit that detects a current supplied to the motor, a position command unit that sets a target position of the rotation position of the motor or the position of the machine, and a rotation position of the motor or the position of the machine. In a positioning control device including a position control unit for controlling, a disturbance observer for estimating the state quantity of the motor by inputting the current supplied to the motor and the rotational position of the motor or the position of the machine, and estimated by the disturbance observer When the disturbance, which is one of the generated state quantities, exceeds a predetermined value for a predetermined time or longer, the number of times the target position of the motor rotational position or machine position is changed. Is characterized by comprising an operation command unit, the.

In this case, when the motor speed or position does not change so much and a large current flows momentarily, such as when the motor is started or stopped, a risk avoidance operation is performed without determining that disturbance has occurred. If the disturbance exceeds the specified value for the specified time or longer, the target position of the motor rotation position or machine position is changed to perform the danger avoidance operation, so the damage to the machine at the time of collision is minimized. can do.
In addition, without providing a special device or sensor for avoiding danger, it is possible to avoid danger only by changing the target position of the rotational position of the motor or the position of the machine when the predetermined value is exceeded for a predetermined time or longer. Therefore, the cost of the positioning control device can be significantly reduced.

In order to solve the above-mentioned problems, a second aspect of the present invention includes a motor, and a position detecting section for detecting a rotational position of the motor or a position of a machine attached to the motor.
A current control unit that drives the motor by controlling the current supplied to the motor, a position command unit that sets a target position of the rotational position of the motor or a position of the machine, and a current command value that outputs the current command value. In a positioning control device including a position control unit that controls the rotational position of the motor or the position of the machine, the current command value from the position control unit and the rotational position of the motor or the position of the machine are input, and the state quantity of the motor Avoidance of changing the target position of the rotational position of the motor or the position of the machine when the disturbance observer that estimates the disturbance and the disturbance that is one of the state quantities estimated by the disturbance observer exceeds a predetermined value for a predetermined time or more. And an operation command section.

In this case, the invention according to claim 1 inputs the electric current supplied to the motor and the rotational position of the motor or the position of the machine to estimate the state quantity of the motor. Since the current command value from the position controller and the rotational position of the motor or the position of the machine are input to estimate the state quantity of the motor, in addition to the same operation as the invention according to claim 1, the motor current is detected. Since it is possible to eliminate the need for a current detector to operate and an A / D converter for fetching the detected value into the arithmetic unit, the cost of the positioning control device can be further reduced.

In order to solve the above-mentioned problems, the invention according to claim 3 is the invention according to claim 1 or 2, wherein the avoidance operation command section is at a predetermined position in a direction of canceling the disturbance estimated by the disturbance observer. The target position is changed to the predetermined position so that only the avoidance operation is performed. In this case, since the target position is appropriately changed to avoid the danger, it is possible to surely avoid the danger and minimize damage to the machine when the actuator such as the control shaft collides.

According to a fourth aspect of the present invention, in order to solve the above-mentioned problems, in the invention according to the first or second aspect, the avoidance operation command section is predetermined according to the sign of the disturbance estimated by the disturbance observer. The position is changed, and the target position of the rotational position or the position of the machine is changed to the predetermined position. In that case, even if the distance for avoiding the danger differs depending on the driving direction of the motor, the danger can be avoided without any trouble.

According to a fifth aspect of the present invention, in order to solve the above-mentioned problems, in the invention according to the first or second aspect, the avoidance operation commanding unit is arranged according to the sign of the disturbance estimated by the disturbance observer. The predetermined value which is the comparison target of is changed. In that case, it is possible to cope with the difference in the parameters with respect to the nominal model included in the estimated disturbance that differs depending on the driving direction of the motor, and it is possible to appropriately change the criterion of abnormality or overload depending on the driving direction of the motor.

In order to solve the above-mentioned problems, the invention according to claim 6 is the invention according to any one of claims 1 to 5, wherein
It is characterized by having a braking means for mechanically stopping the motor, and a current interruption portion for completely interrupting the motor current output from the current control portion. In that case, the motor can be reliably stopped when desired.

In order to solve the above-mentioned problems, the invention according to claim 7 is the invention according to claim 6, wherein the disturbance, which is one of the state quantities estimated by the disturbance observer, has a predetermined value for a predetermined time. When it exceeds the above, it is characterized by comprising motor stop control means for completely stopping the motor by operating the braking means and the current cutoff portion after performing the avoidance operation.

In this case, since the motor can be surely stopped after the danger is avoided, the safety of the position control device can be sufficiently ensured after the danger is avoided. In order to solve the above-mentioned problems, an invention according to claim 8 is: an actuator; a plurality of position detecting portions for detecting a rotational position of the actuator or a position of a machine attached to the actuator; and a rotational position of the actuator, or A position command unit that sets a target position of the machine position, and a current command value to be supplied to the actuator based on output signals from the position detection unit and the position command unit, and the current command value based on the current command value. A positioning control device comprising: a position control unit that controls a rotational position of an actuator or a position of a machine, based on a current command value supplied to the actuator and a rotational position signal of the actuator or a position signal of the machine. Disturbance observers for estimating the state quantity of the actuator are provided in the same number corresponding to the position detection unit, and Part is characterized by inhibiting the disturbance on the basis of the output signal from the disturbance observer.

In this case, when the output signals from the plurality of position detecting sections having different characteristics are detected by one disturbance observer, when the position detecting sections having different characteristics are switched, an error occurs in the calculated value of the disturbance observer. There is a possibility that the disturbance may occur and the disturbance cannot be detected accurately. In the present invention, since the disturbance observer is provided corresponding to the plurality of position detecting units, even when the position detecting units having different characteristics are switched, the detection signal is calculated by the disturbance observer corresponding to the position detecting unit. , No error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

According to a ninth aspect of the invention, in order to solve the above-mentioned problems, an actuator, a plurality of speed detecting portions for detecting a rotation speed of the actuator or a moving speed of a machine attached to the actuator, and the actuator. Position command unit that sets a target position of the rotational position or the position of the machine, and generates a current command value supplied to the actuator based on output signals from the speed detection unit and the position command unit, and the current command value A position control unit for controlling the rotational position of the actuator or the position of the machine based on the above, wherein a current command value supplied to the actuator and a rotation speed signal of the actuator or movement of the machine. A disturbance observer that estimates the state quantity of the actuator based on the velocity signal The number provided, wherein the position controller is characterized by inhibiting the disturbance on the basis of the output signal from the disturbance observer.

In this case, when the output signals from the plurality of speed detecting sections having different characteristics are detected by one disturbance observer, when the speed detecting sections having different characteristics are switched, an error occurs in the calculated value of the disturbance observer. There is a possibility that the disturbance may occur and the disturbance cannot be detected accurately. In the present invention, since the disturbance observer is provided in correspondence with the plurality of speed detecting units, even when the speed detecting units having different characteristics are switched, the detection signal is calculated by the disturbance observer corresponding to the speed detecting unit. , No error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

According to a tenth aspect of the invention, in order to solve the above-mentioned problems, an actuator, a position detector for detecting a rotational position of the actuator or a position of a machine attached to the actuator, and a rotational speed of the actuator. Alternatively, a speed detection unit that detects a moving speed of a machine attached to the actuator, a position command unit that sets a target position of a rotational position of the actuator or a position of the machine, the position detection unit or the speed detection unit, and a position command Position control unit that generates a current command value to be supplied to the actuator based on an output signal from the actuator unit and controls the rotational position of the actuator or the position of the machine based on the current command value. Device, a current command value supplied to the actuator and a rotational position signal of the actuator Or a position signal of the machine, or a disturbance observer for estimating the state quantity of the actuator based on the rotation speed signal of the actuator or the movement speed signal of the machine, the same number of disturbance observers are provided corresponding to the position detection unit and the speed detection unit, and The position control unit suppresses the disturbance based on the output signal from the disturbance observer.

