JPH09222424A - Ultrasonic probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic probe in which the whole region of an array- shaped vibrator group displays a uniform required sensitivity and whose reliability is high by a method wherein a front plate or a backing material is not stripped, deformed and damaged even when a vibrator, a damping material, the front plate and a bonding material whose coefficient of thermal expansion is different are selected and even when the bonding material whose melting point is high is used. SOLUTION: In an ultrasonic probe, a front plate 4 for protection is bonded,to the ultrasonic transmission-reception face of an array-shaped vibrator group 2 in which a plurality of vibrators 1, 3 are arranged in an array shape, and a clamping material 3 for residual-vibration suppression is bonded to the rear which is faced with the ultrasonic transmission-reception face. The ultrasonic probe is provided with side-part bonding materials 12 by which side edge parts 13a of the respective vibrators 13 at both ends of the array-shaped vibrator group 2 are bonded to the front plate 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic probe used in an ultrasonic diagnostic apparatus, an ultrasonic flaw detector, etc., and more particularly to an ultrasonic probe having a structure that can be used at high temperatures.

[0002]

2. Description of the Related Art As one of the usage forms of ultrasonic waves, for example, ultrasonic waves are transmitted to the inside of a steel material and their reflected waves (echo)
There is known an ultrasonic flaw detector which receives (receives) a wave and visualizes a defect or the like inside the steel material from the time shift distribution of the reflected wave.

As shown in FIG. 11, an ultrasonic probe used in such an ultrasonic flaw detector has an array transducer group 2 having an array structure in which a plurality of strip-shaped transducers 1 are arranged, and an ultrasonic transmitting / receiving surface. The vibration damping material 3 for suppressing residual vibration integrated with the back surface of the array transducer group 2 facing to the front and the vibration damping material 3 attached to the ultrasonic transmitting / receiving surface of the array transducer group 2 for protecting the transducer 1. And a face plate 4.

Further, as shown in FIG. 12, electrode layers 1a are integrally formed with the vibrator main body on both main surfaces of each vibrator 1 on the front plate 4 side and on the damping material 3 side. Electrode layer 1b
Is formed integrally with the vibrator body. The electrode layer 1a is bonded to the front plate 4 by the bonding agent 6, and the electrode layer 1b is bonded to the damping material 3.

In the array transducer group 2, strip-shaped transducers 1 are arranged at regular intervals in order to allow uniform transmission of ultrasonic waves to the flaw detection target area and reception of reflected waves. Are arranged in an array structure. With such an array structure, the direction of the ultrasonic beam and the focus point can be controlled by giving an electrical delay time to the electric pulse applied to each transducer 1 and the signal received by each transducer 1. It becomes possible to image in real time.

Further, the effective diameter of the ultrasonic probe can be changed by appropriately selecting the number of the vibrators 1 to be driven. As described above, the ultrasonic probe having an array structure can perform imaging at a higher speed than a ultrasonic probe of a system in which a single transducer is mechanically scanned, and is small in size, lightweight, and excellent in operability and durability.

The vibrator 1 is made of a ceramic piezoelectric material such as lead zirconate titanate (PbZrO3 -PbTiO3), lead titanate (PbTiO3) or lead niobate, and has a thickness of 0.1. ~ 2 mm, width 2 ~
It has a strip shape of about 30 mm and a length of about 2 to 100 mm.

Further, the damping material 3 plays a role of integrally supporting the plurality of vibrators 1 apart from each other, and at the same time, each vibrator 1
Has a role of damping so that the reflected wave of the ultrasonic wave transmitted by the can be accurately received (received). The damping material 3 is generally made of, for example, ferrite rubber or porous ceramics.

Further, the front plate 4 plays a role of giving the constituent material of the vibrator 1 sufficient corrosion resistance, moisture resistance and the like for the environment in which the ultrasonic probe is used. The front plate 4 is made of an alloy such as SUS or Invar.

[0010]

However, in an ultrasonic probe having an array-shaped transducer group 2 formed by arranging a plurality of transducers 1 in an array, as shown in FIG. There was a problem that the sensitivity was lowered in the channels near both ends as compared with the channel in the center of 2.

The reason for this is that, as shown in FIG. 10 as an example, separation of the transducer 1 from the front plate 4 or the damping material 3 occurs near both ends of the array transducer group 2 and the array transducer group 2
This is because the effective area for transmitting and receiving ultrasonic waves is reduced in the vicinity of both ends of the.

