JPH09211504A - Laser pulse compressor - Google Patents
Laser pulse compressorInfo
- Publication number
- JPH09211504A JPH09211504A JP1965096A JP1965096A JPH09211504A JP H09211504 A JPH09211504 A JP H09211504A JP 1965096 A JP1965096 A JP 1965096A JP 1965096 A JP1965096 A JP 1965096A JP H09211504 A JPH09211504 A JP H09211504A
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- Japan
- Prior art keywords
- diffraction grating
- grating pair
- laser pulse
- pulse
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はレーザパルス圧縮装
置に関し、電流銃（例えばFree Electron Laser（自動
電子レーザー）用）、レーザ測長用光源、超音波発生用
光源（レーザＶＴ）等に適用して有用なものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser pulse compressor, which is applied to a current gun (for example, for Free Electron Laser (automatic electronic laser)), a laser length measuring light source, an ultrasonic wave generating light source (laser VT) and the like. And useful.
【０００２】[0002]
【従来の技術】レーザパルスの基本的性質として、パル
ス強度に関する時間幅をΔｔとしパルスの周波数の広が
り幅をΔνとすると、両者の積は次の［数１］に示す関
係が成立する。2. Description of the Related Art As a basic property of a laser pulse, when the time width relating to the pulse intensity is Δt and the width of the pulse frequency spread is Δν, the product of the two satisfies the following equation (1).
【０００３】[0003]
【数１】 [Equation 1]
【０００４】これは、短いパルスは必ず広い周波数スペ
クトルをもち、レーザの周波数スペクトルの広がりが広
くなければ短パルスを形成できないことを意味してい
る。従って、レーザ発振器から得られるレーザパルスの
パルス幅より更に短かいパルス幅のレーザパルスを得る
ために、従来、各種の手法が用いられている。This means that a short pulse always has a wide frequency spectrum, and a short pulse cannot be formed unless the frequency spectrum of the laser is wide. Therefore, in order to obtain a laser pulse having a pulse width shorter than the pulse width of a laser pulse obtained from a laser oscillator, various methods have been conventionally used.
【０００５】従来の手法に係る装置の構成を図２に示
す。同図において、１はパルスレーザ発振器、２−１は
パルスレーザ発振器１から出力されたレーザパルス、３
はファイバーカップリング、４は石英系の単一モードフ
ァイバー、５は回折格子５−１と５−２とを対向させた
回折格子対、２−２は単一モードファイバー４を通過後
のレーザパルス、２−３は回折格子対５を通過後のレー
ザパルスである。FIG. 2 shows the configuration of an apparatus according to the conventional method. In the figure, 1 is a pulse laser oscillator, 2-1 is a laser pulse output from the pulse laser oscillator 1, and 3 is a laser pulse.
Is a fiber coupling, 4 is a silica single mode fiber, 5 is a diffraction grating pair in which the diffraction gratings 5-1 and 5-2 are opposed to each other, and 2-2 is a laser pulse after passing through the single mode fiber 4. 2-3 are laser pulses after passing through the diffraction grating pair 5.
【０００６】パルスレーザ発振器１から出力されたパル
ス幅数１００psec以下のレーザパルス２−１のパルス波
形及び周波数のスペクトル分布を図３（ａ）に示す。前
述した基本特性に従いパルスレーザ発振器１から取出さ
れるパルス幅Δｔ1 、周波数の広がり幅Δν1 なるレー
ザパルス２−１が得られる。FIG. 3A shows the pulse waveform and the spectrum distribution of the frequency of the laser pulse 2-1 having a pulse width of 100 psec or less output from the pulse laser oscillator 1. A laser pulse 2-1 having a pulse width Δt 1 and a frequency spread width Δν 1 extracted from the pulse laser oscillator 1 is obtained according to the basic characteristics described above.
【０００７】そして、対物レンズを利用したファイバー
カップリング３によりレーザパルス２−１を集光し、単
一モードファイバー４に挿入する。このファイバー４に
挿入されたレーザパルス２−１は、ファイバー４の自己
位相変調効果と正の群速度分散により、ファイバー４伝
播後には周波数がチャーピングして、広がり幅Δν
2（＞Δν1 ）とパルス幅Δｔ2 （＞Δｔ1 ）なるレー
ザパルス２−２へと変化する。Then, the laser pulse 2-1 is condensed by the fiber coupling 3 using the objective lens and inserted into the single mode fiber 4. Due to the self-phase modulation effect of the fiber 4 and the positive group velocity dispersion, the laser pulse 2-1 inserted into the fiber 4 has a frequency chirping after the propagation of the fiber 4 and a spread width Δν.
