JPH0876925A - Input/output device and its controlling method - Google Patents

Abstract

PURPOSE: To provide an input/output(I/O) device and its controlling method capable of preventing the generation of malfunction due to a non-intentional and non-artificial factor and having high reliability. CONSTITUTION: In the I/O device and its controlling method, a control part 5 switches an operation validating switch mode by an input from an operation validating switch part 4 in an input part 3 so that recognition display is executed on a display part 2 and an input from a part other than the switch part 4 in the input part 3 is validated and processed when the switch mode is an ON mode, and when the switch mode is an OFF mode, an input from a part other than the switch part 4 is invalidated without executing recognition display.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an input / output device used in an operation monitoring system for semiconductor manufacturing equipment, and more particularly to an input / output device capable of preventing erroneous operation due to unintentional factors and a control method thereof. .

[0002]

2. Description of the Related Art First, a conventional input / output device will be described with reference to FIG. FIG. 6 is a schematic configuration diagram of a conventional input / output device. As shown in FIG. 6, a conventional input / output device includes a display unit 2 for displaying, an input unit 3 for performing an input operation, a control unit 5 ′ for controlling the input / output device, a display unit 2 and an input unit. Three
And an operation panel 1 '.

Next, each part of the conventional input / output device will be specifically described. The display section 2 displays according to the display signal from the control section 5 '. The input unit 3 is
When an operator performs an input operation by touching the position of an item to be input or selected with a finger, a pen or the like according to the content displayed on the display unit 2 provided on the front surface of the display unit 2,
The input position information is transmitted to the control unit 5 '.

For example, in an input / output device used in an operation monitoring system of a semiconductor manufacturing apparatus, a transparent type input device is provided as the input unit 3, and an input operation is performed by touching the transparent type input device with a finger or a pen. Then, the input position information is input to the control unit 5 '. Examples of the transparent input device include a resistance film type touch sheet, an electromagnetic induction type transparent tablet, an ultrasonic matrix touch panel, and the like. And in the input / output device using the perspective type input device, when performing an input operation,
It can be operated with a very weak stamping force.

The control section 5'outputs a display signal to the display section 2, receives position information from the input section 3 to recognize input data, and performs processing according to the input data.

Next, a conventional input / output device control method will be described. In the conventional method of controlling the input / output device, as shown in FIG. 6, the control unit 5 ′ outputs a display signal to the display unit 2 to display a display screen for input operation.
Displayed on the display unit, and the worker refers to the display screen while input unit 3
When the input is performed from, the control unit 5'recognizes the input data based on the input position information, selects or inputs the item, and processes according to the input data.

[0007]

However, in the above-mentioned conventional input / output device, since the input operation in the input part 3 can be performed with a very weak imprinting force, the input / output device 3 of the input / output device is dropped or tilted by an object. There is a possibility that an input operation may be erroneously detected when an object collides with it or static electricity charged on the operator's clothing causes an erroneous input operation, or when the display is read while tracing the input section 3 with a finger. There was a problem that was high.

When a conventional input / output device is used in the input / output monitoring system of a semiconductor manufacturing apparatus, if these erroneous operations occur during wafer processing or transfer, the wafer and the device will be damaged. There was a problem.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a highly reliable input / output device and a control method therefor, which prevent occurrence of erroneous operation due to unintentional or non-human factors. To aim.

[0010]

According to a first aspect of the present invention for solving the problems of the above-mentioned conventional example, a display unit for displaying and a perspective type input provided on the screen of the display unit are provided. In an input / output device having an input section of a device and a control section for performing display control on the display section according to an input from the input section, an area of an operation enable switch section for enabling the input to a part of the input section And a control unit that makes the input from the input unit valid when the operation valid switch unit is in the ON state and invalidates the input from the input unit when the operation valid switch unit is in the OFF state. It is characterized by that.