In this case, when the output signals from the position detector and the velocity detector having different characteristics are detected by one disturbance observer, the calculated value of the disturbance observer when the position detector and the velocity detector are switched. There is a possibility that an error may occur in the noise and it may not be possible to accurately detect the disturbance. In the present invention, since the disturbance observer is provided corresponding to the position detecting unit and the speed detecting unit, even when the position detecting unit and the speed detecting unit having different characteristics are switched, the disturbance detecting observer corresponds to the position detecting unit and the speed detecting unit. Since the detection signal is calculated by the disturbance observer, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

In order to solve the above-mentioned problems, an invention according to claim 11 is characterized in that an actuator, a position detecting section for detecting a rotational position of the actuator or a position of a machine attached to the actuator, and the actuator or the actuator. A focus signal generation unit that generates a focus signal that optically detects the distance between the attached machine and the object to be measured, and a position command unit that sets a target position of the rotational position of the actuator or the position of the machine, A current command value supplied to the actuator is generated based on the output signals from the position detection unit or the focus signal generation unit and the position command unit, and the rotational position of the actuator or the position of the machine is determined based on the current command value. A positioning control device including a position control unit for controlling, and supplying the actuator to the actuator. The same number of disturbance observers that estimate the state quantity of the actuator based on the current command value and the rotational position signal of the actuator or the position signal of the actuator, or the focus signal are provided corresponding to the position detection unit and the focus signal generation unit, It is characterized in that the position control unit suppresses disturbance based on an output signal from the disturbance observer.

In this case, when the output signals from the position detecting section and the focus signal generating section having different characteristics are detected by one disturbance observer, the disturbance observer changes when the position detecting section and the focus signal generating section are switched. There is a possibility that an error may occur in the calculated value and accurate disturbance may not be detected. In the present invention, since the disturbance observer is provided corresponding to the position detection unit and the focus signal generation unit, even when the position detection unit and the focus signal generation unit having different characteristics are switched, the position detection unit and the focus signal generation unit are switched. Since the detection signal is calculated by the disturbance observer corresponding to, there is no error in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

In order to solve the above-mentioned problems, the invention as set forth in claim 12 is: an actuator, a speed detecting unit for detecting a rotational speed of the actuator or a moving speed of a machine attached to the actuator, and the actuator or the actuator. A focus signal generating section for generating a focus signal for optically detecting the distance between the machine and the object to be measured, and a position command section for setting a target position of the rotational position of the actuator or the position of the machine. Generating a current command value to be supplied to the actuator based on output signals from the speed detection unit or the focus signal generation unit and the position command unit, and based on the current command value, a rotational position of the actuator or a machine position And a position control unit for controlling the A disturbance observer that estimates the state quantity of the actuator based on the supplied current command value and the rotation speed signal of the actuator or the movement speed signal of the machine, or the focus signal is provided in correspondence with the position detection unit and the focus signal generation unit. The same number is provided, and the position control unit suppresses the disturbance based on the output signal from the disturbance observer.

In this case, when the output signals from the speed detector and the focus signal generator having different characteristics are detected by one disturbance observer, the disturbance observer of the disturbance observer is switched when the speed detector and the focus signal generator are switched. There is a possibility that an error may occur in the calculated value and accurate disturbance may not be detected. In the present invention, since the disturbance observer is provided corresponding to the speed detection unit and the focus signal generation unit, even when the speed detection unit and the focus signal generation unit having different characteristics are switched, the speed detection unit and the focus signal generation unit are switched. Since the detection signal is calculated by the disturbance observer corresponding to, there is no error in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

[0028]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 6 are views showing a first embodiment of a positioning control device according to the present invention.
It corresponds to the invention described in any one of 4. First, the configuration will be described. In FIG. 1, reference numeral 1 is a carriage as a machine, and this carriage 1 is driven by a voice coil motor 2. The position of the carriage 1 is detected by a linear encoder (position detector) 3, and the detection signal from the linear encoder 3 is fed back to the position controller 4 as a position signal pos. ing. The rotational position of the motor 2 may be detected instead of detecting the position of the carriage 1 by an encoder or the like.

The position control unit 4 compares the feedback signal pos from the linear encoder 3 with the command signal of the rotational position of the motor 2 generated from the position command unit 5, and determines the current command value iref according to the deviation between the two signals. It is configured to calculate and output to the current control unit 6. The current control unit 6 outputs a motor current im corresponding to the current command value iref to the motor 2, and the motor 2 drives the carriage 1 based on this motor current im.

The current sensor (current detecting section) 7 is adapted to detect the motor current.
The motor current isens detected by is output to the disturbance observer 8. The motor current isens and the position signal pos are input to the disturbance observer 8, and the difference from the nominal model of the motor 2 is calculated as an estimated disturbance based on these signals.

The disturbance idis estimated by the disturbance observer 8 (however, idis is a substitute for the characters shown in Table 1 which cannot be used as characters for patent application, and the letters in Table 1 are replaced by idis hereinafter) is the current controller. 6, the current command value iref is controlled to suppress the disturbance d.

[0032]

[Table 1]

The estimated disturbance idis is used for the avoidance operation command unit 9
Is input to the avoidance operation command unit 9
Outputs to the position control unit 4 so as to change the target position input to the position control unit 4 to the target position rpos when the input estimated disturbance idis exceeds a predetermined value dref for a predetermined time tdref, Rotational position of motor 2 or carriage 1
Change the position of.

The changing method by the avoidance operation command unit 9 is specifically shown in FIG. FIG. 2 is a diagram showing an operation at the time of starting the motor 2 and when a disturbance is applied. As shown in the figure,
When starting up the motor 2, a large amount of current flows through the motor 2, but the estimated disturbance idis
Becomes larger and the estimated disturbance idis exceeds the predetermined value dref, but does not exceed the predetermined time tdref, so the target position is not changed.

On the other hand, the target position is changed and the avoidance operation is performed only when the estimated disturbance idis exceeds the predetermined value dref for the predetermined time tdref due to the disturbance. Here, a method of calculating the disturbance by the disturbance observer will be described with reference to FIG. First, the state equation of the linear motor 2 is obtained. A block diagram of the linear motor 2 is shown as in FIG. However, kf = thrust constant [N / A], M = weight [k
g], i = current [A], α = acceleration [m / s2], v =
Velocity [m / s], x = position [m].

When the block diagram of the linear motor 2 is rewritten into a state equation, it is shown as shown in FIG. However, A, B, and C are constants (vectors), x is a state quantity (vector), u is an input vector, and y = output vector.
When this state quantity is calculated by the formula shown in Table 2, the state equation of the linear motor 2 is represented by the following formula.

[0037]

[Table 2]

[0038]

[Equation 1]

When the state equation shown in FIG. 7B is P (plant), the state equation from this plant to the observer is as shown in FIG. 7C, which is expressed by the following equation. Note that Equations 1 and 2 are both vectors.

[0040]

[Equation 2]

When the state quantity x in the equation (1) is expanded to the acceleration disturbance, the state quantity becomes the velocity v, the position x, and the acceleration disturbance w. Therefore, the observer output x1 of the equation (4) is the velocity and x2 is Position, x3 is the estimated amount of acceleration disturbance (however, x1, x2, and x3 are the substitutes for the characters shown in Table 1 that cannot be used as patent application characters. to substitute). In this way, the disturbance is estimated.

Next, the operation will be described. First, when the target position is moved in the positive direction, the position deviation (position deviation = target position-position) is assumed to be positive, and a negative disturbance whose sign of the position deviation is opposite to the moving direction of the target position is added. I think As shown in FIG. 4, when the target position rpos is changed in the positive direction in the position controller 4, the motor 2
The position pos of the carriage 1 changes according to the target position rpos.

The estimated disturbance idis at this time outputs a value corresponding to the deviation of the motor parameter. Then, when the carriage 1 collides with a work or the like, the estimated disturbance idis increases in the negative direction. The avoidance operation command unit 9 determines that the estimated disturbance is abnormal when the value of the estimated disturbance becomes smaller than a predetermined value dref as shown in FIG. 4 and a predetermined time tdref or more elapses, and a position for canceling the estimated disturbance is set. The avoidance operation is performed by changing the target position rpos of the control unit 4 so as to avoid the predetermined position Δx in the negative direction.

This operation will be described below with reference to the flow chart shown in FIG. First, when the carriage 1 moves in the positive direction and collides with a work or the like, it is determined whether the estimated disturbance idis is smaller than a predetermined value -dref (step S1). When it is determined that the estimated disturbance idis is smaller than the predetermined value -dref, it is determined whether or not the time smaller than the predetermined value -dref has passed the predetermined time tdref or more (step S2). If the time has passed, the target position rpos is changed by a predetermined position Δx in the negative direction from the current position pos of the carriage 1, and the avoidance operation is performed (step S3).

On the other hand, when the carriage 1 moves in the negative direction and collides with a work or the like, the estimated disturbance idis is a predetermined value dr.
It is determined whether it is larger than ef (step S4). When it is determined that the estimated disturbance idis is larger than the predetermined value dref, it is determined whether or not the time larger than the predetermined value dref has passed the predetermined time tdref or more (step S5). If it has passed, the target position rpos is moved toward the positive position from the current position pos of the carriage 1 by a predetermined position Δ.
The avoidance operation is performed by changing only x (step S6).