2 (> Δν 1 ) and the pulse width Δt 2 (> Δt 1 ) changes to the laser pulse 2-2.
【０００８】ファイバー４中の電場Ｅ（ｔ）が強いとき
には、非線形屈折率の項が無視できなくなり、次の［数
２］に示すように、屈折率に変化が生じる。When the electric field E (t) in the fiber 4 is strong, the term of nonlinear refractive index cannot be ignored, and the refractive index changes as shown in the following [Equation 2].
【０００９】[0009]
【数２】 [Equation 2]
【００１０】また、屈折率の変化が短時間に生じると、
電場の位相φが変化し、更に周波数の変化が生じる。角
周波数ωの変化は次の［数３］に示すようになる。If the change in the refractive index occurs in a short time,
The phase φ of the electric field changes, and the frequency also changes. The change of the angular frequency ω is as shown in the following [Equation 3].
【００１１】[0011]
【数３】 (Equation 3)
【００１２】つまり、ファイバー４を通過するレーザ自
身のパルス強度による屈折率の変化を通じて、レーザ自
身の位相変化、更に周波数変化を受ける自己位相変調効
果が発生する。That is, through the change in the refractive index due to the pulse intensity of the laser itself passing through the fiber 4, a self-phase modulation effect is generated in which the phase of the laser itself is changed and further the frequency is changed.
【００１３】一方、周波数に広がりがあるレーザパルス
がファイバー４中を伝播する場合、その波長帯が１．３
μｍより短い波長を採用すると、正の群速度分散特性を
有するため、周波数（又は波長）に依存した群速度の変
化量が発生し、伝播時間に次の［数４］に示すような広
がりδτが生じる。On the other hand, when a laser pulse having a frequency spread propagates in the fiber 4, its wavelength band is 1.3.
If a wavelength shorter than μm is adopted, the group velocity dispersion characteristic is positive, so that a variation amount of the group velocity depending on the frequency (or wavelength) occurs, and the spread δτ as shown in the following [Equation 4] is generated. Occurs.
【００１４】[0014]
【数４】 (Equation 4)
【００１５】従って、パルスの立上がりは長波長側（低
周波数側）にシフトするため中心波長成分の伝播速度よ
り速く、逆に立下がりは短波長側（高周波数側）にシフ
トするため中心波長成分の速度より遅く伝播することに
なる。Therefore, since the rising edge of the pulse is shifted to the long wavelength side (low frequency side), it is faster than the propagation speed of the central wavelength component, and the falling edge is shifted to the short wavelength side (high frequency side), and is therefore the central wavelength component. Will propagate slower than the speed of.
【００１６】ファイバー４伝播後のレーザパルス２−２
のパルス波形及び周波数のスペクトル分布を図３（ｂ）
に示す。周波数幅Δν2 及びパルス幅Δｔ2 はファイバ
ー４の入射前より広がることになる。Laser pulse 2-2 after propagation through fiber 4
Fig. 3 (b) shows the pulse waveform and frequency spectrum distribution of
Shown in The frequency width Δν 2 and the pulse width Δt 2 are wider than before the incidence on the fiber 4.
【００１７】以上により、パルス幅を更に短くするため
の前準備として、周波数の広がりΔνは拡大されたこと
になる。As described above, the frequency spread Δν is expanded as a preliminary preparation for further shortening the pulse width.
【００１８】次に、この周波数の広がり幅が増加したΔ
ν2 なるレーザパルス２−２をパルス圧縮するために回
折格子対５が用いられる。回折格子対５は負の分散特性
となるよう１組の回折格子５−１，５−２を対向させて
配置する。つまり、回折格子対５に入射したレーザパル
ス２−２のパルスの立上がり部分（低周波数側、長波長
側）の遅延時間を長く、立下がり部分（高周波数側、短
波長側）の遅延時間を短くなるように回折格子対５を構
成することにより、パルス圧縮が可能となる。Next, the frequency spread width is increased by Δ
The diffraction grating pair 5 is used for pulse-compressing the laser pulse 2-2 of ν 2 . The diffraction grating pair 5 is arranged such that a pair of diffraction gratings 5-1 and 5-2 face each other so as to have a negative dispersion characteristic. That is, the delay time of the rising part (low frequency side, long wavelength side) of the pulse of the laser pulse 2-2 incident on the diffraction grating pair 5 is long, and the delay time of the falling part (high frequency side, short wavelength side) is By configuring the diffraction grating pair 5 to be short, pulse compression becomes possible.