This peeling is caused by the stress caused by the difference in the coefficient of thermal expansion between the vibrator 1 and the front plate 4 or the damping material 3. This stress is generated by the transducer 1 during the ultrasonic probe manufacturing process.
This occurs when the heat treatment temperature of the bonding material is higher than room temperature when the front plate 4 or the damping material 3 is bonded, or when the completed ultrasonic probe is used at a temperature higher than room temperature. The higher these temperatures are, the larger the stress is, and the more easily peeling occurs.

For example, when the ultrasonic probe is used in a high temperature environment of 200 ° C., it is necessary to use a bonding material having a melting point higher than 200 ° C., and the heat treatment temperature during manufacturing of the ultrasonic probe is 200 ° C. As described above, the residual stress due to the difference in thermal expansion always occurs when the temperature drops to room temperature.

If the residual stress is reduced, the joining temperature of the joining material is lowered. However, this limits the temperature range in which the ultrasonic probe can be used to the melting point of the bonding material to be used or less.

Also, in an ultrasonic probe used for a medical diagnostic apparatus which is generally used at room temperature, an epoxy resin-based adhesive which is often used as a bonding material is higher than room temperature by several tens of degrees Celsius or more to improve the bonding strength. In many cases, it is cured at a high temperature, so that also in this case, stress is generated due to the difference in thermal expansion, which causes peeling.

As a result, residual stress is generated due to the difference in thermal expansion related to the bonding material, and as a result, in the vicinity of both ends of the ultrasonic probe, the channel with reduced sensitivity and sometimes the vibrator 1 are completely removed. A channel may be peeled off and the sensitivity becomes zero, which reduces the reliability of the ultrasonic probe and reduces the manufacturing yield.

In the ultrasonic probe having the arrayed structure as described above, by selecting materials having relatively close thermal expansion coefficients for the vibrator 1, the front plate 4 and the damping material 3, the peeling problem is tentatively solved. It is possible to solve it.

However, if the coefficients of thermal expansion among the materials of the vibrator 1, the front plate 4 and the damping material 3 are to be made uniform,
There is a problem that the material of the sensitivity of the vibrator 1 and the damping effect of the vibration damping material 3 is inferior, or the bonding material having a low melting point is selected, so that the performance of the ultrasonic probe is significantly deteriorated.

Therefore, an object of the present invention is to solve the problems of the above-mentioned prior art and prevent peeling of the vibrators at both ends of the array vibrator group arranged in an array even if materials having different thermal expansion coefficients are used. Another object of the present invention is to provide a highly reliable ultrasonic probe capable of exhibiting uniform sensitivity over the entire area of the array transducer group.

[0020]

In order to achieve the above object, an ultrasonic probe according to the present invention is an ultrasonic wave transmitting / receiving surface of an array-shaped transducer group formed by arranging a plurality of transducers in an array. In the ultrasonic probe in which a protective front plate is bonded to and a damping material for suppressing residual vibration is bonded to the back surface facing the ultrasonic transmission / reception surface, in each of the transducers at both ends of the array-like transducer group. It is characterized by comprising a side joining member for joining the side end face portion and the front plate.

Preferably, the side joining member joins the first array member with the arrayed vibrator group and the front plate with a second joining member with the arrayed vibrator group and the damping material. It is made of the same joining material as any one of the joining members.

The first joining member is made of a conductive joining material, the second joining member is made of a non-conductive joining material, and the side joining member is the same joining material as the first joining member. At least one of the transducers on both end sides of the array-shaped transducer group has electrodes on at least one surface thereof removed from electrodes on both surfaces facing each other.

Further, the side joining member joins the side end faces of the transducers at both ends of the array-like transducer group, the front plate and the damping material.

Further, a front plate for protection is joined to the ultrasonic wave transmitting / receiving surface of an array-like vibrator group formed by arranging a plurality of vibrators in an array, and the ultrasonic wave transmitting / receiving surface remains on the rear surface. In an ultrasonic probe joined to a vibration damping material for vibration suppression, a fixing member for fixing the front plate and the vibration damping material to each other in the vicinity of the side end faces of each of the transducers at both ends of the arrayed transducer group. Is provided.