As described above, in this embodiment, the electric current supplied to the motor 2 and the rotational position of the motor 2 or the carriage 1 are used.
When the position of is input and the disturbance observer 8 that estimates the state quantity of the motor 2 and the disturbance that is one of the state quantities estimated by the disturbance observer 8 exceed a predetermined value dref for a predetermined time tdref or more, Since the avoidance operation command unit 9 that changes the rotational position of the motor 2 or the target position rpos of the carriage 1 by Δx is provided, the speed or position of the motor 2 does not change such as when the motor 2 is started or stopped, and the current is reduced. When a large instantaneous flow occurs, the danger avoidance operation is not performed without judging that the disturbance has occurred, and when the disturbance exceeds a predetermined value for a predetermined time or more, the rotational position of the motor 2 or the position of the carriage 1 is changed. The risk avoidance operation can be performed by changing the target position rpos, and damage to the carriage 1 at the time of a collision can be minimized.

Further, when the estimated disturbance idis exceeds the predetermined value dref for a predetermined time tdref or more without providing a special device or sensor for avoiding danger, the rotational position of the motor 2 or the target position of the position of the carriage 1 Since the danger can be avoided only by changing the rpos, the cost of the positioning control device can be significantly reduced. In addition, the avoidance operation command unit 9 uses the disturbance i estimated by the disturbance observer.
Since the current position pos of the carriage 1 is changed by Δx in the negative or positive direction so that the avoidance operation is performed only at a predetermined position in the direction in which the dis is cancelled, the danger can be reliably avoided and the risk of collision of the carriage 1 Damage to the carriage 1 can be minimized.

In this embodiment, the rotational position of the motor 2 or the target position rpos of the carriage 1 is changed by Δx regardless of whether the sign is positive or negative. However, the present invention is not limited to this.
The rotational position of the motor 2 or the target position rpos of the carriage 1 may be changed to a predetermined position according to the positive or negative sign. That is, as shown in the flowchart of FIG. 6, in steps S1 and S2, when the carriage 1 moves in the positive direction and collides with a work or the like, a time smaller than a predetermined value −dref when the estimated disturbance idis occurs is generated. When the predetermined time tdref or more has elapsed, the avoidance operation is performed by changing the target position rpos by a predetermined position Δx1 in the negative direction from the current position pos of the carriage 1 (step S1).
1) In steps S4 and S5, when the carriage 1 moves in the negative direction and collides with a work or the like, the estimated disturbance idi
When the time larger than the predetermined value −dref has elapsed for the generation of s for the predetermined time tdref or more, the target position rp
The os is changed by changing the os in the positive direction from the current position pos of the carriage 1 by a predetermined position Δx2 having a distance different from Δx1.

In this way, even if the distance for avoiding the danger differs depending on the driving direction of the motor 2, the danger can be avoided without any trouble. FIG. 7 is a diagram showing a second embodiment of the positioning control device according to the present invention, and corresponds to the invention of claim 5. It should be noted that in the present embodiment, according to the sign of the disturbance estimated by the disturbance observer, a predetermined value idis which is a comparison target of the disturbance is determined.
Is changed to a different value, and is the same as the above embodiment except for this point, and will be described using the configuration of FIG.

In the flowchart of FIG. 7, when the carriage 1 moves in the forward direction and collides with a work or the like,
It is determined whether the estimated disturbance idis is smaller than a predetermined value -dref1 (step S21). When it is determined that the estimated disturbance idis is smaller than the predetermined value −dref1, it is determined whether or not the time smaller than the predetermined value −dref1 has passed the predetermined time tdref or more (step S22).

If the time has elapsed, the target position rpos is changed by a predetermined position Δx in the negative direction from the current position pos of the carriage 1 to perform the avoidance operation (step S23).
On the other hand, when the carriage 1 moves in the negative direction and collides with a work or the like, it is determined whether the estimated disturbance idis is larger than a predetermined value dref2 (step S24). Estimated disturbance idi
When it is determined that s is larger than the predetermined value dref2, the time larger than the predetermined value dref2 is the predetermined time tdr.
It is determined whether ef or more has elapsed (step S2
Five). If the time has elapsed, the target position rpos is changed by a predetermined position Δx in the positive direction from the current position pos of the carriage 1, and the avoidance operation is performed (step S26).

By doing so, it is possible to deal with the difference in the parameters with respect to the nominal model included in the estimated disturbance that varies depending on the driving direction of the motor 2, and the reference (dref) that causes an abnormality or overload depending on the driving direction of the motor 2 can be dealt with.
1, dref2) can be changed appropriately. 8 and 9 are views showing a third embodiment of the positioning control device according to the present invention, and correspond to the inventions of claims 6 and 7. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

In FIG. 8, 11 is a braking device (braking means).
The braking device 11 is configured to brake the carriage 1 and stop the motor 2 by the brake operation signal brk output after the avoidance operation command unit 9 finishes the avoidance operation. Further, a current cutoff unit 12 is interposed between the current control unit 6 and the motor 2, and the current cutoff unit 12 outputs the current cutoff signal icut after the avoidance operation command unit 9 finishes the avoidance operation to the motor. The current supplied to 2 is cut off. Therefore, the motor 2 is completely stopped in hardware by the braking device 11 and the current interruption unit 12 after the avoidance operation is completed. In the present embodiment,
The avoidance operation command section 9 constitutes a motor stop control means.

Next, the operation will be described based on the flowchart of FIG. In steps S31 and S32, when the carriage 1 moves in the positive direction and collides with a work or the like, and when the estimated disturbance idis occurs, a time smaller than a predetermined value -dref has passed a predetermined time tdref or more. , The target position rpos is changed by a predetermined position Δx in the negative direction from the current position pos of the carriage 1 to perform the avoidance operation (step S33).

After the avoidance operation command section 9 finishes the avoidance operation, it sends a braking operation signal to the braking device 11 and the current interrupting section 12.
The motor 2 is completely stopped by outputting brk and the current cutoff signal icut (step S34). On the other hand, step S
In 35 and 36, when the carriage 1 moves in the negative direction and collides with a work or the like, when the estimated disturbance idis is greater than a predetermined value dref for a predetermined time tdref or more, the target The position rpos is changed by a predetermined position Δx in the positive direction from the current position pos of the carriage 1 to perform the avoidance operation (step S36).

The avoidance operation command section 9 sends a brake operation signal to the braking device 11 and the current interruption section 12 after the avoidance operation is completed.
brk and the current cutoff signal icut are output to completely stop the motor 2 (step S37). As described above, in the present embodiment, when the disturbance idis, which is one of the state quantities estimated by the disturbance observer 8, exceeds the predetermined value dref for the predetermined time tdref or more, the avoidance operation is performed and then the braking device 11 is operated. By operating the current interruption unit 12, the motor 2
Is completely stopped, the motor 2 can be surely stopped after the danger is avoided, and the safety of the positioning control device can be sufficiently ensured after the danger is avoided.

FIG. 10 is a diagram showing a fourth embodiment of the positioning control device according to the present invention and corresponds to the invention of claim 2. The present embodiment is the same as the first embodiment except that the current sensor is abolished and that one of the signals input to the disturbance observer 8 is the signal from the position control unit 4. Therefore, the same numbers are given to the same configurations and the description is omitted.

In FIG. 10, the current command value iref and the position signal pos, which are the output signals from the position control section 4, are input to the disturbance observer 8, and the disturbance observer 8 uses the signals based on these signals. The difference from the Nominal model of 2 should be calculated as the estimated disturbance. Then, the disturbance idis estimated by the disturbance observer 8 is input to the current control unit 6, and the current command value iref is controlled to disturb the disturbance d.
Suppress the. Further, the estimated disturbance idis is input to the avoidance operation command unit 9, and the avoidance operation instruction unit 9 determines the position when the input estimated disturbance idis exceeds a predetermined value dref for a predetermined time tdref. The target position input to the control unit 4 is output to the position control unit 4 so as to be changed to the target position rpos, and the rotational position of the motor 2 or the carriage 1 is output.
The position of is changed.

By doing so, in addition to the same effects as in the first embodiment, a current detector for detecting the motor current and an A / D converter for fetching the detected value into the arithmetic unit can be eliminated. The cost of the positioning control device can be further reduced. Note that the method of changing the target position rpos and the method of changing the predetermined value dref that is the comparison target of the estimated disturbance are the same as those in the first to third embodiments, and thus the description thereof will be omitted.