【００１９】回折格子対５を出た後のレーザパルス２−
３のパルス波形及び周波数のスペクトル分布を図３
（ｃ）に示す。Laser pulse 2 after exiting the diffraction grating pair 5
Figure 3 shows the pulse waveform and frequency spectrum distribution of Figure 3.
It is shown in (c).
【００２０】[0020]
【発明が解決しようとする課題】上記従来のレーザパル
ス圧縮装置において回折格子対５の分散特性が負となる
ような回折光は−１次光が採用され、その分散量はレー
ザパルスの中心波長が決まれば回折格子のピッチ、回折
格子対への入射角、回折格子間隔により決定される。In the above-mentioned conventional laser pulse compression apparatus, the -1st-order light is adopted as the diffracted light which makes the dispersion characteristic of the diffraction grating pair 5 negative, and the dispersion amount is the central wavelength of the laser pulse. Is determined by the pitch of the diffraction grating, the angle of incidence on the diffraction grating pair, and the diffraction grating interval.
【００２１】例えば、石英系の単一モードファイバーに
伝播させた波長１０６４μｍのＮｄ：ＹＡＧパルスレー
ザのレーザパルスを回折格子対に入射させ最適なパルス
圧縮をさせるための上記パラメータ例は［表１］のよう
になる。[0021] For example, the above parameter examples for making the laser pulse of the Nd: YAG pulsed laser having a wavelength of 1064 μm propagated in the quartz single mode fiber enter the diffraction grating pair and perform the optimum pulse compression are shown in [Table 1]. become that way.
【００２２】[0022]
【表１】 [Table 1]
【００２３】回折格子のピッチを更に上げると入射角は
９０°に近づき、実用上困難となる。またピッチ１８０
０本／ｍｍにおいても、回折格子対の間隔は１ｍであ
り、実用上、大型化が問題となる。When the pitch of the diffraction grating is further increased, the incident angle approaches 90 °, which is practically difficult. Also pitch 180
Even at 0 lines / mm, the distance between the diffraction grating pairs is 1 m, which poses a problem of practical size increase.
【００２４】また、回折格子対５の１回の通過によるパ
ルス圧縮では、パルス波形の空間的な遅延光路によるも
のであるから、円形ビームとしてのレーザパルスを入射
すると、このビームが楕円に変化するが、実用的には円
形ビームで出力するのが望ましい。Further, in the pulse compression by the single pass of the diffraction grating pair 5, since it is due to the spatial delay optical path of the pulse waveform, when a laser pulse as a circular beam is incident, this beam changes to an ellipse. However, practically, it is desirable to output with a circular beam.
【００２５】従って本発明は上記従来技術に鑑み、回折
格子対の回折格子間隔を減少させても最適なパルス圧縮
が可能であり、また円形の入射ビームに対して円形の出
射ビームが得られるレーザパルス圧縮装置を提供するこ
とを課題とする。Therefore, in view of the above-mentioned prior art, the present invention is capable of optimal pulse compression even if the diffraction grating spacing of a diffraction grating pair is reduced, and a circular emission beam is obtained with respect to a circular incident beam. An object is to provide a pulse compression device.
【００２６】[0026]
【課題を解決するための手段】上記課題を解決する本発
明の第１の構成は、レーザパルスを通過させて圧縮する
ための回折格子対を有するレーザパルス圧縮装置におい
て、前記レーザパルスを前記回折格子対内を１往復させ
る手段を備えたことを特徴とする。A first structure of the present invention for solving the above-mentioned problems is a laser pulse compression apparatus having a diffraction grating pair for passing and compressing a laser pulse, wherein the laser pulse is diffracted. It is characterized in that means for reciprocating once in the lattice pair is provided.
【００２７】また第２の構成は、上記第１の構成におい
て、前記の１往復させる手段は、前記回折格子対に対す
る前記レーザパルスの往路下流側に、前記回折格子対内
を通過した前記レーザパルスを反射して再び前記回折格
子対内へと入射せしめるよう配設した反射鏡であること
を特徴とする。According to a second structure, in the first structure, the means for reciprocating once reciprocates the laser pulse having passed through the diffraction grating pair on the downstream side of the forward direction of the laser pulse with respect to the diffraction grating pair. It is characterized in that the reflecting mirror is arranged so as to reflect the light and make it enter the diffraction grating pair again.