In the present invention, since the side end face portions of the respective transducers at both ends of the array-like transducer group and the front plate are joined together by the side joining members, the transducers are provided at both ends of the array-like transducer group 2. It is possible to prevent breakage, peeling and deformation of the front plate and damping material.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of an ultrasonic probe of the present invention will be described below with reference to the drawings. The same members as those described in the above figures are designated by the same reference numerals, and duplicate description will be omitted.

First, the first embodiment will be described with reference to FIGS.

FIG. 1 is a sectional view showing a part of the right side of the ultrasonic probe. In FIG. 1, a plurality of transducers 1 are arranged in an array to form an array transducer group 2.

The two vibrators 13 and 14 at the right end of the arrayed vibrator group 2 are provided with electrodes 1a,
1b has been deleted. Similarly, in the two vibrators (not shown) at the left end of the array-shaped vibrator group 2, the opposing electrodes 1a and 1b are deleted. Except for the vibrators 13 and 14 from which the electrodes 1a and 1b are removed,
Electrodes 1a and 1b are arranged.

The ultrasonic wave transmitting / receiving surface of the array-shaped vibrator group 2 for transmitting / receiving ultrasonic waves is formed by the surfaces of the plurality of electrodes 1a arranged in the longitudinal direction.

A notch 8 is provided between the vibrators 1 in order to release the stress caused by the difference in the coefficient of thermal expansion of each member.
Is formed, and the cut portion 8 is cut into the inside of the vibration damping material 3.

The ultrasonic transmission / reception surface side of the array-shaped vibrator group 2 and the front plate 4 are joined together by a conductive first joining member such as solder. The back surface side of the arrayed transducer group 2 facing the ultrasonic transmitting / receiving surface and the damping material 3 are made of a non-conductive second material such as glass.
It is joined by a joining member.

The side end surface portion 13a of the vibrator 13 at the right end of the arrayed vibrator group 2 is joined to the back surface 4a of the front plate 4 and the side end surface 3a of the damping material 3 by the side joining member 12. Similarly, a side joining member (not shown) is also formed on the left end of the arrayed transducer group 2. These side joining members 12 are made of the same joining agent as the first joining member 6,
It is formed integrally with the joining member 6.

In this embodiment, the electrodes 13a and 1b are provided in the vibrators 13 at the left and right ends of the array-like vibrator group 2.
Since the first joining member 6 and the side joining member 12 are conductive joining materials, the first joining member is provided between the electrode 1a and the electrode 1b of the other vibrator 1 because 6
There is no electrical short circuit through the side joining member 12.

Further, the first joining member 6 and the side joining member 12
Are made of the same joining material, the first joining member 6 and the side joining member 12 can be joined integrally, and the vibrator 1
The side end surface portion 13a of 3 can be firmly joined to the front plate 4. The electrode of the vibrator 14 does not necessarily have to be removed, but it is removed in order to reliably prevent an electrical short circuit between the electrode 1a and the electrode 1b of another vibrator 1.

Next, a method of manufacturing the ultrasonic probe according to the above embodiment will be described below.

Length 64 mm, width 20 mm, thickness 0.4 m
a vibrator 1 in which a silver electrode layer having a length of 60 mm and a width of 20 mm is baked to form electrodes 1a and 1b at the center of the main surface of a piezoelectric body made of lead titanate (PbTi03) of m, and a length of 64 mm; Damping material 3 made of aluminum titanate (A12Ti05) having a width of 18 mm and a thickness of 10 mm, and a length of 80 m
m, width 35 mm, thickness 0. Front plate 4 made of 1 mm Invar alloy, length 85 mm, width 40 mm, thickness 40 m
A casing 10 made of m invar alloy was prepared.

Next, the main surface of the vibration damping material 3 is brought into contact with the main surface of the element vibrator through the second bonding member 7 made of a glass material having a melting point of 420 ° C., and heat treatment is performed at 450 ° C. for 15 minutes. The plurality of vibrators 1 and the damping material 3 are joined and integrated to form the array-shaped vibrator group 2. In the production of the array-structured oscillator group, the longitudinal end faces of the vibration damping member 3 are aligned with the side end faces of the array-shaped oscillator unit, and the damping member 3 is formed.
Both side end faces of and the side end faces of the array-shaped transducer group are made flush with each other. In addition, the vibrator 1 is projected from the damping material 3 by 2 mm on one side in the lateral direction orthogonal to the main surface of the vibrator group having the array-like structure.

