JPH0894313A - Shape measuring instrument - Google Patents

Abstract

PURPOSE: To obtain a shape measuring instrument according to an optical cutting method with a high measurement accuracy by detecting the arrival of a traveling body (measurement target) according to the image of light applied to a measurement region. CONSTITUTION: A traveling body 1 to be measured, a light source 2 for applying band-shaped light, an image pick-up device 5 for picking up an image 3a applied into a measurement region 16 from the light source 2, a means for detecting the arrival of the traveling body 1 to the measurement region 16 according to the image 3a, and a processing device 6 for calculating the shape of the traveling body 1 according to an output signal from an image pick-up device 5 are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring device for measuring the shape of a moving body by using a light cutting method.

[0002]

2. Description of the Related Art First, the principle of the light cutting method will be briefly described. FIG. 11 is an explanatory diagram showing the principle of shape measurement by the light section method. In the figure, 1A is an object to be measured, 2 is a light source that emits band-shaped light 3, 4 is a lens unit having a lens, and 5 is an image pickup apparatus having a lens unit 4 and an image pickup unit for taking an image (having a shutter). ) And 6 indicate a processing device for calculating the shape of the moving body based on what is imaged by the imaging device 5.

The object 1A to be measured has a concave cross section, and a method of measuring the width A and the height B of this dent (concave) portion will be described. The positional relationship between the light source 2 and the image pickup device 5 is obtained by irradiating the measured object 1A with the band-shaped light 3 and by the image pickup device 5 from a direction intersecting this (hereinafter, this angle is referred to as a crossing angle θ).
An image 3a of the band-shaped light 3 applied to the object to be measured 1A is imaged, and the shape is calculated based on the output signal from the imaging device 5.

Image 3 by band-shaped light 3 on the surface of the object 1A to be measured
a is represented on the image pickup apparatus 5 as shown in FIG. 12, and is calculated in consideration of the focal length of the lens (the dimensional ratio m between the real space and the image pickup apparatus 5) and the crossing angle θ as shown in Expression 1. The shape of the object 1A to be measured is calculated by performing the processing (Formula 1) in the processing device 6.

[0005]

[Equation 1]

Next, a conventional example of the shape measuring apparatus utilizing the optical cutting method will be described. FIG. 13 shows Japanese Patent Laid-Open No. 6-123.
The shape measuring apparatus is the same as that disclosed in Japanese Patent No. 608. 1 is a moving body to be measured, 16 is a measurement area that can be measured by this shape measuring device, 7 is a photoelectric switch that detects when the moving body 1 reaches the measurement area 16, and 17 is the moving body to the measurement area 16. Is a transporting means for transporting. Other configurations and components of the shape measuring apparatus are almost the same as the description of the principle of the above-mentioned optical cutting method. When the photoelectric switch 7 detects the arrival of the moving body 1 in the measurement region 16, the shutter of the image pickup device 5 is operated by the detection signal from the photoelectric switch 7, and the image of the surface of the moving body 1 irradiated with the band-shaped light 3 is displayed. 3a is imaged and the shape is calculated by the processing device 6.

As described above, when the shape of the moving body 1 is measured by the optical cutting method, the arrival of the moving body 1 in the measurement region 16 is detected by using the photoelectric switch 7 or the like, and the photoelectric switch 7 is detected. The shutter in the image pickup device 5 is operated based on the detection signal from the sensor (for example, when the image pickup element is a CCD, CC
The method of starting charge accumulation in D) was common.

[0008]

Since the conventional shape measuring device is constructed as described above, the distance between the moving body 1 and the image pickup device 5 is reduced if the detection accuracy of the moving body 1 by the photoelectric switch 7 is poor. Change. Due to this change, the dimensional ratio m on the image pickup device 5 and the real space shown in Formula 1 changes, and thus the shape calculation accuracy deteriorates.

In order to improve the measurement accuracy of the shape measuring device, it is essential to perform the measurement so that the distance between the image pickup device 5 and the moving body 1 is always constant. For this reason, in the conventional shape measuring apparatus that detects arrival at the measurement area 16 by the photoelectric switch 7, it is necessary to increase the detection accuracy of the moving body 1 by the photoelectric switch 7, and therefore the moving body 1 and the photoelectric switch 7 It is necessary to make the distance between and as close as possible. However, in such a case, the photoelectric switch 7 interferes with the movement of the moving body 1, and in the worst case, the moving body 1 and the photoelectric switch 7 collide with each other.