FIG. 11 is a diagram showing a fifth embodiment of the positioning control apparatus according to the present invention and corresponds to the invention described in any one of claims 2, 6 and 7. In this embodiment, the same components as those in the first and fourth embodiments are designated by the same reference numerals and the description thereof will be omitted. In FIG. 11, 13 is a braking device (braking means)
The braking device 13 is configured to brake the carriage 1 and stop the motor 2 by the brake operation signal brk output after the avoidance operation command unit 9 finishes the avoidance operation. Further, a current cutoff unit 14 is interposed between the current control unit 6 and the motor 2, and the current cutoff unit 14 outputs the current cutoff signal icut after the avoidance operation command unit 9 finishes the avoidance operation to the motor. The current supplied to 2 is cut off. Therefore, the motor 2 is completely stopped in hardware by the braking device 13 and the current interrupting unit 14 after the avoidance operation is completed. In the present embodiment, the avoidance operation command section 9 constitutes a motor stop control means. Since this operation is the same as the flowchart shown in FIG. 9 of the third embodiment, description thereof will be omitted, but it goes without saying that the same effects as those of the third embodiment can be obtained in this embodiment.

12 and 13 are views showing a sixth embodiment of the positioning control apparatus according to the present invention, and correspond to the invention of claim 8. First, the configuration will be described. In FIG.
21 is a motor as an actuator.
An encoder with a fine pitch (position detection unit) 22 and an encoder with a coarse pitch (position detection unit) 23 are attached to the rotary shaft of 21.
It is to be detected by 22 and 23.

The detection signals from the encoders 22 and 23 are output as position detection signals Xs and Xr to the positioning controller 24. Further, a signal from a position command unit 25 that sets a target position of the rotational position of the motor 21 is input to the control controller 24, and the control controller 24 outputs the rotational position signal Xs from the encoder 22 or 23 or Xr is compared with a command signal for the rotational position of the motor 21 generated from the position command unit 25, and a current command value ic corresponding to the deviation between the two signals is calculated and output to the adder 26.

The rotational position signal Xs or Xr is selectively output to the controller 24 by switching the switch 27, and the switch 27 is switched by the mode switch 28. . The adder 26 is configured to add an output signal from a disturbance observer, which will be described later, and a current command value ic to generate a current command value, and output this current command value to the motor driver 29. The motor driver 29 outputs a motor current im proportional to the current command value to the motor 21, and the motor 21 is rotationally driven based on this motor current im.

The current sensor 30 detects the motor current im, and the motor current im detected by the current sensor 30 is output to the disturbance observer 31 or 32. The disturbance observer 31 receives the motor current im and the rotational position signal Xs from the encoder 22, and the disturbance observer 32 receives the motor current im and the encoder 23.
The rotational position signal Xr from is input, and the disturbance observers 31 and 32 calculate the difference from the nominal model of the motor 21 as an estimated disturbance based on these signals.

The disturbance idis estimated by the disturbance observer 31 or 32 (where idis is a substitute for the characters shown in Table 1 which cannot be used as characters for patent application, and
Character is replaced by idis) as described above in the adder 26
Is added to control the current command value to suppress disturbance. Also, disturbance observer 31 or 32
Is selectively output to the adder 26 by switching the switch 33, and the switch 33 is switched by the mode switch 28.

The mode switch 28 is operated on the basis of the detection signal from the position command section 25. For example, the motor 21 is rotated to move the carriage (machine) from the standby position to the workpiece or the like. When approaching the object to be measured, switch the switches 27 and 33 to the A side to encoder with a coarse pitch.
When minute positioning is performed after the carriage is brought close to the object to be measured by the motor 21 by detecting the output signal from the 23, the switches 27 and 33 are switched to the B side and the encoder 22 with a fine pitch is used. The switches 27 and 33 are switched so as to detect the output signal. In the present embodiment, the controller 24, the adder 26, and the motor driver 29 described above make up a position controller.

Next, the operation will be described. First, when the carriage is brought closer to the work from the standby position, the mode changer 28 switches the switches 27 and 33 to the A side in order to roughly move the carriage, and the encoder 23 detects the rotational position of the motor 21. This output signal is input to the disturbance observer 32 together with the motor current im.

Next, when the carriage is brought close to the work, it is necessary to perform fine positioning control on the work.
33 is switched to the B side, the rotational position of the motor 21 is detected by the encoder 22, and this output signal indicates the motor current im.
It is input together with the disturbance observer 31. Then, when the disturbance is detected by the disturbance observers 31 and 32 while the rotational position of the motor 21 is detected by any of the encoders 22 and 23, the disturbance idis detected by the disturbance observers 31 and 32 is added. Since it is fed back to the device 26, the adder 26 adds the disturbance idis and the current command value ic to generate a current command value (disturbance correction signal) and outputs it to the motor driver 29. The motor driver 29 outputs a motor current im proportional to the current command value to the motor 21 to suppress the position deviation due to the disturbance shown in FIG. 13 and control the carriage to the target position.

Since the method of calculating the disturbance by the disturbance observers 31 and 32 is the same as that described in FIG. 3, Table 2, Formulas 1 and 2, description thereof will be omitted. As described above, in this embodiment, the disturbance observers 31 and 32 that estimate the state quantity of the motor 21 based on the current command value supplied to the motor 21 and the rotation position signals Xs and Xr of the motor 21 correspond to the encoders 22 and 23. Then, the same number is provided, and the controller 24 sets the disturbance observer 3
Disturbance is suppressed based on the output signals from 1 and 32.

With this configuration, when the output signals from a plurality of encoders having different characteristics are detected by one disturbance observer, when the encoders having different characteristics are switched, an error occurs in the calculated value of the disturbance observer. This is because there is a possibility that the noise may occur and the disturbance cannot be accurately detected. In this embodiment, since the disturbance observers 31 and 32 are provided corresponding to the plurality of encoders 22 and 23, even when the encoders 22 and 23 having different characteristics are switched, the disturbance observer 31 corresponding to the encoders 22 and 23 is changed. , 32 calculates the detection signal, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

In this embodiment, the encoders 22 and 23 are
Although the rotational position of the motor 21 is detected by, the moving position of the carriage may be detected. Further, in the present embodiment, only one controller 24 is provided, but the present invention is not limited to this, and as shown in FIG.
4, 35 and positioning control controllers 36, 37 are provided respectively, and the control controller 36 outputs the output signal from the position command section 34 and the rotational position signal Xs from the encoder 22, and the control controller 37 receives the position command. Part 35
Output signal from encoder and rotational position signal Xr from encoder 23
Is output, and the rotational position signals Xs and Xr from the encoder 22 or 23 are compared by the respective control controllers 36 and 37 with the rotational position command signal of the motor 21 generated from the position command units 34 and 35. The current command value ic corresponding to the deviation may be calculated and output to the adder 26. In this case, the switch 38 is connected to the adder 26 and the controller 36,
It suffices that the switch 38 is switched by the mode switch 28 provided between the switches 37.

In this way, in addition to the effect similar to that of the present embodiment, by providing two controllers 36 and 37, the controller gain can be adjusted to match the characteristics of the encoders 21 and 22. , As shown in FIG.
It is possible to obtain the effect that the response performance can be adjusted depending on the respective modes (modes when the switches 33 and 38 are switched to the A side and when they are switched to the B side).

FIG. 16 is a diagram showing a seventh embodiment of the positioning control device according to the present invention and corresponds to the invention of claim 9. In addition, in this embodiment, the same components as those in the sixth embodiment are designated by the same reference numerals, and the description thereof will be omitted. First, the configuration will be described. In FIG. 16, a speed detector (speed detection unit) 41 with high detection accuracy and a speed detector (speed detection unit) 42 with low detection accuracy are attached to the rotating shaft of the motor 21,
The rotation speed of the motor 21 is detected by the speed detectors 41 and 42. Instead of the rotation speed of the motor 21, the movement speed of the carriage may be detected.

The detection signals from the speed detectors 41, 42 become the rotation speed signals Vs, Vr, and the positioning control controller.
It is designed to be output to 24. Further, a signal from the position command unit 25 is input to the control controller 24, and the control controller 24 controls the speed detector 41 or
The rotation speed signal Vs or Vr from 42 is compared with the rotation position command signal of the motor 21 generated from the position command unit 25, and the current command value ic corresponding to the deviation of both signals is calculated to calculate the adder 26.
Output.

The rotation speed signal Vs or Vr is selectively output to the controller 24 by switching the switch 27, and the switch 27 is switched by the mode switch 28. . Further, the adder 26 adds the output signals from the disturbance observers 31, 32 and the current command value ic to generate a current command value. The current command value is used as the motor driver 29, and the motor driver 29 The motor 21 is rotationally driven based on the motor current im.