Next, the vibrator 1 of the vibrator group having the array-like structure
Was subjected to polarization treatment by electric field cooling. That is,
The oscillator 1 was dipped in silicone oil and heated to 170 ° C., then an electric field of 5 kV / mm was applied for 15 minutes, and the electric field was cooled to 40 ° C. with the electric field applied.

Then, the polarized vibrator 1 and the vibration damping material 3 bonded to the vibrator 1 are formed into a dicing saw having a thickness of 15
With a blade of 0 μm, 1 mm pitch width in the longitudinal direction,
A cut portion 8 was formed from the ultrasonic wave transmitting / receiving surface of the vibrator 1 toward the back surface at a depth of 1 mm.

As a result, the length is 0.85 mm and the width is 20 m.
The transducers 1 having a thickness of m and a thickness of 0.4 mm were arrayed in 64 channels at 1 mm intervals in the length direction to form an array-shaped transducer group 2. 2 channel transducers 13 at both ends,
In a total of four channels of fourteen transducers, the electrodes 1a.
1b has been deleted.

Next, the front plate 4 is brought into contact with the ultrasonic transmitting / receiving surface of the ultrasonic probe through the first joining member 6 made of a solder material having a melting point of 315 ° C., and heat treatment is performed at 350 ° C. for 15 minutes. Then, the front plate 4 and the array-shaped vibrator group 2 are integrated. After the characteristic evaluation of the obtained ultrasonic probe was completed, the ultrasonic probe was cut in a direction orthogonal to the longitudinal direction and the cross section was observed. As a result, the thickness T of the first joining member 6 made of a solder material was 50 to 70 μm. there were.

Next, the side end surface portion 13a of the vibrator 13 was joined to the back surface 4a of the front plate 4 and the side end surface 3a of the damping material 3 by the side joining member 12. As the side joining member 12,
A joining material made of the same solder material as the first joining member 6 was used.

Next, a lead wire (not shown) is connected to a portion of the rear surface of the arrayed strip-shaped vibrator group 2 where the damping material 3 is not joined, and all elements except the vibrators 13 and 14 are connected. An electric field of 4 kV / mm for 10 min. It was applied and polarized. Next, the peripheral portion of the front plate 3 is covered with the casing 10.
Were welded to obtain an ultrasonic probe having a structure as shown in the sectional view of FIG.

Next, the test results of the ultrasonic probe according to this embodiment manufactured as described above will be described.

The ultrasonic probe was put in silicone oil at 200 ° C., and the reflection echo was measured by the pulse echo method. FIG. 4 shows the results. As shown in FIG. 4, the vibrators 13 and 1 having no electrodes on both ends of the array-like vibrator group 2 are provided.
Approximately 5M from transducer 1 of all 60 channels except 4
Reflected echoes were measured at a center frequency of Hz. It was confirmed that the dispersion of the intensity level of the reflected echo among the 60 channels was within ± 10% of the average value. From this, it was confirmed that no peeling occurred between the vibrator 1 and the front plate 4 or between the vibrator 1 and the damping material 3.

It should be noted that any deformation occurs in each joining process of the first joining member 6, the second joining member 7 or the side joining member 12, the polarization process, the welding process of the casing 10, or the process of measuring the pulse echo characteristic. No breakage or damage was observed.

As described above, according to the configuration of the present embodiment, the side joining member 12 joins the side end face portion 13a of the vibrator 13 and the back surface 4a of the front plate 4 to each other, so that the array-like vibrator is formed. It is possible to reliably prevent the vibrators 13 at both ends of the group 2 from peeling off.

Next, a second embodiment of the present invention will be described with reference to FIGS.

Also in the present embodiment, each of the two transducers 1 at the left and right ends of the arrayed transducer group 2 is formed.
Opposing electrodes 1a and 1b are removed from the electrodes 3 and 14.

The side end surface portions 13a of the vibrators 13 at the left and right ends of the arrayed vibrator group 2 are joined to the back surface 4a of the front plate 4 by the side joining members 12. Firstly, unlike the embodiment, in this embodiment, the side joining member 12 does not extend to the side end surface 3a of the damping material 3.

The ultrasonic probe of this embodiment was manufactured as follows.

As the bonding material for the first bonding member 6, the second bonding member 7 and the side bonding member 12, a bonding material different from that used in the above manufacturing method is used, except that the above manufacturing method is used. It was manufactured by a manufacturing method similar to the case.