Further, in the conventional shape measuring device for detecting with the photoelectric switch 7, for example, in the case of the wheel measuring device of the above cited example, the photoelectric switch 7 which is a detecting device is used.
There was a restriction on the arrangement.

An object of the present invention is to provide a shape measuring device which solves the above problems.

[0012]

A shape measuring apparatus according to the present invention comprises a light source for irradiating a measurement area with band-shaped light, an image pickup apparatus for picking up an image in the measurement area, and an image in the measurement area. It is configured by a processing device that calculates the shape of the moving body.

Further, the detecting means is constituted by a spectroscopic element arranged in an image input path to the image pickup device in the image pickup device, and a photodetection element for detecting the image input split by the spectroscopic element. Is.

Further, the detecting means is provided in a part of the image pickup device in the image pickup apparatus, and is constituted by a photodetection device for detecting a video input.

Further, the detecting means is arranged in a video input path to the image pickup device in the image pickup apparatus, and is constituted by a transmissive photovoltaic element for detecting the image input.

Further, a first light source for irradiating the measurement area with the band-shaped light, a second light source for irradiating the measurement area with the spot light, an image by the spot light are input, and an image by the band-shaped light is picked up. The image pickup device and the processing device for calculating the shape of the moving body from the image of the band-shaped light in the measurement region are included.

Further, the detecting means is composed of a spectroscopic element arranged in an image input path to the image pickup device by the spot light, and a photodetector element for detecting an image input by the spot light dispersed by the spectroscopic element. It is a thing.

Further, the detection means is one in which the spectroscopic element and the light receiving element are arranged in the lens portion of the image pickup device.

Further, the detecting means is a part of an image pickup device in the image pickup device and is constituted by a photodetection device for detecting an image input by spot light.

Further, the detecting means is arranged in the image input path by the spot light to the image pickup device and is constituted by a transmissive photovoltaic element for detecting the image input by the spot light.

Further, the band-shaped light of the first light source and the spot light of the second light source have different wavelengths.

Further, when the arrival of the moving body in the measurement area is detected by the spot light of the second light source, the second light source is turned off.

Furthermore, the first light source is turned on for detection, and when the arrival of the moving body in the measurement area is detected by the band light image or the spot light image, the image to be imaged is emitted. The first light source is turned on for imaging.

Furthermore, when the output signal from the image pickup device is constantly input to the processing device and the input signal changes as compared with the case where the moving object is not detected, this change causes measurement of the moving object. It detects the arrival at the area.

[0025]

The shape measuring apparatus according to the present invention can input the image of the band-shaped light in the measurement area to the image pickup apparatus and detect the arrival of the moving body in the measurement area by the image.

Further, by detecting the image input dispersed by the spectroscopic element by the photodetection element, it is possible to detect that the moving body has arrived within the measurement area.

Further, by detecting the image input with the photodetector, it is possible to detect the arrival of the moving body in the measurement area.

Furthermore, by detecting the image input by the transmissive photovoltaic element, it is possible to detect that the moving body has arrived within the measurement area.

Further, it is possible to detect the arrival of the moving body in the measurement area by inputting the image of the spot light in the measurement area to the image pickup device.

Further, by detecting the image input by the spot light dispersed by the spectroscopic element by the photodetector, it is possible to detect that the moving body has arrived within the measurement area.

Further, by detecting the image output by the band-shaped light or spot light dispersed by the spectroscopic element by the photodetector, it is possible to detect that the moving body has arrived within the measurement area.

Further, by detecting the image input by the spot light with the photodetector, it is possible to detect the arrival of the moving body in the measurement area.

Further, by detecting the image input by the spot light by the transmissive photovoltaic element, it is possible to detect that the moving body has arrived within the measurement area.

Further, by changing the wavelengths of the spot light and the band-shaped light, it is possible to prevent the mutual light from affecting the other light.

Further, when the arrival of the moving body is detected by the image input of the spot light, the second light source is turned off so that the image of the band light is not affected by the image of the spot light. .