Further, the disturbance observer 31 has a current sensor 30.
The motor current im detected by and the rotation speed signal Vs from the speed detector 41 are input, and the motor current im and the rotation speed signal Vr from the speed detector 42 are input to the disturbance observer 32. The disturbance observers 31 and 32 are configured to calculate the difference from the nominal model of the motor 21 as an estimated disturbance based on these signals.

The disturbance idis estimated by the disturbance observer 31 or 32 is added by the adder 26 as described above to control the current command value and suppress the disturbance. Further, the disturbance observer 31 or 32 is adapted to be selectively output to the adder 26 by switching the switch 33.
It can be switched by.

The mode switch 28 is operated on the basis of a detection signal from the position command section 25. For example, the motor 21 is rotated to move the carriage (machine) from the standby position to the workpiece or the like. When approaching the object to be measured, the switches 27 and 33 are switched to the A side so as to detect the output signal from the low-accuracy speed detector 42, and after the motor 21 moves the carriage to the object to be measured, a minute amount is detected. When positioning is performed, the switches 27 and 33 are switched to the B side and the switches 27 and 33 are switched so as to detect the output signal from the highly accurate speed detector 41.

Next, the operation will be described. First, when the carriage is brought close to the work from the standby position, the switches 27 and 33 are switched to the A side by the mode switch 28 in order to roughly move the carriage, and the rotation speed of the motor 21 is controlled by the speed detector 42. This is detected and this output signal is input to the disturbance observer 32 together with the motor current im.

Next, when the carriage is brought close to the work, it is necessary to perform minute positioning control on the work.
33 is switched to the B side, the rotational position of the motor 21 is detected by the speed detector 41, and this output signal is the motor current im.
It is input together with the disturbance observer 31. When the disturbance is detected by the disturbance observers 31, 32 while the rotation speed of the motor 21 is being detected by either of the speed detectors 41, 42, the disturbance idis detected by the disturbance observers 31, 32 is detected. Is fed back to the adder 26, the adder 26 adds the disturbance idis and the current command value ic to generate a current command value (disturbance correction signal), and outputs it to the motor driver 29. The motor driver 29 outputs a motor current im proportional to the current command value to the motor 21 to suppress the position deviation due to the disturbance shown in FIG. 13 and control the carriage to the target position.

As described above, in this embodiment, the disturbance observer 31 for estimating the state quantity of the motor 21 based on the current command value supplied to the motor 21 and the rotation speeds Vs and Vr of the motor 21,
The same number of 32 are provided corresponding to the speed detectors 41 and 42, and the controller 24 suppresses the disturbance based on the output signals from the disturbance observers 31 and 32.
Even when 41 and 42 are switched, the speed detector 41 and 42
Since the detection signals are calculated by the disturbance observers 31 and 32 corresponding to, there is no error in the calculated values. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

Further, in the present embodiment, the controller
Although only one 24 is provided, the present invention is not limited to this, and as shown in FIG. 17, two position command units 43 and 44 and two positioning control controllers 45 and 46 are provided, and the control controller 45 includes the position command unit 43. And the rotation speed signal Vs from the speed detector 41, and the controller 4
An output signal from the position command unit 44 and a rotation speed signal Vr from the speed detector 42 are output to 6, and the controller 45 and 46 respectively control the rotation speed signal Vs or Vr from the speed detector 41 or 42 and the position. The command signals of the rotational position of the motor 21 generated from the command units 43 and 44 may be compared to calculate a current command value ic according to the deviation between the two signals and output to the adder 26. In this case, switch 47 to adder 26
Between the control controller 45 and 46 and the mode switch 28
It suffices to switch the switch 47 according to.

In this way, in addition to the same effect as the present embodiment, by providing two controllers 45, 45, the controller gain can be adjusted to match the characteristics of the speed detectors 41, 42. And as shown in Figure 15,
The effect that the response performance can be adjusted depending on each mode is obtained. FIG. 18 is a diagram showing an eighth embodiment of the positioning control device according to the invention, and corresponds to the invention of claim 10. In the present embodiment, the sixth
The same components as those of the embodiment are denoted by the same reference numerals, and description thereof is omitted.

First, the structure will be described. In FIG. 18, an encoder (position detection unit) 50 and a speed detector (speed detection unit) 51 are attached to the rotary shaft of the motor 21.
The rotational position of the encoder is detected by the encoder 50 and the rotational speed is detected by the speed detector 51.
The position signal from the speed detector 50 and the speed detector 51 is the rotational position signal X.
Or as a rotation speed signal V, a positioning controller
It is designed to be output to 24.

Further, the controller 24 has a position command section.
The signal from 25 is input, and the controller 24 controls the rotational position signal X or the rotational speed signal V from the encoder 50 or the speed detector 51 and the rotational position of the motor 21 generated from the position command unit 25. The current command value ic corresponding to the deviation between the two signals is calculated and the adder 26
Output.

The rotation position signal X or the rotation speed signal V is controlled by switching the switch 27.
The switch 27 can be selectively output, and the switch 27 can be switched by a mode switch 28. Further, the adder 26 adds the output signals from the disturbance observers 31, 32 and the current command value ic to generate a current command value. The current command value is used as the motor driver 29, and the motor driver 29 The motor 21 is rotationally driven based on the motor current im.

The disturbance observer 31 has a current sensor 30.
The motor current im detected by and the rotation position signal X from the encoder 50 are input, and the motor current im and the rotation speed signal V from the speed detector 51 are input to the disturbance observer 32. The disturbance observers 31 and 32 are configured to calculate the difference from the nominal model of the motor 21 as an estimated disturbance based on these signals.

The disturbance idis estimated by the disturbance observer 31 or 32 is added by the adder 26 as described above to control the current command value and suppress the disturbance. Further, the disturbance observer 31 or 32 is adapted to be selectively output to the adder 26 by switching the switch 33.
It can be switched by.

The mode switch 28 is operated on the basis of the detection signal from the position command section 25. For example, the motor 21 is rotated to move the carriage (machine) from the standby position to a workpiece or the like. When approaching the object to be measured, the switches 27 and 33 are switched to the A side so as to detect the output signal from the speed detector 51, and the motor 21 causes the carriage to approach the object to be measured and then fine positioning is performed. In this case, the switches 27 and 33 are switched to the B side to switch the switches 27 and 33 so as to detect the output signal from the encoder 50.

Next, the operation will be described. First, when the carriage is brought closer to the work from the standby position, the switches 27 and 33 are switched to the A side by the mode switching device 28 in order to roughly move the carriage, and the rotation speed of the motor 21 is controlled by the speed detector 51. This is detected and this output signal is input to the disturbance observer 32 together with the motor current im.

Next, when the carriage is brought close to the work, it is necessary to perform fine positioning control on the work.
33 is switched to the B side, the rotational position of the motor 21 is detected by the encoder 50, and this output signal is the motor current im.
It is input together with the disturbance observer 31. Then, when the disturbance is detected by the disturbance observer 31, 32 while the rotational position or the rotational speed of the motor 21 is detected by either the encoder 50 or the speed detector 51, the disturbance observer 31, 32 Since the detected disturbance idis is fed back to the adder 26, the adder 26 adds the disturbance idis and the current command value ic to generate a current command value (disturbance correction signal) and outputs it to the motor driver 29. .
The motor driver 29 determines the motor current i proportional to the current command value.
By outputting m to the motor 21, the carriage is controlled to reach the target position by suppressing the positional deviation due to the disturbance shown in FIG.

As described above, in the present embodiment, the disturbance observers 31 and 32 for estimating the state quantity of the motor 21 based on the current command value supplied to the motor 21 and the rotation position signal X and the rotation speed signal V of the motor 21 are used. Encoder 50 and speed detector
The same number is provided corresponding to 51, and the controller 24 suppresses the disturbance based on the output signals from the disturbance observers 31 and 32.
Even when 51 is switched, since the detection signals are calculated by the disturbance observers 31 and 32 corresponding to the encoder 50 and the speed detector 51, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

Further, in this embodiment, the controller
Although only one 24 is provided, the present invention is not limited to this, and as shown in FIG. 19, two position command units 52 and 53 and two positioning control controllers 54 and 55 are provided, and the control controller 54 includes the position command unit 52. Output signal from the encoder and the rotational position signal X from the encoder 50, and also outputs the rotational speed signal V from the speed detector 51 to the control controller 55, and the encoder 50 or the speed detector by the respective control controllers 54 and 55. The rotational position signal X or the rotational speed signal V from 51 is compared with the rotational position command signal of the motor 21 generated from the position command units 52 and 53, and the current command value ic corresponding to the deviation of both signals is calculated. You may make it output to the adder 26. In this case, the switch 56 may be provided between the adder 26 and the control controllers 54 and 55, and the mode switch 28 may switch the switch 56.