According to a second aspect of the present invention for solving the above-mentioned problems of the conventional example, a display section for displaying is provided, and an input section of a perspective type input device provided on the screen of the display section. In an input / output device having a control unit for performing display control on the display unit in accordance with an input from the input unit, an operation enable switch unit that enables an input from the input unit when in an on state is the input unit. Separately, the control unit,
The control unit validates the input from the input unit when the operation valid switch unit is on, and invalidates the input from the input unit when the operation valid switch unit is off.

The invention according to claim 3 for solving the above-mentioned problems of the conventional example is the method for controlling an input / output device according to claim 1 or 2, wherein the control section is an input section when the operation enable switch is in the ON state. The input from the input unit is valid, and the input from the input unit is invalid when the operation valid switch unit is in the off state.

[0013]

According to the first aspect of the present invention, a part of the area of the input section of the perspective type input device is assigned to the operation effective switch section, and only when the control section is in the ON state of the operation effective switch section, the input section is operated from the input section. Since it is an input / output device that validates the input of, the erroneous operation due to an unintentional factor can be prevented by turning off the operation validating switch in the input unit.

According to the second aspect of the present invention, an operation effective switch section is provided separately from the input section of the perspective type input device,
Since the control unit is an input / output device that enables the input from the input unit only when the operation enable switch unit is in the ON state,
If the operation enable switch outside the input section is turned off,
It is possible to prevent erroneous operations due to unintentional factors.

According to the third aspect of the present invention, the control section includes:
The control method of the input / output device according to claim 1 or 2, wherein the input from the input unit is valid when the operation valid switch is on, and the input from the input unit is invalid when the operation valid switch is off. By turning on the operation enable switch during input and turning off the operation enable switch during non-input, it is possible to prevent erroneous operation due to unintentional factors.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. 1 is a schematic configuration diagram of an input / output device according to a first embodiment of the present invention. It should be noted that the same components as those in FIG. 6 will be described with the same reference numerals.

The input / output device of the first embodiment has basically the same configuration as the conventional input / output device, and the display part 2, the input part 3 and the first embodiment are the same parts as the conventional part. The control method of the control unit 5 is different from the conventional one as a characteristic part of the above.

Next, regarding the characteristic part of the first embodiment,
This will be described with reference to FIG. FIG. 2 is a front view of the input / output device of the first embodiment. As shown in FIG. 2, the input / output device of the first embodiment determines whether an input operation from the input unit 3 is valid or invalid in a partial area in the display unit 2 and the input unit 3. It is assigned as the operation-effective switch unit 4 which functions as a switch for switching and is recognized by the control unit 5.

Specifically, the control section 5 outputs a display signal indicating that the operation is effective switch section to the area of the operation effective switch section 4 of the display section 2 to display it on the display section 2. Then, the control unit 5 further determines whether or not the position information input from the input unit 3 is the input of the operation effective switch unit 4 part, and when the operation effective switch unit 4 part is input, the operation effective switch mode ON / OFF is performed. The current operation valid switch mode is stored in the control unit 5.

If the position information input from the input unit 3 is input to a portion other than the operation effective switch unit 4,
The control unit 5 confirms the current operation effective switch mode,
In the ON mode, the input data is recognized based on the position information input by validating the input operation, and the process is performed according to the input data. And the current operation effective switch mode is OF
In the F mode, the control unit 5 invalidates the input operation from the input unit 3 and ignores the input position information.

Further, when the operation effective switch mode is the ON mode, the control section 5 outputs a display signal for performing a recognition display indicating that the operation effective switch mode is the ON mode on the display section 2. Examples of the recognition display include reverse display image, character display, and color display.