That is, as the second joining member 7, Ag-
A Cu-based brazing material was used, and heat treatment was performed at 850 ° C. for 15 minutes to perform joining treatment.

An Al-based brazing material was used as the first joining member, and heat treatment was performed at 650 ° C. for 15 minutes to perform the joining treatment. After finishing the characteristics evaluation of the obtained ultrasonic probe described below, cut in a direction orthogonal to the longitudinal direction,
When the cross section was observed, the thickness T of the first joining member 6 made of a solder material was 100 to 120 μm.

As the side joining member 12, a joining material made of the same Al brazing material as the first joining member 6 was used.

The ultrasonic probe according to the present embodiment manufactured in this way was subjected to the same test as the ultrasonic probe manufactured by the above-described manufacturing method.

The results of this test are shown in FIG. As shown in FIG. 7, the transducers 1 of all 60 channels except the transducers 13m14 having no electrodes at both ends of the arrayed transducer group 2
, The reflected echo was measured at a center frequency of about 5 MHz. It was confirmed that the dispersion of the intensity level of the reflected echo among the 60 channels was within ± 10% of the average value. From this, it was confirmed that no peeling occurred between the vibrator 1 and the front plate 4 or between the vibrator 1 and the damping material 3. In addition, any deformation or damage in the joining process of the first joining member 6, the second joining member 7, or the side joining member 12, the polarization process, the welding process of the casing 10, or the process of measuring the pulse echo characteristic, No damage was observed.

Next, a third embodiment of the present invention will be described with reference to FIG.

In the present embodiment, in the vicinity of the side end surface portions 13a of the vibrators 13 at the left and right ends of the arrayed vibrator group 2,
A fixing member 20 made of an Invar material having an L-shaped cross section for fixing the front plate 4 and the damping material 3 to each other is provided. The fixing member 20 is screwed and fixed to the damping material 3 by means of a screw 21, for example, and is screwed and fixed to the front plate 4 by means of a screw 22. The fixing member 20 may be joined to the front plate 4 and the damping material 3 by a joining material such as solder.

In FIG. 8, assuming that the bonding material of at least one of the first bonding member 6 and the second bonding member 7 is conductive and the fixing member 20 is also a conductive member, the left and right side ends The electrodes 1a and 1b facing each other are removed from the two vibrators 13 and 14 in each part.

It is to be noted that both the first joining member 6 and the second joining member 7 are non-conductive, or the fixing member 20.
Is composed of a non-conductive member, the electrodes 1 facing each other in the two vibrators 13 and 14 at the left and right ends, respectively.
It is not always necessary to delete a and 1b.

According to the configuration of this embodiment, the fixing member 2
Since the front plate 4 and the damping material 3 are fixed to each other by 0, it is possible to prevent separation at both ends of the array-shaped vibrator group 2.

Also, in this embodiment, the same test as in the first or second embodiment was conducted, and it was confirmed that the same good test result was obtained.

Although various embodiments have been described above, the scope of the present invention is not limited to the above embodiments.

For example, in the above description of the first or second embodiment, the first joining member 6 is a non-conductive joining material, the second joining member is a conductive joining material, and the side portion The joining member 12 has been described as being made of the same conductive joining material as the first joining member 6. Further, the electrodes 1a and 1b facing each other are assumed to be removed from the two vibrators 13 and 14 at the left and right ends of the array-shaped vibrator group 2, respectively. However, the present invention is not limited to this.

That is, the opposing electrodes 1 of the vibrator 13
If a and 1b are deleted, the first joining member 6
Both the first and second joining members 7 may be conductive joining materials.

If both the first joining member 6 and the second joining member 7 are made of a non-conductive joining material, the opposing electrodes 1a and 1b of the vibrator 13 may not be deleted.

When the electrodes 1a and 1b are deleted, only one of the electrodes 1a and 1b may be deleted.

Further, in the present invention, the piezoelectric body forming the vibrator 1 is a ceramic type piezoelectric body other than lead titanate (PbTi03) type, such as lead zirconate titanate (PbZ).
r03-PbTi03), lead niobate or the like may be used. Alternatively, a piezoelectric single crystal such as lithium niobate or lithium tantalate may be used. In the case of lead titanate type and lead niobate type, good performance as an ultrasonic probe is exhibited even at a high temperature of about 250 ° C., for example. Further, the damping material 3 can also be configured to use a ceramic other than the aluminum titanate-based material, or it is possible to use a mixture of ferrite powder or tungsten powder and rubber.