In this way, in addition to the effect similar to that of this embodiment, by providing the two controllers 54 and 55, the controller gain is adjusted to match the characteristics of the encoder 50 or the speed detector 51. Can, Figure 15
As shown in, the effect that the response performance can be adjusted depending on each mode is obtained. FIG. 20 is a diagram showing a ninth embodiment of the positioning control device according to the present invention, and corresponds to the invention of claim 11. In addition, in this embodiment, the same components as those in the sixth embodiment are designated by the same reference numerals, and the description thereof will be omitted.

First, the structure will be described. In FIG. 18, 61
Is a carriage as a machine, and this carriage 61 is driven by a voice coil motor 62 as an actuator. The position of the carriage 61 is detected by a linear encoder (position detector) 63, and the position signal from the linear encoder 63 becomes a rotational position signal Xe, which is the control controller 24.
To be fed back to. Instead of detecting the movement position of the carriage 61 by the linear encoder 63, the rotation position of the voice coil motor 62 may be detected.

Further, the carriage 61 is provided with a focus generator (focus signal generator) 65, and the focus generator 65 includes the carriage 61 and a work (object to be measured).
Focus signal Xf that optically detects the distance to 64
Is to occur. This focus generator 65
The focus signal Xf output from the device is fed back to the positioning controller 24.

Further, the controller 24 has a position command section.
The signal from 25 is input, and the controller 24 compares the rotational position signal Xe from the encoder 63 with the command signal of the moving position of the carriage 61 generated from the position command unit 25, and compares both signals. Current command value ic according to deviation
Is calculated and output to the adder 26. Further, the controller 24 compares the focus signal Xf from the focus generator 65 with the command signal of the movement position of the carriage 61 generated from the position command unit 25, and calculates the current command value ic according to the deviation between the two signals. And outputs it to the adder 26. Specifically, in the focus mode in which the focus signal Xf from the focus generator 65 is output to the control controller 24, the control controller 24 sets the target position to 0 (zero) so that the carriage 61 moves to the surface of the work 64. The carriage 61 is controlled so as to follow a surface shape of the work 64 while maintaining a certain fixed interval (position in focus).

The rotation position signal Xe or the focus signal Vf is selectively output to the controller 24 by switching the switch 27, and the switch 27 can be switched by the mode switch 28. ing. Further, the adder 26 is a disturbance observer 31, 32.
The current command value is generated by adding the output signal from the current command value ic to the motor driver 29. The motor driver 29 rotationally drives the motor 62 based on the motor current im. To do.

The disturbance observer 31 has a current sensor 30.
The motor current im detected by and the rotational position signal Xe from the encoder 63 are input, and the motor current im and the focus signal Xf from the focus generator 65 are input to the disturbance observer 32. The disturbance observers 31, 32 use the signals from the motor 62 as a basis.
The difference from the nominal model of is calculated as an estimated disturbance.

The disturbance idis estimated by the disturbance observer 31 or 32 is added by the adder 26 as described above to control the current command value and suppress the disturbance. Further, the disturbance observer 31 or 32 is adapted to be selectively output to the adder 26 by switching the switch 33.
It can be switched by.

The mode switch 28 is operated based on the detection signal from the position command unit 25. For example, when the motor 62 is rotated to bring the carriage 61 close to the work 64 from the standby position. Switch B to switches 27 and 33.
Switch to the side to detect the output signal from the encoder 63, and when controlling to keep the distance from the work 64 constant after the carriage is brought close to the work 64 by the motor 62, switch 27, 33 side Switch to the A side and switch 2 to detect the output signal from the focus generator 65.
Switch between 7 and 33.

Next, the operation will be described. First, when the carriage 61 is brought close to the work 64 from the standby position, the mode changer 28 switches the switches 27 and 33 to the B side in order to roughly move the carriage 61.
The moving position of is detected by the encoder 63, and this output signal is input to the disturbance observer 31 together with the motor current im.

Next, when the carriage 61 is brought close to the work 63, it is necessary to maintain a constant position with respect to the work 63. Therefore, the mode selector 28 switches the switches 27 and 33 to the A side, and the carriage The distance between 61 and the workpiece 64 is optically detected by the focus generator 65, and this output signal is input to the disturbance observer 32 together with the motor current im.

If the disturbance is detected by the disturbance observers 31 and 32 while the movement position of the carriage 61 is detected by either the encoder 63 or the focus generator 65, the disturbance observers 31 and 32 detect the disturbance. Since the detected disturbance idis is fed back to the adder 26, the adder 26 adds the disturbance idis and the current command value ic to generate a current command value (disturbance correction signal) and outputs it to the motor driver 29. . The motor driver 29 outputs a motor current im, which is proportional to the current command value, to the motor 62 to suppress the positional deviation due to the disturbance shown in FIG. 13 and control the carriage 61 to the target position.

As described above, in the present embodiment, the disturbance observer 31 for estimating the state quantity of the moving position of the carriage 61 based on the current command value supplied to the motor 62 and the rotational position signal Xe and the focus signal Xf of the motor 62, The same number of 32 are provided corresponding to the encoder 63 and the focus generator 65, and the controller 24 suppresses the disturbance based on the output signals from the disturbance observers 31 and 32. Even when is switched, since the detection signals are calculated by the disturbance observers 31 and 32 corresponding to the encoder 63 and the focus generator 65, no error occurs in the calculated values.
Therefore, the disturbance can be accurately grasped and suppressed,
High-precision positioning control can be executed.

Further, in this embodiment, the controller
Although only one 24 is provided, the present invention is not limited to this, and as shown in FIG. 21, two position command units 66 and 67 and two positioning control controllers 68 and 69 are provided, and the control controller 68 includes the position command unit 66. Outputs the output signal from the encoder 63 and the rotational position signal Xe from the encoder 63,
9 is the output signal from the position command unit 67 and the focus generator 6
The focus signal Xf from 5 is output, and the rotational position signal Xe or focus signal Xf from the encoder 63 or the focus generator 65 and the moving position of the carriage 61 generated from the position command units 66 and 67 are output by the respective controllers 68 and 69. Alternatively, the current command value ic may be calculated according to the deviation between the two signals and output to the adder 26. In this case, the switch 70 may be provided between the adder 26 and the control controllers 68 and 69, and the mode selector 28 may switch the switch 70.

In this way, in addition to the same effect as the present embodiment, by providing two controllers 68 and 69, the controller gain is adjusted to match the characteristics of the encoder 63 or the focus generator 65. Therefore, the response performance can be adjusted according to each mode as shown in FIG. Figure
22 is a diagram showing a tenth embodiment of the positioning control device according to the invention, and corresponds to the invention of claim 12. In addition, in this embodiment, the same components as those in the ninth embodiment are designated by the same reference numerals, and the description thereof will be omitted.

First, the structure will be described. In FIG. 22, the position of the carriage 61 is detected by a linear encoder 71, and the rotational position signal Xe output from this linear encoder 71 is input to a differentiating circuit 73. This differentiating circuit 73 is adapted to differentiate the rotational position signal Xe into a rotational speed signal V,
The rotation speed signal V is fed back to the controller 24. The encoder 71 and the differentiating circuit 73 form a speed detector.

Further, the carriage 61 is provided with a focus generator (focus signal generator) 72, and the focus generator 72 optically detects the distance between the carriage 61 and the work 64. Is to occur. The focus signal Xf output from the focus generator 65 is fed back to the positioning controller 24.

Further, the controller 24 has a position command section.
The signal from 25 is input, and the controller 24 compares the rotational speed signal V from the differentiating circuit 73 with the command signal of the moving position of the carriage 61 generated from the position command unit 25, and outputs both signals. The current command value ic corresponding to the deviation is calculated and output to the adder 26. Further, the controller 24 compares the focus signal Xf from the focus generator 71 with the command signal of the moving position of the carriage 61 generated from the position command section 25, and calculates the current command value ic according to the deviation between the two signals. And outputs it to the adder 26. Specifically, in the focus mode in which the focus signal Xf from the focus generator 72 is output to the controller 24, the controller 24 sets the target position to 0 (zero) so that the carriage 61 causes the work 64 to move.
Carriage 61 so as to follow the surface shape of work 64 with a certain distance (focused position) from the surface of
Control.