Furthermore, when the first light source is turned on for detection and it is detected that the moving body has reached the measurement area,
By turning on the first band-shaped light source for irradiating the image to be imaged for imaging, it is possible to eliminate the influence of the external light.

Further, according to the output signal from the image pickup device,
The moving body can be detected, and the image can be taken immediately after the moving body is detected.

Example 1. Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a shape measuring apparatus. This figure shows an image 3a by the band-shaped light 3 applied to the moving body 1 without using the photoelectric switch 7 for detecting the moving body 1.
An example of a device configuration for detecting the moving body 1 by using is shown. The configuration and components of the shape measuring apparatus are almost the same as those of the conventional example. Regardless of whether or not the moving body 1 has arrived at the measurement area 16, the strip light 3 is constantly applied to the measurement area 16 and the images of the measurement area 16 are sequentially input to the imaging device 5 (having a shutter). The processing device 6 processes the output signal from the moving body 1, detects that the moving body 1 has arrived at the measurement region 16, and calculates the shape at that time.

In this way, the image 3a of the strip-shaped light 3 in the measurement area 16 is picked up. In other words, it is the band-shaped light 3 that is imaged.
Is an input light from the image 3a to the image pickup device 5, which is referred to as a strip input light 8 (not shown in FIG. 1), and an optical path of the strip input light 8 to the image pickup device 5 is referred to as a video input path. . Here, since the arrival of the moving body 1 in the measurement area 16 is detected by inputting the image 3a by the band-shaped light 3 into the image pickup device 5, in other words, the band-shaped input light 8 is used, the detection device is changed from the conventional one. There is no need to provide it separately. Further, since it is not necessary to dispose the detection device, the shape measuring device can be made compact, and the restriction of disposing the shape measuring device is small and the degree of freedom is high. Further, since the strip-shaped input light 8 for detecting the moving body 1 and for picking up the image is the same and passes through the same image input path, the accuracy of detecting the moving body 1 and measuring the shape is high.

Further, in the first embodiment, the detection of the arrival of the moving body 1 in the measurement area 16 is detected by processing the output from the image pickup device 5 in the processing device 6, but in the image pickup device 5 It is also possible to detect the arrival of the moving body 1 in the measurement region 16 and operate the shutter to detect the moving body 1 when the moving body 1 is imaged.

Example 2. The second embodiment is an example of the detecting means in the shape measuring apparatus and will be described with reference to FIG. FIG. 2 is a cross-sectional configuration diagram of the image pickup device 5 in which the spectroscopic element 9 and the photodetection element 10 are arranged, and 4 has a lens (a lens is not shown), which is a part of the image pickup device 5, 5
Is an image pickup device including a lens unit and an image pickup unit, 8 is band-shaped input light passing through the video input path, 9 is a spectroscopic element disposed in the video input path, and 10 is band-shaped input light reflected by the spectroscopic element 9.
Is a photo-detecting element arranged so as to detect
Is an image pickup device for picking up an image.

Here, for example, there are a half mirror and a prism as the spectroscopic element 9, a photodiode, a phototransistor, a thermistor and a thermocouple as the light detecting element 10, and CCD, MOS, CID and BBD as the image pickup element 11.

In FIG. 2, the band-shaped input light 8 is branched by the spectroscopic element 9, part of which goes to the photodetector element 10 and the rest of which goes to the image pickup element 11. The band-shaped input light 8 directed to the photodetection element 10 is detected by the photodetection element 10, and this detection detects that the moving body 1 has arrived at the measurement region 16.

Specifically, the shape of the band-shaped input light 8 changes depending on whether or not the moving body 1 is present in the measurement area 16 (for example, the image on the image pickup device is shifted upward by the band-shaped input light 8). Take advantage of what you do. The moving body 1 is the measurement area 16
When it does not exist in the inside, the photodetector element 10 causes the strip-shaped input light 8
By arranging the photodetector 10 so that the photodetector 10 does not detect the band-shaped input light 8 when the moving body 1 reaches (exists) the measurement region 16, When there is no detection by the photodetection element 10, the arrival of the moving body 1 in the measurement region 16 is detected, and the shutter of the imaging device 5 is operated by using this detection as a trigger to measure the shape of the moving body 1. In addition, the arrangement for detecting the light of the photodetection element 10 may be reversed when the moving body 1 is present in the measurement region 16 and when it is not, to detect the moving body 1.