Further, in order to improve wettability with a bonding material such as solder, the vibrator 1, the front plate 4 or the damping material 3 is used.
It is also effective to metallize part of the metal and surface-treat it in an appropriate atmosphere.

[0072]

As described above, according to the configuration of the present invention, since the side joining members for joining the side end face portions of each transducer at both ends of the array-like transducer group and the front plate are provided, It is possible to prevent the breakage of the vibrator, peeling and deformation of the front plate and damping material, and to prevent the sensitivity of the vibrator at both ends of the array vibrator from lowering. It is possible to obtain a substantially uniform sensitivity with little variation over the entire area.

Further, when selecting the damping material, the vibrator, the front plate and the joining material for joining them, it is possible to eliminate the need to select forest materials having thermal expansion coefficients close to each other. As a result, it is possible to avoid selecting a material having a low sensitivity of the vibrator, a material having a low damping effect of the vibration damping material, or a bonding material having a low bonding temperature, and it is possible to prevent deterioration of the performance of the ultrasonic probe.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional view showing a first embodiment example of an ultrasonic probe of the present invention.

FIG. 2 is a perspective view showing an example of a first embodiment of an ultrasonic probe of the present invention.

FIG. 3 is a sectional view showing a first embodiment of the ultrasonic probe of the present invention.

FIG. 4 is a diagram showing a sensitivity distribution as a test result of the first embodiment of the ultrasonic probe of the present invention.

FIG. 5 is a perspective view showing an ultrasonic probe according to a second embodiment of the present invention.

FIG. 6 is a cross-sectional view showing a second embodiment example of the ultrasonic probe of the present invention.

FIG. 7 is a diagram showing a sensitivity distribution which is a test result of the second embodiment of the ultrasonic probe of the present invention.

FIG. 8 is a cross-sectional view showing an ultrasonic probe according to a third embodiment of the present invention.

FIG. 9 is a diagram showing a sensitivity distribution as a test result of a conventional ultrasonic probe.

FIG. 10 is a sectional view showing a conventional ultrasonic probe.

FIG. 11 is a perspective view showing a conventional ultrasonic probe.

FIG. 12 is a partial cross-sectional view of a conventional ultrasonic probe.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 vibrator 1a, 1b electrode 2 array-like vibrator group 3 damping material 4 front plate 6 first joining member 7 second joining member 8 cut portion 10 casing 12 side joining member 13 transducer 13a side end surface portion 14 transducer 20 fixing members

Claims (5)

[Claims] 1. A front plate for protection is bonded to an ultrasonic wave transmitting / receiving surface of an array-shaped vibrator group formed by arranging a plurality of vibrators in an array, and the ultrasonic wave transmitting / receiving surface remains on the back surface facing the ultrasonic wave transmitting / receiving surface. An ultrasonic probe joined with a vibration damping material for vibration suppression, comprising a side joining member joining the side end face portions of each transducer at both ends of the arrayed transducer group and the front plate. And ultrasonic probe. 2. The side joining member is a first joining member for joining the array-like transducer group and the front plate, and a second joining member for joining the array-like transducer group and the damping material. The ultrasonic probe according to claim 1, wherein the ultrasonic probe is made of the same joining material as any one of the joining members. 3. The first joining member is made of a conductive joining material, the second joining member is made of a non-conductive joining material, and the side joining member is the same joining material as the first joining member. 3. At least one of the vibrators on both ends of the array-like vibrator group is formed by removing at least one electrode of opposite side electrodes.
An ultrasonic probe according to claim 1. 4. The side joining member joins the side end faces of the transducers at both ends of the array-like transducer group, the front plate and the damping material. The ultrasonic probe described. 5. A front plate for protection is bonded to an ultrasonic wave transmitting / receiving surface of an array-like vibrator group formed by arranging a plurality of vibrators in an array, and the ultrasonic wave transmitting / receiving surface remains on the back surface facing the ultrasonic wave transmitting / receiving surface. In an ultrasonic probe joined to a vibration damping material for vibration suppression, a fixing member for fixing the front plate and the vibration damping material to each other in the vicinity of the side end faces of each transducer at both ends of the array-shaped transducer group. The ultrasonic probe according to claim 1, wherein the ultrasonic probe is provided.