Further, the rotation speed signal V or the focus signal Xf is selectively output to the controller 24 by switching the switch 27, and the switch 27 can be switched by the mode switch 28. ing. Further, the adder 26 adds the output signals from the disturbance observers 31, 32 and the current command value ic to generate a current command value. The current command value is used as the motor driver 29, and the motor driver 29 The motor 62 is rotationally driven based on the motor current im.

The disturbance observer 31 has a current sensor 30.
The motor current im detected by and the rotation speed signal V from the differentiating circuit 73 are input, and the disturbance observer
The motor current im and the focus signal Xf from the focus generator 72 are input to the 32, and the disturbance observers 31 and 32 regard the difference from the nominal model of the motor 62 as the estimated disturbance based on these signals. It is supposed to be calculated.

The disturbance idis estimated by the disturbance observer 31 or 32 is added by the adder 26 as described above to control the current command value and suppress the disturbance. Further, the disturbance observer 31 or 32 is adapted to be selectively output to the adder 26 by switching the switch 33.
It can be switched by.

The mode switch 28 is operated on the basis of the detection signal from the position command section 25. For example, when the motor 62 is rotated to bring the carriage 61 from the standby position to the workpiece 64. Switch B to switches 27 and 33.
Switch to the side to detect the output signal from the encoder 71, and when controlling to keep the distance from the work 64 constant after the carriage is brought close to the work 64 by the motor 62, switch 27, 33 side To the A side to switch the switches 27 and 33 so as to detect the focus signal Xf from the focus generator 72.

Next, the operation will be described. First, when the carriage 61 is brought close to the work 64 from the standby position, the mode changer 28 switches the switches 27 and 33 to the B side in order to roughly move the carriage 61.
The moving position of is detected by the encoder 71, and this output signal is input to the disturbance observer 31 together with the motor current im.

Next, when the carriage 61 is brought close to the work 63, it is necessary to maintain a constant position with respect to the work 63. Therefore, the mode selector 28 switches the switches 27 and 33 to the A side, and the carriage The distance between 61 and the workpiece 64 is optically detected by the focus generator 71, and this output signal is input to the disturbance observer 32 together with the motor current im.

If a disturbance is detected by the disturbance observers 31 and 32 while the movement position and the movement speed of the carriage 61 are detected by either the encoder 71 or the focus generator 72, the disturbance observer 31
Since the disturbance idis detected by 31 and 32 is fed back to the adder 26, the adder 26 adds the disturbance idis and the current command value ic to generate a current command value (disturbance correction signal), and the motor driver Output to 29. The motor driver 29 supplies the motor current im proportional to the current command value to the motor 62.
By controlling the carriage to the target position by suppressing the positional deviation due to the disturbance shown in FIG.

As described above, in this embodiment, the disturbance for estimating the moving speed of the carriage 61 and the state quantity of the moving position based on the current command value supplied to the motor 62, the rotation speed signal V of the motor 62, and the focus signal Xf. Observer 31,
The same number of 32 are provided corresponding to the encoder 71 and the focus generator 72, and the controller 24 causes the disturbance observers 31 and 32 to operate.
Since the disturbance is suppressed based on the output signal from, even when the encoder 71 and the focus generator 72 with different characteristics are switched, the disturbance observers 31 and 32 corresponding to the encoder 71 and the focus generator 72 are used. Since the detection signal is calculated, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

Further, in the present embodiment, the controller
Although only one 24 is provided, the present invention is not limited to this, and as shown in FIG. 23, two position command units 74 and 75 and two positioning control controllers 76 and 77 are provided, and the control controller 76 includes the position command unit 74. And the rotation speed signal V from the encoder 71, and the controller 69
The output signal from the position command unit 75 and the focus generator 65
From the encoder 71 or the focus generator 72 and the focus signal Xf from the encoder 71 or the focus generator 72, respectively.
It is also possible to compare f with a command signal of the movement position of the carriage 61 generated from the position command units 76 and 77, calculate a current command value ic according to the deviation of both signals, and output it to the adder 26. . In this case, the switch 78 may be provided between the adder 26 and the controllers 76 and 77, and the mode switch 28 may switch the switch 78.

In this way, in addition to the effect similar to that of the present embodiment, by providing the two controllers 76 and 77, the controller gain is adjusted to match the characteristics of the encoder 71 or the focus generator 72. Therefore, the response performance can be adjusted according to each mode as shown in FIG.

[0121]

According to the first aspect of the present invention, a disturbance occurs when the motor speed or position does not change so much and a large current flows momentarily, such as when the motor is started or stopped. Do not perform danger avoidance operation without judging
When the disturbance exceeds a predetermined value for a predetermined time or longer, the target position of the motor's rotational position or machine's position is changed to perform the danger avoiding operation, so damage to the machine in the event of a collision can be minimized. . In addition, without providing a special device or sensor for avoiding danger, it is possible to avoid danger only by changing the target position of the rotational position of the motor or the position of the machine when the predetermined value is exceeded for a predetermined time or longer. Therefore, the cost of the positioning control device can be significantly reduced.

According to the second aspect of the invention, in addition to the same effect as the first aspect of the invention, a current detector for detecting the motor current and an A / D conversion for taking the detected value into the arithmetic unit are provided. Since the device can be eliminated, the cost of the positioning control device can be further reduced. According to the third aspect of the present invention, the target position is appropriately changed in order to avoid the danger, so that the danger is surely avoided and the damage to the machine at the time of collision of the actuator such as the control shaft is minimized. be able to.

According to the fourth aspect of the present invention, even if the distance for avoiding the danger differs depending on the driving direction of the motor, the danger can be avoided without any trouble.
According to the fifth aspect of the invention, it is possible to deal with the difference in the parameters for the nominal model included in the estimated disturbance that varies depending on the driving direction of the motor, and appropriately change the criterion of abnormality or overload depending on the driving direction of the motor. be able to.

According to the sixth aspect of the invention, the motor can be reliably stopped when desired. Claim 7
According to the invention described above, the motor can be reliably stopped after the danger is avoided, so that the safety of the position control device can be sufficiently ensured after the danger is avoided.

According to the eighth aspect of the present invention, since the disturbance observer is provided corresponding to the plurality of position detecting units, even when the position detecting units having different characteristics are switched, the disturbance corresponding to the position detecting units is changed. Since the observer calculates the detection signal, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

According to the ninth aspect of the present invention, since the disturbance observer is provided corresponding to the plurality of speed detecting sections, even when the speed detecting sections having different characteristics are switched, the disturbance corresponding to the speed detecting section is changed. Since the observer calculates the detection signal, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

According to the tenth aspect of the invention, since the disturbance observer is provided in correspondence with the position detecting section and the speed detecting section, even if the position detecting section and the speed detecting section having different characteristics are switched, Since the detection signal is calculated by the disturbance observer corresponding to the detection unit and the speed detection unit, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

According to the eleventh aspect of the present invention, since the disturbance observer is provided corresponding to the position detecting section and the focus signal generating section, even when the position detecting section and the focus signal generating section having different characteristics are switched, Since the disturbance observer corresponding to the position detector and the focus signal generator calculates the detection signal, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

According to the twelfth aspect of the present invention, since the disturbance observer is provided corresponding to the speed detecting section and the focus signal generating section, even when the speed detecting section and the focus signal generating section having different characteristics are switched, Since the disturbance observer corresponding to the speed detector and the focus signal generator calculates the detection signal, no error occurs in the calculated value. Therefore, the disturbance can be accurately grasped and suppressed, and highly accurate positioning control can be executed.

[Brief description of drawings]

FIG. 1 is a block diagram of a first embodiment of a positioning control device according to the present invention.

FIG. 2 is a diagram showing a method of changing a target position when the motor of the first embodiment is started and when a disturbance occurs.

3A is a block diagram of the linear motor of the first embodiment, FIG. 3B is a diagram showing the motor block diagram of FIG. 3A rewritten into a state equation, and FIG. 3C is an observer. It is a figure which shows a state formula.

FIG. 4 is a diagram showing a method of correcting a target position according to a sign of an estimated disturbance according to the first embodiment.

FIG. 5 is a flowchart showing an operation of the first embodiment.

FIG. 6 is a flowchart showing an operation of another aspect of the first embodiment.

FIG. 7 is a diagram showing a second embodiment of the positioning control device according to the present invention, and is a flowchart showing the operation thereof.

FIG. 8 is a block diagram showing a third embodiment of a positioning control device according to the present invention.

FIG. 9 is a flowchart showing the operation of the third embodiment.

FIG. 10 is a block diagram showing a fourth embodiment of the positioning control device according to the present invention.

FIG. 11 is a block diagram showing a fifth embodiment of the positioning control device according to the present invention.