Thus, the spectroscopic element 9 and the photodetector element 10 are
Since the moving body 1 is disposed in the image pickup device 5,
It is sufficient to input only the image of the moving body 1 when it arrives to the processing device 6 to calculate the shape. Further, since the strip-shaped input light 8 for detecting the moving body 1 and for picking up the image is the same and passes through the same image input path, the accuracy of detecting the moving body 1 and measuring the shape is high.

Example 3. The third embodiment is another example of the detecting means in the shape measuring apparatus and will be described with reference to FIG.
FIG. 3 is a cross-sectional configuration diagram of the imaging device 5 in which the spectroscopic element 9 and the light detection element 10 are arranged in the lens unit 4 of the imaging device 5.
The second embodiment is the same as the second embodiment except that the spectroscopic element 9 and the light detection element 10 are provided in the lens unit 4.

Thus, the spectroscopic element 9 and the photodetector element 10 are
Are arranged in the lens section 4, the optical elements of the spectroscopic element 9 and the photodetection element 10 are combined into the lens section which is a main part of the optical element in the imaging device 5 in addition to the effect similar to the second embodiment. be able to. That is, the manufacturing and maintenance of the imaging device 5 and thus the lens unit 4 are facilitated.

Example 4. The fourth embodiment is still another example of the detecting means in the shape measuring apparatus, which will be described with reference to FIG. FIG. 4 is a cross-sectional configuration diagram of the image pickup device 5 in which the photodetection element 10 is provided in a part of the image pickup element 11. The photodetector element 1 is provided on a part of the image pickup device 11 in the image pickup device 5 which is not used for shape measurement or a part which does not affect the shape measurement.
0 is arranged and the band-shaped input light 8 from the moving body 1 is detected by the light detecting element 1
0, and the shutter of the image pickup device 5 is operated based on the output signal from the photodetector 10.

As described above, the photodetector 10 is attached to the image pickup device 5
Since only the image of the moving body 1 when the moving body 1 reaches the measurement area 16 is input to the processing device 6, the shape may be calculated. Further, since the strip-shaped input light 8 for detecting the moving body 1 and for picking up the image is the same and passes through the same image input path, the accuracy of detecting the moving body 1 and measuring the shape is high. Also,
Although the photodetector 10 is arranged in a part of the image pickup device 11, the same effect can be obtained by allocating the corresponding part of the image pickup device 11 at the position where the photodetector 10 is arranged for detecting the moving body 1.

Example 5. The fifth embodiment is still another example of the detecting means in the shape measuring apparatus, which will be described with reference to FIG. FIG. 5 is a cross-sectional configuration diagram of the image pickup device 5 in which the transmissive photovoltaic element 12 is disposed, and 12 is a transmissive photovoltaic element disposed in the video input path. The transmissive photovoltaic element 12 is like a solar cell that transmits light like a half mirror and generates power by receiving light, and is used as a sensor by an output signal generated by this power generation. To do. This photovoltaic element 12 is arranged at a position where the moving body 1 can be detected by the strip-shaped input light 8 as in the second embodiment.

In FIG. 1, the band-shaped input light 8 input to the transmissive photovoltaic element 12 detects the arrival of the moving body 1 in the measurement area 16, and the image pickup device is based on the output signal from the photodetector element 10. The shutter of No. 5 is operated. With this, it is possible to obtain the same effect as that of the fourth embodiment.

Example 6. A sixth embodiment of the present invention will be described with reference to the drawings. FIG. 6 is a configuration diagram of the shape measuring apparatus.
This figure shows an image 1 by the spot light 14 irradiated on the moving body 1 without using the photoelectric switch 7 for detecting the moving body 1.
An example of a device configuration for detecting the moving body 1 using 4a is shown.

Reference numeral 2A is a first light source for irradiating the band-shaped light 3, and 13 is a second light source for irradiating the spot light 14. Other configurations and components are almost the same as those in the first embodiment. Regardless of whether or not the moving body 1 has arrived at the measurement region 16, the spot light 14 is constantly radiated, the images of the measurement region 16 are sequentially input to the imaging device 5, and the output signal from the imaging device 5 is output to the processing device 6 at the processing device 6. Processed, moving body 1 is measuring area 1
When the arrival at 6 is detected, the shape at that time is calculated.