【００２８】従って上記構成の本発明によれば、回折格
子対の間隔を短くしてもパルス圧縮の分散量として最適
ではないが反射鏡等によってレーザパルスを回折格子対
内を１往復させることにより、このレーザパルスに対し
て最適なパルス圧縮を行うことができる。また、レーザ
パルスが回折格子対を１回通過後はパルス波形の空間的
な遅延光路の差により円形の入射ビームが歪むが、これ
を再び回折格子対内を通過させることにより（即ち１往
復させることにより）、前記ビームの歪が補正されて再
び円形ビームに戻り、円形の出射ビームが得られる。Therefore, according to the present invention having the above-described structure, even if the distance between the diffraction grating pairs is shortened, it is not optimum as the dispersion amount of pulse compression, but the laser pulse is reciprocated once in the diffraction grating pair by a reflecting mirror or the like. Optimal pulse compression can be performed for this laser pulse. Also, after the laser pulse has passed through the diffraction grating pair once, the circular incident beam is distorted due to the difference in the spatial delay optical paths of the pulse waveforms, but by passing this again through the diffraction grating pair (that is, one round trip). ), The distortion of the beam is corrected and the beam returns to the circular beam again, and a circular outgoing beam is obtained.
【００２９】[0029]
【発明の実施の形態】以下、本発明の実施の形態例を図
面に基づき詳細に説明する。なお、従来と同様の部分に
は同一の符号を付し重複する詳細な説明は省略する。Embodiments of the present invention will be described below in detail with reference to the drawings. The same parts as those in the related art are denoted by the same reference numerals, and overlapping detailed description will be omitted.
【００３０】図１は、本発明の実施の形態例に係るレー
ザパルス圧縮装置の構成図である。同図において、２−
２は単一モードファイバー伝播後のレーザパルス、２−
３は回折格子対を通過後のレーザパルス、５は回折格子
５−１と５−２とを対向させた回折格子対、６は反射
板、７は全反射鏡、２−４は回折格子対を１往復後に反
射板６で取出されたレーザパルスである。FIG. 1 is a block diagram of a laser pulse compression apparatus according to an embodiment of the present invention. In the figure, 2-
2 is a laser pulse after propagating a single mode fiber, 2
3 is a laser pulse after passing through the diffraction grating pair, 5 is a diffraction grating pair in which the diffraction gratings 5-1 and 5-2 are opposed to each other, 6 is a reflecting plate, 7 is a total reflection mirror, 2-4 is a diffraction grating pair. Is a laser pulse extracted by the reflector 6 after one round trip.
【００３１】図１に示すように、本実施の形態例に係る
レーザパルス圧縮装置は、全反射鏡７が、回折格子対５
に対するレーザパルスの往路下流側（回折格子対５の図
中右側）に、回折格子対５を通過したレーザパルスを反
射して再び回折格子対５内へ入射せしめるよう配設さ
れ、また、反射板６が、回折格子対５に対するレーザパ
ルスの往路上流側（回折格子対５の図中左側）に、回折
格子対５を再び通過したレーザパルスを取出し可能に配
設されている。As shown in FIG. 1, in the laser pulse compression apparatus according to the present embodiment, the total reflection mirror 7 is composed of a diffraction grating pair 5.
Is arranged on the downstream side of the forward direction of the laser pulse (the right side of the diffraction grating pair 5 in the figure) to reflect the laser pulse that has passed through the diffraction grating pair 5 and make it enter the diffraction grating pair 5 again. 6 is disposed on the upstream side of the forward direction of the laser pulse with respect to the diffraction grating pair 5 (on the left side of the diffraction grating pair 5 in the figure) so that the laser pulse that has passed through the diffraction grating pair 5 again can be taken out.
【００３２】従って上記構成のレーザパルス圧縮装置で
は、単一モードファイバー伝播後に周波数の広がりΔν
が増加したレーザパルス２−２が、回折格子対５を通過
した後、全反射鏡７で反射される。そして、この全反射
鏡７で反射されたレーザパルス２−３が再び負の分散特
性をもつ回折格子対５を通過することにより、回折格子
間隔が短くても最適なパルス圧縮が行われる。その後、
圧縮されたレーザパルスを取出すためにブリュースター
角で設置された反射板６により、パルス圧縮光学系から
レーザパルス２−４として取出される。Therefore, in the laser pulse compression apparatus having the above-mentioned structure, the frequency spread Δν is propagated after the propagation of the single mode fiber.