Next, a method of controlling the input / output device of the first embodiment will be described with reference to FIG. FIG. 3 is a flowchart showing the flow of processing in the control unit of the input / output device of the first embodiment. The processing of the control unit of the input / output device of the first embodiment determines whether the position information input from the input unit 3 is the position information indicating the operation valid switch unit 4 (100), and the operation valid switch is selected. If it is the position information of the section 4, it is judged whether or not the current operation effective switch mode is the ON mode (102), and if it is not the ON mode,
Set the operation enable switch mode to ON mode (10
4), recognition display start processing is performed (106), and processing 100 is performed.
Return to Here, the recognition display start process is a process of outputting a display signal for performing a recognition display indicating that the operation valid switch mode is the ON mode on the display unit 2, and an example of the recognition display is as described above. Display image reverse or
There are character display and color display.

On the other hand, in the process 102, when the current operation effective switch mode is the ON mode, the operation effective switch mode is set to the OFF mode (110), the recognition display end process is performed (112), and the process 100 is returned to. here,
The recognition display ending process is a process of ending the recognition display.

In the process 100, if the position information input from the input unit 3 is not the position information of the operation effective switch unit 4, it is determined whether the current operation effective switch mode is the ON mode (120), If it is not the ON mode, the input positional information is ignored and the process returns to the process 100 as it is. If it is the ON mode, the input data process is performed (122) and the process returns to the process 100. Here, the input data processing is to recognize the input data from the input position information and perform processing based on the input data.

According to the input / output device and its control method of the first embodiment, the control section 5 switches the operation valid switch mode by the input of the operation valid switch section 4 of the input section 3, and the operation valid switch mode is turned ON. In the mode, the recognition display is performed on the display unit 2 and the operation enable switch unit 4 of the input unit 3 is displayed.
When the operation valid switch mode is the OFF mode, the recognition display is not performed, and the input from the portion other than the operation valid switch unit 4 of the input unit 3 is invalidated. Therefore, it is possible to prevent an erroneous operation due to unintentional or non-artificial factors and to improve reliability.

If the input / output device of the first embodiment is used in the operation monitoring system of a semiconductor manufacturing apparatus, it is possible to prevent damages such as damage to the wafer and the device due to erroneous operation of the input / output device.

In the input / output device of the first embodiment, the operation effective switch section 4 is provided in a part of the display section 2 and the input section 3, and the control section 5 controls the operation effective switch section 4. By changing only the software, it is possible to realize the function of preventing erroneous operation.

Next, another embodiment (second embodiment) of the present invention will be described. FIG. 4 is a schematic configuration diagram of an input / output device according to the second embodiment of the present invention. The input / output device of the second embodiment is similar to the conventional input / output device in that
It is composed of a display unit 2 and an input unit 3. Further, as a characteristic part of the second embodiment, an operation effective switch unit 4'which separates the input line from the input unit 3 is provided, and further the control of the control unit 5 ". The method is different from the conventional one.

Next, regarding the characteristic part of the second embodiment,
This will be described with reference to FIG. FIG. 5 is a front view of the input / output device of the second embodiment. In the input / output device of the second embodiment, as shown in FIG. 5, an operation effective switch section 4'is newly provided in a part different from the input section 3 and is connected to the control section 5 ".
Then, when there is an input from the input unit 3, the control unit 5 ″ checks the input from the operation effective switch unit 4 ′, and when the operation effective switch unit 4 ′ is in the ON state, the input operation from the input unit 3 The input data is recognized from the position information input as valid, the process is performed according to the input data, and the input operation from the input unit 3 is invalidated and the input position information is ignored when the operation effective switch unit 4'is OFF. Is.

Next, a method of controlling the input / output device of the second embodiment will be described. In the processing in the control unit 5 ″ of the input / output device of the second embodiment, when the position information is input from the input unit 3, the state of the input terminal connected to the operation effective switch unit 4 ′ is checked and the ON state is set. In the case of, the input data from the input unit 3 is validated and the input data is recognized from the position information,
Perform processing according to the input data.

On the other hand, when there is position information input from the input section 3 and the state of the input terminal connected to the operation valid switch section 4'is checked, if it is in the OFF state, the input from the input section 3 is invalidated and the input is made. The position information you have set is ignored.