In this way, the spot light 1 of the measurement area 16
The image 14a of 4 is input to the imaging device 5. This input light is called spot input light 15, and the spot input light 1
The optical path of the image pickup device 5 to the image pickup device 5 is referred to as an image input path. That is,
The moving body 1 is detected by the spot input light 15 (not shown in FIG. 6). Here, the image 3a by the strip light 3 in the measurement region 16 is captured. That is, it is the band-shaped input light 8 (not shown in FIG. 6) that is imaged, and the shape is calculated by the band-shaped input light 8.

Moreover, since the arrival of the moving body 1 at the measurement area 16 is detected by inputting the image 14a by the spot light 14 into the image pickup device 5, in other words, the spot input light 8 is detected, as in the conventional case. There is no need to provide a separate detection device. Further, the shape measuring device can be made compact, and the second light source for irradiating the spot light 14 can be arranged within the image pickup area 16 with few restrictions and a high degree of freedom. Further, since the spot input light 15 for detecting the moving body 1 and the strip-shaped input light 8 for picking up the image pass through almost the same image input path, the accuracy of detecting the moving body 1 and the shape measurement is high. Further, the spot light 14 is used to detect the moving body 1.
Therefore, the light density is high, and the detection of the image 14a by the spot light 14 is easy and highly accurate.

Further, in the sixth embodiment, the arrival of the moving body 1 in the measurement area 16 is detected by processing the output from the image pickup device 5 in the processing device 6. However, in the image pickup device 5 The moving body 1 may be imaged by detecting the arrival of the moving body 1 in the measurement region 16 and operating the shutter.

Example 7. The seventh embodiment is an example of the detecting means in the shape measuring apparatus and will be described with reference to FIG. FIG. 7 is a cross-sectional configuration diagram of the imaging device 5 in which the spectroscopic element 9 and the photodetecting element 10 are arranged. In FIG. 7, the spot input light 15 is branched by the spectroscopic element 9, and a part of it is detected by the photodetector element 10.
Head to. Spot input light 1 toward the photodetector 10
5 is detected by the photo-detecting element 10, and this detection detects that the moving body 1 has reached the measurement region 16. The second embodiment is the same as the second embodiment except for the detecting means of the moving body 1.

Thus, the spectroscopic element 9 and the photodetector element 10 are
Since the moving body 1 is disposed in the image pickup device 5,
It is sufficient to input only the image of the moving body 1 when it arrives to the processing device 6 to calculate the shape. Further, since the spot input light 15 for detecting the moving body 1 and the strip-shaped input light 8 for picking up the image pass through almost the same image input path, the accuracy of detecting the moving body 1 and the shape measurement is high. Furthermore, the light density is high, and the detection of the image 14a by the spot light 14 is easy and highly accurate.

Example 8. The embodiment is another example of the detecting means in the shape measuring apparatus and will be described with reference to FIG. FIG. 8 is a cross-sectional configuration diagram of the image pickup device 5 in which the spectroscopic element 9 and the light detection element 10 are arranged in the lens unit 4 of the image pickup device 5. The seventh embodiment is the same as the seventh embodiment except that the spectroscopic element 9 and the light detection element 10 are arranged in the lens unit 4.

Thus, the spectroscopic element 9 and the photodetector element 10 are
Is provided in the lens unit 4, the optical elements such as the spectroscopic element 9 and the photodetection element 10 are integrated into the lens section in which the optical elements in the imaging device 5 are the main parts, in addition to the effects similar to those of the seventh embodiment. be able to. That is, the manufacturing and maintenance of the imaging device 5 and thus the lens unit 4 are facilitated.

Example 9. The ninth embodiment is still another example of the detecting means in the shape measuring apparatus, and one example will be described with reference to FIG. FIG. 9 is a cross-sectional configuration diagram of the image pickup device 5 in which the photodetection element 10 is provided in a part of the image pickup element 11. The photodetector 10 is disposed in a part of the image pickup device 11 in the image pickup device 5 which is not used for shape measurement, and the spot force light 15 from the moving body 1 is detected by the photodetector 10 to perform photodetection. The shutter of the image sensor 11 is operated based on the output signal from the element 10.