After passing through the diffraction grating pair 5, the laser pulse 2-2 having the increased pulse width is reflected by the total reflection mirror 7. Then, the laser pulse 2-3 reflected by the total reflection mirror 7 again passes through the diffraction grating pair 5 having a negative dispersion characteristic, so that optimum pulse compression is performed even if the diffraction grating interval is short. afterwards,
The laser pulse 2-4 is extracted from the pulse compression optical system by the reflection plate 6 installed at the Brewster's angle for extracting the compressed laser pulse.
【００３３】以上にように、本実施の形態例に係るレー
ザパルス圧縮装置によれば、レーザパルスを回折格子対
５内を１往復させることにより、回折格子対５の回折格
子間隔が短くても最適なパルス圧縮を実現することがで
きる。このためレーザパルス圧縮装置のコンパクト化を
図ることができる。As described above, according to the laser pulse compressor of the present embodiment, the laser pulse is reciprocated once in the diffraction grating pair 5, so that the diffraction grating interval of the diffraction grating pair 5 is short. Optimal pulse compression can be realized. Therefore, the laser pulse compression device can be made compact.
【００３４】また、レーザパルスが回折格子対５を１回
通過後はパルス波形の空間的な遅延光路の差により円形
の入射ビームが歪むが、これを再び回折格子対５を通過
させることにより（即ち１往復させることにより）、前
記ビームの歪が補正されて再び円形ビームに戻り、円形
の出射ビームが得られる。After the laser pulse has passed through the diffraction grating pair 5 once, the circular incident beam is distorted due to the difference in the spatial delay optical paths of the pulse waveforms. That is, by making one round trip), the distortion of the beam is corrected and the beam returns to the circular beam again, and a circular outgoing beam is obtained.
【００３５】[0035]
【発明の効果】以上発明の実施の形態と共に具体的に説
明したように本発明によれば、レーザパルスが回折格子
対内を１往復するよう構成することにより、回折格子対
の回折格子間隔が短くても最適なパルス圧縮が実現でき
るため、レーザパルス圧縮装置のコンパクト化を図るこ
とができ、効率の良いパルス圧縮が可能であり、円形の
入射ビームに対して円形の出射ビームが得られる。As described above in detail with the embodiments of the invention, according to the present invention, the laser pulse is configured to make one round trip in the diffraction grating pair, so that the diffraction grating interval of the diffraction grating pair is short. However, since optimum pulse compression can be realized, the laser pulse compression device can be made compact, efficient pulse compression is possible, and a circular output beam can be obtained with respect to a circular input beam.
【図１】本発明の実施の形態例に係るレーザパルス圧縮
装置の構成図である。FIG. 1 is a configuration diagram of a laser pulse compression device according to an embodiment of the present invention.
【図２】従来のパルス圧縮装置を有する設備の全体構成
図である。FIG. 2 is an overall configuration diagram of equipment having a conventional pulse compression device.
【図３】（ａ）は単一モードファイバー入射前のパルス
波形（上段 時間ｔの軸、下段周波数νの軸）、（ｂ）
は単一モードファイバー伝播後のパルス波形（上段時間
ｔの軸、下段 周波数νの軸）、（ｃ）は回折格子対通
過後のパルス波形（上段 時間ｔの軸、下段 周波数ν
の軸）である。FIG. 3 (a) is a pulse waveform before entering a single mode fiber (upper time t axis, lower frequency ν axis), (b)
Is the pulse waveform after the propagation of the single mode fiber (upper time t axis, lower frequency ν axis), (c) is the pulse waveform after passing through the diffraction grating pair (upper time t axis, lower frequency ν)
Axis).
２−２ 単一モードファイバー伝播後のレーザパルス ２−３ 回折格子対通過後のレーザパルス ２−４ パルス圧縮光学系から取出されたレーザパルス ５ 回折格子対 ５−１，５−２ 回折格子 ６ 反射板 ７ 全反射鏡 2-2 Laser pulse after propagating single mode fiber 2-3 Laser pulse after passing through diffraction grating pair 2-4 Pulse laser pulse taken out from compression optical system 5 Diffraction grating pair 5-1 and 5-2 Diffraction grating 6 Reflector 7 Total reflection mirror
Claims (2)
の回折格子対を有するレーザパルス圧縮装置において、 前記レーザパルスを前記回折格子対内を１往復させる手
段を備えたことを特徴とするレーザパルス圧縮装置。1. A laser pulse compression apparatus having a diffraction grating pair for allowing a laser pulse to pass therethrough for compression, comprising means for reciprocating the laser pulse once in the diffraction grating pair. apparatus.