The recognition display indicating that the operation effective switch section 4'is in the ON state is in the ON state when the lamp is turned on by turning the operation effective switch section 4'into an LED switch. Can be recognized.

In the second embodiment, the input terminal connected to the operation effective switch section 4'and the input terminal connected to the input section 3 are input to the AND circuit, and the output from the AND circuit is input to the control section 5. "" Is taken in, the input from the input unit 3 is A only when the operation effective switch unit 4'is ON.
Output from the ND circuit, the control unit 5 ″ can realize the erroneous operation prevention function by the control method exactly the same as the conventional one.

According to the input / output device and the control method therefor of the second embodiment, the control section 5 "treats the input from the input section 3 as valid when the operation valid switch section 4'is ON. However, since the input from the input unit 3 is invalidated and ignored when the state of the operation enable switch unit 4'is OFF, it is possible to prevent an erroneous operation due to an unintentional or non-artificial factor,
Further, when used as an input / output device of a semiconductor manufacturing apparatus, there is an effect of preventing damage such as damage to a wafer and an apparatus due to a malfunction.

[0035]

According to the first aspect of the invention, a part of the area of the input unit of the perspective type input device is assigned to the operation effective switch unit, and the control unit inputs only when the operation effective switch unit is in the ON state. Since the input / output device validates the input from the input section, if the operation enable switch in the input section is turned off, it is possible to prevent an erroneous operation due to an unintentional factor.

According to the second aspect of the invention, an operation effective switch section is provided separately from the input section of the perspective type input device,
Since the control unit is an input / output device that enables the input from the input unit only when the operation enable switch unit is in the ON state,
If the operation enable switch outside the input section is turned off,
This has the effect of preventing erroneous operations due to unintentional factors.

According to the third aspect of the present invention, the control section comprises:
The control method of the input / output device according to claim 1 or 2, wherein the input from the input section is valid when the operation valid switch is on, and the input from the input section is invalid when the operation valid switch is off. If the operation valid switch is turned on at the time of input and the operation valid switch is turned off at the time of non-input, there is an effect that an erroneous operation due to an unintentional factor can be prevented.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an input / output device according to a first embodiment of the present invention.

FIG. 2 is a front view of the input / output device according to the first embodiment.

FIG. 3 is a flowchart of a control unit of the input / output device according to the first embodiment.

FIG. 4 is a schematic configuration diagram of an input / output device according to a second embodiment of the present invention.

FIG. 5 is a front view of the input / output device according to the second embodiment.

FIG. 6 is a schematic configuration diagram of a conventional input / output device.

[Explanation of symbols]

1, 1 '... operation panel, 2 ... display section, 3 ... input section,
4, 4 '... operation effective switch section, 5, 5', 5 "... control section

Claims (3)

[Claims] 1. A display unit for displaying, an input unit of a perspective input device provided on a screen of the display unit, and a control for performing display control on the display unit according to an input from the input unit. An input / output device having a section, a part of the input section is provided with an area of an operation valid switch section for validating an input, and the control section inputs from the input section when the operation valid switch section is in an ON state. The input / output device is characterized in that the control unit makes the input valid from the input, and invalidates the input from the input unit when the operation validating switch is turned off. 2. A display unit for displaying, an input unit of a perspective type input device provided on the screen of the display unit, and a control for performing display control on the display unit according to an input from the input unit. An input / output device having a section, an operation enable switch section that enables an input from the input section when the switch is on is provided separately from the input section, and the control section when the operation enable switch section is on. An input / output device, which is a control unit that validates an input from the input unit and invalidates an input from the input unit when the operation valid switch unit is in an off state. 3. The control unit validates the input from the input unit when the operation valid switch is in the ON state, and invalidates the input from the input unit when the operation valid switch is in the OFF state. Item 1. A method for controlling an input / output device according to item 1 or 2.