In this way, the photodetector 10 is mounted on the imaging device 5
Since only the image of the moving body 1 when the moving body 1 reaches the measurement area 16 is input to the processing device 6, the shape may be calculated. Further, since the spot input light 15 for detecting the moving body 1 and the strip-shaped input light 8 for picking up the image pass through almost the same image input path, the accuracy of detecting the moving body 1 and the shape measurement is high. Further, although the photodetecting element 10 is arranged in a part of the image pickup element 11, the same effect can be obtained by allocating the corresponding portion of the image pickup element 11 at the position where the photodetecting element 10 is arranged for detecting the moving body 1. To be Furthermore, the light density is high and the spot light 1
It is easy and highly accurate to detect the image 14a of FIG.

Example 10. The tenth embodiment is still another example of the detecting means in the shape measuring apparatus, which will be described with reference to FIG. FIG. 10 is a cross-sectional configuration diagram of the image pickup device 5 in which the transmissive photovoltaic element 12 is arranged, and 12 is a transmissive photovoltaic element arranged in the video input path. This photovoltaic element 12
Are arranged at positions where the moving body 1 can be detected by the spot input light 15 as in the seventh and eighth embodiments.

In the figure, the moving body 1 is detected by the spot input light 15 input to the transmission type photovoltaic device 12,
The shutter of the image sensor 11 is operated based on the output signal from the photodetector 10. With this, it is possible to obtain the same effect as that of the ninth embodiment.

Further, in the sixth to tenth embodiments,
The spot light 14 and the band-shaped light 3 may have different wavelengths. By doing so, it is possible to prevent the spot light 14 from affecting the band-shaped input light 8 for imaging the shape measurement of the moving body 1. Conversely, band-shaped light 3
Does not affect the spot input light 15 that detects the moving body 1.

Furthermore, in the sixth to tenth embodiments, the spot light 14 from the second light source 13 is moved to the moving body 1.
May be turned off at the time when it is detected that has arrived at the measurement region 16. By doing so, the second light source 13
Strip light 3 emitted from the spot light 14 from the moving body 1
It is possible not to affect the shape measurement by.

In the first to tenth embodiments,
The strip light 3 is turned on for detection, and the moving body 1 moves to the measurement area 16
It may be turned on for imaging at the time when it is detected that it has arrived. That is, to detect the moving body 1, the intensity of light may be weakened as compared with that for imaging, or the intensity of light may be changed with time within a weak range, and at the time of imaging, a fixed light intensity necessary for imaging may be obtained. It is to illuminate strongly. When the spot light 14 is used for detection, the intensity of the band-shaped light 3 may be weakened for detection. This eliminates the influence of extraneous light (mainly sunlight) at the time of detection of the image pickup device 11, the photodetection device 10, and the transmissive photovoltaic device 12 for detecting the moving body 1, and at the same time, makes it possible to detect at the time of image pickup. It is possible to prevent a decrease in light amount due to lighting.

The arrival of the moving body 1 in the measurement region 16 is detected by the detecting means of the second, third, fourth, fifth, seventh, eighth, ninth or tenth embodiment. At this time, the output signal of the light detection element 10 or the transmissive photovoltaic element 12 may be directly input to the shutter, or may be input to the processing device 6 once and the processing device 6 controls the shutter of the imaging device 5. Good.

In the above embodiment, the moving body 1 is the carrying means 17
Although the case has been described in which the mobile unit 1 is moved by, the mobile unit 1 may be self-propelled like an automobile or a train. Further, the moving body 1 may be a stationary device, and the measuring device may be a scanning device.

The case where the moving body 1 is imaged when the arrival of the moving body 1 in the measurement area 16 is detected has been described. At this time, the tip of the moving body 1 can be measured. If the moving body 1 is measured for imaging after detecting the arrival of the moving body 1 in the measurement area 16, the entire moving body 1 can be measured. Furthermore, if a specific part of the moving body 1 can be detected, that part can be measured.

Further, regarding the accuracy of shape measurement, the moving body 1 moves at 10 [m / s] (about 30 [km / h]) at the train wheel, the image sensor 11 is a CCD, and the response is 10 [μs. ], 10 [m / s] × 10 [μs] = 0.1 [mm].