FIG. 12 is a block diagram of a sixth embodiment of a positioning control device according to the present invention.

FIG. 13 is a diagram showing a change until a transition to a target position when a disturbance occurs in the sixth embodiment.

FIG. 14 is a block diagram of another aspect of the positioning control device of the sixth embodiment.

FIG. 15 is a diagram showing response performance according to modes.

FIG. 16 is a block diagram of a seventh embodiment of a positioning control device according to the present invention.

FIG. 17 is a block diagram of another aspect of the positioning control device of the seventh embodiment.

FIG. 18 is a block diagram of an eighth embodiment of a positioning control device according to the present invention.

FIG. 19 is a block diagram of another aspect of the positioning control device of the eighth embodiment.

FIG. 20 is a block diagram of a ninth embodiment of the positioning control device according to the present invention.

FIG. 21 is a block diagram of another form of the positioning control device of the ninth embodiment.

FIG. 22 is a block diagram of a tenth embodiment of a positioning control device according to the present invention.

FIG. 23 is a block diagram of another aspect of the positioning control device of the tenth embodiment.

[Explanation of symbols]

1, 61 Carriage (machine) 2 Voice coil motor (motor) 3 Linear encoder (position detection part) 4 Position control part 5 Position command part 6 Current control part 7 Current sensor (current detection part) 8 Disturbance observer 9 Avoidance operation command part 11, 13 Braking device (braking means) 12, 14 Current interruption section 21 Motor (actuator) 22, 23, 50 Encoder (position detection section) 24, 36, 37, 45, 46, 54, 55, 68, 69, 76 , 77 Positioning controller (position controller) 25, 34, 35, 43, 44, 52, 53, 66, 67, 74, 75 Position command unit 26 Adder (position controller) 29 Motor driver (position controller) 31, 32 Disturbance observer 41, 42, 51 Speed detector (speed detection part) 62 Voice coil motor (actuator) 63 Linear encoder (position detection part) 64 Workpiece (object to be measured) 65, 72 Focus generator (focus signal generation) Part) 71 Rini Encoder (position detector) 73 differentiating circuit (position detection unit)

Claims (12)

[Claims] 1. A motor, a position detection unit for detecting a rotational position of the motor or a position of a machine attached to the motor, and a current control unit for driving the motor by controlling a current supplied to the motor. A current detection unit that detects a current supplied to the motor; a position command unit that sets a target position of the rotation position of the motor or the position of the machine; and a position that controls the rotation position of the motor or the position of the machine. In a positioning control device including a control unit, a disturbance observer for estimating the state quantity of the motor by inputting the current supplied to the motor and the rotational position of the motor or the position of the machine, and the state estimated by the disturbance observer. An avoidance operation command to change the target position of the motor rotation position or machine position when the disturbance, which is one of the quantities, exceeds a predetermined value for a predetermined time or more. And a positioning control device. 2. A motor, a position detector for detecting a rotational position of the motor or a position of a machine attached to the motor, and a current controller for driving the motor by controlling a current supplied to the motor. A position command unit that sets a target position of the motor rotation position or the machine position; and a position control unit that controls the motor rotation position or the machine position by outputting a current command value. In the positioning control device, a disturbance observer that estimates the state quantity of the motor by inputting the current command value from the position control section and the rotational position of the motor or the position of the machine, and one of the state quantities estimated by the disturbance observer And an avoidance operation command unit that changes the target position of the rotational position of the motor or the position of the machine when a certain disturbance exceeds a predetermined value for a predetermined time or more. Positioning control apparatus according to claim. 3. The avoidance operation commanding unit changes the target position to the predetermined position so that the avoidance operation is performed only at a predetermined position in a direction of canceling the disturbance estimated by the disturbance observer. The positioning control device according to claim 1. 4. The avoidance operation command unit changes a predetermined position according to a sign of the disturbance estimated by a disturbance observer, and changes a target position of a rotational position or a machine position to the predetermined position. The positioning control device according to claim 1, wherein the positioning control device is a positioning control device. 5. The avoidance operation command section changes the predetermined value, which is a comparison target of the disturbance, according to the sign of the disturbance estimated by the disturbance observer. Positioning control device. 6. A braking means for mechanically stopping the motor, and a current interruption portion for completely interrupting a motor current output from the current control portion.
The positioning control device according to any one of 5 to 5. 7. When the disturbance, which is one of the state quantities estimated by the disturbance observer, exceeds a predetermined value for a predetermined time or more, the braking means and the current interrupting section are operated after an avoidance operation is performed. 7. A motor stop control means for completely stopping the motor is provided.
The positioning control device described. 8. An actuator, a plurality of position detectors for detecting a rotational position of the actuator or a position of a machine attached to the actuator, and a position command for setting a target position of the rotational position of the actuator or a position of the machine. Section, to generate a current command value to be supplied to the actuator based on the output signal from the position detection unit and the position command unit,
A position control device comprising: a position control unit that controls the rotational position of the actuator or the position of the machine based on the current command value, wherein the current command value supplied to the actuator and the rotational position signal of the actuator. Alternatively, the same number of disturbance observers that estimate the state quantity of the actuator based on the position signal of the machine are provided corresponding to the position detection unit, and the position control unit suppresses the disturbance based on the output signal from the disturbance observer. Characteristic positioning control device. 9. An actuator, a plurality of speed detectors for detecting a rotational speed of the actuator or a moving speed of a machine attached to the actuator, and a position for setting a target position of a rotational position of the actuator or a position of the machine. A command unit, and generates a current command value supplied to the actuator based on output signals from the speed detection unit and the position command unit,
A positioning control device comprising: a position control unit that controls the rotational position of the actuator or the position of the machine based on the current command value, wherein a current command value supplied to the actuator and a rotation speed signal of the actuator. Alternatively, the same number of disturbance observers for estimating the state quantity of the actuator based on the moving speed signal of the machine are provided corresponding to the speed detection unit, and the position control unit suppresses the disturbance based on the output signal from the disturbance observer. Positioning control device characterized by. 10. An actuator, a position detection unit for detecting a rotational position of the actuator or a position of a machine attached to the actuator, and a rotational speed of the actuator or a moving speed of a machine attached to the actuator. A speed detection unit, a position command unit that sets a target position of a rotational position of the actuator or a position of the machine, and the position detection unit or the speed detection unit is supplied to the actuator based on output signals from the position command unit. A positioning control device comprising a position control unit that generates a current command value and controls the rotational position of the actuator or the position of the machine based on the current command value, wherein the current command value is supplied to the actuator. And the rotational position signal of the actuator or the position signal of the machine, or the actuator. The same number of disturbance observers for estimating the state quantity of the actuator based on the rotation speed signal of the motor or the movement speed signal of the machine are provided corresponding to the position detection unit and the speed detection unit, and the position control unit outputs from the disturbance observer. A positioning control device that suppresses disturbance based on a signal. 11. An actuator, a position detector that detects a rotational position of the actuator or a position of a machine attached to the actuator, and a distance between the actuator or the machine attached to the actuator and an object to be measured. From a focus signal generation unit that generates a focus signal that is optically detected, a position command unit that sets a target position of the rotational position of the actuator or the position of the machine, and the position detection unit or the focus signal generation unit and the position command unit A position control unit that generates a current command value to be supplied to the actuator based on the output signal of the position control unit that controls the rotational position of the actuator or the position of the machine based on the current command value. The current command value supplied to the actuator and the rotational position of the actuator. Position signal or machine position signal, or the same number of disturbance observers for estimating the state quantity of the actuator based on the focus signal are provided corresponding to the position detection unit and the focus signal generation unit, the position control unit from the disturbance observer A positioning control device which suppresses disturbance based on the output signal of the positioning control device. 12. An actuator, a speed detecting unit that detects a rotation speed of the actuator or a moving speed of a machine attached to the actuator, and a distance between the actuator or the machine attached to the actuator and an object to be measured. A focus signal generation unit that generates a focus signal that optically detects the position, a position command unit that sets a target position of the rotational position of the actuator or the position of the machine, and the speed detection unit or the focus signal generation unit and the position command unit. Position control unit that generates a current command value to be supplied to the actuator based on an output signal from the actuator and controls the rotational position of the actuator or the position of the machine based on the current command value. The current command value supplied to the actuator and the rotation of the actuator. Rolling speed signal or machine moving speed signal,
Alternatively, the same number of disturbance observers for estimating the state quantity of the actuator based on the focus signal are provided corresponding to the speed detection unit and the focus signal generation unit, and the position control unit determines the disturbance based on the output signal from the disturbance observer. A positioning control device characterized by suppressing.