置において、 前記の１往復させる手段は、前記回折格子対に対する前
記レーザパルスの往路下流側に、前記回折格子対内を通
過した前記レーザパルスを反射して再び前記回折格子対
内へと入射せしめるよう配設した反射鏡であることを特
徴とするレーザパルス圧縮装置。2. The laser pulse compression device according to claim 1, wherein the means for reciprocating once reciprocates the laser pulse having passed through the diffraction grating pair on the downstream side of the forward direction of the laser pulse with respect to the diffraction grating pair. A laser pulse compression device, characterized in that the laser pulse compression device is a reflecting mirror arranged so as to reflect the light and make it enter the diffraction grating pair again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1965096A JPH09211504A (en) | 1996-02-06 | 1996-02-06 | Laser pulse compressor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1965096A JPH09211504A (en) | 1996-02-06 | 1996-02-06 | Laser pulse compressor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09211504A true JPH09211504A (en) | 1997-08-15 |
Family
ID=12005127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1965096A Withdrawn JPH09211504A (en) | 1996-02-06 | 1996-02-06 | Laser pulse compressor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09211504A (en) |
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|---|---|---|---|---|
| JP2007334225A (en) * | 2006-06-19 | 2007-12-27 | Mitsubishi Electric Corp | Optical pulse width conversion apparatus and optical pulse width conversion method |
| CN103365029A (en) * | 2013-07-15 | 2013-10-23 | 上海激光等离子体研究所 | Foldable objective image stitching grating pulse compressor and stitching status diagnosis system |
| WO2014118925A1 (en) | 2013-01-31 | 2014-08-07 | 株式会社島津製作所 | Diffraction grating for laser pulse compression and laser device |
| CN105186280A (en) * | 2015-09-22 | 2015-12-23 | 湖北捷讯光电有限公司 | Femtosecond laser pulse compression module |
| WO2016051518A1 (en) * | 2014-09-30 | 2016-04-07 | ギガフォトン株式会社 | Light source system, beam transmission system, and exposure device |
| JP2020533627A (en) * | 2017-09-07 | 2020-11-19 | ローレンス・リバモア・ナショナル・セキュリティ・エルエルシーＬａｗｒｅｎｃｅ Ｌｉｖｅｒｍｏｒｅ Ｎａｔｉｏｎａｌ Ｓｅｃｕｒｉｔｙ， ＬＬＣ | Symmetrical out-of-plane diffraction grating and method |
| CN117374700A (en) * | 2023-12-08 | 2024-01-09 | 安徽中科光栅科技有限公司 | Ultrafast laser pulse compression device and method based on grating line spacing change |
-
1996
- 1996-02-06 JP JP1965096A patent/JPH09211504A/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007334225A (en) * | 2006-06-19 | 2007-12-27 | Mitsubishi Electric Corp | Optical pulse width conversion apparatus and optical pulse width conversion method |
| WO2014118925A1 (en) | 2013-01-31 | 2014-08-07 | 株式会社島津製作所 | Diffraction grating for laser pulse compression and laser device |
| US9948053B2 (en) | 2013-01-31 | 2018-04-17 | Shimadzu Corporation | Diffraction grating for laser pulse compression and laser device |
| CN103365029A (en) * | 2013-07-15 | 2013-10-23 | 上海激光等离子体研究所 | Foldable objective image stitching grating pulse compressor and stitching status diagnosis system |
| WO2016051518A1 (en) * | 2014-09-30 | 2016-04-07 | ギガフォトン株式会社 | Light source system, beam transmission system, and exposure device |
| CN105186280A (en) * | 2015-09-22 | 2015-12-23 | 湖北捷讯光电有限公司 | Femtosecond laser pulse compression module |
| JP2020533627A (en) * | 2017-09-07 | 2020-11-19 | ローレンス・リバモア・ナショナル・セキュリティ・エルエルシーＬａｗｒｅｎｃｅ Ｌｉｖｅｒｍｏｒｅ Ｎａｔｉｏｎａｌ Ｓｅｃｕｒｉｔｙ， ＬＬＣ | Symmetrical out-of-plane diffraction grating and method |
| CN117374700A (en) * | 2023-12-08 | 2024-01-09 | 安徽中科光栅科技有限公司 | Ultrafast laser pulse compression device and method based on grating line spacing change |
| CN117374700B (en) * | 2023-12-08 | 2024-03-12 | 安徽中科光栅科技有限公司 | Ultrafast laser pulse compression device and method based on grating line spacing change |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20030506 |