[0072]

As described above, according to the present invention, the image of the band-shaped light in the measurement region is input to the image pickup device, and the image detects the arrival of the moving object in the measurement region. Therefore, it is not necessary to provide a moving body detection device, and the accuracy of moving body detection can be increased. That is, there is no restriction on the arrangement of the image pickup device for inputting the image by the band-shaped light in the measurement area related to the detection of the moving body. Moreover, since it is not necessary to provide a detection device, the device can be downsized.

Further, by detecting the image input dispersed by the spectroscopic element by the photodetector, it is possible to detect that the moving body has arrived within the above-mentioned measurement region. Therefore, the accuracy of detecting the moving body is high. Can be higher.

Furthermore, by detecting the image input by the photodetector, it is possible to detect that the moving body has arrived within the above-mentioned measurement region, so that the accuracy of detecting the moving body can be improved. .

Further, by detecting the image input by the light transmission type power generating element, it is possible to detect that the moving body has arrived within the above-mentioned measurement region, so that the accuracy of detecting the moving body can be improved. You can

Further, since it is possible to input an image of spot light in the measurement area to the image pickup device and detect the arrival of the moving body in the measurement area by the image, the moving body detection apparatus is used. It is not necessary to provide it, and the accuracy of detecting the moving body can be increased. Further, since the spot light from the second light source is used, the second light source is arranged at a position suitable for detection, and the light density is high. can do.

Further, by detecting the image input by the spot light dispersed by the spectroscopic element by the photodetection element, it is possible to detect that the moving body has arrived within the measurement area. The detection accuracy can be increased.

Furthermore, by detecting the image output by the band-shaped light or the spot light dispersed by the spectroscopic element by the photodetector, it is possible to detect that the moving body has arrived within the measurement area. It is possible to increase the accuracy of detecting a moving body. Further, since the spectroscopic element and the light receiving element are arranged in the lens portion, the optical system can be integrated in the lens portion and the device can be downsized.

Further, by detecting the image input by the spot light by the photo-detecting element, it is possible to detect that the moving body has arrived within the measurement area.
It is possible to increase the accuracy of detecting a moving body.

Further, by detecting the image input by the spot light by the light transmission type power generating element, it is possible to detect the arrival of the moving body in the above-mentioned measurement area, and therefore the accuracy of the moving body detection can be improved. Can be higher.

Further, by changing the wavelengths of the spot light and the band-shaped light, it is possible to prevent the mutual light from affecting the other light. Therefore, the influence of the image of the band-shaped light at the time of detection, Detection and imaging can be performed without being affected by the image of spot light at the time of imaging, and the accuracy of these can be improved.

Further, when the arrival of the moving body is detected by the image input of the spot light, the second light source is turned off so that the image of the band light is not influenced by the image of the spot light. Therefore, the accuracy of the image pickup is improved without being affected by the image due to the spotlight when the image is picked up.

Furthermore, when the first light source is turned on for detection and it is detected that the moving body has reached the measurement area,
By turning on the first band-shaped light source for irradiating the image to be imaged for image pickup, it is possible to reduce the influence of external light, and thus the image pickup accuracy is improved.

Further, according to the output signal from the image pickup device,
Since the moving body can be detected and the image can be taken immediately after the moving body is known, any portion of the moving body can be measured as long as it is within the range of the band-shaped light.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a shape measuring apparatus according to a first embodiment.

FIG. 2 is a cross-sectional configuration diagram of an image pickup apparatus in which a spectroscopic element and a photodetector element are arranged.

FIG. 3 is a cross-sectional configuration diagram of an image pickup apparatus in which a spectroscopic element and a photodetection element are arranged in a lens unit.

FIG. 4 is a cross-sectional configuration diagram of an image pickup apparatus in which a photodetection element is provided in a part of the image pickup element.

FIG. 5 is a cross-sectional configuration diagram of an image pickup apparatus in which a transmissive photovoltaic element is arranged.

FIG. 6 is a configuration diagram of a shape measuring apparatus according to a sixth embodiment.

FIG. 7 is a cross-sectional configuration diagram of an image pickup apparatus in which a spectroscopic element and a photodetection element are arranged.

FIG. 8 is a cross-sectional configuration diagram of an image pickup apparatus in which a spectroscopic element and a photodetection element are arranged in a lens unit.

FIG. 9 is a cross-sectional configuration diagram of an image pickup apparatus in which a photodetection element is provided in a part of the image pickup element.

FIG. 10 is a cross-sectional configuration diagram of an imaging device provided with a transmissive photovoltaic element.

FIG. 11 is a principle diagram of a light cutting method.

FIG. 12 is a diagram showing an image in which an image of band-shaped light on an object to be measured is input to an image pickup element of an image pickup apparatus.

FIG. 13 is a configuration diagram of a conventional shape measuring apparatus by a light section method.

[Explanation of symbols]

1, moving body, 1A, measured object, 2, light source, 2
A, first light source 3, band light 3a, image by band light in measurement area 4, lens 5, imager 6, processing device 7, photoelectric switch 8, band incident light 9, spectroscopic element 10, photodetector 11 , Image sensor 12, transmissive power generation element 13, spot light source 14, spot light 14a, image 15 by spot light in the measurement area, spot incident light 16, measurement area 17,
Transport means

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical display location G01S 17/88 G06T 7/00

Claims (13)

[Claims] 1. A moving body which is a target of shape measurement and which passes through a measurement region, and a light source which irradiates the measurement region with strip light.
An image pickup device that picks up an image in the measurement region by the band-shaped light emitted from the light source, a detection unit that detects that the moving object has arrived in the measurement region based on the image in the measurement region, and the detection unit. A shape measuring device, comprising: a processing device that calculates the shape of the moving body based on an output signal from the imaging device when the arrival of the moving body in the measurement area is detected. 2. The detecting means is composed of a spectroscopic element arranged in an image input path to an image pickup element in an image pickup device, and a photodetection element for detecting an image input split by the spectroscopic element. The shape measuring apparatus according to claim 1, wherein 3. The shape measuring apparatus according to claim 1, wherein the detecting means is provided in a part of an image pickup element in the image pickup apparatus and is constituted by a photodetection element for detecting a video input. 4. The detection means is provided in a video input path to an image pickup device in an image pickup device, and is constituted by a transmissive photovoltaic device for detecting a video input.
The shape measuring device described. 5. A moving body which is a shape measurement target and passes through a measurement region, a first light source for irradiating the measurement region with band light, and a second light source for irradiating the measurement region with spot light. An image pickup device for inputting an image of spot light emitted from a second light source and capturing an image of the measurement area by the band-shaped light emitted from the first light source,
Detecting means for detecting that the moving body has arrived at the measuring area based on the image of the spot light in the measuring area, and the imaging device when the detecting means detects that the moving body has arrived at the measuring area. And a processing device capable of calculating the shape of the moving body based on an output signal from the shape measuring device. 6. The detecting means detects a spectroscopic element arranged in an image input path of the spot light by the second light source into the image pickup device, and an image input of the spot light dispersed by the spectroscopic element. 6. The shape measuring apparatus according to claim 5, wherein the shape measuring apparatus comprises a light detecting element. 7. The shape measuring device according to claim 2, wherein in the image pickup device including the lens portion and the image pickup portion, the spectroscopic element and the light receiving element are arranged in the lens portion of the image pickup device. 8. The detecting means is arranged in a part of an image pickup device for picking up an image of a measurement region, and is constituted by a photodetector element for detecting an image input of spot light by a second light source. The shape measuring device according to claim 5. 9. The detection means is arranged in a spot light image input path by a second light source into the image pickup device, and is composed of a transmissive photovoltaic element for detecting the spot light image input. The shape measuring device according to claim 5. 10. The shape measuring apparatus according to claim 5, wherein the strip light of the first light source and the spot light of the second light source have different wavelengths. 11. The second light source is turned off when the arrival of the moving object in the measurement area is detected by the spot light of the second light source. Shape measuring device. 12. When the first light source is turned on for detection and it is detected that the moving body has arrived at the measurement region by the band-shaped light from the first light source or the spot light from the second light source,
The shape measuring device according to any one of claims 1 to 11, wherein band-shaped light from the first light source for imaging is turned on for imaging. 13. The detecting means detects, when the video input changes with respect to the video input when the moving body is not detected, the arrival of the moving body in the measurement area based on the change. The shape measuring device according to any one of claims 1 to 12.